Material taking and placing clamp of engraving and milling machine

Abstract

The utility model discloses a material taking and placing clamp of an engraving and milling machine. The material taking and placing clamp comprises a base plate and three adjusting parts evenly distributed in the circumferential direction. The adjusting part comprises a positioning rod and an abutting cap; the positioning rod is rotationally connected to the periphery of the base plate; the abutting cap is arranged on the positioning rod; the lower end of the positioning rod is provided with an inner extending rod extending towards the middle of the base plate. An abutting cap is arranged on the side, facing the middle of the base plate, of the positioning rod. The abutting cap is located above the inner stretching rod. The inner extending rod is used for abutting against the periphery of the fine carving supporting base. The abutting cap is used for abutting against the periphery of the wafer; the upper end of the base plate is longitudinally connected with a linkage plate in a sliding mode, wherein the linkage plate is in transmission connection with the positioning rods. After the clamp is placed downwards, the handle is pressed downwards synchronously, so that the positioning rod adjusts the position of the wafer to be concentric with the fine carving supporting table; the operation steps of wafer position adjustment are simplified, and the wafer placement efficiency is improved; and meanwhile, the position precision of the wafer is also beneficial to improving the processing quality of the wafer and reducing the defective rate.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor integrated circuit manufacturing, and particularly relates to a pick-and-place fixture for a precision engraving machine. Background Art

[0002] In the field of wafer glass processing, it is necessary to precisely process the shape of the wafer. Usually, the shape is processed on a precision engraving machine. For the processing of a circular shape, it is necessary to limit the placement position. Otherwise, deviation will cause the phenomenon that other parts of the circle cannot be processed. Therefore, the problem of loading and unloading positioning is particularly crucial, and a solution needs to be designed to improve the accuracy and convenience of positioning.

[0003] Chinese patent document with publication number CN216250685U discloses a wafer fixture and a fixture assembly. The wafer fixture includes a first substrate, a positioning component, and a pressing component. A bearing portion for bearing the wafer is recessed on the first substrate. The positioning component is arranged on the first substrate, and the positioning component has a positioning portion. The positioning portion can move radially relative to the bearing portion to cooperate with the positioning portion on the wafer to perform circumferential positioning on the wafer placed on the bearing portion. And two or more groups of the pressing components are distributed along the edge of the bearing portion on the first substrate. The pressing component includes a pressing member, and the pressing member can approach or move away from the edge of the bearing portion to axially press the wafer located on the bearing portion.

[0004] The wafer placed on the precision engraving machine needs to be concentric with the support table so that the precision engraving machine can achieve the best processing effect. Otherwise, deviation will cause the phenomenon that other parts of the circle cannot be processed. However, when manually placing the wafer, the position of the wafer is inconvenient to adjust, and it is impossible to intuitively judge whether the wafer is in a concentric position. Therefore, not only the working efficiency is reduced, but also the processing quality cannot be guaranteed. Summary of the Invention

[0005] In order to overcome the technical problem that when a wafer is placed on the support table of a precision engraving machine, the placement position of the wafer cannot be intuitively judged and the position of the wafer is inconvenient to adjust; an object of the present utility model is to provide a pick-and-place fixture for a precision engraving machine. By means of a handheld fixture, pressing the fixture above the support table drives the centripetal rotation of each positioning rod. The inner extension rod abuts against the outer periphery of the support table to concentrically position the fixture and the support table. At the same time, the abutting cap abuts against the outer periphery of the wafer to concentrically position the wafer and the support table. The position adjustment can be realized with only one-step operation, which is simple and convenient.

[0006] To achieve the above object, the present utility model adopts the following technical solutions: A pick-and-place fixture for a precision engraving machine, comprising a substrate and three adjusting parts evenly distributed in the circumferential direction; the adjusting part includes a positioning rod rotatably connected to the outer periphery of the substrate and an abutting cap arranged on the positioning rod; the lower end of the positioning rod is provided with an inner extending rod extending towards the middle of the substrate; on one side of the positioning rod facing the middle of the substrate, there is an abutting cap; the abutting cap is located above the inner extending rod; the inner extending rod is used to abut against the outer periphery of the precision engraving support seat; the abutting cap is used to abut against the outer periphery of the wafer; a linkage plate longitudinally slidably connected to the upper end of the substrate and drivingly connected to each positioning rod is provided.

[0007] Further, the middle of the positioning rod is rotatably connected to the substrate; the adjusting part includes an upper connecting rod rotatably connected to one end of the linkage plate, a lower connecting rod rotatably connected to one end of the substrate, and a transmission rod rotatably connected to the upper end of the positioning rod; the other ends of the upper connecting rod, the lower connecting rod, and the transmission rod are rotatably connected to each other; in the same adjusting part, the rotation axes of the upper connecting rod, the lower connecting rod, the transmission rod, and the positioning rod are parallel to each other.

[0008] Place the fixture directly above the precision engraving support table, and at the same time press the linkage plate. The linkage plate drives the positioning rod to rotate towards the precision engraving support table until the inner extending rod abuts against the outer periphery of the precision engraving support table, and the fixture is concentric with the precision engraving support table; at the same time, the abutting cap abuts against the outer periphery of the wafer, realizing the concentric alignment of the wafer and the precision engraving support table. The operation is simple and convenient, and can be completed with one hand.

[0009] Specifically, the linkage plate, the upper connecting rod, the transmission rod, and the positioning rod are arranged in sequence from the middle of the substrate to the outer periphery; the lower connecting rod is located at the lower end of the upper connecting rod.

[0010] Preferably, three limiting rods are vertically arranged at the lower end of the outer periphery of the substrate; the limiting rods are evenly distributed in the circumferential direction; the lower ends of the limiting rods are located below the positioning rods; the limiting rods are used to abut against the upper end of the bottom plate of the precision engraving machine.

[0011] The limiting rods are used to position the fixture and reduce the wear of the positioning rod.

[0012] Preferably, a spring is arranged between the linkage plate and the substrate; the elastic force of the spring is used to make the linkage plate slide upwards; a handle is arranged at the upper end of the linkage plate.

[0013] After the adjustment is completed, the linkage plate automatically resets, and the fixture is no longer in contact with the wafer and the precision engraving support table, facilitating the removal of the fixture.

[0014] Furthermore, three positioning slide bars are vertically arranged at the upper end of the substrate; three guiding slide seats are arranged on the linkage plate; the positioning slide bars are slidably connected in the corresponding guiding slide seats; the spring is located between the positioning slide bars; a limiting cap is arranged at the upper end of the positioning slide bar.

[0015] Furthermore, a support rod penetrates through the positioning rod; the support rod is threadedly connected to the positioning rod; the abutting cap is arranged at one end of the support rod facing the middle of the substrate.

[0016] The inner extension length of the abutting cap can be finely adjusted, which can prevent damage to the wafer while adjusting the position of the wafer.

[0017] Specifically, the limiting support rod is threadedly connected to the substrate.

[0018] Specifically, the substrate includes two overlapping mounting plates; the mounting plate includes a central disc and three radial rods extending radially outward along the circumference; the radial rods on the two mounting plates are evenly distributed along the circumferential direction.

[0019] Except for the basic structure of the substrate, most of the wafer is exposed, which is convenient for observing the position of the wafer.

[0020] Specifically, the limiting support rod is arranged on the lower mounting plate; the adjusting part is arranged on the upper mounting plate.

[0021] Compared with the prior art, the beneficial effects of the present utility model are as follows: After placing the fixture downward, the handle is pressed downward synchronously, so that the positioning rod adjusts the position of the wafer to be concentric with the precision carving support platform; the operation steps for adjusting the position of the wafer are simplified, and the wafer placement efficiency is improved; at the same time, the position accuracy of the wafer is also helpful for improving the processing quality of the wafer and reducing the defective rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic structural diagram of the structure for adjusting the position of the wafer of the present utility model;

[0023] Figure 2 It is a schematic structural diagram after the adjustment of the present utility model is completed.

[0024] In the figure: 11, precision carving machine bottom plate; 12, precision carving support seat; 13, wafer; 2, substrate; 21, central disc; 22, radial rod; 23, positioning slide bar; 24, limiting support rod; 3, linkage plate; 31, handle; 32, guiding slide seat; 4, positioning rod; 41, abutting cap; 42, support rod; 43, inner extension rod; 5, transmission rod; 6, upper connecting rod; 7, lower connecting rod; 8, spring. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0025] Next, in combination with the accompanying drawings and specific embodiments, the present utility model will be further described. It should be noted that, on the premise of no conflict, the following-described embodiments or technical features can be arbitrarily combined to form new embodiments.

[0026] In the description of the present utility model, it should be noted that for orientation terms, such as the terms "center", "horizontal", "vertical", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., the orientation and position relationships indicated are based on the orientation or position relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and should not be construed as limiting the specific protection scope of the present utility model.

[0027] In addition, such terms as "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, the meaning of "several" is two or more, unless otherwise clearly and specifically defined.

[0028] In the present utility model, unless otherwise clearly defined and limited, such terms as "set", "install", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can also be a mechanical connection; it can be directly connected or connected through an intermediate medium, and it can be internally connected and communicated between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0029] Refer to Figure 1 - Figure 2 , a pick-and-place fixture for a precision engraving machine, which includes a substrate 2 and three adjusting parts evenly distributed along the circumferential direction; the substrate 2 includes two mounting plates arranged one above the other; the mounting plate includes a central disc 21 and three radial rods 22 extending radially outward; the respective radial rods 22 on the two mounting plates are evenly distributed along the circumferential direction; the adjusting part is arranged on the mounting plate located above.

[0030] A linkage plate 3 coaxial with it is longitudinally slidably connected to the upper end of the central disk 21; the adjusting part includes a positioning rod 4 whose middle part is rotatably connected to the outer end of the radial rod 22, an upper connecting rod 6 whose one end is rotatably connected to the outer periphery of the linkage plate 3, a lower connecting rod 7 whose one end is rotatably connected to the same radial rod 22, and a transmission rod 5 whose one end is rotatably connected to the upper end of the positioning rod 4; the other ends of the upper connecting rod 6, the other end of the lower connecting rod 7, and the other end of the transmission rod 5 are rotatably connected to each other.

[0031] In the same adjusting part, the rotation axes of the upper connecting rod 6, the lower connecting rod 7, the transmission rod 5, and the positioning rod 4 are parallel to each other; the linkage plate 3, the upper connecting rod 6, the transmission rod 5, and the positioning rod 4 are arranged in sequence from the middle part to the outer periphery of the substrate 2; the lower connecting rod 7 is located at the lower end of the upper connecting rod 6.

[0032] An inner extension rod 43 extending towards the middle part of the substrate 2 is arranged at the lower end of the positioning rod 4; a support rod 42 is penetrated through the positioning rod 4; the support rod 42 is threadedly connected to the positioning rod 4; a contact cap 41 is arranged on one side of the support rod 42 facing the middle part of the substrate 2; the contact cap 41 is located above the inner extension rod 43; the inner extension rod 43 is used to abut against the outer periphery of the precision carving support seat 12; the contact cap 41 is used to abut against the outer periphery of the wafer 13.

[0033] A spring 8 is arranged between the linkage plate 3 and the substrate 2; the elastic force of the spring 8 is used to slide the linkage plate 3 upwards; a handle 31 is arranged at the upper end of the linkage plate 3; a groove is arranged at the central position of the upper end of the upper mounting plate; the spring 8 is located in the groove.

[0034] Limit stop rods 24 are respectively arranged at the outer ends of the radial rods 22 located below; the limit stop rods 24 are evenly distributed along the circumferential direction; the lower ends of the limit stop rods 24 are located below the positioning rod 4; the limit stop rods 24 are used to abut against the upper end of the precision carving machine base plate 11; the limit stop rods 24 are threadedly connected to the substrate 2.

[0035] Three positioning slide rods 23 are vertically arranged at the upper end of the central disk 21 located above; the positioning slide rods 23 are evenly distributed along the circumferential direction; three guiding slide seats 32 are arranged on the linkage plate 3; the positioning slide rods 23 are slidably connected in the corresponding guiding slide seats 32; the spring 8 is located between the positioning slide rods 23; limit caps are arranged at the upper ends of the positioning slide rods.

[0036] As Figure 1As shown, after placing the wafer 13 on the upper end of the precision carving support base 12, place the fixture on the precision carving machine base plate 11, and the limit rod 24 abuts against the upper end of the precision carving machine base plate 11. Press down the handle 31 to make the linkage plate 3 slide downward, and the spring 8 compresses and stores energy. The downward sliding of the linkage plate 3 causes the upper connecting rod 6 to push the transmission rod 5 outward peripherally. The outward movement of the transmission rod 5 drives the support rod 42 to rotate. Thereby, the three inner extension rods 43 abut against the outer periphery of the precision carving support base 12, the fixture is concentric with the precision carving support base 12, and at the same time, the abutting cap 41 abuts against the outer periphery of the wafer 13 and drives the wafer 13 to move to be concentric with the precision carving support base 12, realizing the position adjustment of the wafer 13.

[0037] As Figure 2 shown, release the handle 31, and the elastic force of the spring 8 drives the linkage plate 3 to slide upward to its original position. The support rod 42 rotates until it no longer contacts the precision carving support base 12 and the wafer 13, and then the fixture can be removed to perform subsequent wafer processing procedures.

[0038] The above are only specific embodiments of the present invention, but the technical features of the present invention are not limited thereto. Any changes or modifications made by those skilled in the art within the scope of the present invention are covered by the patent scope of the present invention.

Claims

1. A pick-and-place fixture for a precision engraving machine, characterized in that: It includes a substrate and three adjusting parts evenly distributed in the circumferential direction; each adjusting part includes a positioning rod rotatably connected to the outer periphery of the substrate and an abutting cap arranged on the positioning rod; the lower end of the positioning rod is provided with an inner extending rod extending towards the middle of the substrate; on one side of the positioning rod facing the middle of the substrate, there is an abutting cap; the abutting cap is located above the inner extending rod; the inner extending rod is used to abut against the outer periphery of the precision engraving support base; the abutting cap is used to abut against the outer periphery of the wafer; a linkage plate is longitudinally slidably connected to the upper end of the substrate and is in transmission connection with each positioning rod.

2. The fixture according to claim 1, characterized in that: The middle of the positioning rod is rotatably connected to the substrate; each adjusting part includes an upper connecting rod with one end rotatably connected to the linkage plate, a lower connecting rod with one end rotatably connected to the substrate, and a transmission rod with one end rotatably connected to the upper end of the positioning rod; the other ends of the upper connecting rod, the lower connecting rod, and the transmission rod are rotatably connected to each other. In the same adjusting part, the rotation axes of the upper connecting rod, the lower connecting rod, the transmission rod, and the positioning rod are parallel to each other.

3. The fixture according to claim 2, characterized in that: The linkage plate, the upper connecting rod, the transmission rod, and the positioning rod are arranged in sequence from the middle of the substrate to the outer periphery; the lower connecting rod is located at the lower end of the upper connecting rod.

4. The fixture according to any one of claims 1-3, characterized in that: Three limiting abutting rods are vertically arranged at the lower end of the outer periphery of the substrate; the limiting abutting rods are evenly distributed in the circumferential direction; the lower ends of the limiting abutting rods are located below the positioning rods; the limiting abutting rods are used to abut against the upper end of the precision engraving machine bottom plate.

5. The fixture according to any one of claims 1-3, characterized in that: A spring is arranged between the linkage plate and the substrate; the elastic force of the spring is used to make the linkage plate slide upwards; a handle is arranged at the upper end of the linkage plate.

6. The fixture according to claim 5, wherein: Three positioning sliding rods are vertically arranged at the upper end of the substrate; three guiding sliding seats are arranged on the linkage plate; the positioning sliding rods are slidably connected in the corresponding guiding sliding seats; the spring is located between each positioning sliding rod; a limiting cap is arranged at the upper end of the positioning sliding rod.

7. The fixture according to any one of claims 1-3, characterized in that: A support rod is penetrated through the positioning rod; the support rod is threadedly connected to the positioning rod; the abutting cap is arranged at one end of the support rod facing the middle of the substrate.

8. The fixture according to claim 4, characterized in that: The limiting abutting rod is threadedly connected to the substrate.

9. The fixture according to claim 4, characterized in that: The substrate includes two overlapping mounting plates; each mounting plate includes a central disc and three radial rods extending radially outwards; the radial rods on the two mounting plates are evenly distributed in the circumferential direction.

10. The fixture according to claim 9, characterized in that: The limiting abutting rod is arranged on the lower mounting plate; the adjusting part is arranged on the upper mounting plate.

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