Continuous coating mechanism

Abstract

The continuous coating mechanism comprises a PVD (Physical Vapor Deposition) coating machine table and a coating device. The PVD coating machine table comprises a furnace wall and a coating chamber defined by the furnace wall, and a first through hole is formed in the furnace wall; the coating device comprises a coating device box body, an insertion plate, a telescopic piece and a first motor, the box body comprises a first part and a second part which are connected with each other, the first part comprises a containing cavity, the second part comprises a second through hole, the second through hole communicates with the containing cavity, the second part is connected to the outer side of the furnace wall, and the second through hole can communicate with the first through hole; the insertion plate is telescopically arranged on the second part and is used for sealing or opening the second through hole; the telescopic piece is used for bearing an evaporation boat filled with liquid medicine; the first motor is connected with the telescopic piece and used for driving the telescopic piece to move so that the evaporation boat can stretch into or stretch out of the coating cavity.

Description

Technical Field

[0001] This application relates to the field of coating technology, and particularly to a continuous coating mechanism. Background Art

[0002] During the production process of workpieces, multiple coating steps are usually required to form coating layers with different functions. When some coating mechanisms achieve multiple coatings, the complete coating process needs to be repeated. For example, a single coating process usually includes steps such as vacuum pumping, introducing inert gas, heating, and coating; when performing the second coating, the above steps need to be repeated, and the coating mechanism also needs to be cooled between the two coating steps for the next coating step. The above coating steps take a long time and the coating efficiency is low. Summary of the Utility Model

[0003] In view of this, it is necessary to provide a continuous coating mechanism with high coating efficiency and cost savings.

[0004] A continuous coating mechanism includes a PVD coating machine platform and a coating device. The PVD coating machine platform includes a furnace wall and a coating chamber surrounded by the furnace wall, and the furnace wall is provided with a first through hole; the coating device includes: a coating device box body, a plug board, a telescopic member, and a first motor. The box body includes a first part and a second part connected to each other. The first part includes a receiving cavity, and the second part includes a second through hole. The second through hole communicates with the receiving cavity. The second part is connected to the outside of the furnace wall, and the second through hole can communicate with the first through hole; the plug board is telescopically arranged on the second part for sealing or opening the second through hole; the telescopic member is used to carry an evaporation boat filled with liquid medicine; and the first motor is connected to the telescopic member, and the first motor is used to drive the telescopic member to move so that the evaporation boat extends into or out of the coating chamber.

[0005] In some embodiments of the present application, the coating device further includes a coil. The coil is located at the end of the telescopic member away from the first motor, and the coil is used to be energized to heat the liquid medicine in the evaporation boat.

[0006] In some embodiments of the present application, the coating device further includes a limiting component. The limiting component is arranged in the receiving cavity, and the telescopic member is movably arranged on the limiting component.

[0007] In some embodiments of the present application, the coating device further includes a roller. The roller is arranged in the receiving cavity and is located between the limiting component and the second part, and the telescopic member is also movably arranged on the limiting component.

[0008] In some embodiments of the present application, the roller is rotatably arranged on the first part, and a part of the roller protrudes from the first part.

[0009] In some embodiments of the present application, the number of coating devices is multiple.

[0010] In some embodiments of the present application, a liquid inlet hole is provided on the first part. The liquid inlet hole communicates with the accommodation cavity and is used to add liquid medicine to the evaporation boat.

[0011] In some embodiments of the present application, the coating device further includes a liquid storage tank, a pipeline, and a second motor. The pipeline connects the liquid storage tank and the liquid inlet hole. The second motor is arranged between the liquid storage tank and the liquid inlet hole and communicates with the pipeline.

[0012] In some embodiments of the present application, the coating device further includes a flow meter. The flow meter is arranged between the second motor and the liquid inlet hole and communicates with the pipeline.

[0013] In some embodiments of the present application, when the telescopic member extends into the coating chamber, the distance L between the end of the telescopic member and the workpiece to be coated satisfies: 80mm ≤ L ≤ 140mm.

[0014] By connecting the coating device to the machine table, after the machine table completes a coating step, the plug board is opened, and through the interaction of the telescopic member, the first motor, and the evaporation boat, the liquid medicine is conveyed into the machine table so that the machine table completes the second coating. Setting the coating device can omit many processes, such as deflation, cooling, etc., which is beneficial to improving the coating efficiency and saving costs. In addition, for steps such as vacuum pumping and heating, they can be achieved by low-power components according to actual needs. Moreover, before implementing the second coating step, there is no need to take out the workpiece after the first coating, which can prevent the performance of the coating layer formed after the first coating from being affected by the external environment. Description of the Drawings

[0015] Figure 1 It is a schematic structural diagram of a continuous coating mechanism provided with a coating device according to an embodiment of the present application.

[0016] Figure 2 It is a cross-sectional schematic diagram of the telescopic member of the coating device according to an embodiment of the present application extending into the coating chamber of the PVD coating machine table.

[0017] Figure 3 It is Figure 1 a schematic structural diagram of the coating device shown in

[0018] Figure 4 It is Figure 3 a schematic structural diagram of the telescopic member of the coating device shown in

[0019] Figure 5 It is Figure 3 an exploded view of the coating device shown in

[0020] Description of the Main Component Symbols

[0021]

[0022] Detailed implementation manners

[0023] In order to more clearly understand the above-mentioned objects, features and advantages of the present application, the present application will be described in detail below in conjunction with the accompanying drawings and specific implementation manners. It should be noted that, without conflict, the implementation manners of the present application and the features in the implementation manners can be combined with each other. In the following description, many specific details are set forth in order to fully understand the present application. The described implementation manners are only a part of the implementation manners of the present application, rather than all of the implementation manners.

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific implementation manners, and are not intended to limit this application. The term "and / or" used herein includes all and any combinations of one or more of the related listed items.

[0025] In each embodiment of the present application, for the convenience of description rather than limiting the present application, the term "connection" used in the patent application specification and claims of the present application is not limited to physical or mechanical connection, whether direct or indirect. "Upper", "lower", "above", "below", "left", "right", etc. are only used to represent relative position relationships. When the absolute position of the object being described changes, the relative position relationship also changes accordingly.

[0026] Please refer to Figure 1 and Figure 2 , an embodiment of the present application provides a continuous coating mechanism 200. The continuous coating mechanism 200 includes a PVD coating machine table 210 and a coating device 100. The coating device 100 is installed on the PVD coating machine table 210. The PVD coating machine table 210 is used for coating. The coating device 100 shares the coating chamber 214 for coating in the PVD coating machine table 210 and is used to assist the PVD coating machine table 210 in performing secondary coating. The machine table 210 and the coating device 100 are used in cooperation to complete two coatings, and some processes can be omitted, such as heating, vacuum pumping, gas release and other steps, which is beneficial to improving the coating efficiency and saving costs.

[0027] The PVD coating machine 210 includes a furnace wall 212 and a coating chamber 214 surrounded by the furnace wall 212. The furnace wall 212 is provided with a first through hole 216, and the first through hole 216 communicates with the coating chamber 214. The coating device 100 is connected to the outside of the furnace wall 212 via the first through hole 216. Among them, the coating device 100 is detachably mounted on the furnace wall 212. In this embodiment, the PVD coating machine 210 is a magnetron sputtering device, which can coat the surface of the workpiece 300 through magnetron sputtering technology. For example, to change the appearance of the workpiece 300, when using the PVD coating machine 210 for coating, the first through hole 216 needs to be closed to isolate the coating device 100 and the PVD coating machine 210, so that the PVD coating machine 210 can independently complete the coating process. The coating device 100 can be a droplet deposition coating system, which is used to further coat the surface of the workpiece 300 that has been coated by the PVD coating machine 210 to form an anti-fingerprint layer. At this time, the first through hole 216 is in a state of communicating the PVD coating machine 210 and the coating device 100, so that the PVD coating machine 210 and the coating device 100 interact with each other, and then complete the secondary coating. That is, the coating device 100 provided in the embodiment of the present application is used in combination with the PVD coating machine 210, and can realize two coating steps.

[0028] In other embodiments, the PVD coating machine 210 is not limited to a magnetron sputtering device, and can be other devices for coating. The coating device 100 is not limited to forming an anti-fingerprint layer, and can also be a film layer with other functions. Multiple coating devices 100 can be installed on the same PVD coating machine 210, and the multiple coating devices 100 are arranged at intervals, and can simultaneously perform secondary coating on multiple workpieces 300.

[0029] Please refer to Figure 3 、 Figure 4 and Figure 5 As shown in, the coating device 100 may include a box body 10, a plug board 20, a telescopic member 40 and a first motor 45. The plug board 20 is telescopically arranged on the box body 10 and is used to communicate or block the box body 10 and the PVD coating machine 210. One end of the telescopic member 40 is used to carry an evaporation boat 43 (not shown in the figure) filled with a liquid medicine (such as Figure 4 ), and the other end is connected to the first motor 45. The first motor 45 is used to drive the telescopic member 40 carrying the evaporation boat 43 to move into the coating chamber 214 of the PVD coating machine 210 through the first through hole 216, so that the liquid medicine can perform secondary coating on the workpiece 300 in the PVD coating machine 210.

[0030] The box body 10 may include a first portion 11 and a second portion 13, and the first portion 11 and the second portion 13 are connected to each other. In this embodiment, the first portion 11 is a substantially rectangular parallelepiped structure, and the second portion 13 is a substantially cylindrical structure. The second portion 13 is used to be installed on the PVD coating machine 210, and the first portion 11 is located on a side of the second portion 13 away from the PVD coating machine 210.

[0031] The first part 11 includes a receiving cavity 112, and the second part 13 includes a second through hole 132. The receiving cavity 112 is connected to the second through hole 132, and the second through hole 132 corresponds to the position of the first through hole 216 of the PVD coating machine 210. The plug plate 20 is telescopically arranged on the second part 13, and is used to seal or open the second through hole 132. When the plug plate 20 seals the second through hole 132, the plug plate 20 blocks the box body 10 and the PVD coating machine 210; when the plug plate 20 opens the second through hole 132, the second through hole 132 is connected to the coating chamber 214 through the first through hole 216, and then connects the box body 10 and the PVD coating machine 210.

[0032] The first motor 45 is disposed in the accommodating cavity 112, and the telescopic member 40 is movably disposed in the accommodating cavity 112. There are two telescopic members 40, and the two telescopic members 40 are arranged in parallel and spaced apart from each other. One end of each telescopic member 40 is connected to the first motor 45, and the end of the telescopic member 40 away from the first motor 45 is used to carry the evaporation boat 43, that is, the evaporation boat 43 is placed at the end of the telescopic member 40, and the first motor 45 is used to drive the telescopic member 40 to move along the horizontal direction L1 toward the PVD coating machine 210 or away from the PVD coating machine 210, thereby driving the evaporation boat 43 to move synchronously.

[0033] Specifically, the evaporation boat 43 and the telescopic member 40 are both placed in the receiving chamber 112, the plug plate 20 seals the second through hole 132, and the liquid medicine is added to the evaporation boat 43. When secondary coating is required, the plug plate 20 is opened to connect the box 10 and the PVD coating machine 210, and the first motor 45 drives the telescopic member 40 to move toward the PVD coating machine 210 until the evaporation boat 43 extends into the PVD coating machine 210. After the secondary coating step is completed, the first motor 45 drives the telescopic member 40 to move toward the box 10 until the evaporation boat 43 is located in the receiving chamber 112, and the plug plate 20 is closed.

[0034] The first portion 11 is provided with an observation port 116 , and the area of the observation port 116 is made of a transparent material, so as to facilitate observation of the internal conditions of the box body 10 .

[0035] The box 10 can also be connected to an external vacuum pump (not shown), which is used to evacuate the box 10. Since the volume of the box 10 is smaller than that of the PVD coating machine 210, a vacuum pump with lower power can be connected.

[0036] The coating device 100 further includes a hatch 30 and a handle 31. The hatch 30 is disposed on the side of the first part 11 facing away from the second part 13. The handle 31 is disposed on the hatch 30 and is used to open the hatch 30. Articles in the accommodation cavity 112 can be placed or taken out through the hatch 30.

[0037] The coating device 100 may further include a coil 41. The coil 41 is located at the end of the telescopic member 40 facing away from the first motor 45. The coil 41 is used to be energized to heat the liquid medicine in the evaporation boat 43 so that the liquid medicine volatilizes, facilitating coating after the liquid medicine volatilizes.

[0038] The coating device 100 further includes a limiting assembly 50. The limiting assembly 50 is disposed in the accommodation cavity 112 and is located between the first motor 45 and the second part 13. The telescopic member 40 is movably disposed on the limiting assembly 50. The limiting assembly 50 includes a support plate 51, a plurality of limiting columns 53 and a plurality of support columns 55. The support columns 55 connect the first part 11 and the support plate 51 and are used to fix the support plate 51. The support plate 51 is disposed along the horizontal direction L1 and is used to support the telescopic member 40. The limiting columns 53 are fixed on the support plate 51 and are perpendicular to the support plate 51. A plurality of the limiting columns 53 are located on both sides of the support plate 51 and are used to limit the telescopic member 40 to prevent the telescopic member 40 from shifting in position during movement.

[0039] The coating device 100 further includes a roller 60. The roller 60 is disposed in the accommodation cavity 112 and is located between the limiting assembly 50 and the second part 13. The telescopic member 40 is also movably carried on the limiting assembly 50. The surface of the roller 60 that is higher along the gravity direction L2 is flush with the surface of the support plate 51 for carrying the telescopic member 40. The roller 60 is used to support the telescopic member 40 during the movement of the telescopic member 40 to prevent the end of the telescopic member 40 carrying the evaporation boat 43 from dropping downward due to its weight.

[0040] The roller 60 is rotatably disposed on the first part 11, and a part of the roller 60 protrudes from the first part 11. When the telescopic member 40 moves, the frictional force between the telescopic member 40 and the roller 60 drives the roller 60 to rotate. Since a part of the roller 60 protrudes from the first part 11, it is convenient for the user to judge whether the moving speed of the telescopic member 40 is normal by observing the rotating speed of the roller 60.

[0041] A liquid inlet hole 114 is provided on the first part 11. The liquid inlet hole 114 is communicated with the accommodation cavity 112 and is used to add liquid medicine to the evaporation boat 43. When the evaporation boat 43 retracts into the accommodation cavity 112 synchronously with the telescopic member 40, along the gravity direction L2, the projection of the liquid inlet hole 114 is located in the evaporation boat 43, so as to facilitate adding liquid medicine to the evaporation boat 43 from the liquid inlet hole 114.

[0042] The coating device 100 may further include a liquid storage tank 70, a second motor 71, a flow meter 73, and a pipeline 80. The liquid storage tank 70, the second motor 71, and the flow meter 73 are sequentially connected through the pipeline 80, and the pipeline 80 is also connected to the flow meter 73 and the liquid inlet hole 114.

[0043] Specifically, the pipeline 80 may include a first section 81, a second section 83, and a third section 85. The first section 81 is connected to the liquid storage tank 70 and the second motor 71, the second section 83 is connected to the second motor 71 and the flow meter 73, and the third section 85 is connected to the flow meter 73 and the liquid inlet hole 114. The liquid storage tank 70 is used to store the liquid medicine, and the motor is used to drive the liquid medicine in the liquid storage tank 70 to pass through the flow meter 73 in the pipeline 80 and reach the liquid inlet hole 114, so as to add the liquid medicine into the evaporation boat 43; the flow meter 73 is used to calculate the total amount of the liquid medicine passing through the flow meter 73, so as to calculate the total amount of the liquid medicine added into the evaporation boat 43, and further the step of automatic liquid addition can be realized.

[0044] The coating device 100 may further include a protective cover 75, and the protective cover 75 is sleeved on the outer surface of the liquid storage tank 70 for protecting the liquid storage tank 70.

[0045] The relationships between the relevant components of the coating device 100 according to the embodiments of the present application will be described below through specific operation steps.

[0046] Seal the second through hole 132 of the second part 13 with the plug board 20 to isolate the box body 10 and the PVD coating machine 210. At this time, the telescopic member 40 and the evaporation boat 43 are both located in the box body 10. Place the workpiece 300 to be coated in the coating chamber 214 of the PVD coating machine 210, and perform steps such as vacuum pumping, inert gas introduction, heating, and coating on the PVD coating machine 210 in sequence to form a coating layer on the surface of the workpiece 300.

[0047] Through the action of the second motor 71, an appropriate amount of liquid medicine is automatically added to the evaporation boat 43. The coating device 100 is subjected to a vacuum pumping process to make the vacuum degree in the box body 10 as close as possible to the vacuum degree in the PVD coating machine 210, prevent the liquid medicine from splashing due to a large pressure difference after opening the plug board 20, and prevent the gas in the atmosphere from affecting the coating quality. Among them, since the volume of the box body 10 of the coating device 100 is relatively small compared to the PVD coating machine 210, the requirements for the vacuum pump used for vacuum pumping are not too large, and the vacuum pumping time is relatively short, which is beneficial to saving costs and time.

[0048] Open the plugboard 20 to connect the box body 10 and the PVD coating machine 210. The first motor 45 drives the telescopic member 40 to move towards the PVD coating machine 210. The evaporation boat 43 and the liquid medicine in the evaporation boat 43 move towards the PVD coating machine 210 synchronously with the telescopic member 40 until the evaporation boat 43 moves into the coating chamber 214 of the PVD coating machine 210. Electrify the telescopic member 40, and the telescopic member 40 heats the evaporation boat 43. The liquid medicine in the evaporation boat 43 volatilizes, and the volatilized liquid medicine can further form a coating layer on the surface of the workpiece 300.

[0049] In the secondary coating step, the specific pair between the evaporation boat 43 carrying the liquid medicine and the workpiece 300 has a certain influence on the quality of the formed coating layer. Taking the distance L between the evaporation boat 43 and the workpiece 300 as 80mm, 100mm, 120mm, and 140mm respectively and forming an anti-fingerprint film as an example for testing, the uniformity and water contact angle of the secondary coating are tested. The specific test results are shown in Table 1.

[0050] Table 1

[0051]

[0052] It can be seen from the data in Table 1 that when the distance L between the evaporation boat 43 and the workpiece 300 is 100mm, the color uniformity of the secondary coating is better, and the water contact angle is larger, which is beneficial to improving the anti-fingerprint performance of the secondary coating; when the distance L between the evaporation boat 43 and the workpiece 300 is 80mm, the formed coating has a water contact angle similar to that of the coating formed when the distance L is 100mm, but the uniformity is relatively low; when the distance L between the evaporation boat 43 and the workpiece 300 is 120mm and 140mm, the water contact angle decreases, and the anti-fingerprint effect decreases. When the distance L between the evaporation boat 43 and the workpiece 300 satisfies 80mm ≤ L ≤ 140mm, the coating effect can be satisfied, and the preferred distance L can be 80mm ≤ L ≤ 110mm.

[0053] By connecting the coating device 100 to the PVD coating machine 210, after the PVD coating machine 210 completes the first coating step, open the plugboard 20. Through the interaction of the telescopic member 40, the first motor 45, and the evaporation boat 43, the liquid medicine is transported into the PVD coating machine 210 so that the PVD coating machine 210 completes the second coating. Setting the coating device 100 can omit many processes, such as deflation, cooling, etc., which is beneficial to improving the coating efficiency and saving costs; in addition, for steps such as vacuum pumping and heating, they can be realized by low-power components according to actual needs; furthermore, before implementing the second coating step, there is no need to take out the workpiece 300 after the first coating, which can prevent the performance of the coating layer formed after the first coating from being affected by the external environment.

[0054] The above embodiments are only used to illustrate the technical solutions of the present application and not to limit them. Although the present application has been described in detail with reference to the above preferred embodiments, those of ordinary skill in the art should understand that modifications or equivalent replacements can be made to the technical solutions of the present application without departing from the spirit and scope of the technical solutions of the present application.

Claims

1. A continuous coating mechanism, characterized in that, Comprising: A PVD coating machine, including a furnace wall and a coating chamber surrounded by the furnace wall, and the furnace wall is provided with a first through hole; And A coating device, including: A box body, including a first part and a second part connected to each other. The first part includes a receiving cavity, and the second part includes a second through hole. The second through hole is communicated with the receiving cavity. The second part is connected to the outside of the furnace wall, and the second through hole can be communicated with the first through hole; A plug board, which is telescopically arranged on the second part and is used to seal or open the second through hole; A telescopic member, which is used to carry an evaporation boat filled with liquid medicine; and A first motor, connected to the telescopic member, and the first motor is used to drive the telescopic member to move so that the evaporation boat extends into or out of the coating chamber.

2. The continuous coating mechanism according to claim 1, wherein The coating device further includes a coil, and the coil is located at the end of the telescopic member away from the first motor, and the coil is used to energize and heat the liquid medicine in the evaporation boat.

3. The continuous coating mechanism according to claim 1, wherein, The coating device further includes a limiting component, and the limiting component is arranged in the receiving cavity, and the telescopic member is movably arranged on the limiting component.

4. The continuous coating mechanism according to claim 3, characterized in that, The coating device further includes a roller, and the roller is arranged in the receiving cavity and is located between the limiting component and the second part, and the telescopic member is also movably arranged on the limiting component.

5. The continuous coating mechanism according to claim 4, wherein, The roller is rotatably arranged on the first part, and a part of the roller protrudes from the first part.

6. The continuous coating mechanism according to any one of claims 1-5, characterized in that, The number of the coating devices is multiple.

7. The continuous coating mechanism according to any one of claims 1-5, characterized in that A liquid inlet hole is arranged on the first part, and the liquid inlet hole is communicated with the receiving cavity, and the liquid inlet hole is used to add the liquid medicine to the evaporation boat.

8. The continuous coating mechanism according to claim 7, characterized in that, The coating device further includes a liquid storage tank, a pipeline and a second motor. The pipeline connects the liquid storage tank and the liquid inlet hole, and the second motor is arranged between the liquid storage tank and the liquid inlet hole and is communicated with the pipeline.

9. The continuous coating mechanism according to claim 8, wherein The coating device further includes a flow meter, and the flow meter is arranged between the second motor and the liquid inlet hole and is communicated with the pipeline.

10. The continuous coating mechanism according to claim 1, characterized in that, When the telescopic member extends into the coating chamber, the distance L between the end of the telescopic member and the workpiece to be coated satisfies: 80mm ≤ L ≤ 140mm.

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