Chemical supply system
The chemical supply system addresses precision and safety issues by employing precise pumps and filtration with inert gas protection, enabling stable and secure chemical delivery even in extreme conditions.
Patent Information
- Application Number
- CN202422165846.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-04
- Publication Date
- 2025-07-15
- Estimated Expiration
- 2034-09-04
AI Technical Summary
The existing chemical supply systems have shortcomings in accuracy control and safety, especially in the small flow range, and there are safety risks under extreme conditions.
Use precision pumps (such as bellows pumps or diaphragm pumps) and filter systems, combined with nitrogen protection systems, to ensure high-precision control of chemical flow and improve operational safety under extreme conditions.
It realizes high-precision control of chemical flow, especially in the small flow range, and improves operating safety under extreme conditions, prevents risks such as oxidation and explosion of chemicals, and ensures the stable and safe operation of the chemical supply system.
Smart Images
Figure CN223105834U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a supply system, in particular to a chemical supply system. Background Art
[0002] Chemical supply systems play a crucial role in multiple industries, especially in industries such as fine chemicals, pharmaceuticals, and semiconductor manufacturing. Existing chemical supply systems usually adopt electric or hydraulic drive methods for control. Although these methods can meet basic requirements, there are also some deficiencies: (1) Control accuracy: Traditional electric or hydraulic control systems are difficult to achieve very precise flow control, especially in the small flow range; (2) Safety issues: Electric or hydraulic control systems may have safety hazards under certain extreme conditions (such as high temperature, high pressure, flammable and explosive environments). Summary of the Utility Model
[0003] The purpose of the utility model is to provide a chemical supply system to solve the problems of poor transportation accuracy and low transportation safety existing in the prior art.
[0004] To achieve the above purpose, the utility model adopts the following technical solutions:
[0005] The utility model provides a chemical supply system, including a chemical discharge supply cabinet and a mixing kettle; wherein, the mixing kettle contains chemicals; the mixing kettle is connected to the first end of a first chemical transportation pipeline, and after the first chemical transportation pipeline penetrates into the cabinet body of the chemical discharge supply cabinet, it is connected to the inlet of a filter, and the outlet of the filter is connected to a chemical supply interface.
[0006] In a preferred embodiment, the chemical filter can be one or at least two. When there are at least two chemical filters, the filters are arranged in parallel.
[0007] In a preferred embodiment, inside the chemical discharge supply cabinet, a pump is further provided on the pipeline upstream of the chemical filter, and the pump can be a bellows pump or a diaphragm pump.
[0008] More preferably, the pump can be one or at least two. When there are at least two pumps, the pumps are arranged in parallel.
[0009] In a preferred embodiment, inside the chemical discharge supply cabinet, a mixer is further provided on the pipeline between the inlet of the filter and the pump.
[0010] In a preferred embodiment, a buffer is further provided on the pipeline between the pump and the mixer.
[0011] In a preferred embodiment, a second chemical transport pipeline is connected between the liquid mixer and the filter inlet. After passing through the chemical discharge supply cabinet, the second chemical transport pipeline is connected to the mixing kettle.
[0012] In a preferred embodiment, the second chemical transport pipeline is further connected to a resin column before being connected to the mixing kettle.
[0013] In a preferred embodiment, a third chemical transport pipeline is further connected between the resin column and the mixing kettle, and the third chemical transport pipeline is connected to the inlet of the filter.
[0014] In a preferred embodiment, a fourth chemical transport pipeline is further connected between the liquid mixer and the filter, and the fourth chemical transport pipeline is connected to the chemical supply interface.
[0015] In a preferred embodiment, a sampling box is further provided in the chemical supply cabinet, and a fifth chemical transport pipeline is connected between the outlet of the filter and the chemical supply interface, and the fifth chemical transport pipeline is connected to the sampling box.
[0016] In a preferred embodiment, a high-level tank is further provided above the mixing kettle, and the high-level tank is connected to the mixing kettle through a pipeline.
[0017] In a preferred embodiment, the chemical discharge supply system further includes a first nitrogen transport pipeline, a first end of the first nitrogen transport pipeline is connected to a nitrogen source interface, and a second end of the first nitrogen transport pipeline is connected to the mixing kettle.
[0018] In a preferred embodiment, in the chemical discharge supply cabinet, a gas filter is further connected downstream of the nitrogen source interface.
[0019] In a preferred embodiment, the first nitrogen transport pipeline is further connected to a second nitrogen transport pipeline before passing through the chemical supply cabinet body, and the second nitrogen transport pipeline is connected to a nitrogen gun for purging the chemical supply cabinet body.
[0020] In a preferred embodiment, the first nitrogen transport pipeline is also connected to a third nitrogen transport pipeline, and the third nitrogen transport pipeline passes through the chemical supply cabinet body and is connected to the high-level tank.
[0021] In a preferred embodiment, an exhaust pipe is further provided in the chemical supply cabinet, and the sampling box and the liquid mixer are connected to the exhaust pipe.
[0022] In a preferred embodiment, a drain pipe is further provided in the chemical supply cabinet, and one or at least two of the gas filter, the chemical filter, the sampling box, the pump, the mixer, and the exhaust pipe can be connected to the drain pipe.
[0023] It should be understood that valve switches can be independently set for all pipelines in this application, and all valve switches can also be connected to the drain pipe.
[0024] Compared with the prior art, the technical solution of the present utility model has the following beneficial effects:
[0025] The present utility model provides a chemical supply system, which solves the problems of poor chemical transportation accuracy and low transportation safety in the prior art. The present utility model adopts precise pumps (such as bellows pumps or diaphragm pumps) and filter systems to achieve high-precision control of chemical flow rates, especially in the small flow rate range. At the same time, a nitrogen protection system and safety equipment are incorporated to effectively improve the operation safety under extreme conditions, such as preventing risks such as chemical oxidation and explosion, and ensuring the stable, reliable and safe operation of the chemical supply system. Description of the Drawings
[0026] The drawings constituting a part of this application are used to provide a further understanding of this application. The schematic embodiments of this application and their descriptions are used to explain this application and do not constitute an improper limitation to this application. In the drawings:
[0027] Figure 1 is a process flow diagram of a chemical supply system according to a preferred embodiment of the present utility model.
[0028] Legend Explanation:
[0029] 1. Supply cabinet; 2. Mixing kettle; 3. First chemical transportation pipeline; 4. Filter; 5. Chemical supply interface; 6. Pump; 7. Mixer; 8. Buffer; 9. Second chemical transportation pipeline; 10. Resin column; 11. Third chemical transportation pipeline; 12. Fourth chemical transportation pipeline; 13. Sampling box; 14. Fifth chemical transportation pipeline; 15. High-level tank; 16. First nitrogen transportation pipeline; 17. Nitrogen source interface; 18. Gas filter; 19. Second nitrogen transportation pipeline; 20. Third nitrogen transportation pipeline; 21. Exhaust pipe; 22. Drain pipe. Detailed Embodiments
[0030] To make the purpose, technical solution and effects of the present utility model clearer and more definite, the following further describes the present utility model in detail with reference to the accompanying drawings and by way of examples. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.
[0031] It should be noted that the terms "first", "second", etc. in the description, claims and above-mentioned drawings of the present utility model are used to distinguish similar objects and do not necessarily describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a system, product or device comprising a series of units does not necessarily have to be limited to those units clearly listed, but may include other units not clearly listed or inherent to these products or devices.
[0032] Embodiment 1:
[0033] As Figure 1 shown, a chemical supply system according to the present utility model includes a chemical discharge supply cabinet 1 and a mixing kettle 2.
[0034] Among them, the mixing kettle 2 contains chemicals; the first end of the first chemical transport pipeline 3 is connected to the mixing kettle 2. After the first chemical transport pipeline 3 penetrates into the cabinet body of the chemical discharge supply cabinet 1, it is connected to the inlet of a filter 4, and the outlet of the filter 4 is connected to a chemical supply interface 5.
[0035] Among them, the filter 4 can be one or at least two. When the filter 4 is at least two, the filters 4 are arranged in parallel.
[0036] Among them, in the chemical discharge supply cabinet 1, a pump 6 is further provided on the pipeline upstream of the filter 4. In this embodiment, the pump is a bellows pump or a diaphragm pump; the pump 6 can be one or at least two. When the pump 6 is at least two, the pumps 6 are arranged in parallel.
[0037] Among them, in the chemical discharge supply cabinet 1, a mixer 7 is further provided on the pipeline between the inlet of the filter 4 and the pump 6.
[0038] Among them, a buffer 8 is also provided on the pipeline between the pump 6 and the mixer 7; the buffer 8 can absorb the instantaneous pressure changes caused by factors such as pump start and stop, valve switching, etc., and reduce the impact on the pipeline and connected equipment. When the flow rate suddenly increases or decreases, the buffer 8 can temporarily store or release the liquid, so as to smooth the flow rate change and maintain a stable flow rate in the system. At the same time, the buffer 8 can prevent the occurrence of the water hammer effect and prevent damage to the pipeline; it can be used as one of the protection measures in the system to prevent equipment damage caused by excessively high or low pressure. During pump station failure or maintenance; at the same time, liquid can also be temporarily stored to ensure that the downstream system will not be immediately cut off. For chemicals with large temperature changes; it can also be used to compensate for the volume change caused by thermal expansion and contraction of the liquid. When multiple chemicals need to be mixed, the buffer 8 can be used as a mixing tank to ensure that the mixture is uniform before entering the system.
[0039] A second chemical transport pipeline 9 is connected between the liquid mixer 7 and the inlet of the filter 4 . The second chemical transport pipeline 9 passes through the chemical discharge supply cabinet 1 and is connected to the mixing kettle 2 .
[0040] Wherein, before being connected to the mixing kettle 2, the second chemical transport pipeline 9 is also connected to a resin column 10, which can be used to remove impurities or perform ion exchange treatment. For example, if high-purity chemicals are transported, metal ions or other contaminants may need to be removed through the resin column 10 to ensure the purity of the product. For some sensitive chemicals, the resin column 10 can be used as part of a stabilizer to help control the state of the chemical. In some cases, the resin column 10 may contain active substances for chemically reacting with the transported chemicals, which helps to change or stabilize the properties of the chemicals.
[0041] A third chemical transport pipeline 11 is connected between the resin column 10 and the mixing kettle 2 , and the other end of the third chemical transport pipeline 11 is connected to the inlet of the filter 4 .
[0042] A fourth chemical transport pipeline 12 is further connected between the liquid mixer 7 and the filter 4 , and the fourth chemical transport pipeline 12 is connected to the chemical supply interface 5 .
[0043] A sampling box 13 is further provided in the chemical supply cabinet 1 , and a fifth chemical transport pipeline 14 is connected between the outlet of the filter 4 and the chemical supply interface 5 , and the fifth chemical transport pipeline 14 is connected to the sampling box 13 .
[0044] Among them, a high-level tank 15 is also provided above the mixing kettle 2, and the high-level tank 15 is connected to the mixing kettle 2 through a pipeline; among them, in the absence of external pumping power, the high-level tank 15 can rely on the hydrostatic pressure generated by its own height to promote the flow of chemicals, especially in the transmission over a short distance. When the chemical supply is interrupted or the pumping station fails, the high-level tank 15 can serve as a backup supply source to ensure that the downstream system or equipment does not stop working immediately. By adjusting the height or liquid level of the high-level tank 15, the flow rate of the chemicals flowing through the pipeline system can be controlled to meet different needs. At the initial stage of system startup, the high-level tank 15 can provide additional pressure support to help overcome the resistance during startup and ensure the smooth inflow of chemicals into the system. During maintenance or repair, the high-level tank 15 can continue to supply chemicals to reduce downtime. In some cases, the high-level tank 15 can serve as an emergency discharge point. When the system pressure is too high, excess chemicals can be released through the high-level tank 15 to protect the system from damage.
[0045] Among them, the chemical discharging and supply system further includes a first nitrogen transportation pipeline 16. The first end of the first nitrogen transportation pipeline 16 is connected to a nitrogen source interface 17, and the second end of the first nitrogen transportation pipeline 16 is connected to the top of the mixing kettle 2. Its main function is to ensure the safety and stability of the environment inside the container. During the transportation or storage of chemicals, by introducing inert gas, the oxygen in the air can be isolated to prevent the oxidation reaction of easily oxidized chemicals. Filling the container with inert gas can effectively remove the air inside the container and reduce the possibility of forming explosive mixtures. By continuously replenishing inert gas into the container, the positive pressure state inside the container can be maintained to prevent the entry of external air and also reduce the volatilization of chemicals.
[0046] Among them, inside the chemical discharging and supply cabinet 1, a gas filter 18 is further connected downstream of the nitrogen source interface 17.
[0047] Among them, before the first nitrogen transportation pipeline 17 penetrates out of the cabinet body of the chemical supply cabinet 1, a second nitrogen transportation pipeline 19 is further connected. The second nitrogen transportation pipeline 19 is connected to a nitrogen gun N1 for purging the cabinet body of the chemical supply cabinet 1.
[0048] Among them, the first nitrogen transportation pipeline 16 is further connected to a third nitrogen transportation pipeline 20. The third nitrogen transportation pipeline 20 penetrates out of the cabinet body of the chemical supply cabinet 1 and is connected to the top of the high-level tank.
[0049] Among them, an exhaust pipe 21 is further provided inside the chemical supply cabinet. The sampling box and the mixer are connected to the exhaust pipe 21.
[0050] Among them, a drain pipe 22 is further provided in the chemical supply cabinet 1, and one or at least two of the gas filter 18, the filter 4, the sampling box 13, the pump 6, the mixer 7, and the exhaust pipe 21 can be connected to the drain pipe 22.
[0051] It should be understood that all pipelines in this application can be independently provided with valve switches, and all valve switches can also be connected to the drain pipe 22.
[0052] The specific embodiments of the present invention have been described in detail above, but they are only examples, and the present invention is not limited to the specific embodiments described above. For those skilled in the art, any equivalent modifications and substitutions made to this utility model are also within the scope of the present invention. Therefore, all equivalent transformations and modifications made without departing from the spirit and scope of the present invention should be covered within the scope of the present invention.
Claims
1. A chemical supply system, characterized in that, It includes a chemical discharging and supply cabinet and a mixing kettle; among them, the mixing kettle contains chemicals; The mixing kettle is connected to the first end of the first chemical transportation pipeline, After the first chemical transportation pipeline penetrates into the cabinet of the chemical discharging and supply cabinet, it is connected to the inlet of a chemical filter, The outlet of the chemical filter is connected to a chemical supply interface.
2. The chemical supply system according to claim 1, characterized in that The chemical filter can be one or at least two; When there are at least two chemical filters, the filters are arranged in parallel.
3. The chemical supply system according to claim 1, wherein Inside the chemical discharging and supply cabinet, a pump is also provided on the pipeline upstream of the chemical filter, and the pump is selected from a bellows pump or a diaphragm pump; and / or The pump can be one or at least two; When there are at least two pumps, the pumps are arranged in parallel.
4. The chemical supply system according to claim 3, characterized in that, Inside the chemical discharging and supply cabinet, a mixer is also provided on the pipeline between the inlet of the filter and the pump; and / or A buffer is also provided on the pipeline between the pump and the mixer; and / or A second chemical transportation pipeline is also connected between the mixer and the inlet of the filter, After the second chemical transportation pipeline penetrates out of the cabinet of the chemical discharging and supply cabinet, it is connected to the mixing kettle; and / or Before the second chemical transportation pipeline is connected to the mixing kettle, it is also connected to a resin column.
5. The chemical supply system according to claim 4, characterized in that, A third chemical transportation pipeline is also connected between the resin column and the mixing kettle, and the third chemical transportation pipeline is connected to the inlet of the filter; and / or A fourth chemical transportation pipeline is also connected between the mixer and the filter, and the fourth chemical transportation pipeline is connected to the chemical supply interface.
6. The chemical supply system according to claim 5, wherein A sampling box is also provided inside the chemical supply cabinet, and a fifth chemical transportation pipeline is also connected between the outlet of the filter and the chemical supply interface, and the fifth chemical transportation pipeline is connected to the sampling box; A high-level tank is also provided above the mixing kettle, and the high-level tank is connected to the mixing kettle through a pipeline.
7. The chemical supply system according to claim 6, characterized in that, The chemical supply system also includes a first nitrogen transportation pipeline, The first end of the first nitrogen transportation pipeline is connected to a nitrogen source interface, and the second end of the first nitrogen transportation pipeline is connected to the mixing kettle; and / or Inside the chemical discharging and supply cabinet, a gas filter is also connected downstream of the nitrogen source interface; and / or Before the first nitrogen transportation pipeline penetrates out of the cabinet of the chemical supply cabinet, a second nitrogen transportation pipeline is also connected to it, and the second nitrogen transportation pipeline is connected to a nitrogen gun for purging the cabinet of the chemical supply cabinet; and / or The first nitrogen transportation pipeline is also connected to a third nitrogen transportation pipeline, and the third nitrogen transportation pipeline penetrates out of the cabinet of the chemical supply cabinet and is connected to the high-level tank.
8. The chemical supply system according to claim 7, characterized in that, An exhaust pipe is also provided inside the chemical supply cabinet, and the sampling box and the mixer are connected to the exhaust pipe.
9. The chemical supply system according to claim 8, wherein A drain pipe is also provided inside the chemical supply cabinet, and one or at least two of the gas filter, the chemical filter, the sampling box, the pump, the mixer, and the exhaust pipe can be connected to the drain pipe.