Convenient-to-adjust detection jig for semiconductor production and processing

Abstract

The utility model discloses a semiconductor production processing detection tool convenient to adjust, comprising a placing plate, the top of the placing plate is provided with a plurality of placing grooves, the top of the placing plate is fixedly provided with two supporting plates, the interiors of the supporting plates are slidably connected with a plurality of limiting rods, the tops of the limiting rods are provided with a detection mechanism, and the detection mechanism is provided with a plurality of clamping grooves. The detection mechanism comprises a moving plate, a motor, a plurality of detection rods, a plurality of contact blocks and a plurality of stop blocks. According to the convenient-to-adjust detection jig for semiconductor production and processing, the detection mechanism is arranged, a detected object is placed in a placement groove, a motor is started, the motor drives a two-way screw rod to rotate, the two-way screw rod drives a moving plate and a detection rod to descend, a contact block makes contact with the detected object, the detection rod stops moving, the moving plate continues to descend, and the detected object can be detected by observing a graduated scale. Therefore, the size of the detected object can be known, and a plurality of detected objects can be detected at the same time.

Description

Technical Field

[0001] The utility model relates to the technical field of detection jigs, in particular to a detection jig for semiconductor production and processing which is convenient to adjust. Background Technique

[0002] Molds are various dies and tools used in industrial production to obtain the required products by methods such as injection molding, blow molding, extrusion, die casting, or forging, smelting, stamping, etc. In short, a mold is a tool used to make formed articles. This tool is composed of various parts, and different molds are composed of different parts. During the manufacturing process of the mold, it is necessary to measure the dimensions of the mold with high precision to prevent non-compliant molds from entering the production line.

[0003] After retrieval, the existing patent (publication number: CN219914231U) discloses a detection jig for semiconductor mold parts, which relates to the field of mold detection, including an equipment base and a detection jig. The detection jig includes a fixed seat, a sliding plate, and a measuring plate. The sliding plate is slidably connected to the top of the fixed seat, and the measuring plate is slidably connected to one side of the sliding plate. The fixed seat includes a fixed seat main body, a placement groove, and a fixed rod. A placement groove is opened at the top of the fixed seat main body, and one end of the fixed rod is fixedly connected to the top of the fixed seat main body. There are two groups of fixed rods and they are symmetrically arranged at the top of the fixed seat main body. The sliding plate includes a sliding plate main body, a circular opening, a slideway, and a scale line. This detection jig for semiconductor mold parts can measure the manufacturing precision of mold parts, ensure that the dimensions of the parts are within the set error range, the height of the jig can be adjusted according to the dimensions of the parts, and one set of jigs has four working stations, which improves the overall detection efficiency.

[0004] However, it has deficiencies. It is to turn the rotation handle of the measuring plate to make the main body of the measuring plate move up and down on the surface of the slideway until the pressing plate fits on the top of the part to complete the measurement. Such measurement is relatively troublesome and cumbersome. Content of the Utility Model

[0005] Aiming at the deficiencies of the prior art, the utility model provides a detection jig for semiconductor production and processing which is convenient to adjust, and solves the problems put forward in the above background technique.

[0006] To achieve the above purposes, the utility model is realized through the following technical solutions: A detection jig for semiconductor production and processing which is convenient to adjust, including a placement plate. A plurality of placement grooves are opened at the top of the placement plate. Two support plates are fixed to the top of the placement plate. A plurality of limiting rods are slidably connected inside the support plates. A detection mechanism is arranged at the top of the limiting rods. The detection mechanism includes a moving plate, a motor, a plurality of detection rods, a plurality of contact blocks, and a plurality of stoppers.

[0007] Preferably, the bottom of the moving plate is fixedly connected to the top of the limiting rod. The detection rod passes through the moving plate. An adjusting screw rod is screwed inside the detection rod. The top of the detection rod and the bottom of the adjusting screw rod are respectively fixedly connected to the contact block and the stopper. A scale is fixed on the outer side wall of the detection rod, and the outer side wall of the detection rod is slidably connected to the inside of the moving plate.

[0008] Preferably, a threaded cylinder is fixed between the two support plates at the top of the placing plate. A screw rod is screwed inside the threaded cylinder. The top of the moving plate is fixedly connected to the bottom of the motor. The output shaft of the motor passes through the moving plate and is fixedly connected to the top of the screw rod.

[0009] Preferably, a clamping mechanism is provided inside the placing plate. The clamping mechanism includes a clamping frame, clamping plates, a plurality of fixing blocks, two bidirectional screw rods, and two transmission rods. An activity groove is formed inside the placing plate, and the upper and lower surfaces of the clamping frame are respectively slidably connected to the upper and lower surfaces inside the activity groove.

[0010] Preferably, the upper and lower surfaces of the clamping plates are respectively slidably connected to the upper and lower surfaces inside the clamping frame. The plurality of fixing blocks are respectively fixedly connected to the left and right sides of the clamping frame and the left and right sides of the clamping plates. The bidirectional screw rod passes through the fixing blocks and is screwed to the fixing blocks. The front end of the bidirectional screw rod is rotatably connected to the front end inside the activity groove, and the rear end of the bidirectional screw rod passes through the rear end of the placing plate.

[0011] Preferably, a rotating cylinder is rotatably connected to the rear surface of the support plate. A rotating rod is slidably connected inside the rotating cylinder. Two transmission rods are rotatably connected to the rear end of the placing plate. A magnetic cylinder is fixed on the outer side wall of the transmission rod. An iron cylinder is rotatably connected to the outer side wall of the magnetic cylinder. The iron cylinder and the bidirectional screw rod, and the rotating rod and the rotating cylinder are connected by bevel gears. The rotating rod and the screw rod are connected by spur gears.

[0012] Beneficial effects

[0013] The utility model provides a detection jig for semiconductor production and processing which is convenient to adjust. Compared with the prior art, the following beneficial effects are achieved:

[0014] 1. For the detection jig for semiconductor production and processing which is convenient to adjust, by setting a detection mechanism, the detection object is placed inside the placing groove, the motor is started, the motor drives the bidirectional screw rod to rotate, the bidirectional screw rod drives the moving plate and the detection rod to descend, the contact block contacts the detection object, the detection rod stops moving, and the moving plate continues to descend. By observing the scale, the size of the detection object can be understood. In this way, multiple detection objects can be detected simultaneously, and the contact block can be rotated according to the size of the detection object to rotate the adjusting screw rod and adjust the height of the contact block.

[0015] 2. The detection jig for semiconductor production and processing with convenient adjustment, by setting a clamping mechanism, the screw drives the rotating rod to rotate through the circular gear, the rotating rod drives the rotating cylinder to rotate, the rotating cylinder drives the transmission rod to rotate through the bevel gear, the transmission rod drives the magnetic cylinder to rotate, the magnetic cylinder adsorbs the iron cylinder to rotate, the iron cylinder drives the bidirectional screw to rotate through the bevel gear, the bidirectional screw rotates to move the fixed block, the fixed block drives the clamping frame and the clamping plate to move, and the clamping frame and the clamping plate clamp the detection object, so as to prevent the detection object from tipping or tilting during detection, resulting in inaccurate detection data. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a schematic structural diagram of the present utility model;

[0017] Figure 2 is a schematic structural diagram of the bottom view of the present utility model;

[0018] Figure 3 is a schematic structural diagram of the side view of the present utility model;

[0019] Figure 4 is a schematic structural diagram of the magnetic cylinder and the iron cylinder in the present utility model;

[0020] Figure 5 is a schematic cross-sectional structural diagram of the placement plate in the present utility model;

[0021] Figure 6 is a schematic cross-sectional structural diagram of the detection rod in the present utility model.

[0022] In the figure: 1. Placement plate; 2. Placement groove; 3. Support plate; 4. Contact block; 5. Scale; 6. Detection mechanism; 7. Limit rod; 8. Stop block; 9. Moving plate; 10. Motor; 11. Clamping mechanism; 12. Transmission rod; 13. Bevel gear; 14. Screw; 15. Circular gear; 16. Clamping frame; 17. Iron cylinder; 18. Rotating cylinder; 19. Rotating rod; 20. Magnetic cylinder; 21. Detection rod; 22. Fixed block; 23. Bidirectional screw; 24. Activity groove; 25. Clamping plate; 26. Threaded cylinder; 27. Adjusting screw. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0024] Please refer to Figures 1-5, the present utility model provides a technical solution: a detection fixture for semiconductor production and processing that is convenient to adjust, including a placement plate 1. A plurality of placement grooves 2 are opened at the top of the placement plate 1. Two support plates 3 are fixed to the top of the placement plate 1. A plurality of limit rods 7 are slidably connected inside the support plates 3. A detection mechanism 6 is provided at the top of the limit rods 7. The detection mechanism 6 includes a moving plate 9, a motor 10, a plurality of detection rods 21, a plurality of contact blocks 4, and a plurality of stoppers 8. The bottom of the moving plate 9 is fixedly connected to the top of the limit rod 7. The detection rod 21 passes through the moving plate 9. An adjustment screw 27 is screwed inside the detection rod 21. The top and bottom of the detection rod 21 are respectively fixedly connected to the contact block 4 and the stopper 8. A scale 5 is fixed to the outer sidewall of the detection rod 21. The outer sidewall of the detection rod 21 is slidably connected to the inside of the moving plate 9. A threaded cylinder 26 is fixed to the top of the placement plate 1 between the two support plates 3. A screw 14 is screwed inside the threaded cylinder 26. The top of the moving plate 9 is fixedly connected to the bottom of the motor 10. The output shaft of the motor 10 passes through the moving plate 9 and is fixedly connected to the top of the screw 14. Place the test object inside the placement groove 2, start the motor 10, the motor 10 drives the screw 14 to rotate, the screw 14 drives the moving plate 9 and the detection rod 21 to descend, the contact block 4 contacts the test object, the detection rod 21 stops moving, the moving plate 9 continues to descend, and by observing the scale 5, the size of the test object can be understood, so that multiple test objects can be detected simultaneously.

[0025] Furthermore, a clamping mechanism 11 is provided inside the placement plate 1. The clamping mechanism 11 includes a clamping frame 16, clamping plates 25, a plurality of fixing blocks 22, two bidirectional screws 23, and two transmission rods 12. An activity slot 24 is formed inside the placement plate 1. The upper and lower surfaces of the clamping frame 16 are respectively slidably connected to the upper and lower inner surfaces of the activity slot 24. The upper and lower surfaces of the clamping plates 25 are respectively slidably connected to the upper and lower inner surfaces of the clamping frame 16. The plurality of fixing blocks 22 are respectively fixedly connected to the left and right sides of the clamping frame 16 and the left and right sides of the clamping plates 25. The bidirectional screws 23 pass through the fixing blocks 22 and are screwed to the fixing blocks 22. The front ends of the bidirectional screws 23 are rotatably connected to the front end inside the activity slot 24. The rear ends of the bidirectional screws 23 pass through the rear end of the placement plate 1. A rotating cylinder 18 is rotatably connected to the rear surface of the support plate 3. A rotating rod 19 is slidably connected inside the rotating cylinder 18. Two transmission rods 12 are rotatably connected to the rear end of the placement plate 1. A magnetic cylinder 20 is fixed to the outer sidewall of the transmission rod 12. An iron cylinder 17 is rotatably connected to the outer sidewall of the magnetic cylinder 20. The magnetic cylinder 20 and the iron cylinder 17 are driven by bevel gears 13, and the rotating rod 19 and the rotating cylinder 18 are driven by bevel gears 13. The rotating rod 19 and the screw 14 are driven by a circular gear 15. The screw 14 drives the rotating rod 19 to rotate through the circular gear 15. The rotating rod 19 drives the rotating cylinder 18 to rotate. The rotating cylinder 18 drives the transmission rod 12 to rotate through the bevel gear 13. The transmission rod 12 drives the magnetic cylinder 20 to rotate. The magnetic cylinder 20 adsorbs the iron cylinder 17 to rotate. The iron cylinder 17 drives the bidirectional screw 23 to rotate through the bevel gear 13. The rotation of the bidirectional screw 23 causes the fixing blocks 22 to move. The fixing blocks 22 drive the clamping frame 16 and the clamping plates 25 to move. The clamping frame 16 and the clamping plates 25 clamp the test object, thus preventing the test object from tipping or tilting during testing, resulting in inaccurate test data.

[0026] During operation, place the test object inside the placement slot 2, start the motor 10. The motor 10 drives the screw 14 to rotate. The screw 14 drives the moving plate 9 and the test rod 21 to descend. The contact block 4 contacts the test object. The test rod 21 stops moving. The moving plate 9 continues to descend. By observing the scale 5, the size of the test object can be understood. In this way, multiple test objects can be tested simultaneously. The screw 14 drives the rotating rod 19 to rotate through the circular gear 15. The rotating rod 19 drives the rotating cylinder 18 to rotate. The rotating cylinder 18 drives the transmission rod 12 to rotate through the bevel gear 13. The transmission rod 12 drives the magnetic cylinder 20 to rotate. The magnetic cylinder 20 adsorbs the iron cylinder 17 to rotate. The iron cylinder 17 drives the bidirectional screw 23 to rotate through the bevel gear 13. The rotation of the bidirectional screw 23 causes the fixing blocks 22 to move. The fixing blocks 22 drive the clamping frame 16 and the clamping plates 25 to move. The clamping frame 16 and the clamping plates 25 clamp the test object, thus preventing the test object from tipping or tilting during testing, resulting in inaccurate test data.

[0027] At the same time, the content not described in detail in this specification belongs to the prior art well known to those skilled in the art.

[0028] It should be noted that in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprising", "including" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device comprising said element.

[0029] Although the embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A detection fixture for semiconductor production and processing that is convenient to adjust, comprising a placement plate (1), characterized in that: A plurality of placement grooves (2) are formed in the top of the placement plate (1). Two support plates (3) are fixed to the top of the placement plate (1). A plurality of limit rods (7) are slidably connected to the inside of the support plates (3). A detection mechanism (6) is provided at the top of the limit rods (7). The detection mechanism (6) includes a moving plate (9), a motor (10), a plurality of detection rods (21), a plurality of contact blocks (4) and a plurality of stoppers (8).

2. The inspection fixture for semiconductor production and processing that is conveniently adjustable according to claim 1, wherein: The bottom of the moving plate (9) is fixedly connected to the top of the limit rod (7). The detection rod (21) passes through the moving plate (9). An adjusting screw rod (27) is screwed inside the detection rod (21). The top of the detection rod (21) and the bottom of the adjusting screw rod (27) are respectively fixedly connected to the contact block (4) and the stopper (8). A scale (5) is fixed to the outer side wall of the detection rod (21). The outer side wall of the detection rod (21) is slidably connected to the inside of the moving plate (9).

3. The inspection fixture for semiconductor production and processing that is conveniently adjustable according to claim 2, wherein: A threaded cylinder (26) is fixed between the two support plates (3) on the top of the placement plate (1). A screw rod (14) is screwed inside the threaded cylinder (26). The top of the moving plate (9) is fixedly connected to the bottom of the motor (10). The output shaft of the motor (10) passes through the moving plate (9) and is fixedly connected to the top of the screw rod (14).

4. The inspection fixture for semiconductor production and processing that is conveniently adjustable according to claim 3, wherein: A clamping mechanism (11) is provided inside the placement plate (1). The clamping mechanism (11) includes a clamping frame (16), a clamping plate (25), a plurality of fixing blocks (22), two bidirectional screw rods (23), and two transmission rods (12). An activity groove (24) is formed inside the placement plate (1). The upper and lower surfaces of the clamping frame (16) are respectively slidably connected to the upper and lower surfaces inside the activity groove (24).

5. The inspection fixture for semiconductor production and processing that is conveniently adjustable according to claim 4, wherein: The upper and lower surfaces of the clamping plate (25) are respectively slidably connected to the upper and lower surfaces inside the clamping frame (16). A plurality of fixing blocks (22) are respectively fixedly connected to the left and right sides of the clamping frame (16) and the left and right sides of the clamping plate (25). The bidirectional screw rod (23) passes through the fixing block (22) and is screwed to the fixing block (22). The front end of the bidirectional screw rod (23) is rotatably connected to the front end inside the activity groove (24). The rear end of the bidirectional screw rod (23) passes through the rear end of the placement plate (1).

6. The inspection fixture for semiconductor production and processing that is conveniently adjustable according to claim 5, wherein: A rotating cylinder (18) is rotatably connected to the rear surface of the support plate (3). A rotating rod (19) is slidably connected to the inside of the rotating cylinder (18). Two transmission rods (12) are rotatably connected to the rear end of the placement plate (1). A magnetic cylinder (20) is fixed to the outer side wall of the transmission rod (12). An iron cylinder (17) is rotatably connected to the outer side wall of the magnetic cylinder (20). The magnetic cylinder (20) and the iron cylinder (17) are connected by a bevel gear (13) between the iron cylinder (17) and the bidirectional screw rod (23), and between the rotating rod (19) and the rotating cylinder (18). The rotating rod (19) and the screw rod (14) are connected by a circular gear (15).

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