Inflation monitoring device for wafer carrier

Abstract

The utility model discloses a wafer carrier inflation monitoring device, which is suitable for a wafer carrier on a load platform and comprises an exhaust module, an air supply module and an electromagnetic valve terminal assembly. And the electromagnetic valve terminal assembly is connected with the exhaust module and the gas supply module, and is used for controlling the action time sequence of the gas supply module and the exhaust module on the wafer carrier, so that the exhaust module extracts gas in the wafer carrier from the wafer carrier, and then the gas supply module supplies gas into the wafer carrier.

Description

Technical Field

[0001] The utility model relates to a monitoring device, in particular to a wafer carrier inflation monitoring device. Background Art

[0002] A wafer is the main substrate in the semiconductor manufacturing process. The wafer can be placed in a wafer carrier (Front Opening Unified Pod, FOUP) to transport, protect and process the wafer, thereby avoiding wafer breakage and contamination.

[0003] Semiconductor manufacturing uses pumping and jetting technologies applied to wafer carriers to provide the required environmental conditions at different stages, thus achieving a high-quality and high-efficiency manufacturing process. Pumping is to extract the air inside the wafer carrier through a vacuum pump to create a negative pressure environment, thereby fixing the wafer carrier. At the same time, it can also avoid damage caused by wafer movement during processing, and then ensure the quality and stability of the product; jetting is used to introduce gas into the wafer carrier to create a positive pressure environment inside the wafer carrier for cleaning the wafer surface, removing impurities or dust, or even spraying specific chemical substances.

[0004] Since pumping and jetting are two different paths, although pumping can fix the wafer carrier, if its position cannot be fixed, when gas is introduced into the wafer carrier by jetting, the wafer carrier may generate a displacement amount, including the lifting amount in the vertical direction and the skew in the horizontal direction. Furthermore, if the jetting volume is too large, it may also cause excessive positive pressure inside the wafer carrier, resulting in vibration, which may affect the wafers inside the wafer carrier.

[0005] In addition, when gas flows in different pipelines, occasionally a reflux phenomenon may occur due to different pressure differences, such as when gas flows back into other clean pipelines, resulting in a micro-pollution situation, which will reduce the service life. Summary of the Utility Model

[0006] The purpose of the utility model is to provide a wafer carrier inflation monitoring device, which can reduce the displacement amount of the wafer carrier and reduce the probability of damage to the wafers inside the wafer carrier.

[0007] An embodiment of the utility model provides a wafer carrier inflation monitoring device suitable for a wafer carrier on a load platform. The wafer carrier inflation monitoring device includes an exhaust module, a gas supply module, and a solenoid valve island assembly. The solenoid valve island assembly is connected to the exhaust module and the gas supply module, and the solenoid valve island assembly is used to control the action sequence of the gas supply module and the exhaust module on the wafer carrier, so that the exhaust module first extracts a gas inside the wafer carrier from the wafer carrier, and then the gas supply module provides gas inside the wafer carrier.

[0008] In an embodiment of the present utility model, the solenoid valve island assembly includes a first solenoid valve, a second solenoid valve, a piping module, and an electronic control module. The first solenoid valve is connected to and controls the exhaust module. The second solenoid valve is connected to and controls the air supply module. The piping module is connected to the air supply module, wherein the first solenoid valve and the second solenoid valve are respectively connected to the piping module. The electronic control module is used to control the opening and closing actions of the first solenoid valve and the second solenoid valve.

[0009] In an embodiment of the present utility model, the air supply module includes an air supply device, a pressure detection and regulation unit, and a pneumatic switch unit. The air supply device is connected to the piping module. The pressure detection and regulation unit is connected to the air supply device. The pneumatic switch unit is connected between the second solenoid valve and the pressure detection and regulation unit, and the second solenoid valve controls the opening and closing action of the pneumatic switch unit.

[0010] In an embodiment of the present utility model, the exhaust module includes an exhaust device, a vacuum device, and an electric valve element. The vacuum device is connected between the exhaust device and the first solenoid valve, and the first solenoid valve controls the opening and closing action of the vacuum device. The electric valve element is connected to the vacuum device.

[0011] In an embodiment of the present utility model, the air supply module includes a pressure regulating valve, and the pressure regulating valve is connected to the piping module in the solenoid valve island assembly. The pressure regulating valve is used to regulate the gas transmitted from the air supply device to the piping module.

[0012] In an embodiment of the present utility model, the wafer carrier inflation monitoring device further includes an anti-backflow component, and the anti-backflow component is connected between the pressure regulating valve and the air supply device.

[0013] In an embodiment of the present utility model, the air supply module includes an air supply device, a pressure detection and regulation unit, and a pneumatic switch unit. The air supply device is connected to the piping module. The pneumatic switch unit is connected between the second solenoid valve and the pressure detection and regulation unit, and the second solenoid valve controls the opening and closing action of the pneumatic switch unit.

[0014] In an embodiment of the present utility model, the exhaust module includes a pressure detection unit, and the pressure detection unit is used to detect the vacuum device.

[0015] In an embodiment of the present utility model, the exhaust module includes a temperature and humidity sensing element, and the temperature and humidity sensing element is connected to the electric valve element.

[0016] In an embodiment of the present utility model, the first solenoid valve is connected to a speed regulating valve.

[0017] In an embodiment of the present utility model, the air supply module includes a flow detection unit and a gas filtration unit. The flow detection unit is connected between the pneumatic switch unit and the gas filtration unit.

[0018] Based on the above, the utility model independently controls the exhaust module and the air supply module through the solenoid valve island assembly, creating an action timing with a time difference for startup, such that the air supply and air extraction for the wafer carrier are not simultaneous. Moreover, since the gas inside the wafer carrier is first extracted to create a negative pressure environment inside the wafer carrier, thereby fixing the position of the wafer carrier. At this time, gas is then injected into the wafer carrier at the fixed position through the air supply module. During the gas injection process, it is possible to avoid causing displacement of the wafer carrier at the fixed position and also avoid excessive positive pressure inside the wafer carrier resulting in vibration. This can reduce the probability of damage to the wafers inside the wafer carrier.

[0019] To make the utility model more clearly understandable, specific embodiments are hereinafter given and detailed descriptions are made in conjunction with the accompanying drawings as follows. Description of the Drawings

[0020] Figure 1 Schematic diagram of an embodiment of the wafer carrier gas filling monitoring device of the utility model.

[0021] Figure 2 Schematic diagram of another embodiment of the wafer carrier gas filling monitoring device of the utility model.

[0022] Figure 3 Schematic diagram of yet another embodiment of the wafer carrier gas filling monitoring device of the utility model.

[0023] Figure 4 Schematic diagram of still another embodiment of the wafer carrier gas filling monitoring device of the utility model.

[0024] Figure 5 Schematic diagram of other embodiments of the wafer carrier gas filling monitoring device of the utility model.

[0025] Description of the Reference Numerals: 50 - wafer carrier; 60 - load platform; 100, 200, 300, 400, 500 - wafer carrier gas filling monitoring device; 110, 310, 510 - exhaust module; 120, 320, 420, 520 - air supply module; 130, 230 - solenoid valve island assembly; 232 - first solenoid valve; 234 - second solenoid valve; 236 - piping module; 238 - electronic control module; 312 - exhaust device; 314 - vacuum device; 316 - electric valve element; 322 - air supply device; 324 - air pressure detection and regulation unit; 326 - pneumatic switch unit; 428 - pressure regulating valve; 640 - anti - reflux component; 518 - air pressure detection unit; 519 - temperature and humidity sensing element; 528 - flow detection unit; 529 - gas filtration unit; GA - gas; K1 - speed regulating valve. Detailed Embodiment

[0026] Examples are listed below and described in detail with reference to the accompanying drawings. However, the provided examples are not intended to limit the scope covered by the present utility model. In addition, the drawings are for illustrative purposes only and are not drawn to the original scale. For ease of understanding, the same elements will be denoted by the same reference numerals in the following description.

[0027] The terms "comprising", "including", "having", etc. mentioned in the present utility model are all open-ended terms, that is, "including but not limited to".

[0028] In the description of each embodiment, when elements are described using terms such as "first", "second", "third", "fourth", etc., these are only used to distinguish these elements from each other and do not limit the order or importance of these elements.

[0029] In the description of each embodiment, the so-called "coupled" or "connected" may mean that two or more elements are in direct physical or electrical contact with each other, or are in indirect physical or electrical contact with each other, and "coupled" or "connected" may also mean that two or more elements operate or act on each other.

[0030] Figure 1 FIG. is a schematic diagram of an embodiment of the wafer carrier inflation monitoring device of the present utility model. Please refer to Figure 1 , the wafer carrier inflation monitoring device 100 of the present utility model is adapted to a wafer carrier 50 on a load platform 60. The wafer carrier inflation monitoring device includes an exhaust module 110, a gas supply module 120, and a solenoid valve island assembly 130. The "solenoid valve island assembly" refers to a modular system composed of multiple solenoid valves (or other control elements) and other elements for controlling the flow of fluid (such as gas or liquid).

[0031] The exhaust module 110 and the gas supply module 120 are respectively connected to the wafer carrier 50 through the load platform 60. The solenoid valve island assembly 130 connects the exhaust module 110 and the gas supply module 120. The solenoid valve island assembly 130 is used to control the action timing of the exhaust module 110 and the gas supply module 120 on the wafer carrier 50. The "action timing" refers to the operation or start sequence of each component or step in a system or device to ensure that the system can operate correctly or perform a specific function. For example, in a mechanical system, the action timing may refer to the start, operation, and stop sequence of each component; in an electronic device, it may refer to the turn-on, turn-off, or signal transmission sequence of each element in the circuit. It can be seen from this that the action timing refers to the time sequence of coordinated operation between various parts of a system.

[0032] The solenoid valve island assembly 130 of the present utility model independently controls the exhaust module 110 and the gas supply module 120, creating an action timing with a time difference for starting, such that the exhaust module 110 first extracts the gas GA within the wafer carrier 50 from the wafer carrier 50 to fix the position of the wafer carrier 50, and then enables the gas supply module 120 to supply the gas GA within the wafer carrier 50 with a fixed position to clean the wafer surface within the wafer carrier 50, remove impurities or dust, or even spray specific chemical substances.

[0033] Thus, it can be seen that the present utility model independently controls the exhaust module 110 and the gas supply module 120 through the solenoid valve island assembly 130, such that the gas supply and extraction of the wafer carrier 50 are not simultaneous. And because the gas within the wafer carrier 50 is first extracted to create a negative pressure environment within the wafer carrier 50 to fix the position of the wafer carrier 50, at this time, the gas GA is then introduced into the wafer carrier 50 by jetting through the gas supply module 120. It can avoid causing the wafer carrier 50 with a fixed position to generate a displacement amount during the jetting process. The displacement amount includes the lifting amount in the vertical direction, and it can also avoid causing excessive positive pressure inside the wafer carrier 50 to result in vibration. This can reduce the probability of wafer damage within the wafer carrier 50.

[0034] Figure 2 It is a schematic diagram of another embodiment of the wafer carrier gas charging monitoring device of the present utility model. Please refer to Figure 2 , wherein Figure 2 the wafer carrier gas charging monitoring device 200 and Figure 1 the difference between the wafer carrier gas charging monitoring device 100 is: the solenoid valve island assembly 230, Figure 2 Illustrate an embodiment of the solenoid valve island assembly 230 by way of example. The solenoid valve island assembly 230 includes a first solenoid valve 232, a second solenoid valve 234, a piping module 236, and an electronic control module 238. Herein, the present utility model takes two solenoid valves as an example, and the number of solenoid valves can be adjusted according to the actual situation. Thus, it can be seen that the solenoid valve island assembly 230 of the present utility model is a modular system composed of two solenoid valves, namely the first solenoid valve 232 and the second solenoid valve 234, and the first solenoid valve 232 and the second solenoid valve 234 are connected through the pipelines of the piping module 236, and the first solenoid valve 232 and the second solenoid valve 234 are controlled by the electronic control module 238 to achieve the purpose of controlling the gas flow.

[0035] One end of the first solenoid valve 232 of the present utility model is connected to and controls the exhaust module 110, and the other end of the first solenoid valve 232 is connected to the piping module 236; one end of the second solenoid valve 234 is connected to and controls the air supply module 120, and the other end of the second solenoid valve 234 is connected to the piping module 236. Thus, it can be seen that the exhaust module 110 is controlled by the first solenoid valve 232, and the air supply module 120 is controlled by the second solenoid valve 234. The piping module 236 is connected to the air supply module 120, and the air supply module 120 supplies air to the piping module 236. The piping module 236 distributes gas to the first solenoid valve 232 and the second solenoid valve 234. The electronic control module 238 is used to control the opening and closing actions of the first solenoid valve 232 and the second solenoid valve 234, and controls the operation timing of the exhaust module 110 and the air supply module 120 on the wafer carrier 50 through the opening and closing actions of the first solenoid valve 232 and the second solenoid valve 234.

[0036] Figure 3 It is a schematic diagram of another embodiment of the wafer carrier inflation monitoring device of the present utility model. Please refer to Figure 3 , in which Figure 3 the wafer carrier inflation monitoring device 300 and Figure 2 the difference between the wafer carrier inflation monitoring device 200 is that: the exhaust module 310 and the air supply module 320, Figure 2 An example is given to illustrate a specific embodiment of the exhaust module 310 and the air supply module 320.

[0037] The exhaust module 310 includes an exhaust device 312, a vacuum device 314 and an electric valve element 316. The "exhaust device" refers to a device or system for exhausting the gas in a certain space to the external environment. The "vacuum device" refers to a device for creating a vacuum in a closed container or system. The working principle of the "vacuum device" is usually to use a pumping device driven by a motor. Of course, the vacuum can also be generated by the Venturi effect, that is, a vacuum device that generates negative pressure suction with positive pressure by using a Venturi device, that is, the gas or other gas components in the container are pumped out to make the pressure in the container lower than the atmospheric pressure. The "electric valve element" refers to a device for controlling the flow of fluid (such as liquid or gas), and its operation is controlled by a motor or an electric device, such as an electric valve or an element with a similar function.

[0038] The vacuum device 314 is connected between the exhaust device 312 and the first solenoid valve 232. The first solenoid valve 232 controls the opening and closing action of the vacuum device 314. The electric valve element 316 is connected to the vacuum device 314, and the electric valve element 316 is connected to the wafer carrier 50 through the load platform 60.

[0039] The gas supply module 320 includes a gas supply device 322, a gas pressure detection and regulation unit 324, and a pneumatic switch unit 326. Herein, the "gas supply device" refers to a device or system that provides gas. The "gas pressure detection and regulation unit" refers to a device or system that monitors the gas pressure and adjusts it to maintain the required pressure to ensure that the gas pressure in the environment is within a safe or appropriate range. The "pneumatic switch unit" refers to a device that uses gas pressure to control the switch operation, such as controlling the switch actions of pneumatic valves, cylinders, pneumatic pumps, etc. for controlling pneumatic devices or systems.

[0040] The gas supply device 322 is connected to the piping module 236, that is, one end of the piping module 236 is connected to the gas supply device 322, and the other end of the piping module 236 is respectively connected to the first solenoid valve 232 and the second solenoid valve 234. Thus, the gas supply device 322 supplies gas to the piping module 236, and then distributes the gas to the first solenoid valve 232 and the second solenoid valve 234. The gas pressure detection and regulation unit 324 is connected to the gas supply device 322. The pneumatic switch unit 326 is connected between the second solenoid valve 234 and the gas pressure detection and regulation unit 324, and the pneumatic switch unit 326 is connected to the wafer carrier 50 through the load platform 60. The second solenoid valve 234 controls the switch action of the pneumatic switch unit 326.

[0041] It can be seen therefrom that the first solenoid valve 232 in the solenoid valve island assembly 230 controls the switch action of the vacuum device 314, and the second solenoid valve 234 controls the switch action of the pneumatic switch unit 326, so that the vacuum device 314 and the pneumatic switch unit 326 are respectively controlled by different solenoid valves: the switch action of the vacuum device 314 is controlled by the first solenoid valve 232 to open or close the electric valve element 316; the switch action of the pneumatic switch unit 326 is controlled by the second solenoid valve 234 to open or close the exhaust pneumatic switch unit 326.

[0042] In this way, the gas supply device 322 supplies gas to the piping module 236. The gas is distributed by the piping module 236 to the first solenoid valve 232 and the second solenoid valve 234. The electronic control module 238 first opens the first solenoid valve 232 and closes the second solenoid valve 234, so that the exhaust module 310 first performs the air extraction operation, while the gas supply module 320 does not perform the gas supply operation. When the first solenoid valve 232 controls the opening of the vacuum device 314, the electric valve element 316 is opened, so that the gas in the wafer carrier 50 can be transmitted through the electric valve element 316, and the gas in the wafer carrier 50 is extracted by the vacuum device 314 and discharged by the exhaust device 312 to create a negative pressure environment in the wafer carrier 50 to fix the wafer carrier 50. At the same time, when the second solenoid valve 234 controls the closing of the pneumatic switch unit 326, the pneumatic switch unit 326 is closed, so that the gas cannot be transmitted into the wafer carrier 50 through the pneumatic switch unit 326, and the wafer carrier 50 cannot be supplied with gas.

[0043] Next, the electronic control module 238 then opens the second solenoid valve 234 and closes the first solenoid valve 232, so that the gas supply module 320 performs the gas supply operation, while the exhaust module 310 does not perform the air extraction operation. When the second solenoid valve 234 controls the opening of the pneumatic switch unit 326, the pneumatic switch unit 326 is opened, and gas is supplied through the gas supply device 322. The gas is transmitted through the pneumatic switch unit 326 into the wafer carrier 50 for gas supply. Furthermore, the gas pressure can be adjusted by the gas pressure detection and adjustment unit 324. The gas pressure detection and adjustment unit 324 can detect the gas pressure through gas detection and can adjust it to the required (or appropriate) range according to the detected gas pressure. At the same time, when the first solenoid valve 232 controls the closing of the vacuum device 314, the electric valve element 316 is closed, so that the gas in the wafer carrier 50 cannot be transmitted through the electric valve element 316, and the wafer carrier 50 cannot be evacuated.

[0044] As can be seen from the above, through the on-off control of the first solenoid valve 232 and the second solenoid valve 234 in different time sequences, the wafer carrier 50 is first evacuated to fix the position of the wafer carrier 50, and then gas is introduced into the wafer carrier 50 after the position is fixed, which can avoid the displacement of the wafer carrier 50, reduce vibration, and reduce the probability of wafer damage in the wafer carrier 50.

[0045] Figure 4 It is a schematic diagram of another embodiment of the wafer carrier gas charging monitoring device of the present invention. Please refer to Figure 4 , in which Figure 4 the wafer carrier gas charging monitoring device 400 and Figure 3The difference between the wafer carrier gas charging monitoring device 300 is that the wafer carrier gas charging monitoring device 400 of the present utility model further includes an anti-backflow component 640, and the gas supply module 420 further includes a pressure regulating valve 428. The anti-backflow component 640 is connected between the pressure regulating valve 428 and the gas supply device 322, and the pressure regulating valve 428 is connected to the piping module 236.

[0046] The "anti-backflow component" refers to a device or element used to prevent gas from flowing backward in a pipeline or system, such as a "non-return valve", "check valve", or "stop valve", etc., which is used to prevent gas from flowing backward when the gas flow direction changes. The purpose is to ensure that the gas can only flow in a predetermined direction and prevent problems that may be caused by backflow or reverse flow, such as pipeline contamination or damage caused by pressure difference, pressure loss of the system, damage to equipment, etc. The anti-backflow component 640 is designed as a valve body, for example, with a valve or valve disc installed inside. When the gas passes through in the correct direction, the valve will open to allow the gas to pass freely; when the gas attempts to flow backward, the valve will automatically close to prevent backflow, ensuring that the gas can only be transmitted in the expected direction without reverse flow.

[0047] The "Pressure Regulating Valve" refers to a device used to control the pressure in a gas system, also known as a pressure regulating valve or pressure regulator. Its main function is to monitor the pressure in the gas system and maintain a predetermined pressure level by adjusting the opening degree of the valve to ensure a stable pressure in the gas system. In an embodiment of the present utility model, the pressure range of the pressure regulating valve 428 can be selected in the range of 0.2 Mpa to 0.6 Mpa, but it is not limited thereto.

[0048] When the gas supply device 322 supplies gas to the piping module 236, the pressure regulating valve 428 is used to adjust the pressure or flow rate of the gas transmitted from the gas supply device 322 to the piping module 236 to ensure a stable pressure in the piping module 236. In this way, the pressure regulating valve 428 first supplies gas to the piping module 236 and then distributes it to the first solenoid valve 232 and the second solenoid valve 234. At the same time, when the gas in the piping module 236 transmits in the direction of the gas supply device 322, the valve of the anti-backflow component 640 will automatically close to prevent the gas from flowing backward to the gas supply device 322, thereby avoiding pipeline contamination and damage caused by backflow (reverse flow).

[0049] Figure 5 It is a schematic diagram of other embodiments of the wafer carrier gas charging monitoring device of the present utility model. Please refer to Figure 5 , where Figure 5 the wafer carrier gas charging monitoring device 500 and Figure 4The difference of the wafer carrier inflation monitoring device 400 is that the exhaust module 510 of the present utility model further includes a barometric pressure detection unit 518 and a temperature and humidity sensing element 519. The barometric pressure detection unit 518 is used to detect the vacuum device 314, and the temperature and humidity sensing element 519 is connected to the electric valve element 316. The gas supply module 520 of the present utility model further includes a flow rate detection unit 528 and a gas filtration unit 529. The flow rate detection unit 528 is connected between the pneumatic switch unit 326 and the gas filtration unit 529. And a speed control valve K1 is newly added, and the first electromagnetic valve 232 is connected to the speed control valve K1.

[0050] The "temperature and humidity sensing element" refers to a device or element that can measure the temperature and humidity of the surrounding environment. Taking the present utility model as an example, one end of the temperature and humidity sensing element 519 is connected to the wafer carrier 50 through the load platform 60, and the other end of the temperature and humidity sensing element 519 is connected to the electric valve element 316. Thus, it can be seen that when the gas inside the wafer carrier 50 is being pumped out, the temperature and humidity of the pipeline environment can be measured through the temperature and humidity sensing element 519, and then the temperature and humidity of the space inside the wafer carrier 50 can be known.

[0051] The "barometric pressure detection unit" refers to a device or element used to measure atmospheric pressure, such as including a barometric pressure sensor that can detect changes in barometric pressure. Taking the present utility model as an example, the barometric pressure detection unit 518 is connected to the pipeline between the electric valve element 316 and the vacuum device 314, and the barometric pressure detection unit 518 is used to detect the gas pressure generated by the gas pumped by the vacuum device 314. Also, in an embodiment of the present utility model, the negative pressure range of the vacuum device 314 is between -3 kPa and -0.3 kPa, but it is not limited thereto.

[0052] The "speed control valve" refers to a valve or device used to control the flow rate of a fluid (such as gas or liquid), which can adjust the amount of fluid passing through to achieve the required flow rate or flow. Taking the present utility model as an example, the flow rate or flow of the gas flowing from the first electromagnetic valve 232 into the vacuum device 314 is adjusted through the speed control valve K1.

[0053] The "flow detection unit" refers to a device or component for measuring and controlling gas flow, capable of detecting the rate or amount of gas passing through. Taking the present utility model as an example, the gas transmitted by the pneumatic switch unit 326 passes through the flow detection unit 528, and the flow detection unit 528 can detect the gas flow rate and adjust it to the required (or appropriate) range, and then supply the gas within the required range to the wafer carrier 50. In another embodiment, the air supply in the pipeline can be adjusted by the air pressure detection and adjustment unit 324 according to the data measured by the flow detection unit 528 to adjust to the required (or appropriate) applicable range. Moreover, in an embodiment of the present utility model, the flow range of the flow detection unit 528 is between 30 liters per minute and 300 liters per minute, but this is not limiting. Additionally, in another embodiment, the flow detection unit 528 not only has the function of detecting the flow rate but also further has the function of controlling the flow rate; that is, the flow detection unit 528 further includes a speed control valve and control valve components, which can be controlled electrically or manually.

[0054] The "gas filtration unit" refers to a device for removing impurities or solid particles in the gas. For example, it includes one or more filters that can filter out solids, liquids, or other impurities when the gas passes through, thereby providing cleaner and purer gas. The material of the gas filtration unit 529 can be filter materials such as polytetrafluoroethylene (PTFE), porous ceramics, resin, and ultra-high molecular weight polyethylene (UPE), etc., but this is not limiting. Taking the present utility model as an example, after the gas transmitted by the pneumatic switch unit 326 is adjusted to the required gas flow rate range by the flow detection unit 528, it then passes through the gas filtration unit 529 to filter out impurities, so as to provide cleaner and purer gas into the wafer carrier 50.

[0055] It should be noted that the above air pressure detection unit 518, temperature and humidity sensing element 519, flow detection unit 528, and gas filtration unit 529 can adjust their installation positions and installation quantities according to actual situations.

[0056] In summary, the present utility model independently controls the exhaust module and the gas supply module through the solenoid valve island assembly, creating an action timing with a time difference for starting, such that the gas supply and extraction for the wafer carrier are not simultaneous. Moreover, since the gas inside the wafer carrier is first extracted to create a negative pressure environment inside the wafer carrier to fix the position of the wafer carrier, and then gas is jetted into the wafer carrier at the fixed position through the gas supply module, it can avoid causing displacement of the wafer carrier at the fixed position during the jetting process and also avoid excessive positive pressure inside the wafer carrier resulting in vibration. This can reduce the probability of damage to the wafers inside the wafer carrier.

[0057] Furthermore, through the design of the anti-backflow component, the present utility model prevents gas from flowing back to the gas supply device, thereby avoiding pipeline contamination and damage caused by backflow (countercurrent).

[0058] Although the present utility model has been described above with embodiments, it is not intended to limit the present utility model. Any person with ordinary knowledge in the relevant technical field can make some modifications and refinements without departing from the spirit and scope of the present utility model. Therefore, the protection scope of the present utility model shall be determined by the scope defined in the appended claims.

Claims

1. A wafer carrier inflation monitoring device, suitable for a wafer carrier on a load platform, characterized in that The wafer carrier inflation monitoring device includes: An exhaust module; A gas supply module; and A solenoid valve island assembly connecting the exhaust module and the gas supply module, the solenoid valve island assembly being used to control the action sequence of the gas supply module and the exhaust module on the wafer carrier, so that the exhaust module first extracts a gas inside the wafer carrier, and then the gas supply module supplies the gas inside the wafer carrier.

2. The wafer carrier inflation monitoring device according to claim 1, wherein, The solenoid valve island assembly includes: A first solenoid valve connecting and controlling the exhaust module; A second solenoid valve connecting and controlling the gas supply module; A piping module connected to the gas supply module, wherein the first solenoid valve and the second solenoid valve are respectively connected to the piping module; and An electric control module for controlling the opening and closing actions of the first solenoid valve and the second solenoid valve.

3. The wafer carrier inflation monitoring device according to claim 2, wherein The gas supply module includes: A gas supply device connecting the piping module; A pressure detection and adjustment unit connected to the gas supply device; and A pneumatic switch unit connected between the second solenoid valve and the pressure detection and adjustment unit, the second solenoid valve controlling the opening and closing action of the pneumatic switch unit.

4. The wafer carrier gas inflation monitoring device according to claim 3, characterized in that The gas supply module includes: A pressure regulating valve connected to the piping module in the solenoid valve island assembly, the pressure regulating valve being used to regulate the gas transmitted from the gas supply device to the piping module.

5. The wafer carrier inflation monitoring device according to claim 4, characterized in that, It further includes: A backflow prevention component connected between the pressure regulating valve and the gas supply device.

6. The wafer carrier inflation monitoring device according to claim 2, wherein, The exhaust module includes: An exhaust device; A vacuum device connected between the exhaust device and the first solenoid valve, the first solenoid valve controlling the opening and closing action of the vacuum device; and An electric valve element connected to the vacuum device.

7. The wafer carrier inflation monitoring device according to claim 6, wherein, The exhaust module includes: A pressure detection unit for detecting the vacuum device.

8. The wafer carrier gas charging monitoring device according to claim 6, wherein, The exhaust module includes: A temperature and humidity sensing element connected to the electric valve element.

9. The wafer carrier gas charging monitoring device according to claim 2, wherein, The first solenoid valve is connected to a speed regulating valve.

10. The wafer carrier inflation monitoring device according to claim 3, characterized in that, The gas supply module includes: A gas filtering unit; and A flow rate detection unit connected between the pneumatic switch unit and the gas filtering unit.

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