Silicon carbide boat

Abstract

The utility model relates to a silicon carbide crystal boat which comprises an end plate A and an end plate B which are oppositely arranged, N groove bars are arranged between the end plate A and the end plate B, and N is an even number larger than or equal to 2. One side, deviating from each other, of every two groove bars is arc-shaped, a plurality of clamping grooves which are arranged side by side are formed in the opposite sides of the groove bars, the bottoms of the clamping grooves are arc-shaped, groove teeth are arranged between the clamping grooves, grabbing lugs are arranged on the sides, close to the end plate A, of the groove bars, and the number of the grabbing lugs is two. The silicon carbide crystal boat is simple in structure, good in using effect and suitable for popularization and application.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly relates to a silicon carbide boat. Background Art

[0002] The processing of semiconductor materials is the core link of semiconductor manufacturing, involving a series of precise and complex technological steps. Among them, annealing is a key step in the semiconductor manufacturing process, which is crucial for improving the material structure and electrical properties. Annealing mainly refers to the process of heating the semiconductor material to a certain temperature, maintaining it for a period of time, and then slowly cooling it to room temperature. The annealing process uses an annealing furnace, the principle of which is to use a resistance coil around a quartz tube. After being energized, the coil heats the quartz tube to generate a constant temperature area. When the temperature reaches the temperature required by the process, the silicon wafer is sent into the constant temperature area inside the quartz tube through a silicon carbide boat placed on a robotic arm for annealing to meet the process requirements. However, the manufacturing cost of the existing silicon carbide boats is relatively high, and the structure is relatively complex, which limits their wide use in some applications. Summary of the Invention

[0003] Aiming at the deficiencies of the prior art, the utility model provides a silicon carbide boat with a simple structure and good use effect.

[0004] A silicon carbide boat of the utility model includes end plates A and B arranged oppositely, and N slot rods are arranged between the end plates A and B, where N is an even number greater than or equal to 2;

[0005] On the opposite sides of every two slot rods are arc-shaped, and on the opposite sides of the slot rods are provided with a plurality of card slots arranged side by side. The bottom of the card slot is an arc, and between the card slots are slot teeth. On the side of the slot rod close to the end plate A are provided ear catches, and the two ear catches are symmetrically arranged along the symmetry axis of the boat.

[0006] Further, the card slot of the silicon carbide boat of the utility model is composed of an arc-shaped bottom surface and two inclined surfaces. The included angle between the inclined surface and the horizontal plane is 3 - 5°, and the width of the slot opening of the card slot is greater than the width of its bottom.

[0007] Further, the cross-section of the slot rod of the silicon carbide boat of the utility model is in the shape of a water droplet or a circle.

[0008] Further, there are four slot rods in the silicon carbide boat of the utility model, which are respectively fixedly connected to the four corners of the end plates A and B, and the slot rods at the same horizontal height are arranged oppositely.

[0009] Further, the two ends of the ear catch of the silicon carbide boat of the utility model are respectively fixedly connected to two adjacent slot rods.

[0010] Further, the depth of the card slot of the silicon carbide boat of the present utility model is 1 / 5 to 1 / 3 of the longest dimension on the cross section of the slot bar.

[0011] Further, the thickness of the end of the slot tooth of the silicon carbide boat of the present utility model is d, the width of the slot opening of the card slot is D, and d = (0.5 to 0.8)D is satisfied.

[0012] Further, a groove is provided on one side of the end plate B of the silicon carbide boat of the present utility model relative to the end plate A.

[0013] Advantages of the present utility model:

[0014] The silicon carbide boat of the present utility model is a complex structural part formed integrally and then grooved. On the one hand, through a simple and symmetric structural design, while meeting the mechanical strength at high temperatures, good chemical stability and mechanical stability are also ensured. On the other hand, the opposite sides of every two slot bars are designed to be arc-shaped, which can greatly improve the wear resistance of the boat, reduce the wear on the surface of the boat during frequent use and cleaning, thereby ensuring the performance of the boat and the placement of the wafers is not affected. The simple and symmetric ear design makes it more convenient to load and unload the boat. The silicon carbide boat described in the present utility model greatly improves the operation efficiency and safety, and further saves the manufacturing cost. Description of the drawings

[0015] Figure 1 is a schematic structural diagram of the silicon carbide boat of the present utility model;

[0016] Figure 2 is a top view of the silicon carbide boat of the present utility model;

[0017] Figure 3 is a partial structural schematic diagram of the slot bar of the present utility model;

[0018] Figure 4 is a cross-sectional view of the slot bar of the silicon carbide boat in Embodiment 1 of the present utility model;

[0019] Among them: 1. End plate A, 2. End plate B, 3. Slot bar, 4. Card slot, 5. Slot tooth, 6. Ear, 7. Groove. Specific embodiments

[0020] In order to make the purpose, technical solutions and advantages of the specific embodiments of the present utility model clearer, the technical solutions in the specific embodiments of the present utility model will be clearly and completely described below. Those not specified in the specific embodiments are carried out according to the conventional conditions or the conditions recommended by the manufacturer.

[0021] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this technology belongs. The terms used in the specification herein are for the purpose of describing specific embodiments only and are not intended to limit the present utility model. The term "and / or" used herein includes any and all combinations of one or more of the related listed items. Embodiment 1

[0022] As shown in FIGS. 1 to 4, a silicon carbide susceptor includes end plates A 1 and B 2 which are oppositely arranged. There are N slot bars 3 provided between the end plates A 1 and B 2, and N is an even number greater than or equal to 2. In this Embodiment 1, there are four slot bars 3, which are fixedly connected to the four corners of the end plates A 1 and B 2 respectively, and the slot bars 3 at the same horizontal height are oppositely arranged. A groove 7 is provided on one side of the end plate B 2 opposite to the end plate A 1.

[0023] The sides of every two slot bars 3 facing away from each other are arc-shaped. In this Embodiment 1, the cross-section of the slot bar 3 is water-drop-shaped. A plurality of card slots 4 arranged side by side are provided on the opposite side of the slot bar 3. The bottom of the card slot 4 is an arc, and the teeth between the card slots 4 are slot teeth 5. On one side of the slot bar 3 close to the end plate A 1, there are ear catches 6, and the ear catches 6 are symmetrically arranged into two along the symmetry axis of the susceptor. In this Embodiment 1, the ear catches 6 are rectangular frames and are fixedly connected to two adjacent slot bars 3 at both ends respectively.

[0024] The card slot 4 is composed of an arc-shaped bottom surface and two inclined surfaces. The included angle between the inclined surface and the horizontal plane is 3 to 5°. The width of the slot opening of the card slot 4 is greater than the width of its bottom, and there are no protrusions on the inclined surface, which is a flat plane. The depth of the card slot 4 is 1 / 5 to 1 / 3 of the longest dimension on the cross-section of the slot bar 3. The thickness of the end of the slot tooth is d, and the width of the slot opening of the card slot is D, and d = (0.5 to 0.8)D is satisfied. In this Embodiment 1, the included angle between the inclined surface and the horizontal plane is 4°, the depth of the card slot 4 is 5.3 mm, and the width D of the slot opening of the card slot 4 is 0.17 mm.

[0025] The silicon carbide susceptor described in the present utility model is integrally formed. During use, wafers are inserted into the card slots 4 one by one, and then the silicon carbide susceptor is loaded into the susceptor holder and slowly moved along the length direction of the susceptor holder. The wafers are restricted by the arc-shaped bottom surface of the card slot 4 in the moving direction and will not move, thereby greatly improving the operation efficiency and safety.

[0026] The embodiments described above are some but not all of the embodiments of the present utility model. The detailed description of the embodiments of the present utility model is not intended to limit the scope of the present utility model claimed, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present utility model without creative efforts fall within the scope of protection of the present utility model.

Claims

1. A silicon carbide susceptor, characterized in that, It includes oppositely arranged end plates A (1) and end plates B (2). There are N groove rods (3) provided between the end plates A (1) and end plates B (2), and N is an even number greater than or equal to 2; On the opposite sides of every two of the groove rods (3) are arc-shaped. On the opposite sides of the groove rods (3), a plurality of card slots (4) are arranged side by side. The bottom of the card slot (4) is an arc. Between the card slots (4) are slot teeth (5). On one side of the groove rod (3) close to the end plate A (1), there are grab ears (6). The grab ears (6) are symmetrically arranged in two along the symmetry axis of the susceptor; The card slot (4) is composed of an arc-shaped bottom surface and two inclined surfaces. The included angle between the inclined surface and the horizontal plane is 3 - 5°. And the width of the slot opening of the card slot (4) is greater than the width of its bottom. The depth of the card slot (4) is 1 / 5 - 1 / 3 of the longest dimension in the cross-section of the groove rod (3). The thickness of the end of the slot tooth (5) is d, and the width of the slot opening of the card slot (4) is D, and d = (0.5 - 0.8)D is satisfied.

2. The silicon carbide susceptor according to claim 1, wherein: The cross-section of the groove rod (3) is a water droplet shape or a circular shape.

3. The silicon carbide boat according to claim 2, wherein: There are four groove rods (3), which are respectively fixedly connected to the four corners of the end plates A (1) and end plates B (2). The groove rods (3) at the same horizontal height are oppositely arranged.

4. The silicon carbide boat according to claim 3, wherein: The two ends of the grab ear (6) are respectively fixedly connected to two adjacent groove rods (3).

5. The silicon carbide boat according to claim 4, characterized in that: On one side of the end plate B (2) opposite to the end plate A (1), there is a groove (7).

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