Short foil support of sputter coating machine

Abstract

The utility model provides a sputter coating machine's short foil support, including the support body, be equipped with at least three short foil support rod above one side of the support body, be equipped with the support screw above the short foil support rod, the top of support screw is detachably connected with the vacuum chamber that is to be connected, and the support body is equipped with the support screw. The stability of the vacuum cavity is guaranteed through the at least three short-mooring supporting rods, kidney-shaped grooves are formed in the tops of the short-mooring supporting rods, supporting screws are arranged in the kidney-shaped grooves, the supporting screws are detachably connected with the kidney-shaped grooves through adjusting pieces, and the supporting screws can slide or ascend and descend in the kidney-shaped grooves by adjusting the adjusting pieces. The support body is arranged on the base to be matched with to-be-connected vacuum cavities of different specifications and different heights, the pulleys are arranged below the bottom of the support body and used for transporting the to-be-connected vacuum cavities to the main cavity, a power distribution system, the vacuum cavities to be connected with the main cavity and loops of a water path and an air path can be integrated on the support body, transportation is convenient, and cost is low. And the main cavity is convenient to replace and transport the vacuum cavity with different requirements.

Description

Technical Field

[0001] The utility model relates to the technical field of sputtering coating, and more specifically, to a short-berth bracket of a sputtering coater. Background Art

[0002] Magnetron sputtering is a kind of physical vapor deposition. General sputtering methods can be used to prepare various materials such as metals, semiconductors, and insulators, and have the advantages of simple equipment, easy control, large coating area, and strong adhesion. The magnetron sputtering method developed in the 1970s has achieved high speed, low temperature, and low damage. Because high-speed sputtering is carried out under low pressure, it is necessary to effectively increase the ionization rate of gas. Magnetron sputtering introduces a magnetic field on the surface of the target cathode, and uses the constraint of the magnetic field on charged particles to increase the plasma density to increase the sputtering rate.

[0003] With the continuous improvement of the performance of thin-film devices, the line width is getting smaller and smaller, and the requirements for magnetron sputtered film layers are also getting higher and higher. Especially in the manufacturing process of large-scale integrated circuit chips, higher requirements are also put forward for process vacuum and the number of process film layers.

[0004] The invention patent with the publication number of CN 112779510 B discloses a magnetron sputtering coating device, which realizes the lifting of the cavity by connecting the lifting drive mechanism with the double-layer rack of the transition cavity. However, the connection between the lifting drive mechanism and the cavity is not stable, and it is not convenient to replace and transport the cavity. The wiring configured between the cavities is also exposed outside, which is prone to safety hazards.

[0005] Therefore, it is necessary to provide a short-berth bracket for a sputtering coater, which is convenient for transporting the cavity, has a stable connection, and has good integration and safety. Content of the Utility Model

[0006] In view of this, in order to solve the above problems, the utility model provides a short-berth bracket for a sputtering coater, which includes a bracket body 1. At least three short-berth support rods 2 are arranged above one side of the bracket body 1. A support screw 3 is arranged above the short-berth support rods 2. The top of the support screw 3 is detachably connected to the vacuum cavity to be connected. At least three short-berth support rods 2 ensure the stability of connecting the vacuum cavity. A waist-shaped groove 21 is arranged at the top of the short-berth support rod 2. The support screw 3 is arranged in the waist-shaped groove 21. The support screw 3 is detachably connected to the waist-shaped groove 21 through an adjusting member 22. By adjusting the adjusting member 22, the support screw 3 can slide or lift in the waist-shaped groove 21 to adapt to vacuum cavities to be connected with different specifications and different heights. A pulley 6 is arranged below the bottom of the bracket body 1 for transporting the vacuum cavity to be connected to the main cavity. The bracket body 1 can integrate a power distribution system, a vacuum cavity to be connected to the main cavity, and a loop of a water circuit and an air circuit, and is convenient for transportation, and is convenient for replacing the vacuum cavity with different transportation requirements for the main cavity.

[0007] A short-berth bracket for a sputtering coating machine, comprising a bracket body 1, characterized in that: at least three short-berth support rods 2 are provided above one side of the bracket body 1, a support screw 3 is provided above the short-berth support rods 2, and the top of the support screw 3 is detachably connected to the vacuum chamber to be connected. At least three short-berth support rods 2 ensure the stability of connecting the vacuum chamber. A waist-shaped groove 21 is provided at the top of the short-berth support rod 2, and the support screw 3 is arranged in the waist-shaped groove 21. The support screw 3 is detachably connected to the waist-shaped groove 21 through an adjusting member 22. By adjusting the adjusting member 22, the support screw 3 can slide or lift in the waist-shaped groove 21 to adapt to vacuum chambers to be connected with different specifications and different heights; a pulley 6 is provided below the bottom of the bracket body 1 for transporting the vacuum chamber to be connected to the main chamber.

[0008] Further, the top of the support screw 3 is connected to the vacuum chamber through an adapter block 4. A connecting column 31 extends upward from the top of the support screw 3. The adapter block 4 is provided with a first connection hole 41 and a second connection hole 42. The first connection hole 41 is threadedly connected to the connecting column 31, and the second connection hole 42 is detachably connected to the bottom of the vacuum chamber to be connected.

[0009] Further, a reinforcing rod 23 is provided between at least two of the short-berth support rods 2 for increasing the stability of the short-berth support rods 2 and preventing shaking.

[0010] Further, a reinforcing rib 24 is provided at the connection between the short-berth support rod 2 and the bracket body 1. The reinforcing rib 24 is triangular for strengthening the stability of the short-berth support rod 2.

[0011] Further, a plurality of sealing plate structures 5 are provided outside the bracket body 1. A bottom plate 11 is provided at the bottom of the bracket body 1 close to the short-berth support rod 2. The sealing plate structure 5 and the bottom plate 11 form a receiving cavity for accommodating the loop of the water path or the gas path. The sealing plate structure 5 functions to prevent dust.

[0012] Further, the sealing plate structure 5 includes an upper sealing plate 51 and a side sealing plate 53. A first opening 52 is provided on the upper sealing plate 51, and a second opening 54 is provided on the side sealing plate 53 for introducing the wiring of the upper vacuum chamber into the receiving cavity from the first opening 52 and leading out the wiring from the second opening 54 to be connected to the main chamber equipment.

[0013] Further, a shock-absorbing gasket 61 is provided at the bottom of the bracket body 1, and the pulley 6 is arranged below the shock-absorbing gasket 61, so that the short-berth bracket slides smoothly when transporting the vacuum chamber.

[0014] Further, above one side of the bracket body 1 away from the short-berth support rod 2, there is a transfer switch cabinet 7, and a power distribution system is arranged inside the transfer switch cabinet 7 for supplying power to the equipment.

[0015] Further, one side of the transfer switch cabinet 7 is provided with a safety lock for locking the transfer switch cabinet 7 to ensure the safety of the power distribution system.

[0016] The beneficial effects of the present utility model: The present utility model provides a short-berth bracket for a sputtering coating machine, including a bracket body 1. Above one side of the bracket body 1, there are at least three short-berth support rods 2. Above the short-berth support rods 2, there is a support screw rod 3. The top of the support screw rod 3 is detachably connected to the vacuum chamber to be connected. At least three short-berth support rods 2 ensure the stability of connecting the vacuum chamber. The top of the short-berth support rod 2 is provided with a waist-shaped groove 21. Inside the waist-shaped groove 21, there is a support screw rod 3. The support screw rod 3 is detachably connected to the waist-shaped groove 21 through an adjusting member 22. By adjusting the adjusting member 22, the support screw rod 3 can slide or lift inside the waist-shaped groove 21 to adapt to vacuum chambers to be connected with different specifications and different heights. Below the bottom of the bracket body 1, there are pulleys 6 for transporting the vacuum chamber to be connected to the main chamber. The bracket body 1 can integrate a power distribution system, a vacuum chamber to be connected to the main chamber, and a loop of a waterway and an air path, and is convenient for transportation, facilitating the replacement of the vacuum chamber with different transportation requirements for the main chamber. Description of the Drawings

[0017] Figure 1 It is the overall structure diagram of the short-berth bracket of the sputtering coating machine of the present utility model.

[0018] Figure 2 It is the structure diagram of the bracket body of the short-berth bracket of the sputtering coating machine of the present utility model.

[0019] Figure 3 It is the connection diagram of the short-berth support rod and the support screw rod of the short-berth bracket of the sputtering coating machine of the present utility model.

[0020] Description of the Main Component Symbols

[0021] Bracket body 1, bottom plate 11, short-berth support rod 2, waist-shaped groove 21, adjusting member 22, strengthening rod 23, strengthening rib 24, support screw rod 3, connecting column 31, adapter block 4, first connection hole 41, second connection hole 42, sealing plate structure 5, upper sealing plate 51, first opening 52, side sealing plate 53, second opening 54, pulley 6, shock-absorbing gasket 61, transfer switch cabinet 7.

[0022] The following specific embodiments will further illustrate the present utility model in conjunction with the above-mentioned drawings. Specific Embodiments

[0023] As Figure 1As shown in the figure, it is the overall structure diagram of the short-berth bracket of the sputtering coating machine of the present utility model; as Figure 2 As shown in the figure, it is the structure diagram of the bracket body of the short-berth bracket of the sputtering coating machine of the present utility model; as Figure 3 As shown in the figure, it is the connection diagram of the short-berth support rod and the support screw of the short-berth bracket of the sputtering coating machine of the present utility model. Embodiment 1:

[0024] A short-berth bracket of a sputtering coating machine, including a bracket body 1, characterized in that: at least three short-berth support rods 2 are arranged above one side of the bracket body 1, a support screw 3 is arranged above the short-berth support rods 2, the top of the support screw 3 is detachably connected to the vacuum chamber to be connected, and at least three short-berth support rods 2 ensure the stability of connecting the vacuum chamber. A waist-shaped groove 21 is arranged at the top of the short-berth support rod 2, and the support screw 3 is arranged in the waist-shaped groove 21. The support screw 3 is detachably connected to the waist-shaped groove 21 through an adjusting member 22. By adjusting the adjusting member 22, the support screw 3 can slide or lift in the waist-shaped groove 21 to adapt to vacuum chambers to be connected with different specifications and different heights; a pulley 6 is arranged below the bottom of the bracket body 1 for transporting the vacuum chamber to be connected to the main chamber.

[0025] The top of the support screw 3 is connected to the vacuum chamber through an adapter block 4. A connecting column 31 extends upward from the top of the support screw 3. The adapter block 4 is provided with a first connection hole 41 and a second connection hole 42. The first connection hole 41 is threadedly connected to the connecting column 31, and the second connection hole 42 is detachably connected to the bottom of the vacuum chamber to be connected.

[0026] At least two reinforcing rods 23 are arranged between the short-berth support rods 2 to increase the stability of the short-berth support rods 2 and prevent shaking.

[0027] A reinforcing rib 24 is arranged at the connection between the short-berth support rod 2 and the bracket body 1. The reinforcing rib 24 is triangular to strengthen the stability of the short-berth support rod 2.

[0028] A plurality of seal plate structures 5 are arranged outside the bracket body 1. A bottom plate 11 is arranged at the bottom of the bracket body 1 close to the short-berth support rod 2. The seal plate structure 5 and the bottom plate 11 form a receiving cavity for accommodating the loop of the water circuit or the gas circuit. The seal plate structure 5 plays a role in dust prevention.

[0029] The seal plate structure 5 includes an upper seal plate 51 and a side seal plate 53. A first opening 52 is arranged on the upper seal plate 51, and a second opening 54 is arranged on the side seal plate 53 for introducing the wiring of the upper vacuum chamber into the receiving cavity from the first opening 52 and leading out the wiring from the second opening 54 to be connected to the main chamber equipment.

[0030] A shock-absorbing gasket 61 is provided at the bottom of the support body 1, and the pulley 6 is arranged below the shock-absorbing gasket 61, so that the short-berth support transports the vacuum chamber smoothly.

[0031] Above one side of the support body 1 away from the short-berth support rod 2, a transfer switchboard 7 is provided. A power distribution system is arranged in the transfer switchboard 7 for supplying power to the equipment.

[0032] A safety lock is provided on one side of the transfer switchboard 7 for locking the transfer switchboard 7 to ensure the safety of the power distribution system.

[0033] The beneficial effects of the present utility model: The present utility model provides a short-berth support for a sputtering coating machine, which includes a support body 1. Above one side of the support body 1, at least three short-berth support rods 2 are provided. Above the short-berth support rods 2, a support screw 3 is provided. The top of the support screw 3 is detachably connected to the vacuum chamber to be connected. At least three short-berth support rods 2 ensure the stability of connecting the vacuum chamber. A waist-shaped groove 21 is provided at the top of the short-berth support rod 2. The support screw 3 is arranged in the waist-shaped groove 21. The support screw 3 is detachably connected to the waist-shaped groove 21 through an adjusting member 22. By adjusting the adjusting member 22, the support screw 3 can slide or lift in the waist-shaped groove 21 to adapt to vacuum chambers to be connected with different specifications and different heights. Below the bottom of the support body 1, a pulley 6 is provided for transporting the vacuum chamber to be connected to the main chamber. A power distribution system, a vacuum chamber to be connected to the main chamber, and a loop of a waterway and an air path can be integrated on the support body 1, and the transportation is convenient, which is convenient for replacing the vacuum chamber with different transportation requirements for the main chamber.

[0034] The above embodiments only represent several implementation manners of the present utility model, and the description thereof is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several deformations and improvements can still be made, and these all belong to the protection scope of the present utility model. Therefore, the protection scope of the patent of the present utility model should be subject to the appended claims.

Claims

1. A short-berth bracket for a sputtering coating machine, comprising a bracket body (1), characterized in that: Above one side of the bracket body (1), there are provided at least three short-berth support rods (2). Above the short-berth support rods (2), there is a support screw rod (3). The top of the support screw rod (3) is detachably connected to the vacuum chamber to be connected. At the top of the short-berth support rod (2), there is a waist-shaped groove (21). The support screw rod (3) is arranged in the waist-shaped groove (21). The support screw rod (3) is detachably connected to the waist-shaped groove (21) through an adjusting member (22). By adjusting the adjusting member (22), the support screw rod (3) can slide or lift in the waist-shaped groove (21). Below the bottom of the bracket body (1), there are pulleys (6).

2. The short parking bracket of the sputtering coating machine according to claim 1, characterized in that: The top of the support screw rod (3) is connected to the vacuum chamber through an adapter block (4). The top of the support screw rod (3) extends upward with a connecting column (31). On the adapter block (4), there are a first connection hole (41) and a second connection hole (42). The first connection hole (41) is threadedly connected to the connecting column (31). The second connection hole (42) is detachably connected to the bottom of the vacuum chamber to be connected.

3. The short-berth bracket of the sputtering coating machine according to claim 1, characterized in that: Between at least two of the short-berth support rods (2), there is a reinforcing rod (23).

4. The short parking bracket of the sputtering coating machine according to claim 1, characterized in that: At the connection of the short-berth support rod (2) and the bracket body (1), there is a reinforcing rib (24).

5. The short parking bracket of the sputtering coating machine according to claim 1, characterized in that: Outside the bracket body (1), there are several seal plate structures (5). At the bottom of the bracket body (1) near the short-berth support rod (2), there is a bottom plate (11). The seal plate structure (5) and the bottom plate (11) form a receiving cavity.

6. The short parking bracket of the sputtering coating machine according to claim 5, characterized in that: The seal plate structure (5) includes an upper seal plate (51) and a side seal plate (53). On the upper seal plate (51), there is a first opening (52). On the side seal plate (53), there is a second opening (54).

7. The short parking bracket of the sputtering coating machine according to claim 1, characterized in that: At the bottom of the bracket body (1), there is a shock-absorbing gasket (61). The pulley (6) is arranged below the shock-absorbing gasket (61).

8. The short parking bracket of the sputtering coating machine according to claim 1, characterized in that: Above one side of the bracket body (1) away from the short-berth support rod (2), there is a transfer electrical box (7). Inside the transfer electrical box (7), there is a power distribution system.

9. The short parking bracket of the sputtering coating machine according to claim 8, characterized in that: On one side of the transfer electrical box (7), there is a safety lock.

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