Automatic sheet feeding platform
By designing an automatic sheet feeding platform, using the combination of a base, conveying line and regular devices, the problem of high efficiency of transfer robots and manual loading and unloading in the semiconductor coating process is solved, and the automatic positioning and conveying of the substrate is realized, reducing production costs and improving efficiency.
Patent Information
- Application Number
- CN202422201506.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-09
- Publication Date
- 2025-07-22
- Estimated Expiration
- 2034-09-09
AI Technical Summary
In the prior art, in the automated production of semiconductor coating processes, there are problems such as high cost and low efficiency of transfer robots and manual loading and unloading.
An automatic sheet feeding platform is designed, including a base, a conveying line, a limiting block, a sensor and a regular device. The limiting block guides the substrate movement, and the inductor detects and stops the conveying line. The moving block of the regular device pushes the substrate to a preset position under the drive of the cylinder, realizing automatic conveying and positioning, reducing costs and improving efficiency.
It realizes automatic positioning and conveying of substrates, reduces production costs, improves production efficiency, and is an automatic chip delivery platform suitable for semiconductor production.
Smart Images
Figure CN223133093U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor production, and particularly relates to an automatic wafer feeding platform. Background Art
[0002] With the application of thin film materials and the development of vacuum coating equipment, the automation of semiconductor coating processes is getting higher and higher. Most production processes have achieved automated production. When a coated product completes one process, the product is conveyed to the next process node through a conveyor line. At this time, there needs to be a transfer connection between the equipment. After the product is conveyed through the conveyor line, it needs to be delivered to a specified position to ensure that the equipment manipulator can pick up the wafer normally. However, currently, a transfer manipulator is used to place the workpiece at the loading and unloading position, or manual placement is used, which is costly and inefficient. Summary of the Utility Model
[0003] The utility model aims to at least solve one of the technical problems existing in the prior art. For this purpose, the utility model provides an automatic wafer feeding platform, which can improve the conveying efficiency and effectively control the cost.
[0004] An automatic wafer feeding platform according to an embodiment of the utility model includes:
[0005] A base platform is provided with a conveyor line. Along the conveying direction of the conveyor line, the base platform is provided with a conveying section and a positioning section. In the conveying section, limiting blocks are arranged on both sides of the conveyor line, and a channel for guiding the movement of the wafer is defined between the limiting blocks on both sides. An inductor is arranged in the positioning section. When the wafer moves into the positioning section, the inductor can detect the wafer, and the conveyor line can stop moving, so that the wafer moves to a preset area. In the positioning section, a rectifying device is provided. The rectifying device includes a moving block installed outside the conveyor line. The moving block can push the wafer to a preset position under the drive of a cylinder.
[0006] An automatic wafer feeding platform according to an embodiment of the utility model has at least the following beneficial effects: In this embodiment, a base platform is provided, and the base platform is provided with a conveyor line. Along the conveying direction of the conveyor line, the base platform is provided with a conveying section and a positioning section. In the conveying section, limiting blocks are arranged on both sides of the conveyor line, and a channel for guiding the movement of the wafer is defined between the limiting blocks on both sides. An inductor is arranged in the positioning section. When the wafer moves into the positioning section, the inductor can detect the wafer, and the conveyor line can stop moving, so that the wafer moves to a preset area. In the positioning section, a rectifying device is provided. The rectifying device includes a moving block installed outside the conveyor line. The moving block can push the wafer to a preset position under the drive of a cylinder, thereby realizing the automatic conveying and positioning functions of the wafer. The loading robot can directly pick up the wafer at the preset position for loading and unloading, which helps to improve the production efficiency while controlling the cost.
[0007] According to some embodiments of the present utility model, a first sensor and a second sensor are respectively provided in the conveying section and the positioning section. The first sensor is located at one end of the conveying section away from the positioning section, and the second sensor is located at one end of the positioning section away from the conveying section. When the first sensor detects the substrate, the conveying line starts and accelerates to a preset speed to drive the substrate to move towards the positioning section.
[0008] According to some embodiments of the present utility model, a plurality of pressing wheels are provided on the moving block. The pressing wheels are rotatably connected to the moving block, and when the moving block moves towards the substrate, the side wall of the substrate can be pressed by the pressing wheels.
[0009] According to some embodiments of the present utility model, at least two moving blocks arranged at intervals along the conveying direction are provided on both sides of the positioning section.
[0010] According to some embodiments of the present utility model, the moving blocks on both sides of the positioning section can simultaneously extend out and press the two side walls of the substrate.
[0011] According to some embodiments of the present utility model, along the width direction of the base, three conveying lines are provided, and the distance between adjacent two conveying lines is the same.
[0012] According to some embodiments of the present utility model, a stop block is provided at the end of the positioning section away from the conveying section, and the stop block can prevent the substrate from falling out of the positioning section.
[0013] According to some embodiments of the present utility model, a third sensor is further provided on the base. The third sensor is arranged on one side of the stop block. When the third sensor detects the substrate, the conveying line can decelerate and stop, so that the substrate moves to a preset area.
[0014] According to some embodiments of the present utility model, the conveying line includes a bracket, a pulley and a conveyor belt. The pulley is rotatably connected to both ends of the bracket, and the conveyor belt moves on the bracket by winding around the pulley.
[0015] According to some embodiments of the present utility model, a guiding member is provided on the bracket. The guiding member is provided with a limiting groove, and the conveyor belt moves in the limiting groove. The inner side wall of the limiting groove can limit the swing of the conveyor belt along the width direction of the base.
[0016] The additional aspects and advantages of the present utility model will be partly given in the following description, partly will become obvious from the following description, or be understood through the practice of the present utility model. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The following further describes the present utility model in conjunction with the drawings and embodiments, wherein:
[0018] Figure 1 is an axonometric view of an automatic wafer feeding platform in an embodiment of the present utility model;
[0019] Figure 2 This is a top view of an automatic film feeding platform in an embodiment of the present utility model;
[0020] Figure 3 It is Figure 1 an enlarged view of A in
[0021] Figure 4 This is a cross-sectional view of an automatic film feeding platform in an embodiment of the present utility model;
[0022] Figure 5 It is Figure 4 an enlarged view of B in
[0023] Reference numerals:
[0024] Base 100; conveyor line 101; bracket 1011; conveyor belt 1012; guide 1013; limit groove 1014; transmission shaft 102; conveying section 103; positioning section 104; first sensor 105; second sensor 106; limit block 107; stop block 108; pulley 109;
[0025] Rectifying device 110; cylinder 111; moving block 112; pressing wheel 113; third sensor 114; driving motor 115. Detailed implementation manners
[0026] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the drawings, in which the same or similar reference numerals indicate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation to the present utility model.
[0027] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by terms such as up, down, front, back, left, right, etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model.
[0028] In the description of the present utility model, the meaning of several is one or more, the meaning of multiple is two or more, greater than, less than, exceeding, etc. are understood as not including the original number, and above, below, within, etc. are understood as including the original number. If there is a description of first and second, it is only for the purpose of distinguishing technical features and should not be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.
[0029] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.
[0030] Reference Figure 1 and Figure 2 In an embodiment of the utility model, an automatic film feeding platform includes a base 100, and the base 100 is provided with a conveying line 101. Along the conveying direction of the conveying line 101, the base 100 is provided with a conveying section 103 and a positioning section 104. In the conveying section 103, limit blocks 107 are provided on both sides of the conveying line 101, and a channel for guiding the movement of the substrate is defined between the limit blocks 107 on both sides. It can be understood that the channel extends from the conveying section 103 to the positioning section 104, and the limit blocks 107 can guide the movement of the substrate to prevent the substrate from rotating or deviating. In the positioning section 104, a tidying device 110 is provided, and the tidying device 110 includes a moving block 112 installed on the outside of the conveying line 101. The moving block 112 can push the substrate to a preset position under the drive of the cylinder 111, thereby realizing the automatic conveying and positioning function of the substrate. The loading robot can directly pick up the substrate at the preset position for loading and unloading, which helps to improve production efficiency while controlling costs.
[0031] It is understandable that at least two conveying lines 101 located on both sides of the substrate are provided on the base 100, and the stopper 107 is located on the outer side of the conveying line 101 away from the substrate. In other embodiments, three conveying lines 101 are provided along the width direction of the base 100, and the spacing between two adjacent conveying lines 101 is the same, which can support both sides and the middle of the substrate, and is conducive to the stable conveyance of the substrate.
[0032] Reference Figure 3, a plurality of pressing wheels 113 are provided on the moving block 112, and the pressing wheels 113 are rotatably connected to the moving block 112. When the moving block 112 moves toward the substrate, the pressing wheels 113 can press against the side wall of the substrate. At least two moving blocks 112 are arranged at intervals along the conveying direction on both sides of the positioning section 104. In this embodiment, three pressing wheels 113 are provided. It can be understood that the substrate moves under the drive of the conveyor line 101, and when the substrate approaches the preset material-collecting position, it is still moving. At this time, the moving block 112 pushes the substrate under the drive of the cylinder 111, so that the pressing wheels 113 press against the outer side wall of the substrate to achieve the positioning of the substrate. The pressing wheels 113 can roll on the outer side wall of the substrate, thereby avoiding friction between the substrate and the moving block 112 when the substrate moves. In other embodiments, when the substrate is completely stopped, the moving block 112 can be pushed out and clamped on the two side walls of the substrate to achieve the positioning of the substrate. Furthermore, a stop block 108 is provided at the end of the positioning section 104 away from the conveying section 103, and the stop block 108 can prevent the substrate from escaping from the positioning section 104. There are at least two stop blocks 108, and the two stop blocks 108 are located on both sides of the conveying line 101 in the middle of the base 100, which can stably block the substrate.
[0033] It is understandable that the moving blocks 112 on both sides of the positioning section 104 can extend and press against the two side walls of the substrate at the same time to center the substrate; in other embodiments, in the process of positioning the substrate, the moving block 112 on either side of the conveyor line 101 is extended in advance under the push of the cylinder 111, and the moving block 112 on the other side of the conveyor line 101 extends and pushes the substrate, so that both sides of the substrate press against the pressure wheels 113 of the moving blocks 112 on both sides at the same time, thereby achieving the positioning of the substrate. In more embodiments, a fixed block can be provided on either side of the conveyor line 101, and a moving block 112 is provided on the other side. When the moving block 112 is extended, it can push the substrate through the pressure wheel 113, so that the other side of the substrate presses against the fixed block, thereby achieving the positioning of the substrate.
[0034] It can be understood that sensors are provided inside the positioning section 104, and the sensors can detect the substrate when the substrate moves into the positioning section 104. Specifically, a first sensor 105 and a second sensor 106 are respectively provided in the conveying section 103 and the positioning section 104. The first sensor 105 is located at one end of the conveying section 103 away from the positioning section 104, and the second sensor 106 is located at one end of the positioning section 104 away from the conveying section 103. Since the substrate is conveyed from the upstream device to the base 100 through this conveyor belt, when the substrate moves onto the base 100 and the first sensor 105 detects the substrate, the conveying line 101 starts and accelerates to a preset speed to drive the substrate to move towards the positioning section 104; when the substrate moves to the end of the positioning section 104, the second sensor 106 detects the substrate, and the conveying line 101 starts to decelerate; at the same time, a third sensor 114 is also provided on the base 100, and the third sensor 114 is arranged on one side of the stop block 108. When the substrate moves into the positioning section 104 and the third sensor 114 can detect the substrate, the conveying line 101 can stop, so that the substrate moves to a preset area, realizing the positioning of the substrate along the length direction of the base 100.
[0035] Referring to Figure 4 and Figure 5 , the conveying line 101 includes a bracket 1011, a pulley 109 and a conveyor belt 1012. The bracket 1011 is fixed to the base 100, the pulley 109 is rotatably connected to both ends of the bracket 1011, and the conveyor belt 1012 moves on the bracket 1011 by winding around the pulley 109. Further, a guide member 1013 is provided on the bracket 1011, the guide member 1013 is provided with a limiting groove 1014, the conveyor belt 1012 moves in the limiting groove 1014, and the inner side wall of the limiting groove 1014 can limit the swing of the conveyor belt 1012 along the width direction of the base 100, thereby ensuring the stable conveyance of the substrate. Further, a transmission shaft 102 is provided at the end of the bracket 1011 away from the positioning section 104. The transmission shaft 102 passes through one end of the bracket 1011. The transmission shaft 102 is simultaneously connected to two adjacent conveying lines 101, and the transmission shaft 102 is connected to a driving motor 115. The driving motor 115 can drive the three conveying lines 101 to rotate synchronously by driving the transmission shaft 102, so as to realize a stable conveying function.
[0036] The above has described the embodiments of the present invention in detail with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the knowledge scope of those of ordinary skill in the art to which the present invention pertains, various changes can be made without departing from the gist of the present invention.
Claims
1. An automatic film feeding platform, characterized in that, Including: A base station is provided with a conveyor line. Along the conveying direction of the conveyor line, the base station is provided with a conveying section and a positioning section. In the conveying section, limiting blocks are arranged on both sides of the conveyor line, and a channel for guiding the movement of the substrate is defined between the limiting blocks on both sides. An inductor is arranged in the positioning section, and when the substrate moves into the positioning section, the inductor can detect the substrate. The conveyor line can stop moving to enable the substrate to move to a preset area. In the positioning section, a rectifying device is provided, and the rectifying device includes a moving block installed outside the conveyor line. The moving block can be driven by a cylinder to push the substrate to a preset position.
2. The automatic film feeding platform according to claim 1, wherein, A first sensor and a second sensor are respectively arranged in the conveying section and the positioning section. The first sensor is located at one end of the conveying section away from the positioning section, and the second sensor is located at one end of the positioning section away from the conveying section. When the first sensor detects the substrate, the conveyor line starts and accelerates to a preset speed to drive the substrate to move towards the positioning section.
3. The automatic film feeding platform according to claim 1, wherein A plurality of pressing wheels are arranged on the moving block, and the pressing wheels are rotatably connected to the moving block. When the moving block moves towards the substrate, the pressing wheels can press against the side wall of the substrate.
4. An automatic film feeding platform according to claim 1, characterized in that, At least two moving blocks arranged at intervals along the conveying direction are provided on both sides of the positioning section.
5. An automatic film feeding platform according to claim 4, characterized in that The moving blocks on both sides of the positioning section can extend out simultaneously and press against both side walls of the substrate.
6. The automatic film feeding platform according to claim 1, characterized in that Along the width direction of the base station, three conveyor lines are arranged, and the spacing between adjacent two conveyor lines is the same.
7. The automatic film feeding platform according to claim 1, characterized in that A stop block is arranged at the end of the positioning section away from the conveying section, and the stop block can prevent the substrate from protruding out of the positioning section.
8. An automatic film feeding platform according to claim 7, characterized in that, A third sensor is further arranged on the base station, and the third sensor is arranged on one side of the stop block. When the third sensor detects the substrate, the conveyor line can decelerate and stop to enable the substrate to move to a preset area.
9. The automatic film feeding platform according to claim 1, characterized in that The conveyor line includes a bracket, a pulley, and a conveyor belt. The pulley is rotatably connected to both ends of the bracket, and the conveyor belt moves on the bracket by winding around the pulley.
10. The automatic film feeding platform according to claim 9, characterized in that, A guiding member is arranged on the bracket, and the guiding member is provided with a limiting groove. The conveyor belt moves in the limiting groove, and the inner side wall of the limiting groove can limit the swinging of the conveyor belt along the width direction of the base station.