Detection mechanism for workpiece umbrella tray of coating machine

Abstract

The utility model discloses a film plating machine workpiece umbrella tray detection mechanism which comprises a film plating machine chamber top cover, the inner wall of the top of the film plating machine chamber top cover is movably connected with a workpiece umbrella tray, the surface of the film plating machine chamber top cover is provided with a double-shaft driving motor, the surface of the film plating machine chamber top cover is provided with magnetic fluid, and the surface of the film plating machine chamber top cover is provided with a workpiece umbrella tray. An output shaft of the magnetic fluid extends into the top cover of the coating machine chamber and is fixed with the workpiece umbrella tray, and a transmission assembly is arranged on the outer wall of the top of the top cover of the coating machine chamber. Rotation detection of a workpiece umbrella tray in a vacuum environment can be transferred to detection in an atmospheric environment, in the atmospheric environment, a feedback signal of rotation of a large gear of the encoder is received through the rotary encoder, and vacuum magnetic induction detection in the coating machine is converted into atmospheric environment multi-point detection outside the equipment; multiple positions of the workpiece umbrella tray are monitored, the encoder is not affected by the working environment, feedback signals are accurate, and the positioning precision is high.

Description

Technical Field

[0001] The utility model relates to the technical field of coating machines, in particular to a detection mechanism for a workpiece umbrella disc of a coating machine. Background Technique

[0002] The working principle of an evaporation coating machine is to heat a material to a high temperature to evaporate it into a gaseous state, and then deposit it on the surface of a substrate in a vacuum environment to form a metal thin film. Specifically, this process is usually carried out in a highly vacuum chamber where the air is pumped out to reduce the interference of external factors. Generally, a substrate is carried by an umbrella disc, and the substrate is evenly coated by the rotation of the umbrella disc. In order to ensure the coating quality, it is necessary to detect the substrate on the umbrella disc in real time.

[0003] At present, the existing method for detecting the position of a workpiece umbrella disc is to use magnetic induction detection in a vacuum chamber, and this detection method has two disadvantages:

[0004] 1. The magnetic induction detection device can only perform single-point detection and cannot achieve full-circle positioning detection;

[0005] 2. Due to the working environment of high vacuum, high temperature, and strong magnetic field, the magnetic induction device will generate false signals, reducing the positioning accuracy;

[0006] Therefore, those skilled in the art provide a detection mechanism for a workpiece umbrella disc of a coating machine to solve the problems raised in the above background technique. Content of the Utility Model

[0007] The purpose of the utility model is to solve the disadvantages existing in the prior art, and a detection mechanism for a workpiece umbrella disc of a coating machine is proposed.

[0008] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0009] A detection mechanism for a workpiece umbrella disc of a coating machine includes a top cover of a coating machine chamber. The inner wall of the top of the top cover of the coating machine chamber is movably connected with a workpiece umbrella disc. A double-axis drive motor is installed on the surface of the top cover of the coating machine chamber. A magnetorheological fluid is installed on the surface of the top cover of the coating machine chamber. The output shaft of the magnetorheological fluid extends into the interior of the top cover of the coating machine chamber and is fixed to the workpiece umbrella disc. A transmission component is arranged on the outer wall of the top of the top cover of the coating machine chamber for converting the rotational movement of the workpiece umbrella disc inside the top cover of the coating machine chamber into rotational movement in the atmospheric environment. A detection component for monitoring the transmission component is arranged on the top cover of the coating machine chamber.

[0010] As a further solution of the present utility model, the transmission assembly includes an encoder pinion and an encoder gear. The encoder pinion is fixedly connected to the top end of the dual-axis drive motor. A bearing seat is fixedly connected to the surface of the top cover of the coating machine chamber. A deep groove ball bearing is installed on the top of the bearing seat. The encoder gear is installed in the deep groove ball bearing, and the encoder gear meshes with the encoder pinion.

[0011] As a further solution of the present utility model, the input shaft of the magnetic fluid is connected to the bottom end of the dual-axis drive motor.

[0012] As a further solution of the present utility model, the detection assembly is a rotary encoder. An encoder bracket is installed inside the bearing seat. The rotary encoder is installed on the encoder bracket, and the rotary encoder is connected to the encoder gear.

[0013] As a further solution of the present utility model, a gland is installed on the top of the bearing seat, and the encoder gear passes through the gland.

[0014] The beneficial effects of the present utility model are as follows:

[0015] By the combined use of the encoder gear and the encoder pinion, the detection of the rotation of the workpiece umbrella disk in the vacuum environment is transferred to the detection in the atmospheric environment. In the atmospheric environment, the rotary encoder receives the feedback signal of the rotation of the encoder gear, converting the internal vacuum magnetic induction detection of the coating machine into the multi-point detection in the external atmospheric environment of the equipment, realizing the monitoring of multiple positions of the workpiece umbrella disk. The encoder is not affected by the working environment, the feedback signal is accurate, the positioning accuracy is high, and it avoids the situation that in the coating machine chamber with high vacuum, high temperature and strong magnetic field, the magnetic induction device will generate wrong signals and reduce the positioning accuracy. Description of the Drawings

[0016] Figure 1 is a three-dimensional structural schematic diagram of a detection mechanism for a workpiece umbrella disk of a coating machine proposed by the present utility model;

[0017] Figure 2 is a cross-sectional structural schematic diagram of a detection mechanism for a workpiece umbrella disk of a coating machine proposed by the present utility model;

[0018] Figure 3 is a cross-sectional structural schematic diagram of the bearing seat of a detection mechanism for a workpiece umbrella disk of a coating machine proposed by the present utility model;

[0019] Figure 4 is a partial top-view structural schematic diagram of a detection mechanism for a workpiece umbrella disk of a coating machine proposed by the present utility model.

[0020] In the figure: 1. Encoder pinion; 2. Top cover of the coating machine chamber; 3. Bearing housing; 4. Encoder gear; 5. Gland; 6. Encoder bracket; 7. Magnetic fluid; 8. Rotary encoder; 9. Deep groove ball bearing; 10. Biaxial drive motor; 11. Workpiece umbrella disk. Specific embodiments

[0021] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. It should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "setting" should be understood in a broad sense. For those of ordinary skill in the art, the specific meanings of the above terms in this patent can be understood according to specific situations.

[0022] Refer to Figures 1-4 , a detection mechanism for a workpiece umbrella disk of a coating machine, including a top cover 2 of the coating machine chamber. The inner wall of the top of the top cover 2 of the coating machine chamber is rotatably connected to a workpiece umbrella disk 11. A biaxial drive motor 10 is installed on the surface of the top cover 2 of the coating machine chamber. A magnetic fluid 7 is installed on the surface of the top cover 2 of the coating machine chamber. The output shaft of the magnetic fluid 7 extends into the interior of the top cover 2 of the coating machine chamber and is fixed to the workpiece umbrella disk 11. The magnetic fluid 7 can seal the coating machine chamber and transmit the rotational movement of the biaxial drive motor 10 into the sealed coating machine chamber. When the biaxial drive motor 10 works, it can drive the workpiece umbrella disk 11 to rotate through the magnetic fluid 7. The input shaft of the magnetic fluid 7 is connected to the bottom end of the biaxial drive motor 10. A transmission assembly is provided on the outer wall of the top of the top cover 2 of the coating machine chamber for converting the rotational movement of the workpiece umbrella disk 11 inside the top cover 2 of the coating machine chamber into a rotational movement in the atmospheric environment. A detection assembly for monitoring the transmission assembly is provided on the top cover 2 of the coating machine chamber.

[0023] In the present invention, the transmission assembly includes an encoder pinion 1 and an encoder gear 4. The encoder pinion 1 is key-connected to the top end of the biaxial drive motor 10. A bearing housing 3 is fixed to the surface of the top cover 2 of the coating machine chamber by bolts. A deep groove ball bearing 9 is installed on the top of the bearing housing 3. The encoder gear 4 is installed in the deep groove ball bearing 9. The encoder gear 4 meshes with the encoder pinion 1. The biaxial drive motor 10 rotates the encoder pinion 1, and the rotation of the encoder pinion 1 rotates the encoder gear 4, converting the rotational movement of the workpiece umbrella disk 11 in the vacuum into a rotational movement in the atmospheric environment.

[0024] In the present utility model, the detection component is a rotary encoder 8. An encoder bracket 6 is installed inside the bearing block 3. The rotary encoder 8 is installed on the encoder bracket 6 and is connected to the encoder large gear 4. The function of the rotary encoder 8 is used to receive the feedback signal of the rotation of the encoder large gear 4. The rotary encoder 8 and the rotary shaft of the encoder large gear 4 perform concentric rotational motion. When the encoder rotates one circle, it emits a fixed number of pulses. The Omron PLC is used to count the high-speed pulses emitted by the rotary encoder 8 in real time, so that the real-time position of the current workpiece shaft can be represented by the real-time count value, and the rotation position of the workpiece umbrella disk 11 can be judged and monitored in the atmospheric environment.

[0025] In the present utility model, a gland 5 is installed on the top of the bearing block 3. The encoder large gear 4 passes through the gland 5, and the gland 5 seals the deep groove ball bearing 9.

[0026] Working principle: During use, the dual-axis drive motor 10 operates to drive the workpiece umbrella disk 11 to rotate through the magnetorheological fluid 7. The dual-axis drive motor 10 causes the encoder pinion 1 to rotate, and the rotation of the encoder pinion 1 causes the encoder large gear 4 to rotate. Thus, the rotational motion of the workpiece umbrella disk 11 in the vacuum is converted into rotational motion in the atmospheric environment. The function of the rotary encoder 8 is used to receive the feedback signal of the rotation of the encoder large gear 4, and the rotation signal is transmitted to the subsequent data processing system to judge and real-time monitor the rotation position of the workpiece umbrella disk 11.

[0027] In this application, the structures and connection relationships not described in detail are all prior arts, and their structures and principles are well-known technologies, so they will not be elaborated here.

[0028] The above is only the preferred specific implementation manner of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model, according to the technical solution of the present utility model and its inventive concept, makes equivalent substitutions or changes, and all should be covered within the protection scope of the present utility model.

Claims

1. A detection mechanism for the workpiece umbrella disk of a coating machine, including the top cover (2) of the coating machine chamber, characterized in that, The top inner wall of the chamber top cover (2) of the coating machine is movably connected with a workpiece umbrella disc (11). A double-shaft drive motor (10) is installed on the surface of the chamber top cover (2) of the coating machine. A magnetic fluid (7) is installed on the surface of the chamber top cover (2) of the coating machine. The output shaft of the magnetic fluid (7) extends into the chamber top cover (2) of the coating machine and is fixed to the workpiece umbrella disc (11). A transmission component is provided on the top outer wall of the chamber top cover (2) of the coating machine for converting the rotational movement of the workpiece umbrella disc (11) inside the chamber top cover (2) of the coating machine into rotational movement in the atmospheric environment. A detection component for monitoring the transmission component is provided on the chamber top cover (2) of the coating machine.

2. The detection mechanism of the workpiece umbrella tray of a coating machine according to claim 1, characterized in that, The transmission component includes an encoder pinion (1) and an encoder gear (4). The encoder pinion (1) is fixedly connected to the top end of the double-shaft drive motor (10). A bearing seat (3) is fixedly connected to the surface of the chamber top cover (2) of the coating machine. A deep groove ball bearing (9) is installed on the top of the bearing seat (3). The encoder gear (4) is installed in the deep groove ball bearing (9). The encoder gear (4) meshes with the encoder pinion (1).

3. The detection mechanism of the workpiece umbrella disc of a coating machine according to claim 1, characterized in that, The input shaft of the magnetic fluid (7) is connected to the bottom end of the double-shaft drive motor (10).

4. The detection mechanism of the workpiece umbrella disc of a coating machine according to claim 2, characterized in that, The detection component is a rotary encoder (8). An encoder bracket (6) is installed inside the bearing seat (3). The rotary encoder (8) is installed on the encoder bracket (6), and the rotary encoder (8) is connected to the encoder gear (4).

5. The detection mechanism of the workpiece umbrella disc of a coating machine according to claim 2, characterized in that, A gland (5) is installed on the top of the bearing seat (3). The encoder gear (4) passes through the gland (5).

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