Feeding device

Abstract

The utility model relates to the technical field of semiconductor production equipment, in particular to a feeding device. The feeding device comprises a first conveying mechanism used for conveying a material box provided with a jig; the second conveying mechanism is located on one side of the first conveying mechanism and used for conveying the jig; the material transferring mechanism comprises a push rod which is located on the side, away from the second conveying mechanism, of the first conveying mechanism and used for pushing the jig to be transferred to the second conveying mechanism. And the detection mechanism comprises a camera and a data processor, the camera is located above the second conveying mechanism, and the camera is used for obtaining image information of the materials in the jig and transmitting the image information to the data processor. According to the scheme, the problem that in the prior art, material abnormity of a feeding device cannot be found in time can be solved, damage to a jig and a machine due to the fact that unqualified products passively flow into a back-end manufacturing procedure is avoided, and the repair cost and the rework time are reduced.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor production equipment, and more particularly, to a loading device. Background Art

[0002] With the increasingly rapid development of the semiconductor industry, the process is constantly changing, and higher requirements are put forward for the automation of semiconductor production equipment.

[0003] The currently used loading devices usually only perform sequential transmission operations on the production line, with low automation and intelligence levels, serious material jamming situations, and the inability to detect material abnormalities in a timely manner. This can lead to unqualified products flowing into the subsequent processes passively, increasing the repair cost and rework man-hours, and also increasing the fixture scrapping rate, becoming a major obstacle to improving the yield. Summary of the Utility Model

[0004] The embodiments of the present application at least provide a loading device to improve the problem in the prior art that material abnormalities of the loading device cannot be detected in a timely manner, avoid damage to fixtures and machines caused by unqualified products flowing into the subsequent processes passively, and reduce the repair cost and rework man-hours.

[0005] According to the embodiments of the present application, a loading device is provided, including:

[0006] A first transfer mechanism for transferring a cassette containing a fixture;

[0007] A second transfer mechanism located on one side of the first transfer mechanism for transferring the fixture;

[0008] A material transfer mechanism including a push rod located on the side of the first transfer mechanism away from the second transfer mechanism for pushing the fixture to transfer it to the second transfer mechanism;

[0009] A detection mechanism including a camera and a data processor, the camera being located above the second transfer mechanism for acquiring image information of the material in the fixture and transmitting the image information to the data processor.

[0010] In some optional embodiments, a first base and a fixing structure are provided on the first transfer mechanism. The first base is used to carry the cassette containing the fixture, and the fixing structure can move relative to the first base and has a first height and a second height relative to the first base. At the first height, the fixing structure restricts the movement of the cassette relative to the first base, and at the second height, the fixing structure allows the cassette to move relative to the first base.

[0011] In some optional embodiments, a lateral translation assembly is provided on the first platform, and the lateral translation assembly is used to translate the cartridge to move it in or out.

[0012] In some optional embodiments, a first sensor is provided on the first conveyor mechanism, and the first sensor is used to detect whether the cartridge is moved out.

[0013] In some optional embodiments, the loading device further includes:

[0014] A feeding mechanism for sending the cartridge containing the fixtures to the first platform;

[0015] A recycling mechanism for sending the empty cartridge to the recycling end.

[0016] In some optional embodiments, a limiting structure is provided on the second conveyor mechanism. The limiting structure can move relative to the second conveyor mechanism and has a first position and a second position relative to the second conveyor mechanism. When in the first position, the limiting structure restricts the fixture from continuing to move. When in the second position, the limiting structure releases the limitation on the fixture.

[0017] In some optional embodiments, a second sensor is provided on the second conveyor mechanism, and the second sensor is used to sense whether the fixture is transferred to the second conveyor mechanism.

[0018] In some optional embodiments, a vibration assembly is provided on the second conveyor mechanism, and the vibration assembly is used to vibrate to adjust the posture of the material.

[0019] In some optional embodiments, the material transfer mechanism further includes a third sensor, and the third sensor is disposed on the push rod. The third sensor is used to sense whether the cartridge reaches a specified position.

[0020] In some optional embodiments, the data processor is configured to be able to process the image information by using a regular binaryzation algorithm.

[0021] The above technical solution of the present application has the following beneficial technical effects:

[0022] The feeding device of the embodiment of the present application can not only realize material feeding, but also realize automatic abnormal detection of materials. Compared with the manual visual inspection method, in this way, the labor intensity of workers can be reduced and the relevant manpower allocation can be saved. In addition, due to the adoption of the automatic abnormal detection method, the problem of omission during manual detection can also be avoided, which is beneficial to improving the detection efficiency and quality, avoiding the damage of jigs and machines caused by unqualified products flowing into the subsequent process passively, and reducing the repair cost and rework man-hours.

[0023] In order to make the above objects, features and advantages of the present application more obvious and understandable, the following specifically gives preferred embodiments and, in conjunction with the accompanying drawings, makes the following detailed description. Brief Description of the Drawings

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required to be used in the embodiments will be briefly introduced below. Here, the drawings are incorporated into the specification and constitute a part of this specification. These drawings show embodiments that conform to the present application and are used together with the specification to illustrate the technical solutions of the present application. It should be understood that the following drawings only show some embodiments of the present application and should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can also be obtained based on these drawings without creative efforts.

[0025] Figure 1 Shows a schematic structural diagram of a feeding device provided by an embodiment of the present application;

[0026] Figure 2 Shows a schematic structural diagram of a first conveying mechanism provided by an embodiment of the present application;

[0027] Figure 3 Shows a schematic structural diagram of a second conveying mechanism provided by an embodiment of the present application;

[0028] Figure 4 Shows an assembly schematic diagram of a detection mechanism provided by an embodiment of the present application;

[0029] Reference Signs:

[0030] 100. First conveying mechanism; 110. First base; 120. First conveying assembly; 121. Base; 122. Column; 123. Driving motor; 130. Fixing structure; 140. Lateral translation assembly; 150. First sensor; 200. Second conveying mechanism; 210. Second base; 220. Second conveying assembly; 230. Limiting structure; 240. Second sensor; 250. Vibration assembly; 300. Material transfer mechanism; 310. Driving structure; 320. Push rod; 330. Third sensor; 400. Detection mechanism; 410. Camera; 420. Light source; 421. Through hole; 500. Feeding mechanism; 510. First conveyor belt; 520. Feeding platform; 600. Recycling mechanism; 610. Second conveyor belt; 620. Recycling platform. Detailed implementation manners

[0031] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that: Unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present application.

[0032] Embodiments of the present application will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only for explaining the present application and should not be construed as limiting the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts fall within the scope of protection of the present application.

[0033] The terms "first" and "second" in the description and claims of the present application may explicitly or implicitly include one or more of such features. In the description of the present application, unless otherwise stated, the meaning of "a plurality" is two or more. In addition, "and / or" in the description and claims means at least one of the connected objects. The character " / " generally indicates an "or" relationship between the associated objects before and after.

[0034] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present application.

[0035] In the description of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0036] The feeding device provided by the embodiment of the present application includes a conveying unit and a detection mechanism 400. Among them, the conveying unit is used to convey materials. The detection mechanism 400 is used to obtain the image information of the materials to detect whether there are any abnormalities in the materials according to the image information.

[0037] In some embodiments, the conveying unit may include a first conveying mechanism 100, a second conveying mechanism 200, a material transfer mechanism 300, and a controller. The first conveying mechanism 100 is used to convey a cassette containing a jig. The second conveying mechanism 200 is located on one side of the first conveying mechanism 100, and the second conveying mechanism 200 is used to convey the jig. The material transfer mechanism 300 is used to transfer the jig in the cassette to the second conveying mechanism 200. The controller is electrically connected to the first conveying mechanism 100, the second conveying mechanism 200, and the material transfer mechanism 300 respectively, and the controller is used for system control.

[0038] In some embodiments, the first conveying mechanism 100 may include a first base 110 and a first conveying component 120. Among them, the first base 110 is used to carry a cassette containing a jig, and the first conveying component 120 is used to convey the first base 110 along a first direction. Specifically, the first base 110 can be the structure of the first conveying mechanism 100 for loading the cassette. When the first base 110 is conveyed along the first direction, the conveyance of the cassette can be realized.

[0039] Optionally, the first base 110 may include two parallel crossbeams and a connecting plate connected between the crossbeams. During use, the two crossbeams carry the cassette through their top surfaces.

[0040] It should be understood that the structure of the first base 110 is not limited to the above-discussed manner. For example, the first base 110 can also be a flat structure, a grid-like structure, etc.

[0041] Optionally, the first transfer assembly 120 may include a base 121, a column 122, and a driving motor 123. Among them, the base 121 is fixedly arranged, a first bearing platform 110 is arranged on the column 122, the column 122 is arranged on the base 121 and can slide relative to the base 121 along a first direction, the driving motor 123 is arranged on the base 121, and the driving motor 123 and the column 122 are driven by a transmission assembly. For example, the transmission assembly may be a gear and a rack. When the driving motor 123 is started, the gear and the rack cooperate with each other to drive the column 122 to slide along the first direction.

[0042] It should be understood that in a specific implementation, the first direction may be a horizontal direction, a vertical direction, or an inclined direction. In the embodiment of the present application, the first direction is preferably the vertical direction.

[0043] In some embodiments, the first transfer mechanism 100 may further include a fixing structure 130, and the fixing structure 130 is used to fix the cassette on the first bearing platform 110 to prevent the cassette from shifting or deflecting during transfer and transfer of the fixture, thereby affecting the transfer of the fixture.

[0044] Optionally, the fixing structure 130 can move relative to the first bearing platform 110 and has a first height and a second height relative to the first bearing platform 110. At the first height, the fixing structure 130 restricts the movement of the cassette relative to the first bearing platform 110. At the second height, the fixing structure 130 allows the cassette to move relative to the first bearing platform 110. For example, the fixing structure 130 may be a pressing plate, and the pressing plate may be driven by a cylinder. Under the action of the cylinder, the pressing plate can move up and down relative to the first bearing platform 110.

[0045] It should be understood that the structure of the fixing structure 130 is not limited to the above-discussed manner. For example, the fixing structure 130 may also be a pneumatic gripper, a suction cup, etc.

[0046] In some embodiments, a lateral translation assembly 140 may be arranged on the first bearing platform 110, and the lateral translation assembly 140 is used to translate the cassette to move it in or out. Specifically, when moving the cassette delivered to the first bearing platform 110 to a target position or sending out the empty cassette from the first bearing platform 110, the cassette can be moved by the lateral translation assembly 140.

[0047] Optionally, the lateral translation assembly 140 may adopt a chain conveyor belt, which is arranged on the outer side of the first bearing platform 110 (cross beam).

[0048] In some embodiments, the transfer unit may further include a feeding mechanism 500, and the feeding mechanism 500 is used to send the cassette containing the fixture to the first bearing platform 110.

[0049] Optionally, the feeding mechanism 500 may include a first conveyor belt 510 and a feeding platform 520. The first conveyor belt 510 is disposed between the feeding end and the first conveying mechanism 100. The first conveyor belt 510 may be a chain conveyor belt. The feeding platform 520 is disposed on the first conveyor belt 510 and is used for loading the fixture-containing cassette. During use, the first conveyor belt 510 drives the feeding platform 520 to reciprocate between the feeding end and the first conveying mechanism 100 to achieve feeding.

[0050] In some embodiments, the conveying unit may further include a recycling mechanism 600 for sending the empty cassettes to the recycling end.

[0051] Optionally, the recycling mechanism 600 may include a second conveyor belt 610 and a recycling platform 620. The second conveyor belt 610 is disposed between the recycling end and the first conveying mechanism 100. The first conveyor belt 510 may be a chain conveyor belt. The recycling platform 620 is disposed on the second conveyor belt 610 and is used for loading the empty cassettes. During use, the second conveyor belt 610 drives the recycling platform 620 to reciprocate between the recycling end and the first conveying mechanism 100 to achieve recycling.

[0052] In some embodiments, the first conveyor belt 510 and the second conveyor belt 610 may be arranged parallel to each other vertically. In the embodiments of the present application, the first conveyor belt 510 is located below the second conveyor belt 610.

[0053] In some embodiments, the first conveying mechanism 100 may further include a first sensor 150 for sensing whether the cassette is removed. During specific use, the first sensor 150 may be used to detect the number of removed cassettes, so as to judge the number of cassettes on the recycling platform 620 for subsequent recycling processing. That is, the first sensor 150 is electrically connected to the controller. When the first sensor 150 senses that a set number of cassettes are removed, the controller controls the second conveyor belt 610 to convey the recycling platform 620 to the recycling end.

[0054] Optionally, the first sensor 150 may include an infrared emission module and an infrared reception module. The infrared emission module and the infrared reception module are oppositely arranged and are respectively disposed on two cross beams. The infrared emission module is used for emitting infrared light, and the infrared reception module is used for receiving infrared light. When no cassette passes by, the infrared reception module can always receive the infrared light. When a cassette passes by, the light path is blocked, resulting in the infrared reception module being unable to receive the infrared light.

[0055] In some embodiments, the second transfer mechanism 200 may include a second base 210 and a second transfer component 220. Among them, the second base 210 is fixedly arranged, and the second transfer component 220 is arranged on the second base 210. The second transfer component 220 is used to transfer the fixture along the second direction. When specifically arranged, the second transfer component 220 may be a chain conveyor belt.

[0056] In some embodiments, the second transfer mechanism 200 may further include a limiting structure 230. The limiting structure 230 is arranged on the second base 210 and is used to selectively limit the continued movement of the fixture. When specifically used, the limiting structure 230 can be used to limit the position of the fixture, so as to facilitate the detection by the detection mechanism 400.

[0057] Optionally, the limiting structure 230 can move relative to the second transfer mechanism 200 and has a first position and a second position relative to the second transfer mechanism 200. When in the first position, the limiting structure 230 restricts the continued movement of the fixture. When in the second position, the limiting structure 230 releases the limit on the fixture. For example, the limiting structure 230 may be a block driven by a cylinder, and the block can move in the height direction relative to the second base 210. When moving up a preset height, the block is in the first position and can restrict the continued movement of the fixture.

[0058] It should be understood that in specific implementations, the second direction may be a horizontal direction, a vertical direction, or an inclined direction. In the embodiments of the present application, the second direction is preferably the horizontal direction and is perpendicular to the transfer directions of the first conveyor belt 510 and the second conveyor belt 610.

[0059] In some embodiments, the second transfer mechanism 200 may further include a second sensor 240. The second sensor 240 is arranged on the second base 210, and the second sensor 240 is used to sense whether the fixture is transferred to the second transfer mechanism 200. When specifically used, the second sensor 240 can be used to detect whether the fixture has arrived, so as to facilitate the controller to control the limiting structure 230 to move to the first position. That is, the second sensor 240 is electrically connected to the controller. When the first sensor 150 senses that the fixture reaches the specified position, the controller controls the cylinder of the limiting structure 230 to act to restrict the fixture from continuing to move with the second transfer component 220.

[0060] Optionally, the second sensor 240 may be a proximity switch.

[0061] In some embodiments, the second transfer mechanism 200 may further include a vibration component 250. The vibration component 250 is arranged on the second base 210, and the vibration component 250 is used to vibrate to adjust the posture of the material. Specifically, during the transfer process, the material in the fixture may be tilted. Therefore, by using the vibration of the vibration component 250, the tilting of the material can be reduced.

[0062] Optionally, the vibration assembly 250 may include a plurality of vibration motors, which are respectively arranged on both sides of the second bearing platform 210.

[0063] In some embodiments, the material transfer mechanism 300 may include a driving structure 310 and a push rod 320. Among them, the driving structure 310 and the push rod 320 are arranged on the side of the first conveying mechanism 100 away from the second conveying mechanism 200, and the driving structure 310 can apply a thrust to the push rod 320 to push the jig so that it is transferred to the second conveying mechanism 200.

[0064] Optionally, the driving structure 310 may be a cylinder, a hydraulic cylinder, etc. In this regard, the embodiments of the present application do not make specific limitations.

[0065] In some embodiments, the material transfer mechanism 300 may further include a third sensor 330, which is arranged on the push rod 320 and is used to sense whether the material box reaches the specified position. During specific use, the third sensor 330 may be electrically connected to the controller. When the third sensor 330 detects that the material box reaches the specified height, the controller may control the start and stop of the driving structure 310.

[0066] Optionally, the third sensor 330 may be a pressure sensor, which is arranged at one end of the push rod 320 facing the material box. During the process of the push rod 320 pushing the jig, when the pressure detected by the pressure sensor exceeds the pressure threshold, it can be determined that the material box reaches the specified height, and then the controller can control the driving structure 310 to stop working.

[0067] In some embodiments, the detection mechanism 400 may include a camera 410 and a data processor. The camera 410 is located above the second conveying mechanism 200. The camera 410 is used to obtain the image information of the material in the jig and transmit the image information to the data processor, so that the data processor processes the image information and outputs a detection result.

[0068] Optionally, the data processor may use the regular binaryzation algorithm to process the image information. Specifically, during regular binaryzation, the software automatically calculates and sums the gray values of each pixel point and divides by the number of pixel points included in the detection frame to obtain the average gray value. When the gray value of the pixel point in the original image is greater than or equal to the average value, it is displayed as a white bright spot in the binaryzation image. When the gray value of the pixel point in the original image is less than the average value, it is displayed as a black dark spot in the binaryzation image. After comparing the regular automatic binaryzation image with the color interval binaryzation image, according to the pre-set algorithm, the gap between the binaryzated material and the jig and the sample size are compared to determine whether there is an abnormality in the material, such as whether the material is missing, whether the flatness meets the requirements, etc.

[0069] In some embodiments, the detection component may further include a light source 420 for supplementing light to the material. When specifically arranged, the light source 420 may be arranged along the circumferential direction of the camera 410 and fixedly connected to the camera 410.

[0070] Optionally, the light source 420 is provided with a through hole 421, and a plurality of lamp beads are uniformly arranged along the circumferential direction of the through hole 421, and the camera 410 is installed in the through hole 421.

[0071] The feeding process of the feeding device according to the embodiment of the present application is as follows: placing the jig containing the material into the material box; placing the material box on the feeding mechanism 500, and the controller controls the feeding structure to convey the material box to the first platform 110 of the first conveying mechanism 100; when the material box reaches the designated position on the platform, the controller controls the first conveying mechanism 100 to convey the material box to the designated height; according to the information sensed by the third sensor 330, the controller controls the material transfer mechanism 300 to transfer the jig in the material box to the second conveying mechanism 200; according to the information sensed by the second sensor 240, the controller controls the limiting structure 230 to limit the jig, and controls the camera 410 of the detection mechanism 400 to take pictures of the material in the jig; after the photographing is completed, the controller controls the limiting structure 230 to release the restriction, so that the second conveying mechanism 200 conveys the jig to the processing station; during the above process, the controller also controls the lateral translation component 140 of the first platform 110 to send out the empty material box to the recycling mechanism 600; according to the information sensed by the first sensor 150, the controller controls the recycling mechanism 600 to convey the controlled material box to the recycling end.

[0072] The feeding device according to the embodiment of the present application can not only realize material feeding, but also realize automatic abnormal detection of materials. Compared with the manual visual inspection method, in this way, the labor intensity of workers can be reduced and relevant manpower configuration can be saved. In addition, due to the use of the automatic abnormal detection method, the problem of omission during manual detection can also be avoided, which is beneficial to improving the detection efficiency and quality, avoiding the damage of jigs and machines caused by unqualified products flowing into the subsequent process passively, and reducing the repair cost and rework man-hours.

[0073] One or more embodiments of this specification are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of one or more embodiments of this specification shall be included within the protection scope of this application.

[0074] The above are only the specific embodiments of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of changes or substitutions, which should all be covered within the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A feeding device, characterized in that, Comprising: A first conveying mechanism for conveying a cartridge containing a jig; A second conveying mechanism located on one side of the first conveying mechanism, the second conveying mechanism being used for conveying the jig; A material transfer mechanism including a push rod, the push rod being located on the side of the first conveying mechanism away from the second conveying mechanism, the push rod being used to push the jig to transfer it to the second conveying mechanism; A detection mechanism including a camera and a data processor, the camera being located above the second conveying mechanism, the camera being used to acquire image information of the material in the jig and transmit the image information to the data processor.

2. The feeding device according to claim 1, characterized in that, A first bearing platform and a fixing structure are provided on the first conveying mechanism, the first bearing platform being used for bearing the cartridge containing the jig, the fixing structure being able to move relative to the first bearing platform and having a first height and a second height relative to the first bearing platform. At the first height, the fixing structure restricts the cartridge from moving relative to the first bearing platform. At the second height, the fixing structure allows the cartridge to move relative to the first bearing platform.

3. The feeding device according to claim 2, characterized in that, A lateral translation assembly is provided on the first bearing platform, the lateral translation assembly being used for translating the cartridge to move it in or out.

4. The feeding device according to claim 3, characterized in that, A first sensor is provided on the first conveying mechanism, the first sensor being used to detect whether the cartridge has been moved out.

5. The feeding device according to claim 2, characterized in that, Further comprising: A feeding mechanism for sending the cartridge containing the jig to the first bearing platform; A recycling mechanism for sending the empty cartridge to the recycling end.

6. The feeding device according to claim 1, wherein A limiting structure is provided on the second conveying mechanism, the limiting structure being able to move relative to the second conveying mechanism and having a first position and a second position relative to the second conveying mechanism. At the first position, the limiting structure restricts the jig from continuing to move. At the second position, the limiting structure releases the limit on the jig.

7. The feeding device according to claim 6, characterized in that, A second sensor is provided on the second conveying mechanism, the second sensor being used to sense whether the jig has been transferred to the second conveying mechanism.

8. The feeding device according to claim 1, wherein A vibration assembly is provided on the second conveying mechanism, the vibration assembly being used for vibrating to adjust the posture of the material.

9. The feeding device according to claim 1, characterized in that The material transfer mechanism further includes a third sensor, the third sensor being provided on the push rod, the third sensor being used to sense whether the cartridge has reached a designated position.

10. The feeding device according to claim 1, characterized in that, The data processor is configured to be able to process the image information using a regular binaryzation algorithm.

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