Laser processing exhaust structure and laser processing equipment

Abstract

The embodiment of the utility model discloses a laser processing exhaust structure and laser processing equipment, the laser processing exhaust structure comprises a focus lens and an exhaust hood, the focus lens is separated from the exhaust hood, the upper side of the exhaust hood is provided with a light hole, the focus lens is located at the upper side of the light hole, and the exhaust hood is located at the lower side of the light hole. And the light emitting end of the focus lens faces the light hole. According to the exhaust structure for laser processing, when laser processing starts, a laser beam is emitted from the light emitting end of the focus lens and is focused on a workpiece through the light hole in the upper side of the exhaust hood. Slag generated by interaction of laser and a workpiece is collected and discharged under guidance of the exhaust hood, the exhaust hood is separated from the focus lens, so that the focus lens is far away from a slag discharge channel, the possibility that the slag floats upwards and pollutes the focus lens in the discharge process is reduced, the maintenance frequency of the focus lens is reduced, and the service life of the focus lens is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of laser processing equipment, in particular to a laser processing exhaust structure and a laser processing equipment. Background Art

[0002] In the field of wafer processing, the vulnerability of the wafer surface layer and its insufficient adhesion to the silicon-based material make the surface layer prone to delamination and cracking. When using traditional diamond blades for mechanical cutting, these problems are particularly prominent, often resulting in delamination and microcracks in the chips, seriously affecting the product quality. To overcome this problem, the industry has adopted a laser process to pre-treat the wafer cutting channels. This process uses laser energy to accurately burn through the surface layer of the cutting channel to form a specific groove structure, thus avoiding the delamination and cracking problems that may occur during mechanical cutting.

[0003] However, as Figures 1 to 3 shown, in the prior art, a full-coverage exhaust structure is usually adopted to enhance the negative pressure to quickly discharge the slag generated by laser processing on the wafer surface. Although this method can effectively improve the slag discharge efficiency, since this structure wraps the light-emitting end of the focusing mirror inside, the slag may float up and contaminate the focusing mirror during the discharge process, which not only increases the maintenance frequency, but also may cause damage to the quality of some products if the maintenance is not timely. Summary of the Utility Model

[0004] The purpose of the utility model is to overcome the deficiencies of the prior art, and provide a laser processing exhaust structure and a laser processing equipment, so as to solve the problems in the prior art that a full-coverage exhaust structure is usually adopted to enhance the negative pressure to quickly discharge the slag generated by laser processing on the wafer surface. Although this method can effectively improve the slag discharge efficiency, since this structure wraps the light-emitting end of the focusing mirror inside, the slag may float up and contaminate the focusing mirror during the discharge process, which not only increases the maintenance frequency, but also may cause damage to the quality of some products if the maintenance is not timely.

[0005] To achieve the above purpose, the utility model adopts the following technical solutions:

[0006] An embodiment of the utility model provides a laser processing exhaust structure, which includes: a focusing mirror and an exhaust hood. The focusing mirror is separated from the exhaust hood. A light-transmitting hole is provided on the upper side of the exhaust hood. The focusing mirror is located above the light-transmitting hole, and the light-emitting end of the focusing mirror faces the light-transmitting hole.

[0007] As a preferred technical solution of the utility model, a first air inlet is provided on the lower side of the exhaust hood, and an air outlet is provided at one end of the exhaust hood in the horizontal direction.

[0008] As a preferred technical solution of the present utility model, a second air inlet is provided on the exhaust hood, and the second air inlet is provided on the opposite side of the exhaust port.

[0009] As a preferred technical solution of the present utility model, a third air inlet is provided on the side of the exhaust hood close to the focusing lens.

[0010] As a preferred technical solution of the present utility model, the light-transmitting hole is the third air inlet.

[0011] As a preferred technical solution of the present utility model, the exhaust hood is an axisymmetric structure.

[0012] An embodiment of the present utility model further provides a laser processing device, including a laser processing exhaust structure as described above, and further including an exhaust device. The air blown out by the exhaust device is respectively directed towards the first air inlet, the second air inlet, and the third air inlet.

[0013] As a preferred technical solution of the present utility model, the exhaust device includes a first exhaust device, and the air outlet direction of the first exhaust device is from bottom to top towards the first air inlet.

[0014] As a preferred technical solution of the present utility model, the exhaust device includes a second exhaust device, and the air outlet direction of the second exhaust device is from the first air inlet towards the second air inlet.

[0015] As a preferred technical solution of the present utility model, the exhaust device includes a third exhaust device, and the air outlet direction of the third exhaust device is downward from the third air inlet.

[0016] Compared with the prior art, in the laser processing exhaust structure of the present utility model, when laser processing starts, the laser beam is emitted from the light-emitting end of the focusing lens and is focused on the workpiece through the light-transmitting hole on the upper side of the exhaust hood. The slag generated by the interaction between the laser and the workpiece is collected and discharged under the guidance of the exhaust hood. The design of separating the exhaust hood from the focusing lens keeps the focusing lens away from the slag discharge channel, reducing the possibility of slag floating up and contaminating the focusing lens during the discharge process, reducing the frequency of focusing lens maintenance, and prolonging the service life of the focusing lens.

[0017] The above description is only an overview of the technical solution of the present utility model. In order to be able to understand the technical means of the present utility model more clearly, it can be implemented according to the content of the description. And in order to make the above and other purposes, features and advantages of the present utility model more obvious and understandable, the following specific preferred embodiments are given and described in detail as follows. Description of the Drawings

[0018] To more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the attached drawings required for the description of the embodiments. Obviously, the attached drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other attached drawings can also be obtained based on these drawings.

[0019] Figure 1 It is a three-dimensional view of the exhaust structure of the prior art;

[0020] Figure 2 It is a front cross-sectional view of the exhaust structure of the prior art;

[0021] Figure 3 It is a working schematic diagram of the exhaust structure of the prior art;

[0022] Figure 4 It is a three-dimensional view of an exhaust structure for laser processing of the present utility model;

[0023] Figure 5 It is a front cross-sectional view of an exhaust structure for laser processing of the present utility model;

[0024] Figure 6 It is a working schematic diagram of an exhaust structure for laser processing of the present utility model.

[0025] Explanation of the markings in the figure:

[0026] 1. Full-coverage exhaust structure; 2. Focusing lens; 3. Exhaust hood; 31. Light-transmitting hole; 32. Exhaust port; 33. First air inlet; 34. Second air inlet; 4. Wafer. Specific embodiments

[0027] In order to make the objectives, technical solutions and advantages of the present utility model more clear and understandable, the following further elaborates on the present utility model in detail in conjunction with the attached drawings and specific embodiments.

[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the attached drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative efforts fall within the scope of protection of the present utility model.

[0029] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is the orientation or positional relationship based on the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0030] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "a plurality of" means two or more unless otherwise specifically defined.

[0031] In the present utility model, unless otherwise clearly specified and defined, terms such as "mounted", "connected", "connected to", "fixed" should be understood in a broad sense. For example, it can be a connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0032] In the present utility model, unless otherwise clearly specified and defined, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "over" and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath" and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0033] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic expressions of the above terms should not be understood as necessarily referring to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine the different embodiments or examples described in this specification.

[0034] In the field of wafer 4 processing, the vulnerability of the surface layer of wafer 4 and its insufficient adhesion to silicon-based materials make the surface layer prone to delamination and cracking. When using traditional diamond blades for mechanical cutting, these problems are particularly prominent, often resulting in delamination and microcracks in the chip, seriously affecting the product quality. To overcome this problem, the industry has adopted a laser process to pre-treat the cutting channels of wafer 4. This process uses laser energy to accurately burn through the surface layer of the cutting channel to form a specific groove structure, thus avoiding the delamination and cracking problems that may occur during mechanical cutting.

[0035] However, as Figures 1 to 3 shown, in the prior art, a full-coverage exhaust structure 1 is usually adopted to enhance the negative pressure to quickly discharge the slag generated by laser processing on the surface of wafer 4. Although this method can effectively improve the slag discharge efficiency, since this structure wraps the light output end of the focusing mirror 2 inside, the slag may float up and contaminate the focusing mirror 2 during the discharge process, which not only increases the maintenance frequency, but also may cause damage to the quality of some products if the maintenance is not timely.

[0036] Please refer to Figures 4 to 6 , an embodiment of the present utility model provides a laser processing exhaust structure, which includes: a focusing mirror 2 and an exhaust hood 3. The focusing mirror 2 is separated from the exhaust hood 3. A light-transmitting hole 31 is provided on the upper side of the exhaust hood 3. The focusing mirror 2 is located above the light-transmitting hole 31, and the light output end of the focusing mirror 2 faces the light-transmitting hole 31.

[0037] In this embodiment, the setting of the light-transmitting hole 31 enables the laser beam emitted from the light output end of the focusing mirror 2 to accurately focus on the workpiece to be processed through the light-transmitting hole 31. More importantly, different from the full-coverage exhaust structure 1 in the prior art, the focusing mirror 2 and the exhaust hood 3 in this solution are separated from each other, which makes the slag during the processing discharged through the exhaust hood 3 not easy to contact the focusing mirror 2, significantly improving the working environment quality of the focusing mirror 2 and reducing the contamination of the focusing mirror 2 by the slag.

[0038] Further, a first air inlet 33 is provided on the lower side of the exhaust hood 3, and an air outlet 32 is provided at one end of the exhaust hood 3 in the horizontal direction. It should be noted that the laser processing equipment in the prior art includes a workbench. The wafer 4 to be processed is placed on the workbench. The exhaust hood 3 and the focusing lens 2 are located above the workbench and the wafer 4. The first air inlet 33 is directly opposite to the wafer 4 and is used to capture the slag generated in the laser processing area. The air outlet 32 at one end in the horizontal direction provides a channel for the discharge of this slag. In a feasible working scenario, the air flow blows into the interior of the exhaust hood 3 from the first air inlet 33 on the lower side of the exhaust hood 3. The slag generated during the laser processing on the wafer 4 is blown into the exhaust hood 3 along with the air flow. After passing through the flow channel inside the exhaust hood 3, the slag finally exits from the air outlet 32 of the exhaust hood 3.

[0039] Further, on the basis of the above-mentioned first air inlet 33 and air outlet 32, a second air inlet 34 is provided on the exhaust hood 3 in this embodiment. The second air inlet 34 is provided on the opposite side of the air outlet 32. It should be noted that when the slag enters the exhaust hood 3 from the first air inlet 33, it is carried by the air flow from bottom to top. The upper side of the exhaust hood 3 is the light-transmitting hole 31, and the upper side of the light-transmitting hole 31 is the focusing lens 2. Even if the focusing lens 2 is separated from the exhaust hood 3, reducing the possibility of its contact with the slag inside the exhaust hood 3, there is still a possibility that some slag may be carried by the upward air flow and pass through the light-transmitting hole 31 to contaminate the focusing lens 2. Considering this situation, in this embodiment, a second air inlet 34 is provided at the opposite end of the exhaust hood 3 in the horizontal direction, that is, on the opposite side of the air outlet 32 of the exhaust hood 3. By adding the second air inlet 34, a lateral air flow is formed in the exhaust hood 3 in the direction of the air outlet 32, reducing the probability that the slag floats through the light-transmitting hole 31 after entering the exhaust hood 3 from the first air inlet 33 with the air flow. So that the slag is subjected to the wind force in the direction of the air outlet 32 after entering the first air inlet 33 and moves in the direction of the air outlet 32, further reducing the possibility of the slag contacting the focusing lens 2.

[0040] Further, a third air inlet is provided on one side of the exhaust hood 3 in this embodiment close to the focusing lens 2. In order to further reduce the possibility of the slag contacting the focusing lens 2, the third air inlet provided in this embodiment utilizes the principle of locally enhancing the air flow, which can more specifically give the slag close to the light-transmitting hole 31 a downward wind force to further prevent the slag from contaminating the focusing lens 2 through the light-transmitting hole 31. It should be noted that the air flow blown into the exhaust hood 3 from the third air inlet will form a convection with the air flow blown into the exhaust hood 3 from the first air inlet 33, and the second air inlet 34 will blow the slag in this convection towards the air outlet 32. Thus, both the contamination of the focusing lens 2 by the slag is avoided and the smooth discharge of the slag inside the exhaust hood 3 is ensured.

[0041] Further, the light-transmitting hole 31 serves as the third air inlet. By using the light-transmitting hole 31 as the air inlet, the slag near the light-transmitting hole 31 in the exhaust hood 3 can be more effectively driven away without affecting the transmission of the laser beam, reducing the pollution and damage of the slag to the focusing lens 2 and further enhancing the protection of the focusing lens 2.

[0042] Further, the exhaust hood 3 has an axisymmetric structure. The design principle of the axisymmetric structure is that it can generate a symmetric air flow distribution. After the air flows into the exhaust hood 3 from the first air inlet 33, the second air inlet 34, and the third air inlet, it can evenly flow towards the air outlet 32, avoiding the dead air zones or accumulation areas caused by the asymmetric structure. Optionally, the exhaust hood 3 has an inverted U-shaped structure with an opening downward. The first air inlet 33 has an opening at the lower end, and the second air inlet 34 and the air outlet 32 are respectively the openings on both sides of the inverted U-shaped structure.

[0043] An embodiment of the present utility model further provides a laser processing device, which includes a laser processing exhaust structure as described above, and further includes an exhaust device. The air blown out by the exhaust device is respectively directed towards the first air inlet 33, the second air inlet 34, and the third air inlet.

[0044] Further, the exhaust device includes a first exhaust device, and the air outlet direction of the first exhaust device is from bottom to top towards the first air inlet 33.

[0045] Further, the exhaust device includes a second exhaust device, and the air outlet direction of the second exhaust device is from the first air inlet 33 towards the second air inlet 34.

[0046] Further, the exhaust device includes a third exhaust device, and the air outlet direction of the third exhaust device is downward from the third air inlet.

[0047] In a feasible working scenario of this embodiment, when the laser processing starts, the first exhaust device, the second exhaust device, and the third exhaust device are started simultaneously. The air outlet direction of the first exhaust device is from bottom to top, directly blowing towards the first air inlet 33, forming an upward airflow, which helps to capture and discharge the slag on the wafer 4, carry it and blow it into the exhaust hood 3 through the first air inlet 33. The air outlet direction of the second exhaust device is from the first air inlet 33 towards the second air inlet 34, forming a lateral airflow, which helps to blow the slag from one side to the other side. While enhancing the airflow circulation in the entire exhaust hood 3, it also reduces the probability of the slag floating up through the light-transmitting holes 31. The air outlet direction of the third exhaust device is downward from the third air inlet, forming a downward airflow, which helps to blow the slag near the light-transmitting holes 31 in the exhaust hood 3 downward, preventing it from contaminating the focusing lens 2 through the light-transmitting holes 31. Under the combined action of the first exhaust device, the second exhaust device, and the third exhaust device, the slag on the processing surface of the wafer 4 is quickly and evenly sucked into the exhaust hood 3 and discharged through the air outlet 32. At the same time, the possibility of the slag contaminating the focusing lens 2 is reduced, and the service life of the focusing lens 2 is extended.

[0048] Compared with the prior art, in the laser processing exhaust structure of the present utility model, when the laser processing starts, the laser beam is emitted from the light-emitting end of the focusing lens and focused on the workpiece through the light-transmitting holes on the upper side of the exhaust hood. The slag generated by the interaction between the laser and the workpiece is collected and discharged under the guidance of the exhaust hood. The design of separating the exhaust hood from the focusing lens keeps the focusing lens away from the slag discharge channel, reducing the possibility of the slag floating up and contaminating the focusing lens during the discharge process, reducing the frequency of focusing lens maintenance, and extending the service life of the focusing lens.

[0049] The above is only the specific implementation manner of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.

Claims

1. A laser processing exhaust structure, characterized in that, Comprising: A focusing lens and an exhaust hood, the focusing lens is separated from the exhaust hood, a light-transmitting hole is provided on the upper side of the exhaust hood, the focusing lens is located above the light-transmitting hole, and the light-emitting end of the focusing lens faces the light-transmitting hole.

2. The laser processing exhaust structure according to claim 1, characterized in that, A first air inlet is provided on the lower side of the exhaust hood, and an air outlet is provided at one end of the exhaust hood in the horizontal direction.

3. The exhaust structure for laser processing according to claim 2, characterized in that, A second air inlet is provided on the exhaust hood, and the second air inlet is provided on the opposite side of the air outlet.

4. The laser processing exhaust structure according to claim 3, characterized in that, A third air inlet is provided on the side of the exhaust hood close to the focusing lens.

5. The exhaust structure for laser processing according to claim 4, wherein, The light-transmitting hole is the third air inlet.

6. The exhaust structure for laser processing according to claim 5, characterized in that, The exhaust hood is an axisymmetric structure.

7. A laser processing device, characterized in that, Comprising a laser processing exhaust structure according to any one of claims 4-6, further comprising an exhaust device, and the air blown out by the exhaust device respectively faces the first air inlet, the second air inlet, and the third air inlet.

8. A laser processing device according to claim 7, characterized in that, The exhaust device includes a first exhaust device, and the air outlet direction of the first exhaust device is from bottom to top towards the first air inlet.

9. A laser processing device according to claim 7, characterized in that, The exhaust device includes a second exhaust device, and the air outlet direction of the second exhaust device is from the first air inlet towards the second air inlet.

10. A laser processing device according to claim 7, characterized in that, The exhaust device includes a third exhaust device, and the air outlet direction of the third exhaust device is downward from the third air inlet.

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