Turnover jig for vacuum coating

Abstract

The utility model relates to a turnover jig for vacuum coating, which comprises a bottom plate, a turntable and a processing table, an empty slot is arranged in the bottom plate, the turntable is rotatably arranged in the empty slot, a rotating mechanism is arranged in the bottom plate to control the turntable to rotate, and the processing table is fixedly arranged at the upper end of the turntable. Two detachable first clamping plates and two detachable second clamping plates are arranged on the upper end face of the machining table, the two first clamping plates are oppositely arranged in the transverse direction of the machining table, the two second clamping plates are oppositely arranged in the longitudinal direction of the machining table, and the interior of the machining table is of a cavity structure. An adjusting mechanism is arranged in the cavity to control the two first clamping plates and the two second clamping plates to move relatively. Workpieces of different specifications can be rapidly fixed, meanwhile, the first clamping plate and the second clamping plate are detachably connected with the machining table, and the clamping plates of different shapes can be replaced conveniently so as to adapt to the workpieces of different shapes such as a round shape or a square shape.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a flip - type fixture for vacuum coating. Background Technique

[0002] With the development of vacuum coating technology, higher requirements are put forward for film quality and coating efficiency. Many coating products, such as semiconductor chips, optical lenses, camera lenses, etc., usually need to be coated on both sides.

[0003] For example, the patent with the publication number of CN217579046U discloses a flip - type fixture mechanism for vacuum double - sided continuous coating. It includes a box body, a gear assembly, a connecting piece and a wafer - holding fixture; among them, the gear assembly includes gears. Specifically, one end of the connecting rod in the connecting piece penetrates through the first side of the box body rotatably and is connected to the wafer - holding fixture, and the wafer - holding fixture is arranged in the box body; the other end of the connecting piece is axially connected to the gear assembly through a gear. The utility model drives the toothed chain to reciprocate through the power of the electric telescopic rod, so that the gear can rotate forward and backward, and the wafer - holding fixture connected to the gear can be flipped 180° back and forth for coating.

[0004] Regarding the above - mentioned related technologies, the inventor believes that the structures of the existing fixtures for vacuum coating to fix workpieces are relatively single and cannot be adjusted, and they cannot be adapted to workpieces of different specifications. Moreover, a lot of time is spent on replacing the fixture device, which affects the coating efficiency. Content of the Utility Model

[0005] In order to solve the problems in the above - mentioned background technique, the utility model provides a flip - type fixture for vacuum coating.

[0006] The utility model adopts the following technical scheme: A flip - type fixture for vacuum coating, including a bottom plate, a turntable and a processing table. An empty slot is arranged inside the bottom plate, the turntable is rotatably installed in the empty slot, a rotating mechanism is arranged inside the bottom plate to control the rotation of the turntable, the processing table is fixedly installed on the upper end of the turntable, two detachable first clamping plates and two detachable second clamping plates are arranged on the upper end surface of the processing table. The two first clamping plates are arranged opposite to each other in the transverse direction of the processing table, and the two second clamping plates are arranged opposite to each other in the longitudinal direction of the processing table. The inside of the processing table is of a cavity structure, and an adjusting mechanism is arranged in the cavity to control the relative movement of the two first clamping plates and the two second clamping plates respectively.

[0007] Preferably, the rotation mechanism includes a rotating shaft and a motor. The lower end of the rotating shaft is rotatably connected to the bottom of the empty slot, the upper end of the rotating shaft is fixedly connected to the turntable, a driving gear is fixedly installed at the driving end of the motor, a driven gear is fixedly sleeved on the outer end surface of the rotating shaft, and the driving gear is meshed with the driven gear.

[0008] Preferably, two first sliding grooves are symmetrically formed in the upper end surface of the processing table in the transverse direction, two second sliding grooves are symmetrically formed in the upper end surface of the processing table in the longitudinal direction, first sliders and second sliders are respectively fixed at the lower ends of the first clamping plate and the second clamping plate, the first sliders are movably connected with the first sliding grooves, and the second sliders are movably connected with the second sliding grooves.

[0009] Preferably, the adjusting mechanism includes a first bidirectional lead screw and a second bidirectional lead screw. The first bidirectional lead screw is arranged in the transverse direction of the cavity and is rotatably connected with the inner wall of the cavity. The second bidirectional lead screw is arranged in the longitudinal direction of the cavity and is rotatably connected with the inner wall of the cavity. The second bidirectional lead screw is installed below the first bidirectional lead screw and is perpendicular to the first bidirectional lead screw.

[0010] Preferably, two first connection blocks are symmetrically threadedly connected to both ends of the outer surface of the first bidirectional lead screw, two second connection blocks are symmetrically threadedly connected to both ends of the outer surface of the second bidirectional lead screw. The lower end of the first slider penetrates through the first sliding groove and then extends into the cavity and is fixedly connected with the first connection block. The lower end of the second slider penetrates through the second sliding groove and then extends into the cavity and is fixedly connected with the second connection block.

[0011] Preferably, a first through hole and a second through hole are respectively formed in the side walls of two adjacent ends of the processing table. A first rotating wheel is rotatably installed in the first through hole. The rotating shaft of the first rotating wheel penetrates through the first through hole and is fixedly connected with the first bidirectional lead screw. A second rotating wheel is rotatably installed in the second through hole. The rotating shaft of the second rotating wheel penetrates through the second through hole and is fixedly connected with the second bidirectional lead screw.

[0012] Preferably, installation grooves are formed in the lower end surfaces of the first clamping plate and the second clamping plate, installation holes are formed in the upper end surfaces of the first clamping plate and the second clamping plate, positioning holes are provided and communicated between the installation grooves and the installation holes. Installation rods are respectively fixed at the upper ends of the first slider and the second slider, and the installation rods are detachably connected with the installation grooves.

[0013] Preferably, one end of the mounting rod close to the positioning hole is provided with a limiting groove, a first spring and a positioning block are arranged in the limiting groove, two ends of the first spring are respectively fixedly connected with the inner wall of the limiting groove and the end face of the positioning block, and one end of the positioning block away from the first spring extends out of the limiting groove and is clamped with the positioning hole.

[0014] Preferably, a moving rod and a second spring are arranged in the mounting hole. A clamping block with the same shape as the positioning hole is integrally formed at one end of the lower end of the moving rod close to the positioning hole. The upper end of the moving rod extends out of the mounting hole and is fixed with a push rod. Two ends of the second spring are respectively fixedly connected with the inner wall of the mounting hole and the end face of the moving rod.

[0015] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0016] The present utility model controls the rotation of the turntable through the rotation mechanism, and then drives the processing table to rotate, so as to facilitate coating both sides of the workpiece. By controlling the relative movement of the two first clamping plates and the two second clamping plates through the adjustment mechanism, it is convenient to fix the workpiece on the processing table, so as to realize the quick fixation of workpieces with different specifications. By the detachable connection between the first clamping plate and the second clamping plate and the processing table, it is convenient to replace clamping plates with different shapes to adapt to workpieces with different shapes such as circular or square. Description of the Drawings

[0017] Figure 1 is a three-dimensional schematic diagram of the overall structure of the present utility model;

[0018] Figure 2 is a three-dimensional schematic diagram of the internal structure of the processing table of the present utility model;

[0019] Figure 3 is a schematic diagram of the structures of the first clamping plate and the second clamping plate of the present utility model;

[0020] Figure 4 is a cross-sectional view of the internal structures of the first clamping plate and the second clamping plate of the present utility model;

[0021] Figure 5 is a cross-sectional view of the internal structure of the bottom plate of the present utility model.

[0022] In the figure: 1, base plate; 11, empty slot; 2, turntable; 3, processing table; 31, cavity; 32, first chute; 33, second chute; 34, first through hole; 341, first runner; 35, second through hole; 351, second runner; 4, rotation mechanism; 41, rotating shaft; 42, motor; 43, driving gear; 44, driven gear; 5, first clamping plate; 51, first slider; 6, second clamping plate; 61, second slider; 7, adjustment mechanism; 71, first double lead screw; 72, second double lead screw; 73, first connecting block; 74, second connecting block; 8, mounting groove; 81, mounting rod; 811, limiting groove; 811a, first spring; 811b, positioning block; 9, mounting hole; 91, positioning hole; 92, moving rod; 93, second spring; 94, clamping block; 95, push rod. Detailed implementation mode

[0023] For the convenience of understanding the present utility model, the present utility model will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present utility model are given in the drawings. However, the present utility model can be implemented in different forms and is not limited to the embodiments described in the text. On the contrary, these embodiments are provided to make the disclosure of the present utility model more thorough and comprehensive.

[0024] It should be noted that when an element is referred to as "fixedly provided on" another element, it can be directly on the other element or there can be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this article are only for the purpose of illustration.

[0025] Unless otherwise defined, all technical and scientific terms used in this article have the same meaning as commonly understood by those skilled in the technical field to which the present utility model belongs. The terms used in the description of the present utility model in this article are only for the purpose of describing specific embodiments and are not intended to limit the present utility model. The term "and / or" used in this article includes any and all combinations of one or more of the related listed items.

[0026] Please refer to Figures 1 to 5, the present utility model provides a flip - able fixture for vacuum coating, including a bottom plate 1, a turntable 2 and a processing table 3. An empty slot 11 is provided inside the bottom plate 1. The turntable 2 is rotatably installed in the empty slot 11. A rotating mechanism 4 is provided inside the bottom plate 1 to control the rotation of the turntable 2. The processing table 3 is fixedly installed at the upper end of the turntable 2. Two detachable first clamping plates 5 and two detachable second clamping plates 6 are provided on the upper end surface of the processing table 3. The two first clamping plates 5 are arranged opposite to each other in the transverse direction of the processing table 3, and the two second clamping plates 6 are arranged opposite to each other in the longitudinal direction of the processing table 3. The inside of the processing table 3 has a cavity 31 structure. An adjusting mechanism 7 is provided in the cavity 31 to control the relative movement of the two first clamping plates 5 and the two second clamping plates 6 respectively. By controlling the rotation of the turntable 2 through the rotating mechanism 4, the processing table 3 is driven to rotate, thus facilitating the coating of both sides of the workpiece. By controlling the relative movement of the two first clamping plates 5 and the two second clamping plates through the adjusting mechanism 7, it is convenient to fix the workpiece on the processing table 3, thereby realizing the rapid fixation of workpieces of different specifications. By the detachable connection of the first clamping plate 5 and the second clamping plate 6 with the processing table 3, it is convenient to replace clamping plates of different shapes to adapt to workpieces of different shapes such as circular or square.

[0027] Please refer specifically to Figure 1 , Figure 5 , the rotating mechanism 4 includes a rotating shaft 41 and a motor 42. The lower end of the rotating shaft 41 is rotatably connected to the bottom of the empty slot 11, and the upper end of the rotating shaft 41 is fixedly connected to the turntable 2. The driving end of the motor 42 is fixedly installed with a driving gear 43, and a driven gear 44 is fixedly sleeved on the outer end surface of the rotating shaft 41. The driving gear 43 is meshed with the driven gear 44. By starting the motor 42 to drive the driving gear to rotate, the driven gear 44 and the rotating shaft 41 are driven to rotate, thereby driving the turntable 2 and the processing table 3 to rotate, facilitating the coating of both sides of the workpiece.

[0028] Please refer specifically to Figures 1 to 3 , two first sliding grooves 32 are symmetrically opened on the upper end surface of the processing table 3 in the transverse direction, and two second sliding grooves 33 are symmetrically opened on the upper end surface of the processing table 3 in the longitudinal direction. The lower ends of the first clamping plate 5 and the second clamping plate 6 are respectively fixed with a first sliding block 51 and a second sliding block 61. The first sliding block 51 is movably connected to the first sliding groove 32, and the second sliding block 61 is movably connected to the second sliding groove 33. By the cooperation of the first sliding block 51 and the second sliding block 61 with the first sliding groove 32 and the second sliding groove 33 respectively, it is convenient to control the relative sliding of the two first clamping plates 5 and the two second clamping plates 6 along the first sliding groove 32 and the second sliding groove 33 respectively.

[0029] Please refer specifically to Figures 1 to 3, the adjusting mechanism 7 includes a first bidirectional lead screw 71 and a second bidirectional lead screw 72. The first bidirectional lead screw 71 is arranged along the transverse direction of the cavity 31 and is rotatably connected to the inner wall of the cavity 31. The second bidirectional lead screw 72 is arranged along the longitudinal direction of the cavity 31 and is rotatably connected to the inner wall of the cavity 31. The second bidirectional lead screw 72 is installed below the first bidirectional lead screw 71 and is perpendicular to the first bidirectional lead screw 71. Two first connection blocks 73 are symmetrically threadedly connected to both ends of the outer surface of the first bidirectional lead screw 71. Two second connection blocks 74 are symmetrically threadedly connected to both ends of the outer surface of the second bidirectional lead screw 72. The lower end of the first slider 51 penetrates through the first chute 32 and extends into the cavity 31 and is fixedly connected to the first connection block 73. The lower end of the second slider 61 penetrates through the second chute 33 and extends into the cavity 31 and is fixedly connected to the second connection block 74. By driving the first bidirectional lead screw 71 to rotate, the relative movement of the two first connection blocks 73 is controlled. While the two first connection blocks 73 move relatively, they drive the two first sliders 51 to slide relatively along the first chute 32, thereby driving the two first clamping plates 5 to move relatively. By driving the second bidirectional lead screw 72 to rotate, the relative movement of the two second connection blocks 74 is controlled. While the two second connection blocks 74 move relatively, they drive the two second sliders 61 to slide relatively along the second chute 33, thereby driving the two second clamping plates 6 to move relatively. First through holes 34 and second through holes 35 are respectively formed in the side walls of two adjacent ends of the processing table 3. A first runner 341 is rotatably installed in the first through hole 34. The rotating shaft 41 of the first runner 341 penetrates through the first through hole 34 and is fixedly connected to the first bidirectional lead screw 71. A second runner 351 is rotatably installed in the second through hole 35. The rotating shaft 41 of the second runner 351 penetrates through the second through hole 35 and is fixedly connected to the second bidirectional lead screw 72. By rotating the first runner 341, it is convenient to drive the first bidirectional lead screw 71 to rotate. By rotating the second runner 351, it is convenient to drive the second bidirectional lead screw 72 to rotate.

[0030] Please refer to Figures 1 to 4, mounting grooves 8 are formed on the lower end faces of the first clamping plate 5 and the second clamping plate 6, mounting holes 9 are formed on the upper end faces of the first clamping plate 5 and the second clamping plate 6, positioning holes 91 are provided between the mounting grooves 8 and the mounting holes 9 and are in communication with each other, mounting rods 81 are fixedly provided at the upper ends of the first slider 51 and the second slider 61, and the mounting rods 81 are detachably connected to the mounting grooves 8. A limiting groove 811 is provided at one end of the mounting rod 81 close to the positioning hole 91, a first spring 811a and a positioning block 811b are provided in the limiting groove 811, two ends of the first spring 811a are respectively fixedly connected to the inner wall of the limiting groove 811 and the end face of the positioning block 811b, and one end of the positioning block 811b away from the first spring 811a extends out of the limiting groove 811 and is clamped with the positioning hole 91. By inserting the mounting rod 81 along the mounting groove 8, the inner wall of the mounting groove 8 drives the positioning block 811b to move into the limiting groove 811 and compress the first spring 811a. After the mounting rod 81 is completely inserted into the mounting groove 8, the elastic force of the first spring 811a drives the positioning block 811b to reset, so that the positioning block 811b is clamped into the positioning hole 91 to fix the clamping plate. A moving rod 92 and a second spring 93 are provided in the mounting hole 9. A clamping block 94 having the same shape as the positioning hole 91 is integrally formed at one end of the lower end of the moving rod 92 close to the positioning hole 91. The upper end of the moving rod 92 extends out of the mounting hole 9 and is fixedly provided with a push rod 95. Two ends of the second spring 93 are respectively fixedly connected to the inner wall of the mounting hole 9 and the end face of the moving rod 92. By pushing the push rod 95 to drive the moving rod 92 to move towards one end in the mounting hole 9 and compress the second spring 93, it is convenient for the clamping block 94 to be inserted into the positioning hole 91, and then the positioning block 811b is pushed out of the positioning hole 91, so that the positioning block 811b is separated from the positioning hole 91, thereby facilitating the removal of the clamping plate for replacement. After releasing the push rod 95, the elastic force of the second spring 93 drives the moving rod 92 to reset.

[0031] The implementation principle of a flipable jig for vacuum coating of the present utility model is as follows:

[0032] Place the workpiece on the processing table 3. Rotate the first runner 341 to drive the first bidirectional lead screw 71 to rotate, control the relative movement of the two first connecting blocks 73. While the two first connecting blocks 73 move relatively, drive the two first sliders 51 to slide relatively along the first chute 32, and then drive the two first clamping plates 5 to move relatively, so as to clamp the left and right ends of the workpiece. Rotate the second runner 351 to drive the second bidirectional lead screw 72 to rotate, control the relative movement of the two second connecting blocks 74. While the two second connecting blocks 74 move relatively, drive the two second sliders 61 to slide relatively along the second chute 33, and then drive the two second clamping plates 6 to move relatively, so as to clamp the front and rear ends of the workpiece, thus realizing the rapid fixation of the workpiece; When it is necessary to replace the clamping plates of different shapes, push the push rod 95 to drive the moving rod 92 to move towards one end in the mounting hole 9 and squeeze the second spring 93, which is convenient for the clamping block 94 to insert into the positioning hole 91, and then push the positioning block 811b out of the positioning hole 91, so that the positioning block 811b moves into the limiting groove 811 and squeezes the first spring 811a. When the positioning block 811b is separated from the positioning hole 91, it is convenient to remove the clamping plate for replacement.

[0033] The above has made an exemplary description of the present invention in conjunction with the accompanying drawings. Obviously, the specific implementation of the present invention is not limited by the above methods. As long as such non-substantial improvements are made by adopting the method concept and technical solution of the present invention, or the concept and technical solution of the present invention are directly applied to other occasions without improvement, they are all within the protection scope of the present invention.

Claims

1. A flip - type fixture for vacuum coating, comprising a bottom plate (1), a turntable (2) and a processing table (3), characterized in that: The bottom plate (1) is internally provided with an empty slot (11), the turntable (2) is rotatably installed in the empty slot (11), a rotating mechanism (4) is provided inside the bottom plate (1) to control the rotation of the turntable (2), the processing table (3) is fixedly installed on the upper end of the turntable (2), two detachable first clamping plates (5) and two detachable second clamping plates (6) are arranged on the upper end surface of the processing table (3), the two first clamping plates (5) are arranged oppositely along the transverse direction of the processing table (3), the two second clamping plates (6) are arranged oppositely along the longitudinal direction of the processing table (3), the inside of the processing table (3) is of a cavity (31) structure, and an adjusting mechanism (7) is arranged in the cavity (31) to control the relative movement of the two first clamping plates (5) and the two second clamping plates (6) respectively.

2. The jig for vacuum coating that can be flipped according to claim 1, wherein: The rotating mechanism (4) includes a rotating shaft (41) and a motor (42), the lower end of the rotating shaft (41) is rotatably connected to the bottom of the empty slot (11), the upper end of the rotating shaft (41) is fixedly connected to the turntable (2), the driving end of the motor (42) is fixedly installed with a driving gear (43), the outer end surface of the rotating shaft (41) is fixedly sleeved with a driven gear (44), and the driving gear (43) is meshed with the driven gear (44).

3. The jig for vacuum coating that can be flipped according to claim 1, characterized in that: Two first sliding grooves (32) are symmetrically formed on the upper end surface of the processing table (3) along the transverse direction, two second sliding grooves (33) are symmetrically formed on the upper end surface of the processing table (3) along the longitudinal direction, the lower ends of the first clamping plate (5) and the second clamping plate (6) are respectively fixed with a first sliding block (51) and a second sliding block (61), the first sliding block (51) is movably connected to the first sliding groove (32), and the second sliding block (61) is movably connected to the second sliding groove (33).

4. The jig for vacuum coating that can be flipped according to claim 3, wherein: The adjusting mechanism (7) includes a first bidirectional lead screw (71) and a second bidirectional lead screw (72), the first bidirectional lead screw (71) is arranged along the transverse direction of the cavity (31) and is rotatably connected to the inner wall of the cavity (31), the second bidirectional lead screw (72) is arranged along the longitudinal direction of the cavity (31) and is rotatably connected to the inner wall of the cavity (31), the second bidirectional lead screw (72) is installed below the first bidirectional lead screw (71) and is perpendicular to the first bidirectional lead screw (71).

5. The fixture for vacuum coating that can be flipped according to claim 4, characterized in that: Two first connecting blocks (73) are symmetrically threadedly connected to the two ends of the outer surface of the first bidirectional lead screw (71), two second connecting blocks (74) are symmetrically threadedly connected to the two ends of the outer surface of the second bidirectional lead screw (72), the lower end of the first sliding block (51) penetrates through the first sliding groove (32) and then extends into the cavity (31) and is fixedly connected to the first connecting block (73), and the lower end of the second sliding block (61) penetrates through the second sliding groove (33) and then extends into the cavity (31) and is fixedly connected to the second connecting block (74).

6. The jig for vacuum coating that can be flipped according to claim 5, wherein: On two adjacent side walls of the processing table (3), a first through hole (34) and a second through hole (35) are respectively formed. A first runner (341) is rotatably installed in the first through hole (34). A rotating shaft (41) of the first runner (341) penetrates through the first through hole (34) and is fixedly connected to the first bidirectional lead screw (71). A second runner (351) is rotatably installed in the second through hole (35). A rotating shaft (41) of the second runner (351) penetrates through the second through hole (35) and is fixedly connected to the second bidirectional lead screw (72).

7. The jig for vacuum coating that can be flipped according to claim 3, characterized in that, Installation grooves (8) are formed in lower end faces of the first clamping plate (5) and the second clamping plate (6). Installation holes (9) are formed in upper end faces of the first clamping plate (5) and the second clamping plate (6). A positioning hole (91) is formed to communicate between the installation groove (8) and the installation hole (9). Installation rods (81) are fixedly installed at upper ends of the first slider (51) and the second slider (61). The installation rods (81) are detachably connected to the installation grooves (8).

8. A flipable fixture for vacuum coating according to claim 7, characterized in that, A limiting groove (811) is formed at one end of the installation rod (81) close to the positioning hole (91). A first spring (811a) and a positioning block (811b) are arranged in the limiting groove (811). Two ends of the first spring (811a) are respectively fixedly connected to an inner wall of the limiting groove (811) and an end face of the positioning block (811b). One end of the positioning block (811b) away from the first spring (811a) extends out of the limiting groove (811) and is clamped with the positioning hole (91).

9. The jig for vacuum coating that can be flipped according to claim 8, characterized in that, A moving rod (92) and a second spring (93) are arranged in the installation hole (9). A clamping block (94) having a shape identical to that of the positioning hole (91) is integrally formed at one end of the lower end of the moving rod (92) close to the positioning hole (91). The upper end of the moving rod (92) extends out of the installation hole (9) and is fixedly connected to a push rod (95). Two ends of the second spring (93) are respectively fixedly connected to an inner wall of the installation hole (9) and an end face of the moving rod (92).

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