High-rigidity gantry supporting structure suitable for deep ultraviolet objective lens detection

Abstract

The utility model provides a high-rigidity gantry supporting structure suitable for deep ultraviolet objective lens detection, belongs to the field of optical detection supporting structures, and solves the problems that an existing structure cannot provide a double-layer mounting structure and does not have a reserved mounting opening. The two supporting side plates are fixedly arranged at the two ends of the supporting top plate correspondingly. The two supporting fixing plates are fixedly connected with the two supporting side plates correspondingly, the two upper supporting vertical plates are arranged in parallel and located at the two ends of the upper supporting transverse plate correspondingly, the upper supporting vertical plates are fixedly connected with the upper supporting transverse plate and the supporting top plate correspondingly, and the two reinforcing side plate sets are located on the two sides of the supporting top plate correspondingly. The reinforcing side plate set comprises a first reinforcing side plate and a second reinforcing side plate, the first reinforcing side plate and the second reinforcing side plate are both fixedly connected with the upper supporting vertical plate, the supporting top plate, the supporting side plate and the supporting fixing plate, the first reinforcing side plate is provided with a first installation opening, and the second reinforcing side plate is provided with a second installation opening. Installation positions can be provided for the reflector and the angle adjusting device, and a larger operation space is provided.

Description

Technical Field

[0001] The utility model belongs to the technical field of optical detection support structures, and particularly relates to a high-rigidity gantry support structure suitable for deep ultraviolet objective lens detection. Background Art

[0002] Gantry support structures are used in various mechanical industries and play an important role. In most cases, the main function of a gantry support structure is to support and fix other products. Existing gantry support structures suitable for optical detection are horizontal and vertical, and mostly designed as single-layer structures. However, when detecting a deep ultraviolet objective lens, a reflector and an angle adjustment device need to be installed, which requires a double-layer installation structure. The existing gantry support structures cannot provide a suitable installation position, and there is no installation opening reserved for facilitating the installation of structures such as reflectors, resulting in a narrow installation space, inconvenient operation, and low installation efficiency. Summary of the Utility Model

[0003] In view of this, in order to solve the problem that the existing gantry support structure cannot provide a suitable installation position for structures such as reflectors and angle adjustment devices during the detection of deep ultraviolet objective lenses, and there is no installation opening reserved for facilitating the installation of structures such as reflectors, resulting in a narrow installation space, inconvenient operation, and low installation efficiency, the utility model proposes a high-rigidity gantry support structure suitable for deep ultraviolet objective lens detection.

[0004] To achieve the above object, the utility model adopts the following technical solutions:

[0005] A high-rigidity gantry support structure suitable for deep ultraviolet objective lens detection, comprising:

[0006] A main support structure, including a support top plate, two support side plates, and two support fixing plates. The two support side plates are both perpendicular to the support top plate and are respectively fixedly arranged at both ends of the support top plate; the two support fixing plates are respectively fixedly connected to the lower ends of the two support side plates, and the support fixing plates are parallel to the support top plate and are respectively located on both sides of the support side plates;

[0007] An upper support cross plate and two upper support vertical plates. The two upper support vertical plates are parallel to each other and are respectively located at both ends of the upper support cross plate. One end of the upper support vertical plate is fixedly connected to the upper support cross plate, and the other end is fixedly connected to the support top plate. The upper support cross plate is parallel to the support top plate;

[0008] Two reinforcing side plate groups are respectively located on both sides in the width direction of the support top plate. Each reinforcing side plate group includes a first reinforcing side plate and a second reinforcing side plate. The first reinforcing side plate and the second reinforcing side plate are arranged at intervals along the length direction of the support top plate. One upper support vertical plate, the support top plate, one support side plate and one support fixing plate are all fixedly connected to the first reinforcing side plate, and the other upper support vertical plate, the support top plate, the other support side plate and the other support fixing plate are all fixedly connected to the second reinforcing side plate;

[0009] The first reinforcing side plate is provided with a first installation opening, and the second reinforcing side plate is provided with a second installation opening.

[0010] As a preferred scheme of the high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection, the support top plate is provided with a third installation opening, and the third installation opening is located below the upper support cross plate.

[0011] As a preferred scheme of the high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection, the high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection further includes two intermediate reinforcing plates. One support side plate and one support fixing plate are both fixedly connected to one intermediate reinforcing plate, and the other support side plate and the other support fixing plate are both fixedly connected to the other intermediate reinforcing plate.

[0012] As a preferred scheme of the high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection, the intermediate reinforcing plate is triangular.

[0013] As a preferred scheme of the high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection, the high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection further includes a reinforcing cross beam, and the reinforcing cross beam is fixedly arranged below the support top plate.

[0014] As a preferred scheme of the high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection, the reinforcing cross beam is provided with a first notch, and the first notch is arranged opposite to the first installation opening.

[0015] As a preferred scheme of the high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection, the reinforcing cross beam is provided with a second notch, and the second notch is located below the third installation opening.

[0016] As a preferred scheme of the high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection, the support top plate, the two support side plates, the two support fixing plates, the upper support cross plate, the two upper support vertical plates and the two reinforcing side plate groups are connected by screws.

[0017] Compared with the prior art, the beneficial effect of a high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection provided by the utility model is:

[0018] The present utility model provides a high-rigidity gantry support structure applicable to the detection of deep ultraviolet objectives. In this high-rigidity gantry support structure applicable to the detection of deep ultraviolet objectives, an upper support cross plate and two upper support vertical plates are provided above the main support structure. The upper support cross plate and the support top plate form a double-layer installation structure. When detecting a deep ultraviolet objective, multiple mirrors need to be installed, and an angle adjustment device is used to adjust the angle and position of the mirrors. This double-layer installation structure provides an installation position for one of the mirrors and the angle adjustment device. Additionally, a mirror needs to be installed at the included angle between the support top plate and the support side plate. Since both sides of this included angle are blocked by two reinforced side plate groups, a first installation opening is provided on the first reinforced side plate, and a second installation opening is provided on the second reinforced side plate, so as to provide a larger operating space for installing the mirror at the included angle and improve the installation efficiency. Furthermore, two reinforced side plate groups are provided, respectively located on both sides of the main support structure, which can improve the overall stability of the structure. This high-rigidity gantry support structure applicable to the detection of deep ultraviolet objectives has a double-layer installation structure, provides an installation position for the mirror and the angle adjustment device, and is provided with a first installation opening and a second installation opening, which provides a larger operating space for installing the mirror at the included angle, improves the installation efficiency, and has a compact structure, high stability, and the modal frequency is increased by about 300%. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The drawings constituting a part of the present utility model are used to provide a further understanding of the present utility model. The schematic embodiments of the present utility model and their descriptions are used to explain the present utility model and do not constitute an improper limitation to the present utility model. In the drawings:

[0020] Figure 1 FIG. 10 is a schematic structural diagram of the high-rigidity gantry support structure applicable to the detection of deep ultraviolet objectives provided by a specific embodiment of the present utility model from a first perspective;

[0021] Figure 2 FIG. 14 is a front view of the high-rigidity gantry support structure applicable to the detection of deep ultraviolet objectives provided by a specific embodiment of the present utility model;

[0022] Figure 3 FIG. 18 is a right view of the high-rigidity gantry support structure applicable to the detection of deep ultraviolet objectives provided by a specific embodiment of the present utility model;

[0023] Figure 4 FIG. 22 is a schematic structural diagram of the high-rigidity gantry support structure applicable to the detection of deep ultraviolet objectives provided by a specific embodiment of the present utility model from a second perspective;

[0024] Figure 5 FIG. 26 is an assembly schematic diagram of the high-rigidity gantry support structure applicable to the detection of deep ultraviolet objectives provided by a specific embodiment of the present utility model with a mirror and an angle adjustment device.

[0025] In the figures:

[0026] 1. Support top plate; 2. Support side plate; 3. Support fixed plate; 4. Upper support vertical plate; 5. Upper support horizontal plate; 6. First reinforcing side plate; 7. Second reinforcing side plate; 8. Reinforcing cross beam; 9. Second installation opening; 10. First installation opening; 11. Third installation opening; 12. Intermediate reinforcing plate; 13. Angle adjustment device; 14. Reflector. Specific implementation manner

[0027] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. It should be noted that, without conflict, the embodiments in the present invention and the features in the embodiments may be combined with each other. The described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments.

[0028] In the description of the present invention, unless otherwise clearly defined and limited, the terms "connected", "connected", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] In the present invention, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include direct contact between the first and second features, or may include the first and second features not being in direct contact but being in contact through other features therebetween. Moreover, the first feature being "above", "above", and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature. The first feature being "below", "below", and "under" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature has a lower horizontal height than the second feature.

[0030] In the description of this embodiment, the orientation or positional relationship terms such as "above", "below", "right", etc. are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention. In addition, the terms "first" and "second" are only used for differentiation in description and do not have special meanings.

[0031] See Figures 1-5To describe this embodiment, the present utility model provides a high-rigidity gantry support structure applicable to the detection of deep ultraviolet objectives. The high-rigidity gantry support structure applicable to the detection of deep ultraviolet objectives includes a main support structure, an upper support cross plate 5, two upper support vertical plates 4, and two strengthening side plate groups. The main support structure includes a support top plate 1, two support side plates 2, and two support fixing plates 3. The two support side plates 2 are both vertically arranged with respect to the support top plate 1, and the two support side plates 2 are respectively fixedly arranged at both ends of the support top plate 1; the two support fixing plates 3 are respectively fixedly connected to the lower ends of the two support side plates 2, and the support fixing plates 3 are arranged parallel to the support top plate 1 and are respectively located on both sides of the support side plates 2; the two upper support vertical plates 4 are arranged parallel to each other and are respectively located at both ends of the upper support cross plate 5. One end of the upper support vertical plate 4 is fixedly connected to the upper support cross plate 5, and the other end is fixedly connected to the support top plate 1. The upper support cross plate 5 is arranged parallel to the support top plate 1; the two strengthening side plate groups are respectively located on both sides in the width direction of the support top plate 1. Each strengthening side plate group includes a first strengthening side plate 6 and a second strengthening side plate 7. The first strengthening side plate 6 and the second strengthening side plate 7 are arranged at intervals along the length direction of the support top plate 1, and one upper support vertical plate 4, the support top plate 1, one support side plate 2, and one support fixing plate 3 are all fixedly connected to the first strengthening side plate 6, and the other upper support vertical plate 4, the support top plate 1, the other support side plate 2, and the other support fixing plate 3 are all fixedly connected to the second strengthening side plate 7; the first strengthening side plate 6 is provided with a first installation opening 10, and the second strengthening side plate 7 is provided with a second installation opening 9.

[0032] For the high-rigidity gantry support structure applicable to the detection of deep ultraviolet objectives, an upper support cross plate 5 and two upper support vertical plates 4 are provided above the main support structure. The upper support cross plate 5 and the support top plate 1 form a double-layer installation structure. When detecting deep ultraviolet objectives, multiple mirrors 14 need to be installed, and an angle adjustment device 13 is used to adjust the angle and position of the mirror 14. This double-layer installation structure provides an installation position for one of the mirrors 14 and the angle adjustment device 13. Also, the mirror 14 needs to be installed at the angle between the support top plate 1 and the support side plate 2. Since both sides of this angle are blocked by the two strengthening side plate groups, a first installation opening 10 is provided on the first strengthening side plate 6, and a second installation opening 9 is provided on the second strengthening side plate 7, so as to provide a larger operation space for installing the mirror 14 at the angle, improving the installation efficiency. In addition, two strengthening side plate groups are provided, respectively located on both sides of the main support structure, which can improve the overall stability of the structure. The high-rigidity gantry support structure applicable to the detection of deep ultraviolet objectives has a double-layer installation structure, provides an installation position for the mirror 14 and the angle adjustment device 13, and is provided with a first installation opening 19 and a second installation opening 9, providing a larger operation space for installing the mirror 14 at the angle, improving the installation efficiency, and having a compact structure, high stability, and the modal frequency is increased by about 300%.

[0033] As Figure 5As shown in the figure, the angle adjustment device 13 is installed at the double-layer installation structure formed by the upper support cross plate 5 and the support top plate 1. One reflecting mirror 14 is installed below the angle adjustment device 13, and the other reflecting mirror 14 is installed at the included angle between the support top plate 1 and one support side plate 2. The second installation opening 9 on the second reinforcing side plate 7 provides a larger operating space when installing the reflecting mirror 14 at the included angle. The first installation opening 10 on the first reinforcing side plate 6 is reserved. If it is necessary to install the reflecting mirror 14 at the included angle between the support top plate 1 and the other support side plate 2, the first installation opening 10 can provide a larger operating space.

[0034] In this embodiment, the first reinforcing side plate 6 and the second reinforcing side plate 7 have the same structure, both having a first part, a second part, and a third part. The first part and the third part are in the shape of a right triangle. The two right sides of the first part are respectively fixedly connected to the upper support vertical plate 4 and the support top plate 1, and the two right sides of the third part are respectively fixedly connected to the support side plate 2 and the support fixing plate 3. It can be understood that the first part, the second part, and the third part are an integral structure.

[0035] Optionally, the support top plate 1 is provided with a third installation opening 11, and the third installation opening 11 is located below the upper support cross plate 5. Providing the third installation opening 11 can provide a larger space for the installation of the reflecting mirror 14 and the angle adjustment device 13, facilitating the installation operation.

[0036] Optionally, the high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection further includes two intermediate reinforcing plates 12. One support side plate 2 and one support fixing plate 3 are both fixedly connected to one intermediate reinforcing plate 12, and the other support side plate 2 and the other support fixing plate 3 are both fixedly connected to the other intermediate reinforcing plate 12. Providing the intermediate reinforcing plates 12 can improve the structural strength and the stability of the structure. Optionally, the intermediate reinforcing plate 12 is triangular.

[0037] Optionally, the high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection further includes a reinforcing cross beam 8, and the reinforcing cross beam 8 is fixedly arranged below the support top plate 1. Providing the reinforcing cross beam 8 can improve the structural strength and the stability of the structure.

[0038] Optionally, the reinforcing cross beam 8 is provided with a first notch, and the first notch is arranged opposite to the first installation opening 10. Providing the first notch can prevent the reinforcing cross beam 8 from hindering the installation of the reflecting mirror 14.

[0039] Optionally, the reinforcing cross beam 8 is provided with a second notch, and the second notch is located below the third installation opening 11. Providing the second notch can prevent the reinforcing cross beam 8 from hindering the installation of the reflecting mirror 14.

[0040] Optionally, the support top plate 1, the two support side plates 2, the two support fixing plates 3, the upper support cross plate 5, the two upper support vertical plates 4 and the two reinforcing side plate groups are connected by screws.

[0041] Among them, the support top plate 1, the support side plate 2 and the support fixing plate 3 are fixedly connected by internal hexagon screws. The upper support vertical plate 4 and the support top plate 1 are fixedly connected by internal hexagon screws. The upper support cross plate 5 and the upper support vertical plate 4 are fixedly connected by internal hexagon screws. One upper support vertical plate 4, the support top plate 1, one support side plate 2 and one support fixing plate 3 are all fixedly connected to the first reinforcing side plate 6 by internal hexagon screws. The other upper support vertical plate 4, the support top plate 1, the other support side plate 2 and the other support fixing plate 3 are all fixedly connected to the second reinforcing side plate 7 by internal hexagon screws. The middle reinforcing plate 12 and the support side plate 2 are fixedly connected by internal hexagon screws.

[0042] Obviously, the embodiments of the present invention disclosed above are only used to help explain the present invention. The embodiments do not describe all the details in detail, nor do they limit the present invention to the specific embodiments described. According to the content of this specification, many modifications and changes can be made. These embodiments are selected and specifically described in this specification to better explain the principle and practical application of the present invention, so that those skilled in the art can understand and utilize the present invention well. It is not necessary and impossible to enumerate all the embodiments here.

Claims

1. A high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection, characterized in that Comprising: A main support structure, including a support top plate (1), two support side plates (2), and two support fixing plates (3). The two support side plates (2) are both vertically arranged with respect to the support top plate (1), and the two support side plates (2) are respectively fixedly arranged at both ends of the support top plate (1). The two support fixing plates (3) are respectively fixedly connected to the lower ends of the two support side plates (2), and the support fixing plates (3) are arranged parallel to the support top plate (1) and are respectively located on both sides of the support side plates (2). An upper support cross plate (5) and two upper support vertical plates (4). The two upper support vertical plates (4) are arranged in parallel and are respectively located at both ends of the upper support cross plate (5). One end of the upper support vertical plate (4) is fixedly connected to the upper support cross plate (5), and the other end is fixedly connected to the support top plate (1). The upper support cross plate (5) is arranged parallel to the support top plate (1). Two strengthening side plate groups, which are respectively located on both sides in the width direction of the support top plate (1). The strengthening side plate group includes a first strengthening side plate (6) and a second strengthening side plate (7). The first strengthening side plate (6) and the second strengthening side plate (7) are arranged at intervals along the length direction of the support top plate (1), and one upper support vertical plate (4), the support top plate (1), one support side plate (2), and one support fixing plate (3) are all fixedly connected to the first strengthening side plate (6), and the other upper support vertical plate (4), the support top plate (1), the other support side plate (2), and the other support fixing plate (3) are all fixedly connected to the second strengthening side plate (7). The first strengthening side plate (6) is provided with a first installation opening (10), and the second strengthening side plate (7) is provided with a second installation opening (9).

2. The high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection according to claim 1, wherein: The support top plate (1) is provided with a third installation opening (11), and the third installation opening (11) is located below the upper support cross plate (5).

3. The high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection according to claim 1, wherein: It further includes two intermediate strengthening plates (12). One support side plate (2) and one support fixing plate (3) are both fixedly connected to one intermediate strengthening plate (12), and the other support side plate (2) and the other support fixing plate (3) are both fixedly connected to the other intermediate strengthening plate (12).

4. The high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection according to claim 3, wherein: The intermediate strengthening plate (12) is triangular in shape.

5. The high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection according to claim 2, wherein: It further includes a strengthening cross beam (8), and the strengthening cross beam (8) is fixedly arranged below the support top plate (1).

6. The high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection according to claim 5, characterized in that: The strengthening cross beam (8) is provided with a first notch, and the first notch is arranged opposite to the first installation opening (10).

7. The high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection according to claim 5, characterized in that: The strengthening cross beam (8) is provided with a second notch, and the second notch is located below the third installation opening (11).

8. The high-rigidity gantry support structure applicable to deep ultraviolet objective lens detection according to claim 1, wherein: The support top plate (1), the two support side plates (2), the two support fixing plates (3), the upper support cross plate (5), the two upper support vertical plates (4), and the two strengthening side plate groups are connected by screws.

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