Gas distribution device for graphite powder

Abstract

The utility model discloses a gas distribution device for graphite powder, and belongs to the field of carbon-based material production equipment. The technical problem that when high-temperature purification equipment purifies graphite powder, the purity of the graphite powder is not high is solved. According to the technical scheme, the gas distribution device comprises a gas distribution device body, one end face of the gas distribution device body is provided with a plurality of gas channels, the gas channels are distributed in a radial mode, each gas channel is provided with a plurality of first gas holes, the first gas holes in each gas channel are linearly distributed, and second gas holes are formed in the positions, communicated with the gas channels, of the gas distribution device body. The first air holes and the second air holes are linearly arranged, a plurality of positioning grooves are formed in the other end face of the air distribution device body, the positioning grooves are used for containing object carrying devices, ventilation pipelines on the object carrying devices correspond to and communicate with the first air holes in a one-to-one mode, and ventilation pipelines correspond to and communicate with the second air holes in a one-to-one mode; the utility model is applied to high-temperature purification equipment.

Description

Technical Field

[0001] The utility model provides a gas separation device for graphite powder, belonging to the technical field of carbon-based material production equipment. Background Art

[0002] When high temperature purification equipment is used to purify graphite powder, the graphite powder needs to be placed in a graphite crucible and used in conjunction with the gas separation device of the high temperature purification equipment. The gas channel of the traditional gas separation device adopts a "snowflake shape", such as Figure 1-7 As shown, the introduced process gas flows from point A at the bottom through the "snowflake-shaped" air channel to the entire area, and diffuses into the vent pipe in the middle of the bottom of the crucible through the first air holes distributed in each area. This "snowflake-shaped" gas distribution device can ensure that the process gas is evenly dispersed throughout the purification chamber. However, for products that need to be placed in the crucible for purification, such as purified graphite powder, the distributed first air holes and the vent pipe in the middle of the bottom of the graphite crucible are not one-to-one corresponding. During the placement process, some graphite crucibles do not have the first air holes at the vent pipe position at the bottom. This results in the purified process gas being unable to enter the crucible through the vent pipe at the bottom of the crucible to react with the impurities in the graphite powder, affecting the purity of the graphite powder, and thus making the graphite powder unable to meet the purity requirements of the graphite powder required for the third-generation semiconductors. Utility Model Content

[0003] In order to solve the technical problem that impurities in the crucible are not reacted sufficiently when high-temperature purification equipment is used to purify graphite powder, thereby affecting the purity of the graphite powder, the utility model proposes a gas separator for graphite powder, the purpose of which is to improve the purity of the extracted graphite powder by improving the hardware structure of the gas separator.

[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is as follows: a gas separator for graphite powder, comprising a gas separator body, wherein one end surface of the gas separator body is provided with a plurality of gas channels, wherein the plurality of gas channels are radially distributed, one end of the plurality of gas channels is interconnected and converges at the center of the gas separator body, and the other ends of the plurality of gas channels are dispersed at the edge of the gas separator body;

[0005] Each airway is provided with a plurality of first air holes, and the plurality of first air holes on each airway are arranged linearly;

[0006] A second air hole is provided at a position where multiple air passages communicate on the main body of the air separation device;

[0007] The first pores and the second pores are arranged linearly;

[0008] The other end surface of the gas distribution device body is provided with a plurality of positioning grooves, the positioning grooves are used to place the loading device, and a plurality of ventilation pipes are provided in the loading device, the ventilation pipes correspond to and communicate with the first air holes one by one, and the ventilation pipes correspond to and communicate with the second air holes one by one.

[0009] Furthermore, each of the positioning grooves corresponds to at least one first air hole.

[0010] Furthermore, the loading device is a crucible.

[0011] Furthermore, the airway is a straight-through structure.

[0012] Furthermore, the diameter of the second pore is smaller than the diameter of the first pore.

[0013] Furthermore, the main body of the gas separation device is a circular structure.

[0014] Furthermore, the ventilation pipe is provided with a plurality of ventilation holes.

[0015] Furthermore, the first air hole is a circular hole, the second air hole is a circular hole, and the cross section of the ventilation duct is a circular structure.

[0016] Furthermore, the ventilation holes are circular holes.

[0017] Furthermore, the number of the airways is twelve, and the number of the positioning grooves is seventeen.

[0018] The beneficial effects of the present invention compared to the prior art are as follows:

[0019] The air duct of the utility model is a straight-through structure, and multiple air ducts are arranged radially. Compared with the traditional "snowflake-shaped" air duct, it is more conducive to the circulation of process gas. Combined with the setting of the first air hole and the second air hole, it can ensure that process gas is passed into the ventilation pipe in each carrier device, so that the graphite powder in the carrier device can fully react, thereby ensuring the purity of the extracted graphite powder. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention will be further described below with reference to the accompanying drawings:

[0021] Figure 1 This is a schematic diagram of the front structure of a traditional gas separator;

[0022] Figure 2 This is a schematic diagram of the back structure of a traditional gas separation device;

[0023] Figure 3 This is the main view of a traditional gas distributor;

[0024] Figure 4 This is the rear view of a conventional gas distributor;

[0025] Figure 5 It is a top view of a traditional gas separation device;

[0026] Figure 6 This is the main view of the traditional gas separator and crucible after assembly;

[0027] Figure 7 For the Figure 6 Cross-sectional view along line AA;

[0028] Figure 8 This is a schematic structural diagram of the gas separation device body of the present utility model;

[0029] Figure 9 This is a front view of the gas distribution device body of the utility model;

[0030] Figure 10 This is a rear view of the gas distribution device body of the present utility model;

[0031] Figure 11 This is a top view of the main body of the gas distribution device of the present utility model;

[0032] Figure 12 It is a side view of the main body of the gas distribution device of the present utility model;

[0033] Figure 13 This is a schematic diagram of the positional relationship between the positioning groove and the airway of the present utility model;

[0034] Figure 14 This is a schematic diagram of the structure of the gas separation device body and the crucible after assembly of the utility model;

[0035] Figure 15 The main view of the gas separator and the crucible after assembly;

[0036] Figure 16 For the Figure 15 Cross-sectional view along the midline BB;

[0037] In the figure: 1 is the air distribution device body, 2 is the air channel, 3 is the first air hole, 4 is the second air hole, 5 is the positioning groove, 6 is the loading device, 7 is the ventilation pipe, and 8 is the ventilation hole. DETAILED DESCRIPTION

[0038] In the present invention, unless otherwise specified, directional words such as "up, down, top, bottom" are usually used with reference to the directions shown in the drawings, or with reference to the components themselves in the vertical, perpendicular or gravity direction; similarly, for ease of understanding and description, "inside and outside" refer to the inside and outside relative to the outline of each component itself, but the above directional words are not used to limit the present invention.

[0039] like Figures 1 to 16 As shown, the present invention provides a gas separator for graphite powder, comprising a gas separator body 1. The gas separator body 1 is a circular structure, and one end surface of the gas separator body 1 is provided with a plurality of gas channels 2. In this embodiment, twelve gas channels 2 are preferably provided. The gas channels 2 are straight-through structures to facilitate the flow of process gases. The multiple gas channels 2 are radially distributed, with one end of the multiple gas channels 2 interconnecting and converging at the center of the gas separator body 1, and the other ends of the multiple gas channels 2 are dispersed at the edge of the gas separator body 1.

[0040] Each air channel 2 is provided with a plurality of first air holes 3, which are arranged linearly. In this embodiment, each air channel 2 is provided with two first air holes 3. A second air hole 4 is provided at a location where the multiple air channels 2 communicate on the air separation device body 1, and the first air hole 3 and the second air hole 4 are arranged linearly.

[0041] The other end surface of the gas separator body 1 is provided with several positioning grooves 5 for accommodating a carrier 6, which is a crucible containing graphite powder. Several ventilation pipes 7 are provided through the bottom of the carrier 6. In this embodiment, one ventilation pipe 7 is preferably provided at the center of the bottom of the carrier 6. Each ventilation pipe 7 corresponds to and communicates with each of the first air holes 3, and also corresponds to and communicates with each of the second air holes 4. Several ventilation holes 8 are provided in the ventilation pipes 7 to facilitate full contact and reaction between the process gas and the graphite powder, thereby improving purification efficiency.

[0042] Each positioning groove 5 corresponds to at least one first air hole 3, and the positioning groove 5 at the center position of the air separation device body 1 corresponds to the second air hole 4. In this embodiment, each positioning groove 5 corresponds to a first air hole 3. Specifically, multiple positioning grooves 5 are arranged in a ring shape to form a first ring carrier groove, a second ring carrier groove, and a third ring carrier groove. The first ring carrier groove is located at the center position of the air separation device body 1 and is arranged with one positioning groove 5; the second ring carrier groove is centered on the first ring carrier groove and is arranged with four positioning grooves 5; the third ring carrier groove is centered on the first ring carrier groove and is arranged with twelve positioning grooves 5. In this embodiment, a total of seventeen positioning grooves 5 are provided, and they are the same size. The positioning groove 5 on the first ring carrier groove corresponds to the second air hole 4, and the positioning grooves 5 on the second and third ring carrier grooves correspond one-to-one to the first air hole 3. To ensure uniform process gas flow into the multiple carriers 6 and improve the purity of the graphite powder, the diameter of the second air holes 4 is smaller than that of the first air holes 3. The diameter of the first air holes 3 corresponding to the second ring carrier groove is smaller than that of the first air holes 3 corresponding to the third ring carrier groove. In other words, the diameter of the first air holes 3 gradually increases from the center of the gas distributor body 1 to the edge of the gas distributor body 1. To ensure more uniform ventilation within the carrier 6 located on the third ring carrier groove, multiple first air holes 3 can be provided on the third ring carrier groove, but their ventilation capacity must be guaranteed to ensure the purity of the graphite powder in the corresponding carrier 6.

[0043] The first air hole 3, the second air hole 4 and the ventilation hole 8 are preferably circular holes, and the cross section of the ventilation pipe 7 is a circular structure.

[0044] When using the gas separator of the present invention to purify graphite powder, the process gas flows from point A at the bottom center of the gas separator along the radial air channel 2, and enters the interior of the carrier device 6 through the air channel 2, the first air hole 3, and the second air hole 4. No air holes are set on the gas separator where the carrier device 6 is not placed, ensuring that the process gas will enter the crucible through the first air hole 3, the second air hole 4 and the ventilation pipe 7 to react with the graphite powder, thereby ensuring that the purity of the graphite powder meets the requirements of the third-generation semiconductor for high-purity graphite powder.

[0045] Regarding the specific structure of the present invention, it should be noted that the connection relationship between the various component modules adopted in the present invention is definite and feasible. Except for the special instructions in the embodiments, the specific connection relationship can bring about corresponding technical effects and solve the technical problems raised by the present invention without relying on the execution of the corresponding software program. The components, modules, models of specific components appearing in the present invention, the connection methods between each other, and the conventional usage methods and expected technical effects brought about by the above-mentioned technical features, except for the specific instructions, all belong to the disclosed contents in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by technical personnel in this field before the application date, or belong to the existing technologies such as conventional technology and common knowledge in this field, and there is no need to elaborate, so that the technical solution provided in this case is clear, complete, and feasible, and the corresponding physical products can be reproduced or obtained based on this technical means.

[0046] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A gas separator for graphite powder, characterized in that: The invention comprises an air separation device body (1), wherein one end surface of the air separation device body (1) is provided with a plurality of air channels (2), wherein the plurality of air channels (2) are radially distributed, one end of the plurality of air channels (2) are interconnected and converge at the center of the air separation device body (1), and the other end of the plurality of air channels (2) are dispersed at the edge of the air separation device body (1); Each air channel (2) is provided with a plurality of first air holes (3), and the plurality of first air holes (3) on each air channel (2) are arranged linearly; A second air hole (4) is provided at a position where the plurality of air passages (2) communicate with each other on the air separation device body (1); The first air holes (3) and the second air holes (4) are arranged linearly; The other end surface of the gas distribution device body (1) is provided with a plurality of positioning grooves (5), the positioning grooves (5) are used to place the object carrier (6), and the object carrier (6) is provided with a plurality of ventilation pipes (7), the ventilation pipes (7) correspond to and communicate with the first air holes (3) one by one, and the ventilation pipes (7) correspond to and communicate with the second air holes (4) one by one.

2. A gas separator for graphite powder according to claim 1, characterized in that: Each positioning groove (5) corresponds to at least one first air hole (3).

3. The gas separator for graphite powder according to claim 1, characterized in that: The object carrying device (6) is a crucible.

4. The gas separator for graphite powder according to claim 1, characterized in that: The airway (2) is a straight-through structure.

5. The gas separator for graphite powder according to claim 1, characterized in that: The diameter of the second air hole (4) is smaller than the diameter of the first air hole (3).

6. The gas separator for graphite powder according to claim 1, characterized in that: The gas separation device body (1) is a circular structure.

7. The gas separator for graphite powder according to claim 1, characterized in that: The ventilation pipe (7) is provided with a plurality of ventilation holes (8).

8. The gas separator for graphite powder according to claim 1, characterized in that: The first air hole (3) is a circular hole, the second air hole (4) is a circular hole, and the cross section of the ventilation pipe (7) is a circular structure.

9. The gas separator for graphite powder according to claim 7, characterized in that: The ventilation holes (8) are circular holes.

10. The gas separator for graphite powder according to claim 1, characterized in that: The number of the air passages (2) is twelve, and the number of the positioning grooves (5) is seventeen.

Images