MEMS test fixture
By designing a MEMS test fixture containing a base plate, a probe, a compression spring and a floating plate, the problem of unstable contact between the probe and the product is solved, and the automatic alignment and stable contact of the probe are achieved, which improves the stability and efficiency of the test.
Patent Information
- Application Number
- CN202421817755.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-30
- Publication Date
- 2025-08-05
- Estimated Expiration
- 2034-07-30
AI Technical Summary
The existing MEMS test fixtures use manual manual operation to cause unstable and inaccurate contact between the probe and the product pin angle.
A MEMS test fixture including bottom plate, probe, No. 1 compression spring, torsion spring, floating plate, pressure gland and barb are designed. Through the cooperation of elastic guide and pressure spring, the probe is automatically aligned and stable contact, and the torsion spring is used to realize the automatic opening of the pressure gland, which is convenient for material withdrawal and discharge.
It improves the stability and efficiency of the test, solves the problem of aberration between the probe and the product pin angle in manual testing, and ensures accurate contact between the probe and the product.
Smart Images

Figure CN223192970U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of electrical testing equipment, in particular to a MEMS testing fixture. Background Art
[0002] Existing MEMS test fixtures use manual operation to operate the probes. Due to errors in manual operation, the contact between the probes and the product pin corners is unstable and inaccurate.
[0003] In view of this, it is necessary to provide a MEMS test fixture. Summary of the Invention
[0004] The MEMS test fixture provided by the utility model effectively solves the problem of inaccurate and unstable contact between the existing probe and the pin corner.
[0005] The technical solution adopted by this utility model is
[0006] The MEMS test fixture includes a base plate, a probe, a No. 1 compression spring, a torsion spring, a floating plate, a base arranged on the base plate, a pressure cover hinged to the base through a torsion spring at one end, a barb hinged to the other end of the pressure cover, and an elastic guide member arranged on the base for elastically guiding the floating plate. The base is provided with a placement groove, and the base is provided with an end portion for engaging with the barb. The two ends of the No. 1 compression spring are respectively abutted against the cover plate and the barb so that the barb and the end portion are locked. The base plate, the base and the floating plate are correspondingly provided with vertical through holes for the sliding of the probe. The lower end surface of the pressure cover is provided with an insulating protrusion protruding downward. When the pressure cover is pressed, the insulating protrusion is located in the placement groove. The upper end of the floating plate is provided with a discharge trough connected to the vertical through hole.
[0007] Furthermore, there are at least two elastic guide members, each of which includes an adjusting bolt and a No. 2 compression spring sleeved on the adjusting bolt, the threaded section of the adjusting bolt is threadedly connected to the base plate, the end portion of the adjusting bolt is slidably connected to the floating plate, and the two ends of the No. 2 compression spring are respectively against the lower end of the floating plate and the upper end of the base plate.
[0008] Furthermore, the barb includes a barb body hinged to the cover plate, a No. 1 plate arranged at one end of the barb body, and a hook arranged at the other end of the barb. When the barb is locked with the end, the No. 1 plate is horizontal, and the two ends of the No. 1 compression spring are respectively against the lower end surface of the No. 1 plate and the upper end surface of the cover plate.
[0009] Furthermore, the lower end of the bottom plate is provided with a plurality of vertical through holes and positioning posts protruding from the lower end surface of the bottom plate, and guide sleeves are provided in the vertical through holes.
[0010] Furthermore, the floating plate and the lower end are further provided with a fixing plate fixedly connected to the base, and the fixing plate is provided with a No. 1 hole corresponding to the vertical through hole.
[0011] Furthermore, the gland includes a gland body and a second plate arranged on the gland body, the second plate is provided with a viewing hole, the insulating protrusion is made of a transparent material, and the viewing hole is projected onto the upper end surface of the insulating protrusion.
[0012] The beneficial effects of the utility model are as follows: the entire MEMS test fixture is easy to install, and a No. 1 compression spring is used to tighten the barb in the engaged state, so that the cover is pressed stably, which solves the problem of misalignment between the manual test probe and the pin corner of the product, improves the stability of the test, and realizes automatic opening of the pressure cover through the torsion spring, which is convenient for taking and releasing materials, and effectively improves the test efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Figure 1 A cross-sectional schematic diagram of a MEMS test fixture provided in an embodiment of the present application.
[0014] Figure 2 for Figure 1 A magnified schematic diagram of area A in the middle.
[0015] Figure 3 This is an exploded view of the base, No. 1 compression spring, torsion spring, and pressure cover provided in an embodiment of the present application.
[0016] The following are marked in the figure: 1. Base plate; 2. Probe; 3. Compression spring No. 1; 4. Torsion spring; 5. Floating plate; 6. Base; 7. Gland; 8. Barb; 9. Elastic guide; 71. End; 10. Insulating bump; 501. Discharge trough; 91. Adjusting bolt; 92. Compression spring No. 2; 81. Plate No. 1; 82. Barb body; 83. Hook; 11. Positioning column; 12. Guide sleeve; 13. Fixing plate; 102. Visible hole; 72. Gland body; 73. Plate No. 2; 15. PCB; 16. Product. DETAILED DESCRIPTION
[0017] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.
[0018] like Figure 1 、 Figure 2 and Figure 3As shown, the MEMS test fixture provided by the embodiment of the present application includes a base plate 1, a probe 2, a No. 1 compression spring 3, a torsion spring 4, a floating plate 5, a base 6 arranged on the base plate 1, a pressure cover 7 hinged to the base 6 at one end through the torsion spring 4, a hook 8 hinged to the other end of the pressure cover 7, and an elastic guide 9 arranged on the base 6 for elastically guiding the floating plate 5. The base 6 is provided with a placement groove, and the base 6 is provided with an end 71 for engaging with the hook 8. The two ends of the No. 1 compression spring 3 are respectively abutted against the cover plate and the hook 8 so that the hook 8 is locked with the end 71. The base 1, the base 6 and the floating plate 5 are correspondingly provided with vertical through holes for sliding of the probe 2. The lower end surface of the pressure cover 7 is provided with an insulating protrusion 10 protruding downward. When the pressure cover 7 is pressed, the insulating protrusion 10 is located in the placement groove. The upper end of the floating plate 5 is provided with a discharge trough 501 connected to the vertical through hole.
[0019] During actual use, when the torsion spring 4 is in the natural state, the pressure cover 7 is in an open state relative to the base 6. The PCB15 board is placed in the external fixture box, and then the MEMS test fixture of the present application is placed on the PCB15 and positioned so that the lower end of the probe 2 contacts the PCB15. The product 16 is then placed in the discharge trough 501. At this time, the upper end of the probe 2 does not contact the product 16. The pressure cover 7 is then flipped over so that the insulating protrusion 10 presses down the product 16. After the floating plate 5 compresses the elastic guide 9, the upper end of the probe 2 passes through the vertical through hole and contacts the pin corner of the product 16 and is then tested.
[0020] In the above design, the entire MEMS test fixture is easy to install, and the No. 1 compression spring 3 is used to tighten the hook 8 in the engaged state, so that the cover is pressed stably, which solves the problem of misalignment between the pin angles of the manual test probe 2 and the product 16, improves the stability of the test, and realizes the automatic opening of the pressure cover 7 through the torsion spring 4, which is convenient for taking and releasing materials, and effectively improves the test efficiency.
[0021] Specifically: Figure 1 As shown, there are at least two elastic guide members 9, each of which includes an adjusting bolt 91 and a No. 2 compression spring 92 sleeved on the adjusting bolt 91. The threaded section of the adjusting bolt 91 is threadedly connected to the base plate 1, and the end portion of the adjusting bolt 91 is slidably connected to the floating plate 5. The two ends of the No. 2 compression spring 92 are respectively against the lower end of the floating plate 5 and the upper end of the base plate 1.
[0022] In actual use, during the test process, when the floating plate 5 is pressed down, the No. 2 compression spring 92 is pressed and contracted by the floating plate 5. When the test is completed and the pressure cover 7 is opened, the floating plate 5 is driven to move upward and reset through the elastic reset of the No. 2 compression spring 92.
[0023] In the above design, the structural design and specific implementation of the elastic guide member 9 can effectively realize the automatic reset of the floating plate 5 and ensure that the contact between the probe 2 and the product 16 is buffered during testing.
[0024] Specifically: Figure 1 and Figure 3 As shown, the barb 8 includes a barb body 82 hinged to the cover plate, a No. 1 plate 81 arranged at one end of the barb body 82, and a hook 83 arranged at the other end of the barb 8. When the barb 8 is locked with the end 71, the No. 1 plate 81 is horizontal, and the two ends of the No. 1 compression spring 3 are respectively against the lower end surface of the No. 1 plate 81 and the upper end surface of the cover plate.
[0025] In actual use, after the barb 8 engages with the end portion 71, the No. 1 compression spring 3 pushes the No. 1 plate 81 upward, thereby applying a clockwise torsion force to the barb 8 around the hinge point, ensuring that the barb 8 and the end portion 71 do not become loose. During the engagement process, the No. 1 compression spring 3 is manually pressed against the No. 1 plate 81 corresponding to the barb 8, compressing the No. 1 compression spring 3, causing the barb body 82 to rotate and the hook 83 to engage with the end portion 71.
[0026] In the above design, the structural design of the barb 8 and the matching mode between the barb 8 and the first compression spring 3 can ensure the effective engagement between the barb 8 and the end 71 .
[0027] Specifically: Figure 1 As shown, the bottom end of the base plate 1 is further provided with a plurality of vertical through holes and positioning posts 11 protruding from the lower end surface of the base plate 1 , and guide sleeves 12 are provided in the vertical through holes.
[0028] In actual use, positioning is performed through the positioning column 11 and the reference hole of the PCB 15, and positioning is performed through the guide sleeve 12 and the positioning pin of the external fixture box.
[0029] In the above design, the design of the positioning column 11 and the guide sleeve 12 facilitates precise positioning during testing, thereby ensuring test accuracy.
[0030] Specifically: Figure 1 As shown, the floating plate 5 is further provided with a fixing plate 13 fixedly connected to the base 6 at the lower end, and the fixing plate 13 is provided with a No. 1 hole corresponding to the vertical through hole.
[0031] In actual use, the floating plate 5 stops moving after being pressed against the fixed plate 13 .
[0032] In the above design, the fixed plate 13 is provided to effectively limit the floating plate 5 and prevent the floating plate 5 from being excessively pressed downward.
[0033] Specifically: Figure 1 and Figure 3As shown, the gland 7 includes a gland body 72 and a second plate 73 arranged on the gland body 72 . The second plate 73 is provided with a visible hole 102 . The insulating protrusion 10 is made of transparent material. The visible hole 102 is projected onto the upper end surface of the insulating protrusion 10 .
[0034] During actual use, the operator observes the pressing condition of the insulating protrusion 10 through the viewing hole 102 .
[0035] In the above design, the design of the viewing hole 102 and the design of the transparent material of the insulating protrusion 10 facilitate observation of the internal conditions of the fixture after the pressing cover 7 is tightened.
[0036] To further explain in detail, it should be understood that the above is only a specific embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. A MEMS test fixture, comprising a base plate (1), characterized in that: The invention also includes a probe (2), a No. 1 compression spring (3), a torsion spring (4), a floating plate (5), a base (6) arranged on the bottom plate (1), a pressure cover (7) hinged to the base (6) at one end through the torsion spring (4), a barb (8) hinged to the other end of the pressure cover (7), and an elastic guide member (9) arranged on the base (6) for elastically guiding the floating plate (5), wherein the base (6) is provided with a placement groove, and the base (6) is provided with an end (7) for engaging with the barb (8). 1), the two ends of the No. 1 compression spring (3) respectively abut against the cover plate and the barb (8) so that the barb (8) and the end (71) are locked, the bottom plate (1), the base (6) and the floating plate (5) are correspondingly provided with vertical through holes for the sliding of the probe (2), the lower end surface of the pressure cover (7) is provided with an insulating protrusion (10) protruding downward, and when the pressure cover (7) is pressed, the insulating protrusion (10) is located in the placement groove, and the upper end of the floating plate (5) is provided with a discharge groove (501) that is conductive with the vertical through hole.
2. The MEMS test fixture according to claim 1, characterized in that: The number of the elastic guide members (9) is at least two, and each of the elastic guide members (9) includes an adjusting bolt (91) and a No. 2 compression spring (92) sleeved on the adjusting bolt (91). The threaded section of the adjusting bolt (91) is threadedly connected to the base plate (1), and the end portion of the adjusting bolt (91) is slidably connected to the floating plate (5). The two ends of the No. 2 compression spring (92) are respectively against the lower end of the floating plate (5) and the upper end of the base plate (1).
3. The MEMS test fixture according to claim 1, wherein: The barb (8) comprises a barb body (82) hinged to the cover plate, a No. 1 plate (81) arranged at one end of the barb body (82), and a hook (83) arranged at the other end of the barb (8); when the barb (8) is locked with the end (71), the No. 1 plate (81) is horizontal, and the two ends of the No. 1 compression spring (3) respectively abut against the lower end surface of the No. 1 plate (81) and the upper end surface of the cover plate.
4. The MEMS test fixture according to claim 1, wherein: The lower end of the base plate (1) is also provided with a plurality of vertical through holes and a positioning column (11) protruding from the lower end surface of the base plate (1), and a guide sleeve (12) is provided in the vertical through hole.
5. The MEMS test fixture according to claim 1, wherein: The floating plate (5) and the lower end are further provided with a fixed plate (13) fixedly connected to the base (6), and the fixed plate (13) is provided with a number one hole corresponding to the vertical through hole.
6. The MEMS test fixture according to claim 1, characterized in that: The pressure cover (7) comprises a pressure cover (7) body and a second plate (73) arranged on the pressure cover (7) body, the second plate (73) is provided with a visual hole (102), the insulating protrusion (10) is made of a transparent material, and the visual hole (102) is projected onto the upper end surface of the insulating protrusion (10).