Clamping device for quartz wafer coating

Abstract

The utility model belongs to the technical field of quartz wafer processing equipment, and particularly relates to a clamping device for coating a quartz wafer, which comprises a fixed box, a mounting part is fixedly mounted at the top of the fixing box, a lead screw is vertically arranged in the fixing box, a limiting rod is horizontally arranged below the lead screw, sliding blocks are slidably mounted at the two ends of the limiting rod, sliding holes are formed in the two sides of the bottom of the fixing box, connecting plates are slidably arranged in the sliding holes, and the tops of the connecting plates are fixedly connected to the bottoms of the sliding blocks. Clamping blocks are fixedly mounted on the inner sides of the lower ends of the connecting plates, an air cylinder is fixedly mounted in the center of the bottom of the fixing box, a shock absorber is fixedly mounted at the front end of a piston rod of the air cylinder, a mounting groove is formed in the shock absorber, a sliding rod is slidably mounted in the mounting groove, and a suction cup is fixedly mounted at the bottom of the sliding rod. A quartz wafer is sucked through the suction cup, and then the wafer is lifted to the position of the clamping block through the air cylinder to be clamped, so that position deviation or falling in the clamping process is prevented.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz wafer processing equipment, in particular to a clamping device for quartz wafer coating. Background Art

[0002] Quartz wafer coating is a process that aims to improve the performance of the wafer or meet specific application requirements by forming a thin metal film on the surface of the quartz wafer. During the coating process, the quartz wafer needs to be clamped accurately and stably to ensure the quality and efficiency of the coating.

[0003] The clamping device usually consists of two parts: a drive mechanism and a clamping mechanism. The drive mechanism is responsible for providing power to the clamping mechanism, enabling it to clamp and release the quartz wafer.

[0004] During the quartz wafer coating process, using a clamping block to directly clamp the quartz wafer may cause the wafer to fall or shift in position during the clamping process, thereby increasing operation time and cost and reducing production efficiency; therefore, a clamping device for quartz wafer coating is proposed to address the above problems. Utility Model Content

[0005] In order to make up for the shortcomings of the existing technology, during the quartz wafer coating process, when the quartz wafer is directly clamped using a clamping block, it may cause the wafer to fall or shift in position during the clamping process, thereby increasing operation time and cost and reducing production efficiency. The utility model proposes a clamping device for quartz wafer coating.

[0006] The technical solution adopted by the present invention to solve its technical problems is as follows: a clamping device for quartz wafer coating described in the present invention comprises a fixed box; a mounting piece is fixedly installed on the top of the fixed box, a screw rod is vertically arranged in the fixed box, the top end of the screw rod is rotatably installed in the fixed box through a bearing, a sliding sleeve is slidably arranged on the screw rod, a threaded hole is opened inside the sliding sleeve, and the sliding sleeve is slidably installed on the screw rod through the threaded hole, a limit rod is horizontally arranged below the screw rod, both ends of the limit rod are fixedly installed on the inner wall of the fixed box, and both ends of the limit rod are slidably installed A slider is equipped, and sliding holes are opened on both sides of the bottom of the fixed box. A connecting plate is slidably arranged in the sliding hole, and the top of the connecting plate is fixedly connected to the bottom of the slider, and a clamping block is fixedly installed on the inner side of the lower end of the connecting plate. A cylinder is fixedly installed at the center of the bottom of the fixed box, and a shock absorber is fixedly installed at the front end of the cylinder piston rod. A mounting groove is opened in the shock absorber, and a sliding rod is slidably installed in the mounting groove. A suction cup is fixedly installed at the bottom of the sliding rod, and the quartz wafer is sucked by the suction cup, and then the wafer is lifted to the clamping block position by the cylinder for clamping to prevent position displacement or falling off during the clamping process.

[0007] Preferably, a motor is provided inside the mounting member, the motor is fixedly mounted on the upper portion of the fixed box, the motor rotating shaft is fixedly connected to one end of the screw rod, the motor drives the screw rod to rotate, and the screw rod drives the sleeve to slide.

[0008] Preferably, connecting rods are rotatably mounted on both sides of the sleeve via fixed shafts, and the other ends of the connecting rods are rotatably mounted on the top of the slider via rotating shafts. The two sliders are adjusted by the connecting rods to drive the clamping blocks to move, thereby clamping quartz wafers of different specifications.

[0009] Preferably, a buffer spring is provided between the sliders and is sleeved on the limit rod, and the limit spring slides on the limit rod, and the buffer spring buffers the relative movement speed of the two clamping blocks to prevent the clamping blocks from damaging the lens.

[0010] Preferably, a top plate is fixedly installed on the top of the sliding rod, and the top plate is slidably installed inside the mounting groove. A vibration damping spring is slidably arranged in the vibration damper mounting groove, and the vibration damping spring is arranged on the upper part of the top plate. The vibration damping spring reduces the impact force caused by the cylinder pushing the suction cup on the surface of the quartz wafer, thereby preventing the crystal from being damaged by excessive force.

[0011] Preferably, the clamping blocks are arranged in an arc shape, and are provided with clamping grooves on their inner sides. Silicone pads are fixedly installed on the inner sides of the clamping grooves to prevent the clamping blocks from damaging the quartz wafer during the clamping process.

[0012] The utility model is beneficial in that:

[0013] 1. The utility model starts the cylinder during the coating process of the quartz wafer and uses the clamping device to clamp it. The cylinder piston rod pushes the shock absorber to move. The shock absorber drives the suction cup to move toward the quartz wafer through the sliding rod. Then the suction cup contacts and sucks the surface of the quartz wafer tightly. The cylinder is started in the reverse direction to lift the quartz wafer to the clamping groove position of the clamping block through the suction cup. The motor is started to drive the screw rod to rotate. The screw rod drives the sliding sleeve to slide up. The sliding sleeve pulls the two sliders on the limit rod to move relative to each other through the connecting rod. The slider drives the connecting plate to slide in the sliding hole at the bottom of the fixed box. The plate drives the clamping block to move relative to each other, clamps the quartz wafer in the center, moves the clamping device to the coating position, then starts the motor to reverse, releases the wafer clamping, and starts the cylinder to place the wafer in the coating position for coating. The structural design realizes the function of preventing the quartz wafer from falling or position shifting, and solves the problem that when the quartz wafer is directly clamped by the clamping block during the quartz wafer coating process, the wafer may fall or shift during the clamping process, thereby increasing operation time and cost and reducing production efficiency, thereby improving the production efficiency of quartz wafer coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0015] Figure 1 It is a schematic diagram of the side structure of the clamping device;

[0016] Figure 2 Schematic diagram of the internal structure of the fixed box;

[0017] Figure 3 It is a schematic diagram of the cross-sectional structure of the clamping device;

[0018] Figure 4 Schematic diagram of the internal structure of the shock absorber;

[0019] Figure 5 Schematic diagram of the clamping block structure.

[0020] In the figure: 1. Fixed box; 2. Mounting parts; 3. Motor; 4. Screw; 5. Sleeve; 6. Connecting rod; 7. Slider; 8. Limit rod; 9. Buffer spring; 10. Connecting plate; 11. Clamp; 12. Silicone pad; 13. Cylinder; 14. Shock absorber; 15. Sliding rod; 16. Suction cup; 17. Top plate; 18. Shock-absorbing spring. DETAILED DESCRIPTION

[0021] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] See also Figure 1-5The cam 5 is provided with a plurality of guide rails 16, 17 and 18, and the guide rails 16 are provided with guide rails 14 and 19. The guide rails 16 are provided with guide rails 18 and 20. The guide rails 16 are provided with guide rails 18 and 21. A slide rod 15 is slidably installed in the groove, and a suction cup 16 is fixedly installed at the bottom of the slide rod 15. During operation, when the quartz wafer is coated, when the clamping device is used for clamping, the cylinder 13 is started, and the piston rod of the cylinder 13 pushes the shock absorber 14 to move. The shock absorber 14 drives the suction cup 16 to move toward the quartz wafer through the slide rod 15. Then the suction cup 16 contacts the surface of the quartz wafer and sucks it tightly. The cylinder 13 is started in the reverse direction, and the quartz wafer is lifted to the clamping groove position of the clamping block 11 through the suction cup 16. At the 4th position, the motor 3 is started to drive the screw 4 to rotate, the screw 4 drives the sleeve 5 to slide up, the sleeve 5 pulls the two sliders 7 on the limit rod 8 through the connecting rod 6, the slider 7 drives the connecting plate 10 to slide in the sliding hole at the bottom of the fixed box 1, the connecting plate 10 drives the clamping block 11 to move relatively, clamping the quartz wafer in the center, and moving the clamping device to the coating position through the mounting part 2, then starting the motor 3 to reverse, release the wafer clamping, and start the cylinder 13 to place the wafer in the coating position for coating.

[0023] A motor 3 is provided inside the mounting member 2, and the motor 3 is fixedly mounted on the upper part of the fixing box 1, and the rotating shaft of the motor 3 is fixedly connected to one end of the screw rod 4; during operation, when the quartz wafer is coated and the clamping device is used for clamping, the motor 3 is started to drive the screw rod 4 to rotate, and the screw rod 4 drives the sliding sleeve 5 to slide upward.

[0024] Connecting rods 6 are rotatably installed on both sides of the sliding sleeve 5 through a fixed axis, and the other ends of the connecting rods 6 are rotatably installed on the top of the slider 7 through a rotating shaft; during operation, when the quartz wafer is coated and the clamping device is used for clamping, the sliding sleeve 5 pulls the two sliders 7 to move relative to each other on the limit rod 8 through the connecting rod 6, and the slider 7 drives the connecting plate 10 to slide in the sliding hole at the bottom of the fixed box 1, and the connecting plate 10 drives the clamping block 11 to move relative to each other, clamping the quartz wafer in the center.

[0025] A buffer spring 9 is provided between the sliders 7 and is sleeved on the limit rod 8, and the limit spring slides on the limit rod 8; during operation, during the quartz wafer coating process, when the clamping device is used for clamping, the slider 7 moves relatively on the limit rod 8, driving the clamping block 11 to move relatively, squeezing the buffer spring 9 in the middle, and the buffer spring 9 acts in the opposite direction on the slider 7 to slow down the force of the clamping block 11 on both sides of the quartz wafer.

[0026] A top plate 17 is fixedly installed on the top of the sliding rod 15, and the top plate 17 is slidably installed in the mounting groove. A vibration damping spring 18 is slidably set in the mounting groove of the vibration damper 14, and the vibration damping spring 18 is set on the upper part of the top plate 17; during operation, during the quartz wafer coating process, when the clamping device is used for clamping, the cylinder 13 pushes the vibration damper 14 to drive the suction cup 16 to adsorb the quartz wafer through the sliding rod 15. In the process, the suction cup 16 contacts the surface of the quartz wafer, and the reverse force of the quartz wafer pushes the sliding rod 15 to slide in the vibration damper 14. The sliding rod 15 pushes the top plate 17 to compress the vibration damping spring 18. The vibration damping spring 18 absorbs the reverse force and buffers the force on the surface of the quartz wafer.

[0027] The clamping block 11 is arranged in an arc shape, and a clamping groove is opened on the inner side, and a silicone pad 12 is fixedly installed on the inner side of the clamping groove; when working, during the quartz wafer coating process, when the clamping device is used to clamp the quartz wafer, the two sides of the quartz wafer are in contact with the silicone pad 12 during the clamping process of the clamping block 11. Since the silicone pad 12 is relatively soft, the clamping block 11 is prevented from damaging the quartz wafer during the clamping process.

[0028] Working principle: when the quartz wafer is coated and the clamping device is used for clamping, the cylinder 13 is started, and the piston rod of the cylinder 13 pushes the shock absorber 14 to move, and the shock absorber 14 drives the suction cup 16 to move toward the quartz wafer through the slide rod 15, and the suction cup 16 contacts the surface of the quartz wafer. The reverse force of the quartz wafer pushes the slide rod 15 to slide in the shock absorber 14, and the slide rod 15 pushes the top plate 17 to compress the shock absorber spring 18. The shock absorber spring 18 absorbs the reverse force and buffers the force on the surface of the quartz wafer. Then the suction cup 16 contacts the surface of the quartz wafer and sucks it tightly. The cylinder 13 is started in the reverse direction, and the quartz wafer is lifted to the clamping groove position of the clamping block 11 through the suction cup 16. The motor 3 is started to drive the screw rod 4 to rotate, and the screw rod 4 drives the sliding sleeve 5 to slide up, and the sliding sleeve 5 is pulled by the connecting rod 6 The two sliders 7 move relative to each other on the limit rod 8. When the sliders 7 move relative to each other on the limit rod 8, the clamping blocks 11 are driven to move relative to each other, squeezing the buffer spring 9 in the middle. The buffer spring 9 acts in the opposite direction on the slider 7 to slow down the force of the clamping blocks 11 on both sides of the quartz wafer. The slider 7 drives the connecting plate 10 to slide in the sliding hole at the bottom of the fixed box 1. The connecting plate 10 drives the clamping blocks 11 to move relative to each other, clamping the quartz wafer in the center. In the process of the clamping blocks 11 clamping the quartz wafer, both sides of the quartz wafer are in contact with the silicone pads 12. Due to the high softness of the silicone pads 12, the clamping blocks 11 are prevented from causing damage to the quartz wafer during the clamping process. The clamping device is moved to the coating position through the mounting part 2, and then the motor 3 is started to reverse to release the wafer clamping. The cylinder 13 is started to place the wafer in the coating position for coating.

[0029] Throughout this specification, references to terms such as "one embodiment," "example," or "specific example" indicate that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0030] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and improvements fall within the scope of the present invention as claimed.

Claims

1. A clamping device for quartz wafer coating, characterized in that: The invention comprises a fixed box (1); a mounting member (2) is fixedly installed on the top of the fixed box (1); a screw rod (4) is vertically arranged in the fixed box (1); the top end of the screw rod (4) is rotatably installed in the fixed box (1) through a bearing; a sliding sleeve (5) is slidably arranged on the screw rod (4); a threaded hole is opened inside the sliding sleeve (5); the sliding sleeve (5) is slidably installed on the screw rod (4) through the threaded hole; a limit rod (8) is horizontally arranged below the screw rod (4); both ends of the limit rod (8) are fixedly installed on the inner wall of the fixed box (1); both ends of the limit rod (8) are slidably installed A slider (7) is provided, and sliding holes are provided on both sides of the bottom of the fixed box (1), and a connecting plate (10) is slidably provided in the sliding hole. The top of the connecting plate (10) is fixedly connected to the bottom of the slider (7), and a clamping block (11) is fixedly installed on the inner side of the lower end of the connecting plate (10). A cylinder (13) is fixedly installed at the center of the bottom of the fixed box (1), and a shock absorber (14) is fixedly installed at the front end of the piston rod of the cylinder (13). An installation groove is provided in the shock absorber (14), and a sliding rod (15) is slidably installed in the installation groove. A suction cup (16) is fixedly installed at the bottom of the sliding rod (15).

2. A quartz wafer coating clamping device according to claim 1, characterized in that: A motor (3) is provided inside the mounting member (2), and the motor (3) is fixedly mounted on the upper portion of the fixing box (1), and the rotating shaft of the motor (3) is fixedly connected to one end of the screw rod (4).

3. The quartz wafer coating clamping device according to claim 1, characterized in that: Connecting rods (6) are rotatably mounted on both sides of the sliding sleeve (5) via a fixed shaft, and the other ends of the connecting rods (6) are rotatably mounted on the top of the slider (7) via a rotating shaft.

4. The quartz wafer coating clamping device according to claim 1, characterized in that: A buffer spring (9) is provided between the sliders (7) and is sleeved on the limiting rod (8), and the limiting spring slides on the limiting rod (8).

5. The quartz wafer coating clamping device according to claim 1, characterized in that: A top plate (17) is fixedly installed on the top of the slide rod (15), and the top plate (17) is slidably installed inside the installation groove. A vibration damping spring (18) is slidably installed in the installation groove of the shock absorber (14), and the vibration damping spring (18) is arranged on the upper part of the top plate (17).

6. The quartz wafer coating clamping device according to claim 1, characterized in that: The clamping blocks (11) are arranged in an arc shape, and are provided with clamping grooves on the inner sides thereof, and silicone pads (12) are fixedly installed on the inner sides of the clamping grooves.

Images