Electronic probe sample support device

By designing the electronic probe sample holder device, the combination of sleeve and gasket is used to solve the problem of irregular samples being fixed and not level on the standard sample table, the sample surface is smoothed, and the testing efficiency and accuracy are improved.

CN223229519UActive Publication Date: 2025-08-15TONGJI UNIV
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Patent Information

Application Number
CN202421957077.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-13
Publication Date
2025-08-15
Estimated Expiration
2034-08-13

AI Technical Summary

Technical Problem

Irregular samples are difficult to place horizontally on standard sample tables, resulting in unlevel testing surfaces, affecting the test effect and accuracy.

Method used

An electronic probe sample holder is designed, including a sleeve, a circular baffle and a plurality of gaskets of different inner diameters, and the irregular samples are fixed by threaded connections and selection of gaskets to keep their flat surface level.

Benefits of technology

Ensure that the surface level of irregular samples is fixed, improve testing efficiency and accuracy, and adapt to irregular samples measurements of multiple sizes.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides an electronic probe sample supporting device, which belongs to the field of electronic probe sample table component devices, is used for fixing a sample to be detected, at least one surface of the sample to be detected is flat, and is characterized by comprising a sleeve, a supporting plate, a fixing plate and a fixing plate, the circular baffle is in threaded connection with the sleeve and is used for fixing the to-be-detected sample; the gaskets are the same in outer diameter and different in inner diameter, one gasket is selected to be arranged in the sleeve according to the size of the to-be-detected sample and located between the sleeve and the to-be-detected sample, and the flat surface of the to-be-detected sample is attached to the gaskets. Through the sample support device, the problem of mounting and fixing irregular samples during testing is solved, mounting inclination and instability are avoided, and it is guaranteed that the surfaces of the samples are flat so as to improve the testing effect and accuracy.
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Description

Technical Field

[0001] The utility model belongs to the field of electronic probe sample stage component devices, in particular to an electronic probe sample holder device. Background Art

[0002] As a precision instrument for high-precision in-situ micro-area composition analysis and morphology observation, the electron probe is an important basic tool in many fields. A smooth and flat surface during sample preparation and analysis is crucial to the effectiveness of experimental tests. This effect can be effectively eliminated during the testing process for samples that can fit into the standard sample stage size. In reality, there are many irregular samples. Although their smooth surfaces meet the requirements of analytical testing, due to their irregular bottoms, it is difficult to place them in a standard sample stage and make their surfaces level. Therefore, designing a sample holder for such samples to be tested to meet the testing requirements of samples of irregular sizes has become an urgent problem to be solved. Summary of the Invention

[0003] The present invention is made to solve the above problems, and aims to provide an electron probe sample holder device capable of measuring irregular samples of different thicknesses.

[0004] The utility model provides an electronic probe sample holder device, which is used to fix a sample to be detected, wherein at least one surface of the sample to be detected is a flat surface, and has the following characteristics: a sleeve, which is used to accommodate the sample to be detected; a circular baffle, which is threadedly connected to the sleeve and is used to fix the sample to be detected; and a plurality of gaskets, which have the same outer diameter and different inner diameters, and are used to select a gasket according to the size of the sample to be detected and set in the sleeve, and located between the sleeve and the sample to be detected, so that the flat surface of the sample to be detected fits with the gasket.

[0005] The electronic probe sample holder device provided by the present invention may also have the following feature: wherein the sleeve is adapted to the size and shape of the sample stage of the sample to be detected.

[0006] The electronic probe sample holder device provided by the present invention may also have the following features: wherein, the sleeve includes a cylindrical portion, a first limiting portion and a second limiting portion, the first limiting portion and the second limiting portion are used to limit the position of the gasket in the cylindrical portion, one side surface of the second limiting portion is connected to the threaded portion and the end of the outer cylinder portion, the other side surface of the second limiting portion is connected to the first limiting portion, a first opening is provided at the center of the first limiting portion, and a second opening is provided at the center of the second limiting portion, the size of the second opening is larger than the first opening, and the opening is used for the electronic probe to detect the sample.

[0007] The electronic probe sample holder device provided by the present invention may also have the following features: wherein the cylindrical portion includes an outer cylindrical portion and a threaded portion, the threaded portion is arranged on the inner wall surface of the outer cylindrical portion, and the circular baffle is provided with an external thread adapted to the threaded portion.

[0008] The electronic probe sample holder device provided by the utility model may also have the following feature: wherein, the length of the threaded section of the threaded portion is greater than the length of the external threaded section.

[0009] The electronic probe sample holder device provided by the present invention may also have the following features: wherein the circular baffle is plate-shaped, and a screwdriver pit is provided at the bottom thereof, and the screwdriver pit is used to cooperate with a screwdriver to change the screw connection position of the circular baffle and the sleeve.

[0010] The electronic probe sample holder device provided by the utility model may also have the following feature: the gasket is a rigid gasket or a grinding steel gasket.

[0011] The electronic probe sample holder device provided by the present invention may also have the following feature: the sum of the thickness of the gasket and the thickness of the sample to be measured is greater than the thickness of the second limiting portion.

[0012] Functions and effects of utility models

[0013] According to the device of the electronic probe sample holder involved in the utility model, because it includes a sleeve, a circular baffle and a gasket, the gasket has multiple specifications with the same outer diameter and different inner diameters. When in use, a gasket that is compatible with the sample to be tested is selected, and the gasket is first placed in the sleeve, and then the smooth and flat side of the sample to be tested is placed against the direction of the gasket, and then the circular baffle is threadedly connected to the sleeve, so that the sample to be tested is clamped on the gasket. After fixing, the flat surface of the sample to be tested can always be kept level as the test surface, thus solving the problem of irregular samples being unable to be installed or tilted during installation causing the observation test surface to be uneven, ensuring the flatness of the sample surface to improve test efficiency and accuracy, and having strong practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a left side view of the electronic probe sample holder device in an embodiment of the present utility model;

[0015] Figure 2 This is a right side view of the electron probe sample holder device in an embodiment of the present utility model;

[0016] Figure 3 Schematic diagram of the structure of the sleeve in the embodiment of the present utility model;

[0017] Figure 4 Schematic diagram of the structure of the circular baffle in the embodiment of the present utility model;

[0018] Figure 5 This is a schematic structural diagram of the first inner diameter gasket in an embodiment of the present utility model;

[0019] Figure 6 This is a schematic structural diagram of a second inner diameter gasket in an embodiment of the present utility model;

[0020] Figure 7 This is a schematic structural diagram of a third inner diameter gasket in an embodiment of the present utility model;

[0021] Figure 8 This is a schematic structural diagram of the electronic probe sample holder device in an embodiment of the present invention when measuring an irregular sample to be tested;

[0022] Figure 9 This is a structural diagram of the electronic probe sample holder device in an embodiment of the present utility model when measuring a regular sample to be tested. DETAILED DESCRIPTION

[0023] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections, electrical connections, or mutual communication; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to internal communication between two components or the interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0024] In order to make the technical means, creative features, objectives and effects of the present invention easier to understand, the following embodiments and accompanying drawings specifically illustrate the electronic probe sample holder device of the present invention.

[0025] Figure 1 It is a left side view of the electron probe sample holder device in an embodiment of the present utility model. Figure 2 This is a right side view of the electron probe sample holder device in an embodiment of the present invention. Figure 3 Schematic diagram of the structure of the sleeve in the embodiment of the present utility model. Figure 4 Schematic diagram of the structure of the circular baffle in the embodiment of the present utility model. Figure 5 This is a structural schematic diagram of the first inner diameter gasket in an embodiment of the present utility model. Figure 6 This is a schematic structural diagram of the second inner diameter gasket in an embodiment of the present utility model. Figure 7 This is a schematic structural diagram of the third type of inner diameter gasket in an embodiment of the present utility model.

[0026] like Figure 1-7As shown, this embodiment provides an electron probe sample holder device 100 for securing a sample to be tested. The sample to be tested has at least one flat surface, and the surface opposite the flat surface can be either uneven or flat. The electron probe sample holder device 100 includes a sleeve 10, a circular baffle 20, and a plurality of spacers 30.

[0027] like Figure 1-3 As shown, the sleeve 10 is used to accommodate a sample to be tested, and includes a cylindrical portion 11 , a first limiting portion 13 and a second limiting portion 12 .

[0028] The cylindrical portion 11 includes a threaded portion 111 and an outer cylindrical portion 112. The threaded portion 111 is disposed on the inner wall of the outer cylindrical portion 112. The combined thickness of the threaded portion 111 and the outer cylindrical portion 112 is 1.42 mm. The diameter of the outer cylindrical portion 112 is 36.9 mm. The overall height of the cylindrical portion is 20.9 mm. The height D of the threaded portion 111 and the outer cylindrical portion 112 is the same, 18.9 mm.

[0029] The first limiting portion 13 and the second limiting portion 12 are used to limit the position of the gasket 30 within the cylindrical portion 11. The lower surface of the second limiting portion 12 is connected to the threaded portion 111 and the end of the outer cylindrical portion 112. The lower surface of the first limiting portion 13 is connected to the upper surface of the second limiting portion 12. A first opening is provided at the center of the first limiting portion 13, and a second opening is provided at the center of the second limiting portion 12. The second opening is larger than the first opening. Both openings are used for electron probe detection of the sample.

[0030] The diameter of the first opening is 23.4 mm, and the thickness of the first limiting portion 13 is 0.5 mm. The diameter of the second opening is 26 mm, and the thickness of the second limiting portion 12 is 1.5 mm.

[0031] like Figure 4 As shown, the circular baffle 20 is threadedly connected to the sleeve 10 for fixing the sample to be tested. The circular baffle 20 includes a baffle 21 and a screwdriver pit 22.

[0032] like Figure 4 and 8 As shown, the shape and size of the baffle 21 are adapted to the cylindrical portion 11. The outer wall of the baffle 21 is provided with external threads adapted to the threaded portion 111. The thickness d of the baffle 21 is 8 mm, and the threaded section length d of the external threads is less than the threaded section length D of the threaded portion 111.

[0033] The screwdriver pit 22 is provided at the bottom of the baffle 21 and is used in conjunction with a hexagonal screwdriver to change the screw connection position between the circular baffle and the sleeve.

[0034] like Figure 5 、 Figure 6 and Figure 7 As shown, multiple gaskets 30 have the same outer diameter (26 mm), different inner diameters (3-22 mm), and the same gasket thickness (0.5 mm). A gasket can be selected based on the size of the sample to be tested and placed within the sleeve 10, positioned between the sleeve 10 and the sample to be tested, with the flat surface of the sample to be tested conforming to the gasket. In this embodiment, three types of steel gaskets with the same outer diameter and different inner diameters are specifically provided. The sum of the thickness of the gasket 30 and the thickness of the sample to be tested must be greater than the thickness of the second limiting portion 12.

[0035] Figure 8 This is a schematic structural diagram of an electronic probe sample holder device in an embodiment of the present utility model when measuring an irregular sample to be tested.

[0036] like Figure 8 As shown, the process of fixing an irregular sample to be tested (i.e., the upper surface of the sample to be tested is a smooth and flat surface, and the rest of the surface is irregular) using the electron probe sample holder device 100 of this embodiment is as follows:

[0037] First, a suitable gasket 30 is selected according to the size of the irregular sample to be tested, and the gasket 30 is placed in the sleeve 10 , and then the smooth and flat side of the irregular sample to be tested is placed against the gasket 30 .

[0038] Then, the position of the circular baffle 20 is adjusted using a hexagonal screwdriver until the lower portion of the irregular sample to be tested is supported by the circular baffle 20 . At this time, the irregular sample to be tested is fixed by the electron probe sample holder device 100 .

[0039] Figure 9 This is a structural diagram of the electronic probe sample holder device in an embodiment of the present utility model when measuring a regular sample to be tested.

[0040] like Figure 9 As shown, the process of fixing a regular sample to be tested (i.e., a standard sample with smooth upper and lower surfaces) using the electron probe sample holder device 100 of this embodiment is as follows:

[0041] First, a regular sample to be tested is placed between the first limiting portion 13 and the second limiting portion 12 .

[0042] Then, use a hexagonal screwdriver to screw in the circular baffle 20 until the lower part of the regular sample to be tested is supported by the circular baffle 20 . At this time, the regular sample to be tested is fixed by the electron probe sample holder device 100 .

[0043] Functions and Effects of the Embodiments

[0044] According to the device of the electronic probe sample holder involved in the utility model, because it includes a sleeve part, a circular baffle part and a gasket part, the gasket part has multiple specifications with the same outer diameter and different inner diameters. When in use, a gasket that is compatible with the sample to be tested is selected, and the gasket is first placed in the sleeve, and then the smooth and flat side of the sample to be tested is placed against the direction of the gasket. Then, the movable circular baffle is moved up and down in the sleeve to adjust the bottom of the other side of the sample to be tested for fixed measurement. The gasket and the circular baffle cooperate to fix the sample to be tested, which solves the problem of irregular samples being unable to be installed or tilted during installation causing the observation test surface to be uneven, ensures the flatness of the sample surface to improve the test effect and accuracy, improves the test efficiency, and is very practical.

[0045] Furthermore, the sleeve is adapted to the size and shape of the sample stage of the sample to be tested, and can meet the measurement requirements of irregular samples of various sizes.

[0046] Furthermore, the sleeve has two limiting parts, which can limit the gasket, thereby ensuring the stable position of the gasket.

[0047] Furthermore, the cylindrical portion is provided with a threaded portion, the circular baffle is provided with an external thread adapted to the threaded portion, and the length of the threaded section of the internal threaded portion of the cylinder is greater than the length of the external threaded section of the circular baffle, so that the circular baffle can move freely in the sleeve.

[0048] Furthermore, a tool pit that can cooperate with a hexagonal screwdriver is provided at the bottom of the circular baffle, which can more conveniently change the screw connection position of the circular baffle and the sleeve.

[0049] Furthermore, the gasket is a steel gasket, which, on the one hand, can keep the test surface of the sample to be tested horizontal, and on the other hand, can fix the sample to be tested, thereby ensuring a more accurate measurement result.

[0050] Furthermore, the sum of the thickness of the gasket and the thickness of the sample to be tested is greater than the thickness of the second limiting portion, so that the circular baffle can support the sample to be tested and ensure that the sample to be tested is stably fixed.

[0051] Furthermore, the present invention can measure a sample to be tested that has at least one flat surface, and the surface opposite to the flat surface can be either an uneven surface or a flat surface, thus being able to measure samples in various states.

[0052] Those skilled in the art should understand that the present invention is not limited to the above-described embodiments. The above-described embodiments and the description are merely illustrative of the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements are intended to fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

[0053] For example, in actual use, the diameter of the sample sleeve can be changed as needed, and can be specifically adjusted according to the size of the sample stage configured for the electron probe sample measurement instrument.

Claims

1. An electronic probe sample holder device for fixing a sample to be detected, wherein at least one surface of the sample to be detected is a flat surface, characterized in that: include: A sleeve, used for accommodating the sample to be tested; A circular baffle, threadedly connected to the sleeve, for fixing the sample to be tested; as well as Multiple gaskets have the same outer diameter and different inner diameters. One of the gaskets is selected according to the size of the sample to be tested and is set in the sleeve. The gasket is located between the sleeve and the sample to be tested, and the flat surface of the sample to be tested fits the gasket.

2. The electron probe sample holder device according to claim 1, characterized in that: in, The sleeve is adapted to the size and shape of the sample stage of the sample to be detected.

3. The electron probe sample holder device according to claim 1, characterized in that: in, The sleeve includes a cylindrical portion, a first limiting portion and a second limiting portion. The cylindrical portion includes an outer cylindrical portion and a threaded portion, wherein the threaded portion is provided on the inner wall surface of the outer cylindrical portion. The circular baffle is provided with an external thread adapted to the threaded portion. The first limiting portion and the second limiting portion are used to limit the position of the gasket in the cylindrical portion, one side surface of the second limiting portion is connected to the threaded portion and the end of the outer cylindrical portion, and the other side surface of the second limiting portion is connected to the first limiting portion. A first opening is provided at the center of the first limiting portion, and a second opening is provided at the center of the second limiting portion. The second opening is larger than the first opening, and the openings are used for electronic probes to detect samples.

4. The electron probe sample holder device according to claim 3, characterized in that: in, The thread segment length of the threaded portion is greater than the thread segment length of the external thread.

5. The electron probe sample holder device according to claim 1, characterized in that: in, The circular baffle is in the shape of a plate, and a screwdriver pit is provided at the bottom thereof. The screwdriver pit is used to cooperate with a screwdriver to change the screw connection position of the circular baffle and the sleeve.

6. The electron probe sample holder device according to claim 1, characterized in that: The gasket is a steel gasket or a grinding steel gasket.

7. The electron probe sample holder device according to claim 3, characterized in that: The sum of the thickness of the gasket and the thickness of the sample to be tested is greater than the thickness of the second limiting portion.