Dichlorosilane gas-phase filling cabinet and gas-phase filling system

Abstract

The utility model belongs to the technical field of semiconductor gas filling, and discloses a dichlorosilane gas-phase filling cabinet and a gas-phase filling system. The dichlorosilane gas-phase filling cabinet comprises a cabinet body, a cooling device, a first main pipeline and a plurality of steel cylinders, wherein a closed first cavity is formed in the cabinet body; the plurality of steel cylinders are arranged in the first cavity; the cooling device is arranged in the cabinet body, is in heat exchange connection with the first cavity and is used for cooling the steel cylinder in the first cavity; the first main pipeline is arranged in the first cavity, the first main pipeline is communicated with a plurality of first branch pipelines, the first branch pipelines are communicated with the steel cylinders in a one-to-one correspondence manner, and the first main pipeline is used for being communicated with a gas-phase dichlorosilane container. According to the dichlorosilane gas-phase filling cabinet, gas-phase dichlorosilane can be filled into a plurality of steel cylinders at the same time, the filling efficiency is improved, and a gas-phase filling method is used, so that the purity of substances in the steel cylinders is ensured to meet the use requirements.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor gas filling, in particular to a dichlorosilane gas phase filling cabinet and a gas phase filling system. Background Art

[0002] With the rapid development of industries like integrated circuits, purity requirements for gases used in the manufacturing of integrated circuits and finished semiconductor products are becoming increasingly stringent, with impurities required to be less than 1 ppb. Among these, the high-purity electronic gas dichlorosilane (DCS) is widely used as a silicon source gas for epitaxial silicon and CVD (chemical vapor deposition) silicon nitride growth. However, dichlorosilane is a toxic, flammable, and corrosive gas with a low vapor pressure. Its boiling point is 8.2°C at 101.325 kPa, and its flammable volume in air ranges from 4.1% to 98.8% at 20°C and 101.325 kPa. It rapidly hydrolyzes and spontaneously ignites in air, posing an explosion risk upon contact with air. Dichlorosilane is also highly toxic, requiring comprehensive protective measures in any experiments using it. Therefore, it is typically stored in liquid form in cylinders to minimize risk and damage. The conventional filling method uses liquid phase filling. Although the filling speed is fast, the product quality cannot meet the purity requirements of high-purity DCS for customers such as integrated circuits. Gas phase filling can well solve this problem, but the existing gas phase filling equipment cannot meet the filling requirements of dichlorodihydrogen silicon.

[0003] Therefore, there is an urgent need to provide a new type of dichlorosilane gas phase filling cabinet and gas phase filling system to solve the above technical problems in the prior art. Utility Model Content

[0004] The purpose of the utility model is to provide a dichlorosilane gas-phase filling cabinet, which can simultaneously fill dichlorosilane gas-phase into multiple cylinders, improve the filling efficiency, and ensure that the purity of the substance in the cylinders meets the use requirements.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] The dichlorosilane vapor-phase filling cabinet includes a cabinet body, a cooling device, a first main pipeline and a plurality of steel cylinders. The cabinet body has a sealed first cavity inside; the plurality of steel cylinders are arranged in the first cavity; the cooling device is arranged in the cabinet body and connected to the first cavity for heat exchange, and is used to cool the steel cylinders in the first cavity; the first main pipeline is arranged in the first cavity, and the first main pipeline is connected to a plurality of first branch pipelines, and the first branch pipelines are connected to the steel cylinders in a one-to-one correspondence. The first main pipeline is used to communicate with the gas-phase dichlorosilane container.

[0007] Optionally, a filling coil is provided at one end of the first branch pipeline away from the first main pipeline, and the filling coil is connected to the steel cylinder.

[0008] Optionally, a heating device is provided on the outer wall of any one of the several steel cylinders, the filling coil is further connected to a second branch pipe, the second branch pipe is connected to a second main pipe, and the second main pipe can be connected to a gas detection device.

[0009] Optionally, a ventilation partition is placed horizontally in the cabinet, and the ventilation partition divides the interior of the cabinet into a second cavity and a first cavity arranged upper and lower. The ventilation partition is provided with a ventilation fan to introduce the gas in the first cavity into the second cavity.

[0010] Optionally, the cabinet is further provided with an exhaust duct, which passes through the outer wall of the cabinet, the second cavity and the ventilation baffle in sequence, and is connected to the first cavity.

[0011] Optionally, a plurality of fixing brackets are provided on the inner wall of the cabinet at intervals along the first direction, and the steel cylinders are fixed to the fixing brackets one by one.

[0012] Optionally, a plurality of weighing devices are arranged at intervals along the first direction on the inner bottom wall of the cabinet, the cylinders are placed one by one on the weighing devices, and a plurality of display screens correspondingly connected to the weighing devices are arranged on the front panel of the cabinet.

[0013] Optionally, a drainage partition is provided at the bottom of the cabinet, the drainage partition is provided with a plurality of drainage grooves, the weighing device is provided in the drainage grooves, and the drainage grooves are provided with drainage gaps.

[0014] Optionally, the cabinet body is further provided with a control cabinet, and the end of the first main line away from the cylinder is passed through the control cabinet, and flame detectors are provided inside the control cabinet and inside the cabinet body.

[0015] Another object of the present invention is to provide a dichlorosilane gas phase filling system, which includes a dichlorosilane gas phase filling cabinet as described in any of the above solutions.

[0016] Beneficial effects:

[0017] The dichlorosilane vapor-phase filling cabinet of the present invention uses a first cavity of the cabinet to accommodate several steel cylinders and a first main pipe. The first main pipe is connected to an external dichlorosilane vapor-phase container, so that the dichlorosilane vapor-phase is filled into the corresponding steel cylinders using several first branch pipes connected to the first main pipe. During the filling process, a cooling device is used to cool and exchange heat in the first cavity, thereby continuously cooling the steel cylinders, causing the dichlorosilane vapor-phase filled into the steel cylinders to liquefy, increase the filling volume, and realize the transportation of dichlorosilane in a liquid state. The dichlorosilane vapor-phase filling cabinet can realize the simultaneous filling of multiple steel cylinders with dichlorosilane vapor, improving the filling efficiency, and using a gas-phase filling method to ensure that the purity of the material in the steel cylinders meets the use requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is an axonometric diagram of a silicon dichloride vapor-phase filling cabinet provided in a specific embodiment of the present utility model;

[0019] Figure 2 This is an axonometric view of a silicon dichloride vapor-phase filling cabinet provided by a specific embodiment of the present invention with some components hidden;

[0020] Figure 3 yes Figure 2 A partial enlarged view of point A in the middle;

[0021] Figure 4 yes Figure 2 A partial enlarged view of point B in the middle.

[0022] In the picture:

[0023] 100, cabinet body; 101, first chamber; 102, ventilation baffle; 103, second chamber; 104, ventilation fan; 105, weighing device; 106, drainage baffle; 107, drainage trough; 108, fixing bracket; 109, drainage hole; 110, front cabinet door; 120, packaging board; 130, exhaust duct; 140, display screen; 150, flame detector;

[0024] 200, steel cylinder;

[0025] 300, cooling device; 310, heat exchanger; 320, heat exchange grid;

[0026] 400, first main pipeline; 410, first branch pipeline; 420, charging coil;

[0027] 500, second main line; 510, second branch line;

[0028] 600. Control cabinet; 601. Second exhaust duct. DETAILED DESCRIPTION

[0029] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0030] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0031] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0032] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0033] The first direction described in this embodiment is Figure 2 The X direction shown in the figure is the horizontal direction and the length direction of the cabinet 100. It should be noted that the dichlorosilane vapor phase filling cabinet is not only suitable for filling dichlorosilane vapor phase, but also suitable for filling alkyl silanes such as methylsilane, dimethylsilane, and trimethylsilane, as well as other types of electronic specialty gases such as boron trichloride, as long as they are special gases used in chemical vapor deposition, photolithography, etching, doping and other processes in wafer manufacturing.

[0034] Please refer to Figures 1 to 3In this embodiment, the dichlorosilane vapor-phase filling cabinet includes a cabinet 100, a cooling device 300, a first main line 400, and a plurality of steel cylinders 200. The cabinet 100 has a sealed first cavity 101 therein; the plurality of steel cylinders 200 are arranged in the first cavity 101; the cooling device 300 is disposed in the cabinet 100 and is connected to the first cavity 101 for heat exchange, and is used to cool the steel cylinders 200 in the first cavity 101; the first main line 400 is disposed in the first cavity 101, and is connected to a plurality of first branch lines 410. The first branch lines 410 are connected to the steel cylinders 200 in a one-to-one correspondence. The first main line 400 is used to communicate with the gas-phase dichlorosilane container.

[0035] The dichlorosilane vapor-phase filling cabinet in this embodiment uses a first cavity 101 of the cabinet body 100 to accommodate several cylinders 200 and a first main line 400. The first main line 400 is connected to an external gas-phase dichlorosilane container, so that the gas-phase dichlorosilane is filled into the corresponding cylinders 200 using several first branch lines 410 connected to the first main line 400. During the filling process, the cooling device 300 is used to cool and exchange heat with the first cavity 101, thereby continuously cooling the cylinders 200, so that the gas-phase dichlorosilane filled into the cylinders 200 is liquefied, increasing the filling volume and realizing the transportation of dichlorosilane in a liquid state. The dichlorosilane vapor-phase filling cabinet can realize the simultaneous filling of gas-phase dichlorosilane into multiple cylinders 200, improving the filling efficiency, and using the gas-phase filling method to ensure that the purity of the material in the cylinders 200 meets the use requirements.

[0036] In this embodiment, the front panel of the cabinet 100 is further provided with a plurality of front cabinet doors 110. Each front cabinet door 110 is provided for two cylinders 200. Eight cylinders 200 are provided in the cabinet 100, i.e., four front cabinet doors 110 are provided. The front panel of the cabinet 100 also includes a sealing plate 120, which seals the cabinet 100. The front cabinet doors 110 are hingedly connected to the sealing plate 120. By opening the front cabinet door 110, the corresponding cylinder 200 can be removed and replaced, thereby performing cyclic refilling of the cylinder 200.

[0037] Please continue to refer to Figure 1 and Figure 2 The cabinet 100 is further provided with a control cabinet 600. The end of the first main line 400 away from the cylinder 200 is passed through the control cabinet 600. The interior of the control cabinet 600 is connected to the interior of the cabinet 100 (such as Figure 3(as shown) are both equipped with flame detectors 150. The control cabinet 600 is also equipped with numerous control and detection components to enable automatic filling of fumed dichlorosilane, thereby improving filling efficiency. Because dichlorosilane is flammable, flame detectors 150 are used to detect fires within the cabinet 100 and control cabinet 600, allowing for timely detection and treatment of fires, thereby improving the safety and reliability of the dichlorosilane fumed filling cabinet.

[0038] At the same time, a second exhaust duct 601 is provided on the top of the control cabinet 600 to promptly extract the dichlorosilane in the control cabinet 600 to avoid fire and explosion caused by excessive concentration, thereby improving safety.

[0039] like Figure 3 As shown, a filling coil 420 is provided at one end of the first branch line 410 away from the first main line 400. The filling coil 420 is connected to the steel cylinder 200. The filling coil 420 is in a curved spiral shape, thereby extending the path of the gaseous dichlorosilane as it flows to the steel cylinder 200, ensuring that the gaseous dichlorosilane is fully cooled by the first chamber 101, thereby improving filling efficiency.

[0040] In this embodiment, the outer wall of any one of the several steel cylinders 200 is provided with a heating device (not shown in the figure), and the filling coil 420 is also connected to the second branch pipe 510, which is connected to the second main pipe 500, and the second main pipe 500 can be connected to the gas detection device. The heating device can be specifically selected as a heating belt, a heating blanket or other devices, as long as it can heat the steel cylinder 200. When the composition of the dichlorosilane in the steel cylinder 200 is detected, it is necessary to heat the steel cylinder 200 first so that the liquid dichlorosilane in the steel cylinder 200 is vaporized, thereby flowing into the gas detection device from the second branch pipe 510 and the second main pipe 500, and the composition of the gaseous dichlorosilane is detected to ensure that the purity of the dichlorosilane meets the requirements.

[0041] like Figure 2 and Figure 3 As shown, a ventilation baffle 102 is horizontally placed within the cabinet 100. The ventilation baffle 102 divides the interior of the cabinet 100 into a second chamber 103 and a first chamber 101, which are arranged one above the other. The ventilation baffle 102 is provided with a ventilation fan 104 to direct the gas in the first chamber 101 into the second chamber 103. When the cylinder 200 is filled and then disassembled and transported, some dichlorosilane may leak. In this case, the ventilation fan 104 can be used to extract the gas in the first chamber 101 and discharge it into the second chamber 103, thereby preventing the accumulation of dichlorosilane gas and the subsequent increase in concentration, which could cause danger. This improves the safety of the gas-phase dichlorosilane filling cabinet.

[0042] Furthermore, the cabinet 100 is further provided with an exhaust duct 130, which sequentially passes through the outer wall of the cabinet 100, the second cavity 103, and the ventilation baffle 102, and is connected to the first cavity 101. The exhaust duct 130 is used to promptly discharge the dichlorosilane in the first cavity 101 in the event of a large-scale leakage of the dichlorosilane, thereby avoiding any danger and further ensuring the safety of the filling process.

[0043] like Figure 4 As shown, in this embodiment, a plurality of fixing brackets 108 are provided at intervals along a first direction on the inner wall of the cabinet 100, and the cylinders 200 are fixed to the fixing brackets 108 one by one. The fixing brackets 108 can fix the cylinders 200 circumferentially, so that the cylinders 200 are firmly fixed inside the cabinet 100, ensuring that the cylinders 200 remain stable during the filling process, thereby improving safety.

[0044] like Figure 2 and Figure 4 As shown, optionally, a plurality of weighing devices 105 are spaced along the first direction along the inner bottom wall of the cabinet 100. The cylinders 200 are placed one-to-one on the weighing devices 105. The front panel of the cabinet 100 is provided with a plurality of display screens 140 connected to the weighing devices 105. The weighing devices 105 are used to detect whether the dichlorosilane in the cylinder 200 is fully filled, and the display screens 140 can intuitively display the weight of the dichlorosilane in the cylinder 200 as measured by the weighing devices 105. For example, in this embodiment, the weighing device 105 is an electronic scale, and the capacity of the cylinder 200 is 40L. Since the density of liquid dichlorosilane is 1.25kg / L, the net weight of the dichlorosilane in the cylinder 200 after filling is 50kg.

[0045] Furthermore, a drainage baffle 106 is provided at the bottom of the cabinet 100. The drainage baffle 106 is provided with a plurality of drainage grooves 107. The weighing device 105 is disposed within the drainage grooves 107, which are provided with drainage gaps. As the cylinder 200 is continuously cooled by the cooling device 300, water vapor on the surface of the cylinder 200 inevitably liquefies and forms dew. When this dew accumulates, it not only corrodes the cabinet 100 but also affects the weighing performance of the weighing device 105. Therefore, the dew is drained through the drainage grooves 107 and drainage gaps on the drainage baffle 106 and then discharged to the outside of the cabinet 100 through drainage holes 109 provided at the bottom of the side wall of the cabinet 100, thereby extending the service life of the dichlorosilane vapor-phase filling cabinet.

[0046] In this embodiment, the cooling device 300 includes a heat exchanger 310 and a heat exchange grille 320. The heat exchanger 310 is used to exchange heat with the outside world, thereby blowing out cold air, and blowing the cold air into the first cavity 101 through the heat exchange grille 320 to achieve cooling of the first cavity 101.

[0047] This embodiment also provides a dichlorosilane vapor-phase filling system, which includes a dichlorosilane vapor-phase filling cabinet as described in any of the above-mentioned solutions. This dichlorosilane vapor-phase filling system has all the benefits of the dichlorosilane vapor-phase filling cabinet described in any of the above-mentioned solutions, and will not be further described here.

[0048] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. Dichlorosilane gas phase filling cabinet, characterized in that: include: A cabinet (100), wherein the cabinet (100) has a sealed first cavity (101) therein; A plurality of steel cylinders (200), wherein the plurality of steel cylinders (200) are arranged in the first cavity (101); a cooling device (300), the cooling device (300) being arranged in the cabinet (100) and connected to the first cavity (101) for heat exchange, and being used to cool the steel cylinder (200) in the first cavity (101); A first main line (400) is provided in the first cavity (101); the first main line (400) is connected to a plurality of first branch lines (410); the first branch lines (410) are connected to the cylinders (200) in a one-to-one correspondence; the first main line (400) is used to communicate with a gaseous dichlorosilane container.

2. The dichlorosilane gas phase filling cabinet according to claim 1, characterized in that: A filling coil (420) is provided at one end of the first branch pipe (410) away from the first main pipe (400), and the filling coil (420) is connected to the steel cylinder (200).

3. The dichlorosilane gas phase filling cabinet according to claim 2, characterized in that: The outer wall of any one of the plurality of steel cylinders (200) is provided with a heating device, the filling coil (420) is further connected to a second branch pipe (510), the second branch pipe (510) is connected to a second main pipe (500), and the second main pipe (500) can be connected to a gas detection device.

4. The dichlorosilane gas phase filling cabinet according to claim 1, characterized in that: A ventilation baffle (102) is horizontally placed in the cabinet (100), and the ventilation baffle (102) divides the interior of the cabinet (100) into a second cavity (103) and a first cavity (101) arranged above and below. The ventilation baffle (102) is provided with a ventilation fan (104) to guide the gas in the first cavity (101) into the second cavity (103).

5. The dichlorosilane gas phase filling cabinet according to claim 4, characterized in that: The cabinet (100) is further provided with an exhaust duct (130), the exhaust duct (130) sequentially passing through the outer wall of the cabinet (100), the second cavity (103) and the ventilation baffle (102), and the exhaust duct (130) is connected to the first cavity (101).

6. The dichlorosilane gas phase filling cabinet according to claim 1, characterized in that: A plurality of fixing brackets (108) are arranged at intervals along a first direction on the inner wall of the cabinet (100), and the steel cylinders (200) are fixed to the fixing brackets (108) in a one-to-one correspondence.

7. The dichlorosilane vapor phase filling cabinet according to claim 6, characterized in that: The inner bottom wall of the cabinet (100) is provided with a plurality of weighing devices (105) spaced apart along the first direction, the steel cylinders (200) are placed one-to-one on the weighing devices (105), and the front panel of the cabinet (100) is provided with a plurality of display screens (140) correspondingly connected to the weighing devices (105).

8. The dichlorosilane vapor phase filling cabinet according to claim 7, characterized in that: The cabinet (100) is provided with a drainage partition (106) at the bottom, the drainage partition (106) is provided with a plurality of drainage grooves (107), the weighing device (105) is arranged in the drainage grooves (107), and the drainage grooves (107) are provided with drainage gaps.

9. The dichlorosilane vapor phase filling cabinet according to any one of claims 1 to 8, characterized in that: The cabinet (100) is further provided with a control cabinet (600), and one end of the first main line (400) away from the cylinder (200) is passed through the control cabinet (600), and flame detectors (150) are both provided inside the control cabinet (600) and inside the cabinet (100).

10. Silicon dichloride gas phase filling system, characterized in that: It comprises the dichlorosilane gas phase filling cabinet according to any one of claims 1 to 9.

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