Wafer plating pot loading platform

Abstract

The utility model discloses a wafer plating pot loading platform, and relates to the technical field of processing equipment. The device specifically comprises a supporting base; the first ends of the supporting screws are connected to the supporting base and are not located on the same straight line; the rotating nut is arranged on the supporting screw rod and can do reciprocating motion in the length direction of the supporting screw rod; the supporting platform is provided with a via hole for the supporting rod to penetrate through, and when the supporting screw penetrates through the via hole, the supporting platform abuts against the top of the rotating nut; and the rotating piece is arranged on the supporting platform, is used for supporting a piece to be placed and can drive the piece to be placed to rotate. On the premise that the universality of the loading platform is achieved, the lifting structure of the loading platform is simplified, and the production cost of the loading platform is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of processing equipment, in particular to a wafer plating pot loading platform. Background Art

[0002] With the continuous development of semiconductor technology, the complexity and precision of wafer manufacturing processes are also constantly improving. As an indispensable part of the semiconductor manufacturing process, the importance of coating technology is self-evident. During the coating process, the coating pot is heavy and the wafers are fragile, which places higher demands on the loading platform for loading wafers. Existing loading platforms are usually made one-to-one according to the corresponding evaporation machines and lack height adjustment functions. The limitation of this design is that when different models of evaporation machines need to be replaced, the corresponding loading platform often needs to be replaced, resulting in poor versatility of the equipment, increased production costs and difficulty in maintenance. In addition, during operation, the fixed-height loading platform is prone to unstable wafer loading due to height mismatch, increasing the risk of wafer damage and affecting production efficiency and product quality.

[0003] To improve the versatility of loading platforms, some existing technologies have adopted height-adjustable designs. However, these designs use lifting motors. While these designs improve the versatility of loading platforms, they are complex in structure, cumbersome in operation, and heavily rely on electric drive, which increases material costs.

[0004] Therefore, under the premise of achieving the versatility of the loading platform, how to simplify the lifting structure of the loading platform and reduce the production cost of the loading platform has become a technical problem that needs to be solved urgently. Utility Model Content

[0005] The main purpose of the utility model is to provide a wafer plating pot loading platform, aiming to simplify the lifting structure of the loading platform and reduce the production cost of the loading platform under the premise of achieving versatility.

[0006] In order to achieve the above-mentioned purpose, the present invention provides a wafer plating pot loading platform, comprising:

[0007] Support base;

[0008] at least three support screws, wherein the first ends of the support screws are connected to the support base and are not in the same straight line;

[0009] A rotating nut is provided on the support screw and can reciprocate along the length direction of the support screw;

[0010] a support platform, wherein the support platform is provided with a through hole for the support rod to pass through, and when the support screw passes through the through hole, the support platform abuts against the top of the rotating nut; and

[0011] The rotating member is arranged on the supporting platform, and is used for supporting the member to be placed and driving the member to be placed to rotate.

[0012] In one embodiment of the present application, the rotating part is a rotating bearing, a through hole is provided on the support platform, the outer ring of the rotating bearing is connected to the support platform, and the inner ring of the rotating bearing passes through the through hole and extends to the side away from the support screw to achieve support for the part to be placed.

[0013] In one embodiment of the present application, the outer ring of the rotating bearing is connected to the supporting platform via screws.

[0014] In one embodiment of the present application, a locking nut is further provided on the support screw, and when the support platform moves to a specified position, the locking nut locks the support platform on the rotating nut.

[0015] In one embodiment of the present application, a level meter for detecting the horizontal state of the support platform is provided on the support platform.

[0016] In one embodiment of the present application, the number of the support screws is four, and the four support screws are evenly distributed on the support base.

[0017] In one embodiment of the present application, fixing holes for the fixing members to pass through are evenly distributed on the support base.

[0018] With the above technical solution, due to the design of the support base and at least three support screws, the entire device has good stability, can effectively prevent overturning and shaking, and ensure the safety and stability of the parts to be placed during use. By rotating the nut to reciprocate along the length of the support screw, the height of the support platform can be easily adjusted to accommodate parts to be placed at different heights. This design makes the device highly flexible and applicable. The mechanical structure of this solution is relatively simple, the connection relationship between the various components is clear, and it is easy to manufacture and maintain. Components such as the support screw, rotating nut, support platform and rotating part are all common mechanical elements, which are easy to purchase and replace. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be described in detail below with reference to specific embodiments and accompanying drawings, wherein:

[0020] Figure 1 This is a schematic diagram of the three-dimensional structure of the first embodiment of the present utility model;

[0021] 10. Support base; 11. Fixing hole; 20. Support screw; 21. Rotating nut; 22. Locking nut; 30. Level; 40. Screw; 50. Inner ring of rotating bearing. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the following specific embodiments are only used to explain the present invention and do not constitute a limitation to the present invention.

[0023] like Figure 1 As shown, in order to achieve the above-mentioned purpose, the utility model proposes a wafer plating pot loading platform, comprising:

[0024] Support base 10;

[0025] At least three support screws 20, wherein the first ends of the support screws 20 are connected to the support base 10 and are not in the same straight line;

[0026] The rotating nut 21 is provided on the support screw 20 and can reciprocate along the length direction of the support screw 20;

[0027] a support platform, wherein a through hole is provided on the support platform for the support rod to pass through, and when the support screw 20 passes through the through hole, the support platform abuts against the top of the rotating nut 21; and

[0028] The rotating member is arranged on the supporting platform, and is used for supporting the member to be placed and driving the member to be placed to rotate.

[0029] Specifically, the solution relates to a mechanical device, which mainly consists of a support base 10, at least three support screws 20, a rotating nut 21, a support platform and a rotating member.

[0030] The support base 10 is made of a sturdy material, such as steel or aluminum alloy, to ensure stability and load-bearing capacity. At least three support screws 20 are connected to the support base 10. The first ends of these support screws 20 are fixed to the support base 10, and they are arranged in a non-linear manner. This design can increase the stability and anti-overturning ability of the device.

[0031] The support screw 20 is a long, threaded metal rod. A rotating nut 21 is attached to the support screw 20, allowing it to reciprocate along the length of the support screw 20. The design of the rotating nut 21 allows it to be freely adjusted on the support screw 20, thereby adjusting the height of the support platform.

[0032] The support platform is a planar structure for placing the object to be supported. It has multiple holes, sized and positioned to allow the support screw 20 to pass through. When the support screw 20 passes through the holes in the support platform, the bottom of the support platform abuts the top of the rotating nut 21. By adjusting the position of the rotating nut 21, the height of the support platform can be changed, thereby adjusting the height of the object to be supported.

[0033] A rotating member is a component mounted on a support platform, supporting and rotating the object to be placed. Rotating members can be designed in a variety of ways, such as a rotating disk with bearings or a rotating device driven by a motor. The main function of a rotating member is to rotate the object to be placed, thereby satisfying specific requirements.

[0034] By adopting the above technical solution, due to the design of the support base 10 and at least three support screws 20, the entire device has good stability, can effectively prevent overturning and shaking, and ensure the safety and stability of the parts to be placed during use. By rotating the nut 21 to reciprocate along the length direction of the support screw 20, the height of the support platform can be easily adjusted to adapt to parts to be placed of different heights. This design makes the device highly flexible and applicable. The mechanical structure of this solution is relatively simple, the connection relationship between the various components is clear, and it is easy to manufacture and maintain. Components such as the support screw 20, the rotating nut 21, the support platform and the rotating part are all common mechanical elements, which are easy to purchase and replace. At the same time, by adjusting the lifting and lowering of at least three support screws, the inclination angle of the rotating part can be fine-tuned to keep the rotating part in a horizontal state.

[0035] In one embodiment of the present application, the rotating part is a rotating bearing, a through hole is provided on the support platform, the outer ring of the rotating bearing is connected to the support platform, and the inner ring 50 of the rotating bearing passes through the through hole and extends to the side away from the support screw 20 to achieve support for the part to be placed.

[0036] Specifically, the rotating member is a rotating bearing, which is used to provide rotational motion. The rotating bearing has two main parts: an outer ring and an inner ring. The support platform is provided with a through hole, through which the inner ring 50 of the rotating bearing can extend and extend away from the support screw 20. By extending away from the support screw 20, the support screw 20 is prevented from interfering with the parts to be placed on the inner ring of the rotating bearing when adjusting the position. The outer ring of the rotating bearing and the support platform can be connected by a fixed connection method, such as welding or integral molding. Using a fixed connection method can improve the connection strength between the rotating bearing and the support platform. It is conceivable that the outer ring of the rotating bearing and the support platform can also be connected by a detachable method, such as screw connection 40, bolt connection, etc. Using a detachable connection method can facilitate the installation and removal of the rotating bearing and facilitate subsequent maintenance.

[0037] The aforementioned technical solution utilizes a rotating bearing design that allows for smoother rotational motion, reduces friction and energy loss, and improves transmission efficiency. The through-hole design on the support platform facilitates installation and removal of the rotating bearing, reducing maintenance complexity. This design also makes the entire device extremely compact, making it suitable for use in space-constrained environments while ensuring sufficient support and stability.

[0038] In one embodiment of the present application, the outer ring of the rotating bearing is connected to the supporting platform via screws 40 .

[0039] With this technical solution, the screw 40 connection provides a secure fixation, ensuring that the outer ring does not loosen during use, thereby ensuring stable operation of the rotating bearing. The screw 40 connection makes it easier to remove and replace the bearing, reducing maintenance time and costs.

[0040] In one embodiment of the present application, a locking nut 22 is further provided on the support screw 20 . When the support platform moves to a specified position, the locking nut 22 locks the support platform on the rotating nut 21 .

[0041] Specifically, a support screw 20 extends through the support platform and the rotating nut 21. It provides support and guidance, allowing the support platform to move up and down along the screw. A locking nut 22 is mounted on the support screw 20, above the support platform. Once the support platform reaches the desired position, the locking nut 22 can be tightened to secure the support platform to the rotating nut 21, preventing further movement.

[0042] With the above technical solution, the locking nut 22 can effectively prevent the support platform from moving after reaching the specified position, thereby ensuring stability. The mechanical structure is simple and easy to manufacture and maintain.

[0043] In one embodiment of the present application, a level meter 30 for detecting the horizontal state of the support platform is provided on the support platform.

[0044] Specifically, it is used to detect the horizontal state of the support platform. The level 30 can be a traditional bubble level 30 or an electronic level 30, the latter of which can provide more accurate measurement.

[0045] By adopting the above technical solution, through precise level detection and adjustment, the support platform can be kept in a very precise level state, which is convenient for subsequent use.

[0046] In one embodiment of the present application, there are four supporting screws 20 , and the four supporting screws 20 are evenly distributed on the supporting base 10 .

[0047] By adopting the above technical solution, the four support screws 20 are evenly distributed on the four corners of the support base 10, which can provide good support and stability. This ensures that the support platform will not tilt or deform when subjected to external force or load. The four evenly distributed support screws 20 can evenly distribute the load on the support platform, avoiding local deformation or damage caused by excessive force on a single point. This is very important for maintaining the overall structural integrity of the platform. The design of the four support screws 20 makes it more convenient to adjust the height and level of the platform. By adjusting each screw separately, the various angles of the platform can be precisely adjusted to ensure that the platform is in the optimal level state. The four support screws 20 disperse the load of the platform, reducing the pressure on each screw, thereby enhancing the overall load-bearing capacity. This enables the platform to withstand greater weight without affecting its stability and levelness.

[0048] In one embodiment of the present application, fixing holes 11 for fixing members to pass through are evenly distributed on the support base 10 .

[0049] By adopting the above technical solution, the evenly distributed fixing holes 11 enable the fixing member to be fixed at different positions, thereby increasing the overall stability of the support base 10.

[0050] The above description is only a preferred embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made by using the contents of the present invention specification and drawings under the utility model concept, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A wafer plating pot loading platform, characterized in that: include: Support base; at least three support screws, wherein the first ends of the support screws are connected to the support base and are not in the same straight line; A rotating nut is provided on the support screw and can reciprocate along the length direction of the support screw; A support platform, wherein the support platform is provided with a through hole for the support screw to pass through, and when the support screw passes through the through hole, the support platform abuts against the top of the rotating nut; as well as The rotating member is arranged on the supporting platform, and is used for supporting the member to be placed and driving the member to be placed to rotate.

2. The wafer plating pot loading platform according to claim 1, wherein: The rotating part is a rotating bearing, a through hole is provided on the support platform, the outer ring of the rotating bearing is connected to the support platform, and the inner ring of the rotating bearing passes through the through hole and extends to the side away from the support screw to achieve support for the part to be placed.

3. The wafer plating pot loading platform according to claim 2, wherein: The outer ring of the rotating bearing is connected to the supporting platform through screws.

4. The wafer plating pot loading platform according to claim 1, wherein: The support screw is further provided with a locking nut. When the support platform moves to a specified position, the locking nut locks the support platform on the rotating nut.

5. The wafer plating pot loading platform according to claim 1, wherein: The support platform is provided with a level meter for detecting the horizontal state of the support platform.

6. The wafer plating pot loading platform according to claim 1, wherein: The number of the support screws is four, and the four support screws are evenly distributed on the support base.

7. The wafer plating pot loading platform according to claim 1, wherein: The support base is evenly distributed with fixing holes for the fixing members to pass through.

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