Seed crystal placing and finished product taking-out device of MPCVD (Micro Plasma Chemical Vapor Deposition) device
By introducing an automatic visual expansion and contraction system into the MPCVD device, the problems of seed crystal position offset and impurity residue are solved, the precise pick-up and placement of seed crystals are realized and the operation is simplified, and the production quality and the practicality of the device are improved.
Patent Information
- Application Number
- CN202422325483.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-23
- Publication Date
- 2025-08-22
- Estimated Expiration
- 2034-09-23
AI Technical Summary
The furnace door of the existing MPCVD device is relatively small, and the seed crystals need to be manually operated manually during the placement and removal of the seed crystals. The blind spot in the field of vision is large and difficult to operate, resulting in the seed crystals not centered, the temperature difference is large, the growth quality is poor, and impurities may remain.
A MPCVD device seed crystal insertion and finished product removal device is designed, and the automatic visual expansion and contraction method is adopted. Through the combination of electric telescopic rods, adjustment components, mechanical grippers and micro cameras, the precise placement and removal of seed crystals is achieved, simplifying the operation process and avoiding dust residue.
It improves the flexibility and accuracy of seed crystal picking and placement, simplifies the operation process, ensures the accurate placement of seed crystals, avoids impurities residues, and improves the production quality and practical value of the device.
Smart Images
Figure CN223255417U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of MPCVD devices, in particular to a device for inserting seed crystals and taking out finished products of an MPCVD device. Background Art
[0002] Among the many methods for synthesizing diamond films, microwave plasma chemical vapor deposition (MPCVD) technology has become the preferred method for preparing high-quality diamond films due to its advantages such as high plasma density, good controllability, no discharge electrode pollution, and high quality of synthesized diamond films.
[0003] The furnace doors of many current MPCVD devices are relatively small, and manual operation is required during the process of placing and removing the seed crystals. The blind spot is large, and the operation is difficult and complicated. This may cause the seed crystal to be out of the center during the growth process, the temperature difference to be too large, and the seed crystal growth quality to be poor.
[0004] Therefore, in view of the fact that the seed crystal position is easily offset during the seed crystal placement and removal process of the existing MPCVD device, and impurities may remain on the surface, a seed crystal placement and finished product removal device for the MPCVD device can be designed. Through automatic visual telescopic means, the seed crystal placement steps can be optimized, the flexibility of seed crystal placement can be improved, the operation of the operator can be simplified, the seed crystal placement position can be guaranteed to be accurate, dust can be avoided from remaining on the seed crystal, the seed crystal production quality can be ensured, and the practical value of the device can be enhanced. Utility Model Content
[0005] In order to overcome the problem that most MPCVD devices inevitably have errors in the process of placing and removing the seed crystal, which may cause the placement position of the seed crystal to shift and may also cause tiny impurities to remain on the surface of the seed crystal.
[0006] The technical solution of the utility model is: a seed crystal placement and finished product removal device for an MPCVD device, comprising a base, a first electric telescopic rod, a first adjustment component, a second fixed block, a second electric telescopic rod, a second adjustment component, a third fixed frame, a mechanical gripper, a third motor and a micro camera; a first electric telescopic rod is provided on the upper surface of the base, a first adjustment component is provided at one end of the first electric telescopic rod, a second fixed block is provided on one side of the first adjustment component, a second electric telescopic rod is provided on one side of the second fixed block, a second electric telescopic rod is provided at one end of the second electric telescopic rod, a second adjustment component is provided on one side of the second adjustment component, a third fixed frame is provided on the inner side of the third fixed frame, a third motor is provided on the outer side of the third fixed frame, and a micro camera is provided on one side of the third fixed frame.
[0007] Preferably, a base is provided to fix and support the first electric telescopic rod, the height of the second fixed block can be flexibly adjusted by extending and retracting the first electric telescopic rod, the second electric telescopic rod can be flexibly rotated by using the first adjusting component, the placement angle and position of the second electric telescopic rod can be flexibly adjusted, the second electric telescopic rod can be flexibly extended and retracted, the mechanical gripper can be flexibly extended and retracted by using the second adjusting component, the placement angle and position of the third fixed frame can be flexibly adjusted, the mechanical gripper can be fixedly connected by using the third fixed frame, thereby moving the mechanical gripper to a specified placement position, and the mechanical gripper can be flexibly controlled by the third motor to grab and release the molybdenum disk. At the same time, a micro camera can be used to observe the position of the mechanical gripper in the furnace chamber in real time, thereby optimizing the seed crystal placement steps, improving the flexibility of seed crystal placement, simplifying the operation effect of the operator, and enhancing the practical value of the device.
[0008] Preferably, the first adjustment component includes a first fixed block, a first universal joint coupling, a first fixed frame and a first motor; a first fixed block is provided at one end of the first electric telescopic rod, a first universal joint coupling is provided on one side of the first fixed block, a first fixed frame is provided on one side of the first universal joint coupling, and a first motor is provided on one side of the first fixed frame; the first universal joint coupling is rotatably connected through the first fixed block, the placement angle of the first fixed frame is flexibly adjusted by using the first universal joint coupling, the second electric telescopic rod is fixedly connected through the first fixed frame, and the rotation angle of the first universal joint coupling is controlled by using the first motor.
[0009] Preferably, the first universal joint coupling and the first fixed block are rotatably connected to each other, and the output end of the first motor is connected to the first universal joint coupling; the first motor controls the rotation of the first universal joint coupling to rotate the first fixed block, thereby flexibly adjusting the angle of the second fixed block.
[0010] Preferably, the second adjustment assembly includes a second universal joint coupling, a second fixed frame and a second motor; a second universal joint coupling is provided at one end of the second electric telescopic rod, a second fixed frame is provided on one side of the second universal joint coupling, and a second motor is provided on one side of the second fixed frame; the angle of the second fixed frame is flexibly adjusted by the second universal joint coupling, the second fixed frame is fixedly connected to the third fixed frame, and the rotation angle of the second universal joint coupling is controlled by the second motor.
[0011] Preferably, the second universal joint coupling is rotatably connected to one end of the second electric telescopic rod, and the output end of the second motor is connected to the second universal joint coupling; the rotation of the second universal joint coupling is controlled by the second motor, so that the second fixed frame rotates around one end of the second electric telescopic rod, thereby flexibly adjusting the placement position of the mechanical gripper.
[0012] Preferably, the mechanical gripper is rotatably connected to the third fixed frame, and the output end of the third motor is connected to the mechanical gripper; the mechanical gripper is fixedly connected to the third fixed frame, and the third motor is used to flexibly control the use state of the mechanical gripper, and the molybdenum plate is flexibly grasped and released by the mechanical gripper, thereby achieving the effect of conveniently moving and picking up the molybdenum plate.
[0013] Preferably, a micro camera is arranged on the top of the third fixing bracket, and the micro camera and the external device are connected to each other via Bluetooth; the micro camera is connected to a computer or mobile device via Bluetooth, so that the position of the mechanical gripper movement can be observed in real time through the external device, and the placement position of the molybdenum disk can be accurately located.
[0014] Beneficial effects of the utility model:
[0015] 1. Compared with traditional MPCVD devices, most furnace doors are relatively small, and manual operation is required during the seed crystal placement and removal process. The blind spot is large, and the operation is difficult and complicated. This may cause the seed crystal to be misaligned during the growth process, resulting in large temperature differences and poor seed crystal growth quality. The automatic visual telescopic method optimizes the seed crystal placement process, improves the flexibility of seed crystal placement, simplifies the operator's operation, ensures the accurate placement of the seed crystal, avoids dust residue on the seed crystal, ensures the seed crystal production quality, and enhances the practical value of the device.
[0016] 2. When placing or removing seed crystals, the first electric telescopic rod is extended and retracted to flexibly adjust the height of the second fixed block. The second fixed block is used to connect and fix the second electric telescopic rod. The second electric telescopic rod is extended and retracted to flexibly move the mechanical gripper into and out of the furnace chamber. The mechanical gripper is fixedly connected to the third fixed frame, thereby moving the mechanical gripper to the specified position. This solves the problem of seed crystal position easily shifting during seed crystal placement and removal in most MPCVD devices, and impurities may remain on the surface. This improves the flexibility of seed crystal placement and removal.
[0017] 3. The first electric telescopic rod is fixedly supported by the base, and the third motor is used to flexibly control the mechanical gripper to grab and release the molybdenum plate. At the same time, the micro camera is connected to the external device via Bluetooth to transmit the image inside the furnace cavity to the external device in real time, so as to observe the position of the mechanical gripper in the furnace cavity in real time and ensure the accurate removal and placement of the molybdenum plate. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 Shown is a schematic diagram of the three-dimensional structure of a seed crystal placement and finished product removal device of an MPCVD device of the present invention;
[0019] Figure 2 Shown is a schematic diagram of the three-dimensional structure of the first adjustment component of a seed crystal placement and finished product removal device of an MPCVD device of the present invention;
[0020] Figure 3Shown is a schematic diagram of the three-dimensional structure of the second electric telescopic rod of the seed crystal placement and finished product removal device of an MPCVD device of the present invention;
[0021] Figure 4 Shown is a schematic diagram of the three-dimensional structure of a mechanical gripper of a seed crystal placement and finished product removal device of an MPCVD device of the present invention.
[0022] Explanation of the accompanying drawings: 1. Base; 2. First electric telescopic rod; 301. First fixed block; 302. First universal joint coupling; 303. First fixed frame; 304. First motor; 4. Second fixed block; 401. Second electric telescopic rod; 501. Second universal joint coupling; 502. Second fixed frame; 503. Second motor; 6. Third fixed frame; 601. Mechanical gripper; 602. Third motor; 7. Miniature camera. DETAILED DESCRIPTION
[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0024] See also Figures 1-4 The utility model provides an embodiment: a seed crystal placement and finished product removal device for an MPCVD device, comprising a base 1, a first electric telescopic rod 2, a first adjustment component, a second fixed block 4, a second electric telescopic rod 401, a second adjustment component, a third fixing frame 6, a mechanical gripper 601, a third motor 602 and a micro camera 7; the first electric telescopic rod 2 is provided on the upper surface of the base 1, one end of the first electric telescopic rod 2 is provided with the first adjustment component, the second fixed block 4 is provided on one side of the first adjustment component, the second electric telescopic rod 401 is provided on one side of the second fixed block 4, one end of the second electric telescopic rod 401 is provided with the second adjustment component, the third fixing frame 6 is provided on one side of the second adjustment component, the mechanical gripper 601 is provided on the inner side of the third fixing frame 6, the third motor 602 is provided on the outer side of the third fixing frame 6, and the micro camera 7 is provided on one side of the third fixing frame 6.
[0025] See also Figure 2In this embodiment, the first adjustment component includes a first fixed block 301, a first cardan shaft coupling 302, a first fixed frame 303 and a first motor 304; one end of the first electric telescopic rod 2 is provided with a first fixed block 301, one side of the first fixed block 301 is provided with a first cardan shaft coupling 302, one side of the first cardan shaft coupling 302 is provided with a first fixed frame 303, one side of the first fixed frame 303 is provided with a first motor 304, and the first cardan shaft coupling 302 is rotatably connected to the first fixed block 301. 302 flexibly adjusts the placement angle of the first fixed frame 303, and the second electric telescopic rod 401 is fixedly connected to the first fixed frame 303, and the first motor 304 is used to control the rotation angle of the first universal joint coupling 302; the first universal joint coupling 302 and the first fixed block 301 are rotatably connected to each other, and the output end of the first motor 304 is connected to the first universal joint coupling 302. The first motor 304 controls the rotation of the first universal joint coupling 302, so that the first fixed frame 303 rotates around the first fixed block 301, thereby flexibly adjusting the angle of the second fixed block 4.
[0026] See also Figure 3 In this embodiment, the second adjustment component includes a second universal joint coupling 501, a second fixed frame 502 and a second motor 503; a second universal joint coupling 501 is provided at one end of the second electric telescopic rod 401, a second fixed frame 502 is provided on one side of the second universal joint coupling 501, and a second motor 503 is provided on one side of the second fixed frame 502. The angle of the second fixed frame 502 is flexibly adjusted by the second universal joint coupling 501, and the third fixed frame 6 is fixedly connected to the second fixed frame 6 by the second fixed frame 502. The rotation angle of the second universal joint coupling 501 is controlled by the second motor 503; the second universal joint coupling 501 is rotatably connected to one end of the second electric telescopic rod 401, and the output end of the second motor 503 is connected to the second universal joint coupling 501. The second universal joint coupling 501 is controlled to rotate by the second motor 503, so that the second fixed frame 502 rotates around one end of the second electric telescopic rod 401, thereby flexibly adjusting the placement position of the mechanical gripper 601.
[0027] See also Figure 4In this embodiment, the mechanical gripper 601 is rotatably connected to the third fixed frame 6, the output end of the third motor 602 is connected to the mechanical gripper 601, and the mechanical gripper 601 is fixedly connected through the third fixed frame 6. The third motor 602 is used to flexibly control the use state of the mechanical gripper 601, and the molybdenum plate is flexibly grasped and released by the mechanical gripper 601, thereby achieving the effect of conveniently moving and taking the molybdenum plate; the micro camera 7 is arranged on the top of the third fixed frame 6, and the micro camera 7 is connected to the external device via Bluetooth. The micro camera 7 is connected to a computer or mobile phone device via Bluetooth, so that the position of the mechanical gripper 601 is observed in real time through the external device, and the placement position of the molybdenum plate is accurately located.
[0028] When placing the seed crystals, the operator arranges the cleaned seed crystals closely on the molybdenum plate, controls the mechanical gripper 601 to grip the molybdenum plate through the third motor 602, and then extends the second electric telescopic rod 401 to move the third fixed frame 6 into the furnace chamber, retracts the first electric telescopic rod 2 to adjust the height of the first fixed block 301, controls the second universal joint coupling 501 to rotate through the second motor 503, and adjusts the placement angle of the second fixed frame 502. At the same time, the first universal joint coupling 302 is controlled to rotate through the first motor 304 to adjust the placement angle of the second fixed block 4 on the first fixed frame 303, thereby adjusting the placement angle of the second electric telescopic rod 401. At the same time, the position of the mechanical gripper 601 is observed in real time using the image transmitted by the micro camera 7. After moving the molybdenum plate to the specified position, the mechanical gripper 601 is released, the second electric telescopic rod 401 is retracted to move the mechanical gripper 601 out of the furnace, and the furnace door is closed.
[0029] After the seed crystal growth is completed, the furnace door is opened, and the first electric telescopic rod 2 on the base 1 is extended and retracted according to the height of the substrate table in the furnace door. Then, the second electric telescopic rod 401 is extended to move the mechanical gripper 601 into the furnace chamber. The position of the mechanical gripper 601 in the furnace chamber is observed by the micro camera 7, and the position of the mechanical gripper 601 is adjusted according to the position of the molybdenum disk. When the mechanical gripper 601 clamps the molybdenum disk, the second electric telescopic rod 401 is retracted to take out the molybdenum disk.
[0030] Through the above steps, the base 1 is set to fix and support the first electric telescopic rod 2, the first electric telescopic rod 2 is extended and retracted to flexibly adjust the height of the second fixed block 4, the first adjustment component is used to flexibly rotate the second electric telescopic rod 401, the placement angle and position of the second electric telescopic rod 401 are flexibly adjusted, the second electric telescopic rod 401 is extended and retracted flexibly, the mechanical gripper 601 is flexibly extended and retracted, the placement angle and position of the third fixed frame 6 are flexibly adjusted by the second adjustment component, the mechanical gripper 601 is fixedly connected by the third fixed frame 6, so as to move the mechanical gripper 601 to the specified placement position, and the mechanical gripper 601 is flexibly controlled by the third motor 602 to grab and release the molybdenum disk. At the same time, the micro camera 7 is used to observe the position of the mechanical gripper 601 in the furnace chamber in real time.
[0031] The embodiments of the present invention are described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the scope of knowledge possessed by those skilled in the art without departing from the purpose of the present invention.
Claims
1. A device for inserting seed crystals and removing finished products in an MPCVD device, comprising a base (1); characterized in that: The invention also comprises a first electric telescopic rod (2), a first adjustment component, a second fixed block (4), a second electric telescopic rod (401), a second adjustment component, a third fixed frame (6), a mechanical gripper (601), a third motor (602) and a micro camera (7); the upper surface of the base (1) is provided with the first electric telescopic rod (2), one end of the first electric telescopic rod (2) is provided with the first adjustment component, one side of the first adjustment component is provided with the second fixed block (4), one side of the second fixed block (4) is provided with the second electric telescopic rod (401), one end of the second electric telescopic rod (401) is provided with the second adjustment component, one side of the second adjustment component is provided with the third fixed frame (6), the inner side of the third fixed frame (6) is provided with the mechanical gripper (601), the outer side of the third fixed frame (6) is provided with the third motor (602), and one side of the third fixed frame (6) is provided with the micro camera (7).
2. The device for inserting seed crystals and removing finished products in an MPCVD device according to claim 1, characterized in that: The first adjustment component comprises a first fixed block (301), a first universal joint coupling (302), a first fixed frame (303) and a first motor (304); one end of the first electric telescopic rod (2) is provided with the first fixed block (301), one side of the first fixed block (301) is provided with the first universal joint coupling (302), one side of the first universal joint coupling (302) is provided with the first fixed frame (303), and one side of the first fixed frame (303) is provided with the first motor (304).
3. The device for inserting seed crystals and removing finished products in an MPCVD device according to claim 2, characterized in that: The first universal joint coupling (302) and the first fixed block (301) are rotatably connected to each other, and the output end of the first motor (304) is connected to the first universal joint coupling (302).
4. The device for inserting seed crystals and removing finished products in an MPCVD device according to claim 3, characterized in that: The second adjustment assembly comprises a second universal joint coupling (501), a second fixing frame (502) and a second motor (503); one end of the second electric telescopic rod (401) is provided with the second universal joint coupling (501), one side of the second universal joint coupling (501) is provided with the second fixing frame (502), and one side of the second fixing frame (502) is provided with the second motor (503).
5. The device for inserting seed crystals and removing finished products in an MPCVD device according to claim 4, characterized in that: The second universal joint coupling (501) is rotatably connected to one end of the second electric telescopic rod (401), and the output end of the second motor (503) is connected to the second universal joint coupling (501).
6. The device for inserting seed crystals and removing finished products in an MPCVD device according to claim 4, characterized in that: The mechanical gripper (601) and the third fixed frame (6) are rotatably connected to each other, and the output end of the third motor (602) is connected to the mechanical gripper (601).
7. The device for inserting seed crystals and removing finished products in an MPCVD device according to claim 6, characterized in that: The micro camera (7) is arranged on the top of the third fixing frame (6), and the micro camera (7) and the external device are connected to each other via Bluetooth.