Semiconductor photomask box supporting structure

Abstract

The utility model relates to the technical field of photomask boxes, in particular to a semiconductor photomask box supporting structure which is used for storing a mask plate and comprises a first outer box, a second outer box, a first inner box, a second inner box and a supporting piece. The first inner box and the second inner box are correspondingly connected into inner cavities of the first outer box and the second outer box respectively, the supporting piece is connected into the first inner box and the second inner box, the supporting piece comprises a fixing block, connecting blocks, an elastic supporting part and a clamping part, the connecting blocks are arranged on the fixing block, the connecting blocks are arranged at the two ends of the fixing block respectively, and the clamping part is arranged on the elastic supporting part. The connecting block is connected into the first inner box and the second inner box through bolts, one end of the elastic supporting part is arranged on the fixing block, the elastic supporting part is arranged in an arc shape, the clamping part is arranged at the other end of the elastic supporting part, and the surface of the clamping part is attached to the surface of the mask plate. The photomask box has the effect of solving the problems that after the photomask box is used for a long time, the mask plate is prone to being scratched, and loading is loosened.

Description

Technical Field

[0001] The utility model relates to the field of photomask box technology, in particular to a semiconductor photomask box supporting structure. Background Art

[0002] The support parts of existing mask boxes are prone to minor scratches on the mask plate after long-term use, and the loading of the mask plate may become loose. Semiconductor mask plates are characterized by high precision. As long as there is a slight scratch on the surface, there is a risk of scrapping. Therefore, reducing scratches is the best protection for the mask plate. Utility Model Content

[0003] In order to improve the problem that the mask box is prone to scratches and loose loading after long-term use, the present application provides a semiconductor mask box support structure.

[0004] The semiconductor mask box support structure provided in this application adopts the following technical solutions:

[0005] A semiconductor mask box support structure for storing mask plates, comprising a first outer box, a second outer box, a first inner box, a second inner box and a support member, the same sides of the first outer box and the second outer box are hinged to each other, the first outer box and the second outer box can be rotatably assembled with each other, the first inner box and the second inner box are respectively connected to the inner cavities of the first outer box and the second outer box, the support member is connected to the first inner box and the second inner box, four support members are respectively provided at the four corners of the first inner box and the four corners of the second inner box, the support members in the first inner box and the support members in the second inner box are staggered with each other, the support member comprises a fixed block, a connecting block, an elastic support part and a clamping part, the connecting block is provided on the fixed block, the connecting block is respectively provided at both ends of the fixed block, the connecting block is connected to the first inner box and the second inner box by bolts, one end of the elastic support part is provided on the fixed block, the elastic support part is arranged in an arc shape, the clamping part is provided at the other end of the elastic support part, and the surface of the clamping part is in contact with the surface of the mask plate.

[0006] Preferably, the connecting block is provided with a connecting hole for bolt connection, and the first inner box and the second inner box are both provided with a through hole for the bolt to pass through.

[0007] Preferably, the fixing block, the connecting block, the elastic supporting portion and the clamping portion are integrally formed, and the supporting member is made of elastic plastic material.

[0008] Preferably, the fixing block is connected to a first reinforcing rib, and the first reinforcing rib is arranged between the fixing block and the connecting block.

[0009] Preferably, the fixing block is connected to a second reinforcing rib, and the second reinforcing rib is arranged between the fixing block and the elastic supporting portion.

[0010] Preferably, a compression pad is provided on the clamping portion, and the compression pad is located on the surface of the clamping portion facing the mask plate.

[0011] In summary, this application has the following beneficial technical effects:

[0012] The utility model provides a semiconductor mask box support structure, comprising a first outer box, a second outer box, a first inner box, a second inner box and a support. During storage, the mask plate is placed on the support of the second inner box, and then the first outer box is rotated to make the first outer box and the second outer box be spliced ​​together, so that the support in the first inner box cooperates with the support in the second inner box to squeeze, clamp and fix the mask plate. By increasing the contact surface between the clamping part in the support and the mask plate, the mask plate is evenly stressed, and the elastic support part in the support is in a contracted state during the clamping process. The generated elastic force can improve the fixing effect of the clamping part on the mask plate, thereby achieving the effect of improving the problem that the mask plate is easily scratched and loaded loosely after long-term use of the mask box. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 2 is a schematic structural diagram of a semiconductor mask box support structure according to an embodiment of the present application;

[0014] Figure 2 is a schematic diagram illustrating a first inner box and a second inner box in an embodiment of the present application;

[0015] Figure 3 It is a schematic diagram used to illustrate the support member in the embodiment of the present application.

[0016] Explanation of the accompanying drawings: 1. Mask plate; 2. First outer box; 3. Second outer box; 4. First inner box; 5. Second inner box; 6. Support member; 61. Fixing block; 62. Connecting block; 621. Connecting hole; 63. Elastic supporting part; 64. Clamping part; 641. Extrusion pad; 7. Through hole; 8. First reinforcing rib; 9. Second reinforcing rib. DETAILED DESCRIPTION

[0017] In order to enable those skilled in the art to better understand the solutions of the present invention, the solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work should fall within the scope of protection of the present invention.

[0018] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," and the like, indicating positions or location relationships, are based on the positions or location relationships shown in the accompanying drawings and are intended only to facilitate the description of the present invention and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation, and therefore should not be construed as limiting the present invention. The terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Furthermore, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense, for example, to mean a fixed connection, a detachable connection, or an integral connection; a mechanical connection or an electrical connection; a direct connection, an indirect connection through an intermediate medium, or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention in specific contexts.

[0019] The embodiment of the present application discloses a semiconductor mask box support structure. Figure 1 、 Figure 2 and Figure 3 , a semiconductor mask box support structure for storing a mask plate 1, comprising a first outer box 2, a second outer box 3, a first inner box 4, a second inner box 5 and a support member 6. The same sides of the first outer box 2 and the second outer box 3 are hinged to each other, the first outer box 2 and the second outer box 3 can be rotated and assembled with each other, the first inner box 4 and the second inner box 5 are respectively connected to the inner cavities of the first outer box 2 and the second outer box 3, the support member 6 is connected to the first inner box 4 and the second inner box 5, and the support member 6 is respectively provided with four corners of the first inner box 4 and the four corners of the second inner box 5, in the first inner box 4. The support member 6 and the support member 6 in the second inner box 5 are staggered with each other, and the support member 6 includes a fixed block 61, a connecting block 62, an elastic support portion 63 and a clamping portion 64. The connecting block 62 is arranged on the fixed block 61, and a connecting block 62 is respectively provided at both ends of the fixed block 61. The connecting block 62 is connected to the first inner box 4 and the second inner box 5 by bolts. One end of the elastic support portion 63 is arranged on the fixed block 61, and the elastic support portion 63 is arranged in an arc shape. The clamping portion 64 is arranged at the other end of the elastic support portion 63, and the surface of the clamping portion 64 is in contact with the surface of the mask plate 1.

[0020] The connecting block 62 is provided with a connecting hole 621 for bolt connection, and the first inner box 4 and the second inner box 5 are both provided with a through hole 7 for the bolt to pass through. The connection hole 621 and the through hole 7 are provided to facilitate the installation and removal of the support member 6.

[0021] The fixing block 61 , the connecting block 62 , the elastic support portion 63 and the clamping portion 64 are integrally formed. The support member 6 is made of elastic plastic material. This configuration makes the overall structure of the support member 6 stable and elastic.

[0022] The fixed block 61 is connected to a first reinforcing rib 8, which is arranged between the fixed block 61 and the connecting block 62. The fixed block 61 is connected to a second reinforcing rib 9, which is arranged between the fixed block 61 and the elastic support portion 63. The arrangement of the first reinforcing rib 8 and the second reinforcing rib 9 is beneficial to improving the strength of the support member 6 structure.

[0023] A pressing pad 641 is provided on the clamping portion 64. The pressing pad 641 is located on the surface of the clamping portion 64 facing the mask plate 1. The provision of the pressing pad 641 prevents the clamping portion 64 from directly contacting the mask plate 1, which is beneficial to protecting the mask plate 1. The pressing pad 641 can further improve the clamping and fixing effect of the clamping portion 64 on the mask plate 1.

[0024] The implementation principle of the auxiliary wheel structure for a two-wheeled vehicle in the embodiment of the present application is as follows: when storing, the mask plate 1 is placed on the support member 6 of the second inner box 5, so that the four corners of the mask plate 1 are placed on the extrusion pad 641 of the clamping plate, and then the first outer box 2 is rotated to splice the first outer box 2 and the second outer box 3, so that the support member 6 in the first inner box 4 cooperates with the support member 6 in the second inner box 5 to clamp and fix the mask plate 1. During this process, the elastic support part 63 is compressed, and the generated elastic force can improve the fixing effect of the clamping part 64 on the mask plate 1.

[0025] Finally, it should be noted that the above description is merely a preferred embodiment of the present invention, and the scope of protection of the present invention is not limited to the above-described embodiments. All technical solutions based on the principles of the present invention are within the scope of protection of the present invention. It should be noted that improvements and modifications that do not depart from the principles of the present invention, as known to those skilled in the art, should also be considered within the scope of protection of the present invention.

Claims

1. A semiconductor mask box support structure for storing a mask plate (1), characterized in that: The invention comprises a first outer box (2), a second outer box (3), a first inner box (4), a second inner box (5) and a support member (6), wherein the same sides of the first outer box (2) and the second outer box (3) are hinged to each other, the first outer box (2) and the second outer box (3) can be rotated and assembled with each other, the first inner box (4) and the second inner box (5) are respectively connected to the inner cavities of the first outer box (2) and the second outer box (3), the support member (6) is connected to the first inner box (4) and the second inner box (5), and the support member (6) is respectively provided at the four corners of the first inner box (4) and the four corners of the second inner box (5), and the support member (6) in the first inner box (4) and the second inner box (5) are respectively provided at the four corners of the first inner box (4) and the four corners of the second inner box (5). ) are arranged in a staggered manner with respect to each other, and the support members (6) include a fixed block (61), a connecting block (62), an elastic supporting portion (63) and a clamping portion (64); the connecting block (62) is arranged on the fixed block (61); the connecting block (62) is provided at both ends of the fixed block (61); the connecting block (62) is connected to the first inner box (4) and the second inner box (5) by bolts; one end of the elastic supporting portion (63) is arranged on the fixed block (61); the elastic supporting portion (63) is arranged in an arc shape; the clamping portion (64) is arranged at the other end of the elastic supporting portion (63); and the surface of the clamping portion (64) is in contact with the surface of the mask plate (1).

2. The semiconductor mask box support structure according to claim 1, characterized in that: The connecting block (62) is provided with a connecting hole (621) for bolt connection, and the first inner box (4) and the second inner box (5) are both provided with a through hole (7) for the bolt to pass through.

3. The semiconductor mask box support structure according to claim 1, wherein: The fixing block (61), the connecting block (62), the elastic support portion (63) and the clamping portion (64) are integrally formed, and the support member (6) is made of elastic plastic material.

4. The semiconductor mask box support structure according to claim 1, wherein: The fixing block (61) is connected to a first reinforcing rib (8), and the first reinforcing rib (8) is arranged between the fixing block (61) and the connecting block (62).

5. The semiconductor mask box support structure according to claim 1, wherein: The fixing block (61) is connected to a second reinforcing rib (9), and the second reinforcing rib (9) is arranged between the fixing block (61) and the elastic support portion (63).

6. The semiconductor mask box support structure according to claim 1, characterized in that: A pressing pad (641) is provided on the clamping portion (64), and the pressing pad (641) is located on the surface of the clamping portion (64) facing the mask plate (1).

Images