Positioning plate

Abstract

The utility model relates to the technical field of chemical vapor deposition, in particular to a positioning plate which is a circular thin plate, a first through hole is formed in the center of the positioning plate, a plurality of second through holes are further formed in the positioning plate, and the second through holes are formed in the positions, with the circle center of the first through hole as the circle center, of the second through holes. The positioning plates are uniformly distributed on a first circumference with R1 as the radius, and the positioning plates capable of quickly and accurately positioning measuring points are provided.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical vapor deposition, in particular to a positioning plate. Background Art

[0002] Polycrystalline diamond is grown using chemical vapor deposition technology, and its substrate is generally a large single-crystal silicon wafer. After the polycrystalline is grown on the single-crystal silicon wafer, multiple data points are evenly spaced around the circumference with the center of the single-crystal silicon wafer as the center and R as the radius to evaluate the uniformity of the polycrystalline growth on the circumference.

[0003] In the prior art, eight measuring points A, B, C, D, E, F, G, and H are directly marked on the substrate 2 with a marker before measurement. However, the efficiency is extremely low due to the use of freehand marking. In addition, it is difficult for the eight measuring points to fall on the same circumference at the same time and be evenly spaced (e.g. Figure 1 ), resulting in inaccurate measurement data. Utility Model Content

[0004] The purpose of the present invention is to overcome the deficiencies of the prior art and provide a positioning plate that can quickly and accurately locate measurement points.

[0005] The purpose of this utility model is achieved through the following technical solutions:

[0006] A positioning plate is a circular thin plate with a first through hole at its center and multiple second through holes evenly distributed on a first circle with the center of the first through hole as the center and R1 as the radius.

[0007] Furthermore, the positioning plate is further provided with a plurality of third through holes, and the plurality of third through holes are evenly distributed on a second circumference with the center of the first through hole as the center and R2 as the radius, wherein R2>R1.

[0008] Furthermore, the positioning plate is also provided with a plurality of fourth through holes, and the plurality of fourth through holes are evenly distributed on a third circle with the center of the first through hole as the center and R3 as the radius, and R3>R2. A notch is provided on the edge of the positioning plate, and the notch corresponds to and is tangent to the position of the fourth through hole.

[0009] Furthermore, the first through hole, the second through hole, the third through hole and the fourth through hole are evenly spaced apart.

[0010] Furthermore, the outer diameter of the positioning plate is equal to the outer diameter of the substrate.

[0011] Furthermore, the positioning plate is provided with an annular boss, and the inner diameter Φ of the annular boss is equal to the outer diameter of the substrate.

[0012] The utility model has the following advantages:

[0013] When locating the measurement point, the positioning plate is placed on the substrate and the center of the first through hole is aligned with the center of the substrate. The point on the substrate corresponding to the second through hole is the measurement point. Since the second through holes are evenly distributed on the same circumference, the above-mentioned measurement points are also evenly distributed on the same circumference. That is, by placing the positioning plate on the substrate and aligning their centers, the measurement point can be quickly and accurately located. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and should not be considered as limiting the scope. For those skilled in the art, other relevant drawings can be obtained based on these drawings without inventive effort.

[0015] Figure 1 A schematic diagram of measurement points marked by hand in the prior art;

[0016] Figure 2 This is a structural diagram of the positioning plate of the utility model;

[0017] Figure 3 This is a schematic cross-sectional view of the positioning plate of the utility model;

[0018] Figure 4 This is a schematic diagram of the positioning plate of the utility model in use;

[0019] In the figure: 1- positioning plate; 11- first through hole; 12- second through hole; 13- third through hole; 14- fourth through hole; 15- notch; 2- substrate; 3- micrometer. DETAILED DESCRIPTION

[0020] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0021] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0022] Furthermore, terms such as "horizontal," "vertical," and "overhanging" do not necessarily imply that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.

[0023] In the present invention, unless otherwise expressly specified or limited, a first feature being above or below a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being above, above, and above the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being below, below, and below the second feature includes the first feature being directly below and obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0024] like Figure 2 and Figure 3 As shown, a positioning plate 1 is a circular thin plate structure. A first through hole 11 is provided at the center of the positioning plate 1. The diameter of the first through hole 11 is larger than the diameter of the micrometer screw 3. The positioning plate 1 is also provided with a plurality of second through holes 12. The plurality of second through holes 12 are evenly distributed on a first circumference with the center of the first through hole 11 as the center and R1 as the radius. The diameter of the second through holes 12 is larger than the diameter of the micrometer screw 3. When locating the measuring point, the positioning plate 1 is placed on the substrate 2, and the first through hole 11 is provided. The center of the through hole 11 coincides with the center of the substrate 2. The point on the substrate 2 corresponding to the second through hole 12 is the measuring point. Since the second through holes 12 are evenly distributed on the same circumference, the above-mentioned measuring points are also evenly distributed on the same circumference. That is, the positioning plate 1 is placed on the substrate 2 and their centers coincide, so that the measuring point can be quickly and accurately positioned. When measuring data, the anvil end face of the micrometer 3 is brought into contact with the lower bottom surface of the substrate 2, and then the micrometer screw of the micrometer 3 is extended into any second through hole 12 and contacts the upper surface of the substrate 2 (see Figure 4 ), subtract the thickness of the substrate 2 from the data measured by the micrometer 3 to obtain the growth thickness of the polycrystal at the measuring point. Repeat the above steps until the values ​​of all measuring points are obtained. The uniformity data of the polycrystal growth thickness on the first circumference can be obtained by calculation.

[0025] Furthermore, the positioning plate 1 is also provided with a plurality of third through holes 13, and the plurality of third through holes 13 are evenly distributed on a second circle with the center of the first through hole 11 as the center and R2 as the radius, and R2>R1, and the diameter of the third through hole 13 is larger than the diameter of the micrometer screw 3; the steps of measuring and evaluating the thickness of the polycrystalline growth on the second circle are roughly the same as those of measuring the first circle, and will not be repeated here.

[0026] Furthermore, the positioning plate 1 is further provided with a plurality of fourth through holes 14, and the plurality of fourth through holes 14 are evenly distributed on a third circumference with the center of the first through hole 11 as the center and R3 as the radius, wherein R3>R2, the diameter of the fourth through hole 14 is larger than the diameter of the micrometer screw 3, and a notch 15 is provided on the edge of the positioning plate 1, wherein the notch 15 corresponds to and is tangent to the position of the fourth through hole 14, and the size of the notch 15 is larger than the diameter of the micrometer screw 3; the steps of measuring and evaluating the thickness of the polycrystalline growth on the third circumference are roughly the same as those of measuring the first circumference, and will not be repeated here; the setting of the notch 15 can facilitate the placement or collection of the micrometer 3, specifically, when we measure the first circumference When the value at the second through hole 12 or the third through hole 13 is reached, it is necessary to first turn the knob of the micrometer 3 to increase the opening of the micrometer 3 (i.e., the distance between the anvil and the micrometer screw) to a larger size before the positioning plate 1 and the substrate 2 can be placed in the micrometer 3. After completing the measurement, it is necessary to turn the knob again to increase the opening to a larger size before the positioning plate 1 and the substrate 2 can be taken out from the micrometer 3. This is inefficient and very inconvenient. After setting the notch 15, it is only necessary to slightly loosen the knob to quickly take the micrometer 3 out of the fourth through hole 14 through the notch 15. In addition, in some occasions, the edge of the substrate 2 will be marked with special purposes, and the notch 15 can prevent these marks from being blocked, thereby facilitating the search for the mark.

[0027] Furthermore, in order to obtain measurement points evenly spaced in the diameter direction of the substrate 2, the first through hole 11, the second through hole 12, the third through hole 13 and the fourth through hole 14 are evenly spaced, that is, the first circumference, the second circumference and the third circumference are evenly spaced, that is, R1 = R2 / 2 = R3 / 3.

[0028] Furthermore, in some embodiments, in order to facilitate the coincidence of the center of the first through hole 11 with the center of the substrate 2, the outer diameter of the positioning plate 1 is equal to the outer diameter of the substrate 2; when in use, it is only necessary to align the edge of the positioning plate 1 with the edge of the substrate 2 to make the center of the first through hole 11 coincide with the center of the substrate 2.

[0029] Furthermore, in some other embodiments, in order to facilitate the center of the first through hole 11 to coincide with the center of the substrate 2, an annular boss is provided on the edge of the positioning plate 1 (see Figure 3 ), the inner diameter Φ of the annular boss is equal to the outer diameter of the substrate 2; when in use, it is only necessary to sleeve the annular boss of the positioning plate 1 on the substrate 2 so that the center of the first through hole 11 coincides with the center of the substrate 2.

[0030] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A positioning plate (1), characterized in that: The positioning plate (1) is a circular thin plate, a first through hole (11) is provided at the center of the positioning plate (1), and a plurality of second through holes (12) are also provided on the positioning plate (1), wherein the plurality of second through holes (12) are evenly distributed on a first circumference with the center of the first through hole (11) as the center and R1 as the radius.

2. The positioning plate (1) according to claim 1, characterized in that: The positioning plate (1) is further provided with a plurality of third through holes (13), and the plurality of third through holes (13) are evenly distributed on a second circumference with the center of the first through hole (11) as the center and R2 as the radius, wherein R2>R1.

3. The positioning plate (1) according to claim 2, characterized in that: The positioning plate (1) is further provided with a plurality of fourth through holes (14), and the plurality of fourth through holes (14) are evenly distributed on a third circumference with the center of the first through hole (11) as the center and R3 as the radius, wherein R3>R2, and a notch (15) is provided on the edge of the positioning plate (1), and the notch (15) corresponds to and is tangent to the fourth through holes (14).

4. The positioning plate (1) according to claim 3, characterized in that: The first through hole (11), the second through hole (12), the third through hole (13) and the fourth through hole (14) are evenly spaced apart.

5. The positioning plate (1) according to any one of claims 1 to 4, characterized in that: The outer diameter of the positioning plate (1) is equal to the outer diameter of the substrate (2).

6. The positioning plate (1) according to any one of claims 1 to 4, characterized in that: The positioning plate (1) is provided with an annular boss, and the inner diameter Φ of the annular boss is equal to the outer diameter of the substrate (2).

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