LCOS (Liquid Crystal On Silicon) chip coating mask mounting device

Abstract

The utility model relates to an LCOS (Liquid Crystal On Silicon) chip coating mask mounting device. The device comprises a base; the mask support is arranged at the upper end of the base, and the mask support is used for placing a mask and providing support for the mask; the clamping mechanism comprises an adsorption assembly and a moving assembly, the moving assembly is in driving connection with the adsorption assembly and used for driving the adsorption assembly to move in the direction close to or away from the mask, and the adsorption assembly is used for adsorbing the substrate; and the detection assemblies are arranged at the upper end of the base, and the multiple detection assemblies are arranged below the mask and used for detecting whether the substrate and the mask are aligned or not. By adopting the structure, accurate alignment mounting of the substrate and the mask is realized, scraping damage in the mounting process of the substrate and the mask is prevented, and the production quality and efficiency can be effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of LCOS mounting, in particular to an LCOS chip coating mask mounting device. Background Art

[0002] LCOS chips can be used in AR / VR headsets, LCOS projections, LCOS displays and other occasions, and are widely used. In the existing technology, the mask mounting before the LCOS chip is plated with an orientation layer is usually done by sucking the substrate with a handheld rubber suction cup, and at the same time cooperating with the lens located above the substrate and the mask for alignment mounting. After the substrate is placed on the mask, it needs to be flipped before the image can be seen in the lens. The substrate is prone to displacement during the flipping process. When aligning under the lens, it is necessary to flip the substrate multiple times and adjust the position of the substrate with a handheld suction cup. In addition, the substrate is rubbed with fingers during fine-tuning, which can easily scratch the substrate and cause damage to the substrate.

[0003] Therefore, there is an urgent need to provide an LCOS chip coating mask mounting device to solve the above problems. Utility Model Content

[0004] The purpose of the utility model is to overcome the shortcomings and defects of the existing technology and provide an LCOS chip coating mask mounting device, which realizes the precise alignment and mounting of the substrate and the mask, prevents scratches and damages during the mounting process of the substrate and the mask, and can effectively improve production quality and efficiency.

[0005] The purpose of this utility model is achieved through the following technical solutions:

[0006] An LCOS chip coating mask mounting device, characterized by comprising:

[0007] base;

[0008] A mask support is provided at the upper end of the base, and is used to place the mask and provide support for the mask;

[0009] A clamping mechanism, the clamping mechanism comprising an adsorption component and a moving component, the moving component being drivenly connected to the adsorption component to drive the adsorption component to move in a direction close to or away from the mask, and the adsorption component being used to adsorb the substrate;

[0010] The detection component is arranged at the upper end of the base. The detection component is provided with multiple groups. The multiple groups of detection components are all arranged below the mask to detect whether the substrate and the mask are aligned.

[0011] Optionally, the adsorption component includes a suction head and a vacuum pump; one end of the suction head is connected to the vacuum pump, and the other end is used to adsorb the substrate, and the suction head is connected to the moving component.

[0012] Optionally, the moving assembly includes an X-axis screw module and a Y-axis screw module, the X-axis screw module is horizontally and vertically connected to the Y-axis screw module, and the suction head is connected to the X-axis screw module.

[0013] Optionally, the Y-axis screw module includes a screw support and a Y-direction screw mechanism, and the screw support and the Y-direction screw mechanism are each provided with two groups, and one of the screw mechanisms is correspondingly arranged at the upper end of one of the screw supports; the X-axis screw module includes an X-direction screw mechanism and two groups of sliders, and the two sliders are respectively arranged at the two ends of the X-direction screw mechanism, and the Y-direction screw mechanism is passed through the slider, and the suction head is connected to the X-direction screw mechanism.

[0014] Optionally, the X-axis screw module further includes a connecting block, the connecting block is slidably connected to the X-axis screw mechanism, and the suction head is slidably connected to the connecting block.

[0015] Optionally, the suction head is connected to the connection block via a clamp.

[0016] Optionally, the detection component is configured as a CCD camera.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] In the mainboard of the utility model, in this embodiment, the LCOS chip coating mask mounting device includes a base, a mask support, a clamping mechanism and a detection component. The mask support is provided at the upper end of the base, and the mask is placed and supported on the mask; the clamping component is provided above the mask, and includes an adsorption component and a moving component. The moving component is driven and connected to the adsorption component to drive the adsorption component to move in the direction close to or away from the mask. The adsorption component is used to adsorb the substrate, that is, after the adsorption component adsorbs the substrate, the moving component drives the adsorption component to move, thereby driving the substrate to move close to the mask and move directly above the mask; the detection component is provided at the upper end of the base, and the detection component is provided with multiple groups, and the multiple groups of detection components are all provided under the mask to detect whether the substrate and the mask are aligned. Through the arrangement of the above components, the substrate and the mask are accurately aligned and mounted, scratches and damages during the mounting process of the substrate and the mask are prevented, and the production quality and efficiency can be effectively improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural diagram of the present utility model.

[0020] Figure 2 It is a front view of the utility model.

[0021] The above drawings include the following reference numerals:

[0022] 1. Base, 21. Mask support, 22. Mask, 31. Suction head, 32. Base plate, 33. Screw support, 34. Y-axis screw mechanism, 35. X-axis screw mechanism, 36. Slider, 37. Connecting block, 4. Detection component. DETAILED DESCRIPTION

[0023] The present invention will be described in further detail below with reference to the embodiments and drawings, but the embodiments of the present invention are not limited thereto.

[0024] The technical solution of the utility model provides an LCOS chip coating mask mounting device.

[0025] Reference Figures 1 to 2 , in this embodiment, including:

[0026] Base 1;

[0027] The mask support 21 is provided at the upper end of the base 1 and is used to place the mask 22 and provide support for the mask 22;

[0028] The clamping mechanism includes an adsorption component and a moving component. The moving component is driven and connected to the adsorption component to drive the adsorption component to move in a direction close to or away from the mask 22. The adsorption component is used to adsorb the substrate 32.

[0029] The detection assembly 4 is disposed at the upper end of the base 1 . There are multiple detection assemblies 4 , and the multiple detection assemblies 4 are all disposed below the mask 22 to detect whether the substrate 32 and the mask 22 are aligned.

[0030] Optionally, in this embodiment, the LCOS chip coating mask mounting device includes a base 1, a mask support 21, a clamping mechanism and a detection component 4, the mask support 21 is provided at the upper end of the base 1, the mask support 21 is used to place the mask 22, and the mask support 21 can support the mask 22 placed thereon; the clamping component is provided above the mask 22, and includes an adsorption component and a moving component, the moving component is driven and connected to the adsorption component, and is used to drive the adsorption component to move in a direction close to or away from the mask 22, the adsorption component is used to adsorb the substrate 32, that is, when the adsorption component adsorbs the substrate 32, the moving component drives the adsorption component to move, thereby driving the substrate 32 to move, driving the substrate 32 to move close to the mask 22, and moving Move to the top of mask22; the detection component 4 is arranged at the upper end of the base 1, and the detection component 4 is provided with multiple groups, and the multiple groups of detection components 4 are all arranged below mask22 to detect whether the substrate 32 and mask22 are aligned. The setting of multiple groups of detection components 4 is used to prevent a single detection component 4 from detecting inaccurately or a certain detection component 4 from being damaged and affecting the mounting process, that is, when the moving component drives the substrate 32 to move above mask22, the detection component 4 below detects whether the substrate 32 and mask22 are aligned. If aligned, the operator controls the adsorption component to put down the substrate 32 so that the substrate 32 is mounted on mask22. If not aligned, the moving component is controlled to move until the substrate 32 and mask22 are aligned, and finally the mounting of the substrate 32 and mask22 is completed. Through the setting of the above components, the precise alignment and mounting of the substrate 32 and mask22 is achieved, and scratches and damages during the mounting process of the substrate 32 and mask22 are prevented, and the production quality and efficiency can be effectively improved.

[0031] In this embodiment, the adsorption component includes a suction head 31 and a vacuum pump. One end of the suction head 31 is connected to the vacuum pump, and the other end is used to adsorb the substrate 32. The suction head 31 is connected to the vacuum pump to achieve adsorption of the substrate 32. Compared with the conventional clamping block assembly, the vacuum adsorption of the suction head 31 can prevent damage to the substrate 32; in other embodiments, a rubber ring can be provided at the connection between the suction head 31 and the substrate 32 to prevent damage caused by direct contact between the suction head 31 and the substrate 32, which is not limited here; the suction head 31 is connected to the moving component, that is, the suction head 31 vacuum absorbs the substrate 32 and then moves with the moving component.

[0032] In this embodiment, the moving component includes an X-axis screw module and a Y-axis screw module. The X-axis screw module is horizontally and vertically connected to the Y-axis screw module, and the suction head 31 is connected to the X-axis screw module, that is, the X-axis screw module drives the suction head 31 to move in the X direction, and the Y-axis module drives the X-axis screw module to move in the Y direction, thereby driving the suction head 31 to move in the Y direction. Furthermore, in this embodiment, the Y-axis screw module includes a screw support and a Y-direction screw mechanism 34, and the screw support and the Y-direction screw mechanism 34 are each provided with two groups, and one group of screw mechanisms is correspondingly arranged at the upper end of one group of screw supports; the X-axis screw module includes an X-direction screw mechanism 35 and two groups of sliders 36, and the two groups of sliders 36 are respectively arranged at the two ends of the X-direction screw mechanism 35, and the Y-direction screw mechanism 34 is passed through the sliders 36, that is, the X-direction screw mechanism 35 is connected to the Y-direction screw mechanism 34 through the sliders 36 at both ends, so as to realize the Y-direction sliding of the X-direction screw mechanism 35 on the Y-direction screw mechanism, and the suction head 31 is connected to the X-direction screw mechanism 35, that is, the suction head 31 moves with the movement of the X-direction screw mechanism 35.

[0033] Optionally, in this embodiment, the X-axis screw module further includes a connecting block 37, which is slidably connected to the X-axis screw mechanism 35, and the suction head 31 is slidably connected to the connecting block 37, that is, the suction head 31 can also move up and down on the X-axis screw mechanism 35, and can adjust the vertical distance between the base plate 32 and the mask 22. At the same time, the suction head 31 can also be rotatably connected to the X-axis screw mechanism 35, that is, adjust the angle of the base plate 32 to align with the mask 22. Furthermore, in this embodiment, the suction head 31 is connected to the connecting block 37 via a clamp. In other embodiments, the suction head 31 can also be connected to the connecting block 37 via a set screw, which is not limited here.

[0034] In this embodiment, the detection component 4 is configured as a CCD camera. In other embodiments, the detection component 4 may also be configured as other image sensors such as a CMOS camera, which is not limited here.

[0035] The above-described embodiments merely represent implementation methods of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. An LCOS chip coating mask mounting device, characterized in that: include: base; A mask support is provided at the upper end of the base, and is used to place the mask and provide support for the mask; A clamping mechanism, the clamping mechanism comprising an adsorption component and a moving component, the moving component being drivenly connected to the adsorption component to drive the adsorption component to move in a direction close to or away from the mask, and the adsorption component being used to adsorb the substrate; The detection component is arranged at the upper end of the base. The detection component is provided with multiple groups. The multiple groups of detection components are all arranged below the mask to detect whether the substrate and the mask are aligned.

2. The LCOS chip coating mask mounting device according to claim 1, characterized in that: The adsorption component includes a suction head and a vacuum pump; one end of the suction head is connected to the vacuum pump, and the other end is used to adsorb the substrate, and the suction head is connected to the moving component.

3. The LCOS chip coating mask mounting device according to claim 2, characterized in that: The moving component includes an X-axis screw module and a Y-axis screw module, the X-axis screw module is horizontally and vertically connected to the Y-axis screw module, and the suction head is connected to the X-axis screw module.

4. The LCOS chip coating mask mounting device according to claim 3, characterized in that: The Y-axis screw module includes a screw support and a Y-direction screw mechanism. The screw support and the Y-direction screw mechanism are each provided with two groups, and one screw mechanism is correspondingly provided at the upper end of one screw support; the X-axis screw module includes an X-direction screw mechanism and two groups of sliders. The two sliders are respectively provided at the two ends of the X-direction screw mechanism, and the Y-direction screw mechanism is passed through the sliders, and the suction head is connected to the X-direction screw mechanism.

5. The LCOS chip coating mask mounting device according to claim 4, characterized in that: The X-axis lead screw module further includes a connecting block, which is slidably connected to the X-axis lead screw mechanism, and the suction head is slidably connected to the connecting block.

6. The LCOS chip coating mask mounting device according to claim 5, characterized in that: The suction head is connected to the connection block through a clamp.

7. The LCOS chip coating mask mounting device according to claim 1, characterized in that: The detection component is configured as a CCD camera.

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