Auxiliary tool for disassembling and assembling vacuum pump

Abstract

The utility model relates to the technical field of maintenance of semiconductor processing equipment, in particular to an auxiliary tool for dismounting and mounting a vacuum pump, and aims to solve the problems that the efficiency is low, potential safety hazards exist and the mounting precision of the vacuum pump is possibly influenced because the conventional vacuum pump is mostly dismounted and mounted in a manual manner. In order to achieve the purpose, the disassembly and assembly auxiliary tool comprises a fixed seat, the translation device is connected to the fixed seat in a sliding manner and can slide in the horizontal direction relative to the fixed seat; and the bearing device comprises a supporting component and a plurality of rotating components, the supporting component is installed on the translation device, the rotating components are connected to the supporting component in a pivoted mode to form a supporting part for the vacuum pump, and the rotating components and the vacuum pump can roll relatively so that the vacuum pump can rotate on the supporting part more easily. Through the arrangement, the vacuum pump is easier and more efficient to disassemble and assemble, and meanwhile, the safety of operators and the mounting precision of the vacuum pump are guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment maintenance, in particular to a vacuum pump disassembly and assembly auxiliary tool, in particular to a vacuum pump disassembly and assembly auxiliary tool used in semiconductor equipment. Background Art

[0002] In many industrial and electronic equipment, a vacuum system is often required to achieve the required vacuum level. For example, in semiconductor processing equipment such as ion implantation equipment and chemical vapor deposition equipment, a vacuum pump is often required to be installed in the process chamber to ensure that the vacuum level in the process chamber meets the processing requirements and ensure the quality of the chip. Typical vacuum pumps include molecular pumps, vacuum pumps, and dry pumps. When performing maintenance (maintenance) on the above equipment, the vacuum pump also needs to be cleaned and regenerated. However, vacuum pumps such as molecular pumps and vacuum pumps are generally heavy and have complex installation locations. Therefore, disassembling and assembling vacuum pumps has always been a difficult point in the equipment maintenance process.

[0003] Currently, vacuum pumps are mostly disassembled and assembled manually, which is not only inefficient but also poses safety risks and may affect the installation accuracy of the vacuum pump. Therefore, a new technical solution is needed to solve the above problems. Utility Model Content

[0004] The utility model aims to solve the above technical problems and provides a vacuum pump disassembly and assembly auxiliary tool to improve the disassembly and assembly efficiency of the vacuum pump, the safety of operators and the installation accuracy of the equipment.

[0005] To achieve the above-mentioned purpose, the utility model provides a vacuum pump disassembly and assembly auxiliary tool, including: a fixed seat; a translation device, the translation device is slidably connected to the fixed seat and can slide in the horizontal direction relative to the fixed seat; a bearing device, the bearing device includes a supporting member and a plurality of rotating members, the supporting member is installed on the translation device, and the plurality of rotating members are pivotally connected to the supporting member to form a support part for the vacuum pump, and the plurality of rotating members can rotate to drive the vacuum pump to rotate.

[0006] In the preferred technical solution of the above-mentioned disassembly and assembly auxiliary tool, the supporting member includes a supporting frame, wherein the supporting frame includes a first side frame and a second side frame spaced apart in the horizontal direction, and a plurality of rotating members are pivotally connected between the first side frame and the second side frame.

[0007] In the preferred technical solution of the above-mentioned disassembly and assembly auxiliary tool, the first frame includes a first inclined portion and a second inclined portion connected to each other, and the first inclined portion and the second inclined portion extend obliquely upward on both sides respectively from the connection between the two; the second frame includes a third inclined portion and a fourth inclined portion connected to each other, wherein the third inclined portion is opposite to the first inclined portion, and the fourth inclined portion is opposite to the second inclined portion, and the third inclined portion and the fourth inclined portion extend obliquely upward on both sides respectively from the connection between the two; wherein, at least one rotating component is arranged between the first inclined portion and the third inclined portion, and at least one rotating component is arranged between the second inclined portion and the fourth inclined portion.

[0008] In the preferred technical solution of the above-mentioned disassembly and assembly auxiliary tool, the rotating component is a linear bearing or a roller.

[0009] In the preferred technical solution of the above-mentioned disassembly and assembly auxiliary tool, the carrying device further includes a plurality of support columns, the bottom ends of the support columns are fixedly connected to the translation device, and the top ends of the support columns are fixedly connected to the supporting members.

[0010] In the preferred technical solution of the above-mentioned disassembly and assembly auxiliary tool, the translation device includes a first movable plate and a second movable plate, wherein the first movable plate is slidably connected to the fixed seat so as to be able to slide along the first direction, and the second movable plate is slidably connected to the first movable plate so as to be able to slide along the second direction. The first direction and the second direction are both parallel to the horizontal direction, and there is a preset angle between the two.

[0011] In the preferred technical solution of the above-mentioned disassembly and assembly auxiliary tool, the fixed seat and the first movable plate are slidingly connected through a first sliding connection structure; the first sliding connection structure includes a first guide rail and a first slider extending along a first direction, wherein the first guide rail is arranged on one of the fixed seat and the first movable plate, and the first slider is arranged on the other of the fixed seat and the first movable plate; and / or the first movable plate and the second movable plate are slidingly connected through a second sliding connection structure; the second sliding connection structure includes a second guide rail and a second slider extending along a second direction, wherein the second guide rail is arranged on one of the first movable plate and the second movable plate, and the second slider is arranged on the other of the first movable plate and the second movable plate.

[0012] In the preferred technical solution of the above-mentioned disassembly and assembly auxiliary tool, the first slider is provided with a first locking mechanism that locks with the first guide rail, and / or the second slider is provided with a second locking mechanism that locks with the second guide rail.

[0013] In the preferred technical solution of the above-mentioned disassembly and assembly assisting tool, the disassembly and assembly assisting tool also includes a lifting device and a walking device, wherein the top of the lifting device is fixedly connected to the bottom of the fixed seat, and can drive the fixed seat to rise and fall; the bottom of the lifting device is fixedly connected to the walking device, and the walking device can walk on the ground to realize the free movement of the disassembly and assembly assisting tool.

[0014] In the preferred technical solution of the above-mentioned disassembly and assembly auxiliary tool, there are multiple fixing seats, and the multiple fixing seats are arranged at intervals at the bottom of the translation device; among the multiple fixing seats, two of the fixing seats are provided with mounting grooves at the bottom for plugging in the fork arm of the forklift; and the side of the mounting groove is provided with multiple locking screw holes for locking the fixing seat and the fork arm by bolts.

[0015] During the process of disassembling and assembling the vacuum pump, the disassembly and assembly auxiliary tool can be fixedly connected to the external lifting and / or walking device through a fixed seat to achieve the lifting and transfer of the disassembly and assembly auxiliary tool; the carrying device and the vacuum pump can be moved horizontally through a translation device to adjust and position the horizontal installation position of the vacuum pump; while the carrying device provides support for the vacuum pump, it can also rotate the vacuum pump with the help of a rotating component to assist in adjusting its installation angle. The above-mentioned functional units cooperate with each other to meet the support, positioning, translation, lifting and rotation requirements of the vacuum pump during the disassembly and assembly process, greatly improving the disassembly and assembly efficiency, reducing the number of operators, and ensuring the safety of operators and the installation accuracy of the vacuum pump.

[0016] The support member adopts a frame structure, which not only makes the overall structure of the support member simple and easy to process, but also helps to reduce the structural weight of the support member while ensuring the structural strength; at the same time, the frame structure of the support member also facilitates the installation and fixation of the rotating member inside it.

[0017] The first and second frames adopt V-, X-, or Y-shaped structures, spaced horizontally and fixed above the translation mechanism. Multiple rotating members are pivotally connected between the two frames, forming a V-shaped support portion between the first and second frames. During assembly and disassembly, the vacuum pump is placed in the center of the V-shaped support portion, so that the inclined portions on both sides act as a stop for the vacuum pump. This prevents the vacuum pump from rolling when the operator applies rotational force to the vacuum pump, facilitates angle adjustment, and improves the support stability of the vacuum pump.

[0018] The rotating member can be a linear bearing or roller, with both ends of the linear bearing or roller pivotally connected to the inner sides of the first and second frames, respectively. The linear bearing or roller has a strong load-bearing capacity and low rolling resistance, making it more stable in supporting the vacuum pump and quieter in operation.

[0019] The support structure also includes multiple support columns arranged below the support structure, which ensures the connection strength between the support structure and the translation device, further improves the stability of the support, and enables the support part to maintain an appropriate height, making it easy to approach the installation height of the vacuum pump during disassembly and assembly.

[0020] In the translation device, the horizontal position of the vacuum pump can be adjusted in two directions through the cooperation of the first movable plate and the second movable plate to meet the requirements of disassembly, assembly and positioning of the vacuum pump.

[0021] The coordination between the guide rail and the slider results in a simple structure and stable operation of the translation device, improving positioning flexibility and accuracy. Furthermore, by providing a first locking mechanism and a second locking mechanism, the horizontal position of the carrying device and the vacuum pump it carries can be locked after positioning is completed, preventing the horizontal position of the vacuum pump from shifting, thereby facilitating the positioning and installation of the vacuum pump.

[0022] By installing a lifting device at the bottom of the fixed base, the disassembly and assembly assisting tool can be raised and lowered. Furthermore, by installing a walking device, the disassembly and assembly assisting tool can be moved and transferred as a whole. This not only meets the height requirements of different equipment, but also improves the maneuverability and flexibility of the disassembly and assembly assisting tool, allowing it to quickly reach different workstations for disassembly and assembly operations. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The preferred embodiments of the present invention are described below with reference to the accompanying drawings, in which:

[0024] Figure 1 This is a schematic diagram of the structure of the auxiliary tool for disassembling and assembling the vacuum pump according to the embodiment of the utility model. Figure 1 ;

[0025] Figure 2 This is a schematic diagram of the structure of the auxiliary tool for disassembling and assembling the vacuum pump according to the embodiment of the utility model. Figure 2 .

[0026] Figure 3 This is a schematic diagram of the use status of the carrying device in the vacuum pump disassembly and assembly auxiliary tool according to an embodiment of the utility model.

[0027] List of reference numerals:

[0028] 1. Fixed seat; 11. Mounting slot; 12. Locking screw; 2. Translation device; 21. First movable plate; 22. Second movable plate; 23. First guide rail; 24. Second guide rail; 25. First slider; 251. First locking mechanism; 26. Second slider; 261. Second locking mechanism; 3. Carrying device; 31. Support frame; 311. First side frame; 3111. First inclined portion; 3112. Second inclined portion; 312. Second side frame; 3121. Third inclined portion; 3122. Fourth inclined portion; 32. Support column; 33. Rotating component; 4. Vacuum pump. DETAILED DESCRIPTION

[0029] The preferred embodiments of the present invention are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0030] It should be noted that in the description of this utility model, terms such as "inner," "upper," "top," and "bottom" indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings. This is merely for ease of description and does not indicate or imply that the device or structure described must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0031] Furthermore, it should be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," and "connected" should be understood in a broad sense, for example, to refer to fixed connections, detachable connections, or integral connections. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0032] Currently, the disassembly and assembly of vacuum pumps used in industrial and electronic equipment is often done manually, which is not only inefficient but also poses safety risks and may affect the installation accuracy of the vacuum pump. Therefore, the present invention provides a disassembly and assembly assisting tool to address the aforementioned issues. The following embodiments illustrate the structure and operation of the disassembly and assembly assisting tool using the disassembly and assembly of a vacuum pump used in ion implantation equipment as an example. It is readily understood that the disassembly and assembly assisting tool can also be used to disassemble and assemble vacuum pumps used in other industrial and electronic equipment.

[0033] like Figures 1 to 3 As shown, the disassembly and assembly assisting tool provided by an embodiment of the present invention includes: a fixing base 1, located at the bottom of the disassembly and assembly assisting tool; a translation device 2, slidably connected to the fixing base 1 and capable of sliding horizontally relative to the fixing base 1; and a supporting device 3, including a support member and a plurality of rotating members 33, wherein the support member is mounted on the translation device 2, and the plurality of rotating members 33 are pivotally connected to the support member to form a support portion for the vacuum pump 4. When disassembling and assembling the vacuum pump 4, the operator needs to rotate the vacuum pump 4 to adjust its installation angle. The rotating member 33 can rotate to drive the vacuum pump 4 to rotate, so that the operator can easily disassemble and assemble the vacuum pump 4.

[0034] In actual application, in order to match the installation height of the vacuum pump 4 on the ion implanter, the disassembly and assembly auxiliary tool of this embodiment can be designed to be installed on a lifting forklift in the process line, so as to use the lifting forklift to realize the transfer and lifting of the disassembly and assembly auxiliary tool.

[0035] Specifically, this can be achieved by installing the fixing base 1 on the fork arm of a lifting forklift. Figure 1 and Figure 2 As shown, there are two fixing seats 1, and the two fixing seats 1 are arranged at intervals at the bottom of the translation device 2. A locking structure adapted to the fork arm is provided on the fixing seat 1, so that the two fixing seats 1 can be fixedly connected to the two fork arms of the lifting forklift respectively. Preferably, the locking structure of the present invention is a mounting groove 11 provided at the bottom of the fixing seat 1. The size of the mounting groove 11 is adapted to the fork arm and can be plugged and fixed with the fork arm. In addition, in order to further enhance the installation strength of the fixing seat 1 on the fork arm, a number of locking screw holes 12 are also provided on the side of the mounting groove 11, so that the fixing seat 1 and the fork arm can be locked by bolts, thereby completing the rapid installation and fixation of the fixing seat 1 on the fork arm.

[0036] It should be noted that, in actual applications, those skilled in the art can flexibly set the locking structure on the fixing base 1. In addition to the mounting groove 11, locking can also be performed through various structures such as bolts and snaps, as long as the fixing base 1 and the fork arm can be quickly disassembled and assembled.

[0037] During the specific operation, Figures 1 to 3 As shown, when the vacuum pump 4 needs to be disassembled, the disassembly and assembly auxiliary tool is first fixed to the fork arm of the lifting forklift, and the carrying device 3 is raised to the installation height of the vacuum pump 4 by using the lifting forklift so that the top of the carrying device 3 contacts the circular pump body of the vacuum pump 4, and the axis of the circular pump body is parallel to the rotation axis of the rotating member 33 to form an upward support force on the circular pump body. Then, the connecting member between the vacuum pump 4 and the ion implanter is removed to separate the vacuum pump 4 from the ion implanter. At this time, the entire weight of the vacuum pump 4 falls completely on the carrying device 3. Finally, the lifting forklift is controlled to slowly lower the vacuum pump 4 for maintenance work. Of course, before and after disassembling the vacuum pump 4, the relative position of the vacuum pump 4 and the ion implanter in the horizontal direction can also be adjusted by the translation device 2 to facilitate the disassembly of the vacuum pump 4 or to avoid the ion implanter during the descent of the lifting forklift.

[0038] When the vacuum pump 4 needs to be installed on the ion implanter, first use a lifting forklift to lift the carrier device 3 carrying the vacuum pump 4 to the installation height of the vacuum pump 4, and then control the translation device 2 to fine-tune the relative position of the vacuum pump 4 and the ion implanter in the horizontal direction. At the same time, the circular pump body is rotated along the horizontal axis to adjust the installation angle of the vacuum pump 4, so that the connection structure on the vacuum pump 4 can be accurately docked with the connection structure on the ion implanter, completing the installation and fixation of the vacuum pump 4.

[0039] By operating the lifting forklift, not only can the carrying device 3 be adjusted to the disassembly and assembly height of the vacuum pump 4 during the disassembly and assembly process of the vacuum pump 4 to facilitate workers to perform disassembly and assembly operations, but the disassembly and assembly auxiliary tools can also be transported to any work station as needed, thereby improving the maneuverability and flexibility of the disassembly and assembly auxiliary tools.

[0040] In another embodiment, an independent lifting device and traveling device may be provided to replace or partially replace the forklift. The top of the lifting device is provided with a structure adapted to and connected to the mounting groove 11 at the bottom of the fixing base 1, so as to be fixedly connected to the bottom of the fixing base 1 and capable of driving the fixing base 1 to rise and fall. The bottom of the lifting device is fixedly connected to the traveling device, which can travel on the ground to achieve free movement of the disassembly and assembly auxiliary tool.

[0041] Compared with using a lifting forklift to complete the movement and lifting of the disassembly and assembly auxiliary tool, the disassembly and assembly auxiliary tool in this embodiment includes an independent lifting device and a walking device, which can independently complete the lifting and movement of the vacuum pump 4 without relying on other tools, meeting the docking height of different equipment, and at the same time improving the maneuverability and flexibility of the disassembly and assembly auxiliary tool, making it convenient for it to quickly reach different workstations for disassembly and assembly operations.

[0042] It should be noted that the walking device, lifting device and translation device 2 on the disassembly and assembly auxiliary tool can be adjusted manually, or a driving device such as a motor can be installed to achieve electronic control adjustment.

[0043] like Figure 1 and Figure 2 As shown, the translation device 2 in this embodiment is installed on the top of the fixed base 1 and includes a first movable plate 21 and a second movable plate 22. The first movable plate 21 is slidably connected to the fixed base 1 and can slide in a first direction; the second movable plate 22 is slidably connected to the first movable plate 21 and can slide in a second direction, wherein the first direction and the second direction are at a preset angle. For example, in this embodiment, the first direction is perpendicular to the second direction; of course, the first direction and the second direction are both parallel to the horizontal direction. By setting the first movable plate 21 and the second movable plate 22, the horizontal position of the carrier device 3 and the vacuum pump 4 can be adjusted to meet the requirements of installation and removal of the vacuum pump 4.

[0044] Regarding the first sliding connection structure between the first movable plate 21 and the fixed seat 1, and the second sliding connection structure between the second movable plate 22 and the first movable plate 21, as shown in FIG. Figure 1 and Figure 2As shown, in one embodiment, the top of the fixed base 1 is provided with a first guide rail 23 extending along the first direction, and the bottom of the first movable plate 21 is provided with a first slider 25 slidingly engaged with the first guide rail 23, so that the first movable plate 21 can slide along the first direction; the top of the first movable plate 21 is provided with a second guide rail 24 extending along the second direction, and the bottom of the second movable plate 22 is provided with a second slider 26 slidingly engaged with the second guide rail 24, so that the second movable plate 22 can slide along the second direction.

[0045] The first sliding connection structure may also adopt other methods. For example, in other embodiments, the first guide rail 23 is arranged at the bottom of the first movable plate 21, and the first slider 25 is arranged at the top of the fixed seat 1; similarly, the second sliding connection structure may also adopt other methods. For example, the second guide rail 24 is arranged at the bottom of the second movable plate 22, and the second slider 26 is arranged at the top of the first movable plate 21.

[0046] The combination of the guide rail and the slider has a simple structure and stable operation, thereby improving the accuracy of positioning the vacuum pump 4 .

[0047] In a preferred embodiment, the translation device 2 further includes a driving mechanism for driving the first movable plate 21 and the second movable plate 22 to slide, such as a screw-nut mechanism or a gear rack mechanism.

[0048] Preferably, if Figure 1 and Figure 2 As shown, in this embodiment, the first slider 25 is further provided with a first locking mechanism 251 that locks with the first guide rail 23 , and / or the second slider 26 is provided with a second locking mechanism 261 that locks with the second guide rail 24 .

[0049] Exemplarily, the first locking mechanism 251 and the second locking mechanism 261 can be set as locking bolts, which cooperate with the threads to make them extend and retract during rotation to achieve locking and unlocking between the slider and the guide rail, thereby locking the horizontal position of the vacuum pump 4 to avoid position deviation after positioning is completed, making the disassembly and assembly of the vacuum pump 4 smoother.

[0050] like Figures 1 to 3 As shown, the carrying device 3 is fixed on the top of the translation device 2, and includes a supporting member, a support column 32 and a plurality of rotating members 33, wherein the supporting member includes a supporting frame 31, the bottom end of the support column 32 is fixedly connected to the top of the translation device 2, and the top end of the support column 32 is fixedly connected to the support frame 31, so that the support frame 31 can be fixed on the translation device 2, and the plurality of rotating members 33 are pivotally connected in the support frame 31.

[0051] Exemplarily, the support frame 31 includes a first frame 311 and a second frame 312 arranged opposite to each other, wherein the first frame 311 and the second frame 312 are arranged at intervals in the horizontal direction, and the first frame 311 includes a first inclined portion 3111 and a second inclined portion 3112 connected to each other, wherein the first inclined portion 3111 and the second inclined portion 3112 extend obliquely upward from the connection between the two, respectively, forming a V-shaped structure, an X-shaped structure or an approximately Y-shaped structure.

[0052] For example, Figures 1 to 3 In the illustrated embodiment, one end of each of the first inclined portion 3111 and the second inclined portion 3112 is a connecting end, and the first frame 311 has a V-shaped structure as a whole. In another embodiment, the first inclined portion 3111 and the second inclined portion 3112 are connected at their mid-regions, and the first frame 311 has an X-shaped structure as a whole. In yet another embodiment, one end of the first inclined portion 3111 is connected to the mid-region of the second inclined portion 3112, and the first frame 311 has an approximately Y-shaped structure as a whole. Similarly, the second frame 312 includes a third inclined portion 3121 opposite the first inclined portion 3111 and a fourth inclined portion 3122 opposite the second inclined portion 3112, wherein the third inclined portion 3121 and the fourth inclined portion 3122 extend obliquely upward from their connection point, respectively, to either side, forming a V-shaped structure, an X-shaped structure, or an approximately Y-shaped structure.

[0053] It should be noted that, in actual applications, in addition to setting the support portion to a V-shape, an X-shape, and an approximate Y-shape, it can also be set to other shapes. For example, the connection between the first inclined portion 3111 and the second inclined portion 3112 of the first frame 311 can also be set to an arc shape or with a chamfer, etc. As long as it can facilitate the bearing and rotation of the vacuum pump 4, this application does not make any specific restrictions.

[0054] It should also be noted that this embodiment does not specifically limit the length relationship between the first inclined portion 3111 and the second inclined portion 3112. The lengths of the two extending obliquely upward from the connection point can be the same or different, so as to facilitate the disassembly and assembly of the vacuum pump 4; this embodiment does not specifically limit the angle between the first inclined portion 3111 and the second inclined portion 3112, which can be an acute angle, a right angle, or an obtuse angle, for example, any angle within the range of 60 degrees to 135 degrees. In actual applications, those skilled in the art can flexibly set the above-mentioned angle according to the external dimensions of the vacuum pump 4.

[0055] The frame-shaped structure adopted by the support frame 31 makes the structure of the support member simple and easy to process, while ensuring structural strength, it also helps to reduce the weight of the overall structure. In actual application, it is not limited to a frame-shaped structure, and can also be set to a plate structure, a block structure, etc.

[0056] At least one rotating member 33 is provided between the first inclined portion 3111 and the third inclined portion 3121, and at least one rotating member 33 is provided between the second inclined portion 3112 and the fourth inclined portion 3122. Preferably, a plurality of rotating members 33 are installed between the first inclined portion 3111 of the first frame 311 and the third inclined portion 3121 of the second frame 312, and the plurality of rotating members 33 are distributed at intervals, such as Figures 1 to 3 In the structure shown, three rotating members 33 are provided between the first inclined portion 3111 and the third inclined portion 3121; correspondingly, a plurality of rotating members 33 are also installed between the second inclined portion 3112 of the first frame 311 and the fourth inclined portion 3122 of the second frame 312. The edges of the rotating members 33 protrude from the support frame 31, so that when the vacuum pump 4 is placed on the carrier device 3, the rotating members 33 are in direct contact with the vacuum pump 4, thereby forming a support portion.

[0057] When the vacuum pump 4 is placed on the support part, the multiple rotating components 33 arranged upward on both sides can support and stop the vacuum pump 4, preventing the vacuum pump 4 from sliding to both sides, thereby improving the stability of the support for the vacuum pump 4. In addition, it can be adapted to vacuum pumps 4 of various specifications and sizes. At the same time, the rotating components 33 on both sides also facilitate the flipping of the vacuum pump 4. When the operator needs to rotate the vacuum pump 4 to adjust the installation angle, he only needs to apply a certain rotational force to the vacuum pump 4, and the vacuum pump 4 will roll relative to the rotating component 33, thereby making the rotation of the vacuum pump 4 easier.

[0058] It should be noted that, in practical applications, those skilled in the art can flexibly set the rotating member 33 to a spherical rotating member or a cylindrical rotating member, etc., as long as it can support the vacuum pump 4 and make relative rolling contact with the vacuum pump 4.

[0059] The present application preferably sets the rotating member 33 as a linear bearing or a roller. Specifically, the present application provides mounting holes at positions corresponding to the first frame 311 and the second frame 312. A fixed shaft is passed through the mounting hole, so that the linear bearing is sleeved on the fixed shaft, thereby realizing a pivotal connection between the linear bearing and the support frame 31. The linear bearing has a large supporting force and good quietness, so that a sufficiently large contact area can be ensured between the support portion and the vacuum pump 4 during the rotation of the vacuum pump 4, thereby improving the bearing capacity of the support portion and reducing rolling noise.

[0060] The present application adopts a method of manually adjusting the angle of the vacuum pump 4, which is more flexible and faster than the mechanical adjustment method (such as motor), and at the same time makes the structure simpler and more reliable, reducing costs.

[0061] Therefore, in addition to the carrying and supporting functions of traditional carrying equipment, the carrying device 3 can also utilize the relative rolling between the rotating component 33 and the vacuum pump 4 to allow the vacuum pump 4 to be easily rotated on the carrying device 3 to adjust the installation angle of the vacuum pump 4.

[0062] like Figures 1 to 3 As shown, the number of support columns 32 in this embodiment can be determined based on factors such as the shape of the support frame 31 and the required bearing capacity. In one specific embodiment, the first frame 311 and the second frame 312 are both V-shaped structures, and there are four support columns 32, two of which connect the first frame 311 and the translation device 2, and the other two connect the second frame 312 and the translation device 2. This ensures the connection strength between the two frames and the translation device 2, further improves the stability of the support, and at the same time maintains the support portion at an appropriate height to facilitate the support of the vacuum pump 4 during disassembly and assembly. In other embodiments, the first frame 311 and the second frame 312 are both X-shaped structures, and it is also possible to choose to provide or not provide support columns 32.

[0063] Thus far, the technical solutions of the present invention have been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it is readily understood by those skilled in the art that the scope of protection of the present invention is obviously not limited to these specific embodiments. Without departing from the principles of the present invention, those skilled in the art may make equivalent changes or substitutions to the relevant technical features, and the technical solutions after such changes or substitutions will fall within the scope of protection of the present invention.

Claims

1. A vacuum pump disassembly and assembly auxiliary tool, characterized in that: include: Fixed seat; a translation device, the translation device being slidably connected to the fixing base and capable of sliding in a horizontal direction relative to the fixing base; The carrying device includes a supporting member and a plurality of rotating members, wherein the supporting member is mounted on the translation device, the plurality of rotating members are pivotally connected to the supporting member to form a supporting portion for the vacuum pump, and the plurality of rotating members can rotate to drive the vacuum pump to rotate.

2. The disassembly and assembly assisting tool according to claim 1, wherein: The supporting member includes a supporting frame, wherein the supporting frame includes a first side frame and a second side frame spaced apart in a horizontal direction, and the plurality of rotating members are pivotally connected between the first side frame and the second side frame.

3. The disassembly and assembly assisting tool according to claim 2, wherein: The first frame includes a first inclined portion and a second inclined portion connected to each other, wherein the first inclined portion and the second inclined portion extend obliquely upward from their connection points on both sides respectively; The second frame includes a third inclined portion and a fourth inclined portion connected to each other, wherein the third inclined portion is opposite to the first inclined portion, and the fourth inclined portion is opposite to the second inclined portion, and the third inclined portion and the fourth inclined portion respectively extend obliquely upward from a connection point between the third inclined portion and the fourth inclined portion; At least one rotating member is provided between the first inclined portion and the third inclined portion, and at least one rotating member is provided between the second inclined portion and the fourth inclined portion.

4. The disassembly and assembly assisting tool according to claim 2 or 3, characterized in that: The rotating member is a linear bearing or a roller.

5. The disassembly and assembly assisting tool according to any one of claims 1 to 3, characterized in that: The bearing device further includes a plurality of support columns, the bottom ends of the support columns are fixedly connected to the translation device, and the top ends of the support columns are fixedly connected to the supporting member.

6. The disassembly and assembly assisting tool according to claim 1, characterized in that: The translation device includes a first moving plate and a second moving plate, wherein: The first movable plate is slidably connected to the fixed seat so as to be able to slide along a first direction; The second movable plate is slidably connected to the first movable plate so as to be able to slide along a second direction. The first direction and the second direction are both parallel to the horizontal direction, and a preset angle is formed between the first direction and the second direction.

7. The disassembly and assembly assisting tool according to claim 6, wherein: The fixed seat and the first movable plate are slidably connected via a first sliding connection structure; the first sliding connection structure comprises a first guide rail and a first slider extending along a first direction, wherein the first guide rail is provided on one of the fixed seat and the first movable plate, and the first slider is provided on the other of the fixed seat and the first movable plate; and / or The first movable plate and the second movable plate are slidably connected via a second sliding connection structure; the second sliding connection structure includes a second guide rail and a second slider extending along a second direction, wherein the second guide rail is arranged on one of the first movable plate and the second movable plate, and the second slider is arranged on the other of the first movable plate and the second movable plate.

8. The disassembly and assembly assisting tool according to claim 7, characterized in that: The first slider is provided with a first locking mechanism that locks with the first guide rail; and / or The second sliding block is provided with a second locking mechanism that locks with the second guide rail.

9. The disassembly and assembly assisting tool according to claim 1, wherein: The disassembly and assembly auxiliary tool also includes a lifting device and a walking device. The top of the lifting device is fixedly connected to the bottom of the fixing seat, and can drive the fixing seat to rise and fall; The bottom of the lifting device is fixedly connected to the walking device, and the walking device can walk on the ground to achieve free movement of the disassembly and assembly auxiliary tool.

10. The disassembly and assembly assisting tool according to claim 1, wherein: There are multiple fixing seats, and the multiple fixing seats are arranged at intervals at the bottom of the translation device; Among the multiple fixing seats, two of the fixing seats are provided with mounting grooves at the bottom for plugging in the fork arms of the forklift; and the sides of the mounting grooves are provided with multiple locking screw holes for locking the fixing seats and the fork arms by bolts.

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