Air inlet structure of water ring pump of CVD (Chemical Vapor Deposition) coating furnace
By introducing flow guide blocks, mounting plates, heating wires and temperature sensors into the inlet structure of the CVD-coated furnace water ring pump, the inconvenience of disassembly and assembly caused by the simple structure of the air inlet is solved, and the effect of convenient disassembly and assembly and effective insulation is achieved.
Patent Information
- Application Number
- CN202422253181.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-13
- Publication Date
- 2025-09-05
- Estimated Expiration
- 2034-09-13
AI Technical Summary
The air inlet of the existing CVD coated furnace water ring pump is simple in structure, which leads to inconvenient disassembly and assembly.
A structure including air intake pipe, flow guide block, mounting plate, heating wire and temperature sensor is designed. Through heating wire heating, mounting plate clamping and guard plate protection, the air intake pipe is stable and conveniently disassembled and assembled.
It realizes convenient disassembly and assembles the air inlet, reduces accumulation and effectively maintains heat, avoids heat loss, and improves operating efficiency.
Smart Images

Figure CN223306534U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of air inlet structures of water ring pumps for CVD coating furnaces, in particular to an air inlet structure of a water ring pump for CVD coating furnaces. Background Art
[0002] The CVD coating of CNC blades uses TiCl4, aluminum chloride, acetonitrile, methane, carbon dioxide, carbon monoxide, nitrogen, and hydrogen as raw materials, which react at high temperature to generate titanium carbonitride coating and aluminum oxide coating. The tail gas not consumed by the coating reaction, as well as the tail gas hydrogen chloride and dust generated by the reaction, are condensed by the condenser, enter the tail gas pipe, and are pumped into the neutralization station by a water ring pump for neutralization and then discharged. However, the air inlet structure of the water ring pump of the CVD coating furnace currently used on the market is relatively simple and inconvenient to disassemble and assemble, resulting in inconvenience in later disassembly and assembly. Therefore, a CVD coating furnace water ring pump air inlet structure is proposed. Utility Model Content
[0003] The purpose of the utility model is to provide an air inlet structure of a water ring pump for a CVD coating furnace, so as to solve the problem raised in the above background technology that the air inlet structure of the water ring pump for a CVD coating furnace currently used on the market is relatively simple and inconvenient to disassemble and assemble, resulting in inconvenience in later disassembly and assembly.
[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solution: an air inlet structure of a CVD coating furnace water ring pump, comprising an air inlet pipe, a guide block is provided at the bottom inner bottom of the air inlet pipe, and multiple arc plates are provided at both ends of the outer side of the air inlet pipe, a connecting plate is fixedly provided between the bottoms of the multiple arc plates and the connecting plate is sleeved on the outer side of the air inlet pipe, a sealing gasket is provided at the bottom of the connecting plate, a fixing plate is fixedly provided on one side of the upper and lower connecting plates, and an annular protrusion is integrally processed on the outer side of the fixing plate, the outer side of the inlet pipe is sleeved with a mounting plate and the mounting plate is located between the two connecting plates, the fixing plate is buckled inside the mounting plate, the annular protrusion on the outer side of the fixing plate is buckled on the inner wall of the mounting plate, the inner wall of the mounting plate is evenly provided with multiple heating wires, a temperature sensor is provided inside the mounting plate, a protective structure is provided on the outer side of the mounting plate, and the outer sides of the multiple arc plates are threadedly connected with fixing rings.
[0005] Preferably, the protective structure includes a first guard plate and a second guard plate, the first guard plate and the second guard plate are sleeved on the outside of the mounting plate, plug-in plates are fixedly provided at both ends of the first guard plate and the plug-in plates are buckled on the inner wall of the second guard plate, a plurality of buckle plates are fixedly provided on the outside of the second guard plate, a plurality of L-shaped buckle plates are fixedly provided on the outside of the first guard plate and one end of the L-shaped buckle plate is buckled inside the buckle plate, a limiting protrusion is fixedly provided on one side of the plurality of L-shaped buckle plates and the limiting protrusion is buckled on the inner wall of the buckle plate.
[0006] Preferably, both ends of the inner wall of the mounting plate are provided with a card slot, and the annular protrusion is engaged with the card slot through interference fit.
[0007] Preferably, the inner wall of the fixing ring is processed with an internal thread, the outer side of the arc-shaped plate is processed with an external thread, and the fixing ring is threadedly connected to the arc-shaped plate.
[0008] Preferably, the inner walls at both ends of the second guard plate are provided with plug-in slots, and the size of the plug-in plate is adapted to the size of the plug-in slots.
[0009] Preferably, a through hole is provided on one side of the gusset plate, and the limiting protrusion passes through the through hole.
[0010] Compared with the prior art, the above technical solution adopted by the present invention has the following technical effects:
[0011] The utility model is provided with an intake pipe, a guide block, a mounting plate, a heating wire and a temperature sensor. When in use, the intake pipe is connected to the ball valve, and the mounting plate is buckled inside the fixing plate on one side of the connecting plate. The mounting plate is located on the outside of the intake pipe, and then another connecting plate is sleeved on the outside of the intake pipe, so that the mounting plate is clamped firmly and convenient for disassembly and assembly. The intake pipe is heated by the heating wire to reduce accumulation. At the same time, the first guard plate and the second guard plate are sleeved on the outside of the mounting plate. The thermal insulation sponges inside the first guard plate and the second guard plate will keep them warm to avoid rapid heat loss. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.
[0013] Figure 1 This is a schematic diagram of the main structure of the utility model;
[0014] Figure 2 This is a side structural diagram of the present utility model;
[0015] Figure 3 This is a schematic diagram of the explosion structure of the utility model;
[0016] Figure 4 For the utility model Figure 1 Schematic diagram of the enlarged structure of A in the figure.
[0017] Explanation of the accompanying drawings: 1. Inlet pipe; 2. Guide block; 3. Arc plate; 4. Connecting plate; 5. Sealing gasket; 6. Fixing plate; 7. Annular protrusion; 8. Mounting plate; 9. Heating wire; 10. Temperature sensor; 11. First guard plate; 12. Second guard plate; 13. Plug plate; 14. Buckle plate; 15. L-shaped buckle plate; 16. Limiting protrusion; 17. Insulation sponge; 18. Fixing ring. DETAILED DESCRIPTION
[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0019] It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the conditions under which this application can be implemented. Therefore, they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed in this application without affecting the efficacy and purpose that can be achieved by this application.
[0020] Example
[0021] In the prior art, the air inlet structure of the water ring pump of the CVD coating furnace currently used in the market is relatively simple and inconvenient to disassemble and assemble, resulting in the problem of inconvenience in later disassembly and assembly.
[0022] See also Figure 1-4The utility model provides a technical solution: an air inlet structure of a CVD coating furnace water ring pump, comprising an air inlet pipe 1, a guide block 2 is provided at the inner bottom end of the air inlet pipe 1, a plurality of arc-shaped plates 3 are provided at both ends of the outer side of the air inlet pipe 1, a connecting plate 4 is fixedly provided between the bottoms of the plurality of arc-shaped plates 3, and the connecting plate 4 is sleeved on the outer side of the air inlet pipe 1, a sealing gasket 5 is provided at the bottom of the connecting plate 4, a fixing plate (6) is fixedly provided on one side of the upper and lower connecting plates (4), an annular protrusion 7 is integrally processed on the outer side of the fixing plate 6, a mounting plate 8 is sleeved on the outer side of the air inlet pipe 1 and the mounting plate 8 is located between the two connecting plates 4, the fixing plate 6 is buckled inside the mounting plate 8, the annular protrusion 7 on the outer side of the fixing plate 6 is buckled on the inner wall of the mounting plate 8, and the inner wall of the mounting plate 8 is provided with a sealing gasket 5. A plurality of heating wires 9 are evenly arranged on the wall, a temperature sensor 10 is arranged inside the mounting plate 8, a protective structure is arranged on the outside of the mounting plate 8, and a plurality of arc-shaped plates 3 are threadedly connected to the outside of the intake pipe 1. Then, the mounting plate 8 is buckled inside the fixed plate 6 on one side of the connecting plate 4, and then another connecting plate 4 is put on the outside of the intake pipe 1, and then the fixed plate 6 on one side of the connecting plate 4 is buckled inside the mounting plate 8, thereby clamping the mounting plate 8, and then the fixing ring 18 is connected to the arc plate 3 on the top of the connecting plate 4, so as to tighten it for easy disassembly and assembly, and at the same time, the intake pipe 1 is heated by the heating wire 9 to reduce accumulation.
[0023] The protective structure includes a first guard plate 11 and a second guard plate 12. The first guard plate 11 and the second guard plate 12 are sleeved on the outside of the mounting plate 8. Both ends of the first guard plate 11 are fixedly provided with a plug-in plate 13 and the plug-in plate 13 is buckled on the inner wall of the second guard plate 12. A plurality of gussets 14 are fixedly provided on the outside of the second guard plate 12. A plurality of L-shaped gussets 15 are fixedly provided on the outside of the first guard plate 11 and one end of the L-shaped gusset 15 is buckled inside the gusset 14. A limiting protrusion 16 is fixedly provided on one side of the plurality of L-shaped gussets 15 and the limiting protrusion 16 is fixedly provided on one side of the plurality of L-shaped gussets 15. The positioning protrusion 16 is buckled on the inner wall of the buckle plate 14. When in use, the first guard plate 11 and the second guard plate 12 are put on the outside of the mounting plate 8, and the L-shaped buckle plate 15 on the outside of the first guard plate 11 will be inserted into the inside of the buckle plate 14. At the same time, the limiting protrusion 16 on one side of the L-shaped buckle plate 15 will buckle the buckle plate 14, thereby limiting the first guard plate 11 and the second guard plate 12. The first guard plate 11 and the second guard plate 12 are used for protection, and the thermal insulation sponge 17 inside the first guard plate 11 and the second guard plate 12 will keep them warm.
[0024] Both ends of the inner wall of the mounting plate 8 are provided with a card slot, and the annular protrusion 7 is engaged with the card slot through interference fit, and the mounting plate 8 is limited and fixed by the annular protrusion 7 on the outer side of the fixing plate 6.
[0025] The inner wall of the fixing ring 18 is processed with an internal thread, and the outer side of the arc plate 3 is processed with an external thread. The fixing ring 18 is threadedly connected to the arc plate 3, and the arc plate 3 is fastened by the fixing ring 18, so that the connecting plate 4 is fixedly installed on the outer side of the intake pipe 1.
[0026] Insertion slots are provided on the inner walls at both ends of the second guard plate 12 . The size of the insertion plate 13 matches that of the insertion slots. The first guard plate 11 and the second guard plate 12 are connected together through the insertion plate 13 .
[0027] A through hole is formed on one side of the pinch plate 14 , and a limiting protrusion 16 passes through the through hole. The limiting protrusion 16 limits the L-shaped pinch plate 15 .
[0028] Working principle or structural principle, when in use, install the guide block 2 at the bottom of the intake pipe 1, then connect the intake pipe 1 to the ball valve, then put the connecting plate 4 on the outside of the intake pipe 1, and then buckle the mounting plate 8 inside the fixing plate 6 on one side of the connecting plate 4, the mounting plate 8 is on the outside of the intake pipe 1, and at the same time, the annular protrusion 7 on the outside of the fixing plate 6 will buckle with the inner wall of the mounting plate 8, and then put another connecting plate 4 on the outside of the intake pipe 1, so that the fixing plate 6 on one side of the connecting plate 4 is buckled inside the mounting plate 8, thereby clamping the mounting plate 8 firmly, and then fasten the fixing ring 18 to the arc plate at the top of the connecting plate 4. 3 is connected to tighten it and facilitate disassembly and assembly, and the intake pipe 1 is heated by the heating wire 9 to reduce accumulation. At the same time, the first guard plate 11 and the second guard plate 12 are put on the outside of the mounting plate 8, and the L-shaped buckle plate 15 on the outside of the first guard plate 11 will be inserted into the inside of the buckle plate 14. The limiting protrusion 16 on one side of the L-shaped buckle plate 15 will buckle the buckle plate 14, thereby limiting the first guard plate 11 and the second guard plate 12. The first guard plate 11 and the second guard plate 12 are used for protection. At the same time, the thermal insulation sponge 17 inside the first guard plate 11 and the second guard plate 12 will keep them warm to avoid rapid heat loss.
[0029] Those skilled in the art will appreciate that various combinations and / or combinations of features described in the various embodiments and / or claims of the present invention may be employed, even if such combinations and / or combinations are not explicitly described in the present invention. In particular, various combinations and / or combinations of features described in the various embodiments and / or claims of the present invention may be employed without departing from the spirit and teachings of the present invention. All such combinations and / or combinations fall within the scope of the present invention.
Claims
1. A CVD coating furnace water ring pump air inlet structure, comprising an air inlet pipe (1), characterized in that: The inner bottom end of the air intake pipe (1) is provided with a guide block (2), and the outer ends of the air intake pipe (1) are provided with a plurality of arc-shaped plates (3). A connecting plate (4) is fixedly provided between the bottoms of the plurality of arc-shaped plates (3), and the connecting plate (4) is sleeved on the outer side of the air intake pipe (1). A sealing gasket (5) is provided at the bottom of the connecting plate (4). A fixing plate (6) is fixedly provided on one side of the upper and lower connecting plates (4), and an annular protrusion (7) is integrally processed on the outer side of the fixing plate (6). The air intake pipe (1) The outer side of the mounting plate (8) is covered with a mounting plate (8) and the mounting plate (8) is located between the two connecting plates (4); the fixing plate (6) is buckled inside the mounting plate (8); the annular protrusion (7) on the outer side of the fixing plate (6) is buckled on the inner wall of the mounting plate (8); the inner wall of the mounting plate (8) is evenly provided with a plurality of heating wires (9); the interior of the mounting plate (8) is provided with a temperature sensor (10); the outer side of the mounting plate (8) is provided with a protective structure; the outer sides of the plurality of arc-shaped plates (3) are threadedly connected with fixing rings (18).
2. The air inlet structure of a CVD coating furnace water ring pump according to claim 1, characterized in that: The protective structure comprises a first guard plate (11) and a second guard plate (12), wherein the first guard plate (11) and the second guard plate (12) are sleeved on the outer side of the mounting plate (8), plug-in plates (13) are fixedly provided at both ends of the first guard plate (11), and the plug-in plates (13) are buckled on the inner wall of the second guard plate (12), a plurality of buckle plates (14) are fixedly provided on the outer side of the second guard plate (12), a plurality of L-shaped buckle plates (15) are fixedly provided on the outer side of the first guard plate (11), and one end of the L-shaped buckle plate (15) is buckled inside the buckle plate (14), and a limiting protrusion (16) is fixedly provided on one side of the plurality of L-shaped buckle plates (15), and the limiting protrusion (16) is buckled on the inner wall of the buckle plate (14).
3. The air inlet structure of a CVD coating furnace water ring pump according to claim 1, characterized in that: Both ends of the inner wall of the mounting plate (8) are provided with a card slot, and the annular protrusion (7) is engaged with the card slot through interference fit.
4. The air inlet structure of a CVD coating furnace water ring pump according to claim 1, characterized in that: The inner wall of the fixing ring (18) is processed with an internal thread, the outer side of the arc-shaped plate (3) is processed with an external thread, and the fixing ring (18) is threadedly connected to the arc-shaped plate (3).
5. The air inlet structure of a water ring pump for a CVD coating furnace according to claim 2, characterized in that: Insertion slots are provided on the inner walls at both ends of the second guard plate (12), and the size of the insertion plate (13) is adapted to the size of the insertion slots.
6. The air inlet structure of a CVD coating furnace water ring pump according to claim 2, characterized in that: A through hole is provided on one side of the buckle plate (14), and the limiting protrusion (16) passes through the through hole.