Prefabricated ultrapure water terminal sampling header assembly and ultrapure water supply system

Abstract

The utility model relates to the technical field of ultrapure water monitoring, and discloses a prefabricated ultrapure water terminal sampling header assembly and an ultrapure water supply system, the prefabricated ultrapure water terminal sampling header assembly comprises an on-line monitoring pipeline and a plurality of sampling pipelines, the two ends of the on-line monitoring pipeline are respectively provided with a detachable interface, and the sampling pipelines are connected with the on-line monitoring pipeline. The plurality of sampling pipelines are sequentially connected to the online monitoring pipeline at intervals; and the tail ends of at least part of the sampling pipelines are connected with a parameter monitoring instrument. According to the prefabricated ultra-pure water terminal sampling header assembly, the on-line monitoring pipeline and the sampling pipelines are prefabricated and assembled together in advance to form a modular structure, and the modular structure is detachably assembled on a same-pass water supply and return loop through the detachable interfaces on site, so that further pollution of ultra-pure water caused by site construction can be avoided; the monitoring accuracy is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of ultrapure water monitoring, in particular to a prefabricated ultrapure water terminal sampling manifold component and an ultrapure water supply system. Background Art

[0002] With the development of the electronics and semiconductor industries, ultrapure water plays an increasingly important role in chip manufacturing, and the quality requirements for ultrapure water are becoming increasingly stringent.

[0003] When it comes to ultrapure water quality for VLSI (Very Large Scale Integrated Circuit) applications, priority water quality indicators include resistivity, particulates, TOC (total organic carbon), bacteria, soluble silicon, heavy metals, and dissolved oxygen (DO). These factors significantly impact semiconductor device production. During IC chip manufacturing, the more ions contained in the medium in contact with the silicon wafer, the greater the impact on product yield. The ion concentration in ultrapure water can be characterized by resistivity. Particle count is also a measure of ultrapure water purity. If impurities or particulates are present in the cleaning water during the IC photolithography process, this can lead to uneven gate oxide film thickness and defects in the product pattern. Excessive particle content in the immersion liquid can also cause exposure defects. Trace amounts of organic matter in ultrapure water can affect the dielectric strength and withstand voltage of the gate oxide film. The impact of bacteria in ultrapure water is similar to that of TOC and particulates, primarily because bacterial growth in the system becomes a source of organic matter and particulates. Dissolved oxygen in ultrapure water accelerates oxidation reactions on the silicon wafer surface, causing premature oxide film formation.

[0004] Ultrapure water used in machines that require extremely stringent water quality requirements is usually produced by a remote ultrapure water system and then distributed to each machine's water use point through a co-flowing water supply and return loop (hereinafter referred to as "LOOP"). In order to ensure the safety of the ultrapure water quality supplied, relevant water quality indicators are usually monitored online at the LOOP end, mainly resistivity, particles, TOC (total organic carbon), silicon, boron, DO (dissolved oxygen), etc. The impurities contained in the ultrapure water are at the trace level, usually only at the ppb level (1 / 10 9 ), even PPT level (1 / 10 12 Online monitoring sampling should be kept in a highly clean state. During the sampling and monitoring process, even extremely slight secondary contamination may cause significant deviations in the online monitoring results.

[0005] The design, construction, and commissioning of ultrapure water sampling and monitoring pipelines present numerous specialized technical requirements. In specific projects, online monitoring deviations and system contamination caused by improper design, construction, and commissioning are common within the industry, particularly in advanced semiconductor processes where ultrapure water quality requirements are extremely high.

[0006] To ensure the stability of ultrapure water quality indicators and the accuracy of online sampling monitoring, the LOOP end online monitoring pipeline adopts an uninterrupted circulation state. Currently, the more commonly used sampling technology routes are as follows:

[0007] The first technical approach involves installing a sampling port on the LOOP main pipe. This approach is more suitable for smaller ultrapure water systems. However, for larger systems, the LOOP main pipe diameter is large, and the PVDF-HP sampling tubing used is expensive. Consequently, the material and construction costs of the sampling piping are substantial. Therefore, the first technical approach is not cost-effective for larger systems.

[0008] At present, the size of ultrapure water systems for advanced semiconductor processes is generally large. There are very few ultrapure water systems with a scale below 10m3 / hr, and even fewer with a LOOP main pipe diameter close to DN25.

[0009] In large-scale ultrapure water system engineering projects, the inappropriate use of the first technical route for design and implementation, resulting in significant cost waste, is common in the industry.

[0010] Since 2021, the price of PVDF-HP materials has skyrocketed, significantly increasing the investment costs of ultrapure water polishing systems and LOOP systems. The EU's stricter controls and bans on perfluoroalkyl and polyfluoroalkyl substances are gradually being implemented, potentially exacerbating the supply shortage of PVDF-HP. PVDF-HP prices are likely to remain high for an extended period. The cost burden of PVDF-HP materials is becoming a crucial consideration in the investment and construction of ultrapure water systems for advanced semiconductor manufacturing. Therefore, the proper design and use of PVDF-HP materials must be prioritized to avoid unnecessary waste.

[0011] The second technical approach involves extending a dedicated online monitoring line from the LOOP main pipeline. This line maintains a circulating state, typically circulating back to the pure water tank. A sampling line is installed on this line. For the typical five to six online monitoring indicators, a DN25 main diameter is sufficient. This second technical approach is suitable for ultrapure water systems of all sizes and is particularly cost-effective for large-scale systems.

[0012] This patent adopts the second technical route which has wider applicability and higher cost advantage.

[0013] During project implementation, due to the high level of specialized technical requirements, sampling pipeline design errors, construction errors, construction contamination, and commissioning contamination often occur. This is particularly true in advanced semiconductor ultrapure water system projects, where high ultrapure water quality is crucial. Problems caused by improper design, construction, and commissioning are particularly prominent.

[0014] In addition, due to the technical particularity, complexity and high quality requirements, the design and construction of the sampling pipeline requires more energy, the process is time-consuming and labor-intensive, and it is not easy to ensure quality. Utility Model Content

[0015] The utility model discloses a prefabricated ultrapure water terminal sampling manifold assembly and an ultrapure water supply system, which are used to avoid further contamination of ultrapure water caused by on-site construction by prefabricating the ultrapure water terminal sampling manifold assembly in advance, thereby improving monitoring accuracy.

[0016] In order to achieve the above-mentioned purpose, the present invention provides the following technical solutions:

[0017] In a first aspect, a prefabricated ultrapure water terminal sampling manifold assembly is provided, which includes: an online monitoring pipeline and multiple sampling pipelines, wherein both ends of the online monitoring pipeline are respectively provided with detachable interfaces, and the multiple sampling pipelines are sequentially connected to the online monitoring pipeline at intervals; at least some of the ends of the sampling pipelines are connected to parameter monitoring instruments.

[0018] The prefabricated ultrapure water terminal sampling manifold assembly is prefabricated and assembled with the online monitoring pipeline and multiple sampling pipelines to form a modular structure. This modular assembly can be removably assembled on-site into the same supply and return water loop via detachable connectors. This prevents further contamination of the ultrapure water during on-site construction and improves monitoring accuracy. The ultrapure water to be monitored enters the online monitoring pipeline through the detachable connector at the water inlet. The ultrapure water in the online monitoring pipeline is then discharged into the sampling pipeline. Parameter monitoring instruments can be used to monitor the ultrapure water samples in the corresponding sampling pipelines.

[0019] Optionally, the parameter monitoring instrument includes a particle monitoring instrument, and the particle index monitoring instrument is located in the first upstream sampling pipeline.

[0020] Optionally, the parameter monitoring instrument further includes a dissolved oxygen monitoring instrument, and the dissolved oxygen monitoring instrument is located at the end of the first sampling pipeline downstream of the particle monitoring instrument.

[0021] Optionally, the parameter monitoring instrument also includes a resistivity monitoring instrument, a total organic carbon monitoring instrument, a silicon monitoring instrument and a boron monitoring instrument; the resistivity monitoring instrument, the total organic carbon monitoring instrument, the silicon monitoring instrument and the boron monitoring instrument are located in sequence at the end of the sampling pipeline downstream of the particle monitoring instrument.

[0022] Optionally, the online monitoring pipeline has monitoring branches corresponding one to one with the sampling pipeline, and the monitoring branches are provided with control valves. The distance between the center of each control valve and the online monitoring pipeline is less than or equal to 3 times the outer diameter of the sampling pipeline.

[0023] Optionally, the material of the online monitoring pipeline and the material of the monitoring branch are both high-purity polyvinylidene fluoride, and the monitoring branch is welded to the online monitoring pipeline by infrared heat melting.

[0024] Optionally, the control valve is a diaphragm valve.

[0025] Optionally, when the parameter monitoring instrument includes a dissolved oxygen monitoring instrument, the sampling pipeline and control valve corresponding to the dissolved oxygen monitoring instrument are both made of stainless steel.

[0026] Optionally, when the parameter monitoring instrument includes a particle monitoring instrument, a resistivity monitoring instrument, a total organic carbon monitoring instrument, a silicon monitoring instrument and a boron monitoring instrument, the sampling pipelines corresponding to the particle monitoring instrument, the resistivity monitoring instrument, the total organic carbon monitoring instrument, the silicon monitoring instrument and the boron monitoring instrument all use perfluoroalkoxy resin (PFA) hoses.

[0027] Optionally, the plurality of sampling pipelines are located on the same side of the online monitoring pipeline.

[0028] Optionally, ends of some of the sampling pipelines are not connected to parameter monitoring instruments; the sampling pipelines not connected to parameter monitoring instruments are all located downstream of the online monitoring pipelines connected to the parameter monitoring instruments.

[0029] Optionally, the online monitoring pipeline includes a plurality of segments that are detachably connected in sequence; in at least some of the segments, each segment is connected to at least one of the sampling pipelines.

[0030] In the second aspect, an ultrapure water supply system is provided, which includes: a same-process supply and return water loop and a prefabricated ultrapure water terminal sampling manifold assembly described in any of the above technical solutions, the detachable interface at the inlet end of the online monitoring pipeline is connected to the same-process supply and return water loop, and the outer diameter of the online monitoring pipeline is smaller than the outer diameter of the same-process supply and return water loop.

[0031] The advantages of the ultrapure water supply system and the prefabricated ultrapure water terminal sampling manifold assembly described above over the prior art are the same and will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 A schematic diagram of a prefabricated ultrapure water terminal sampling manifold assembly provided in an embodiment of the present application;

[0033] Figure 2 A schematic diagram of an ultrapure water supply system provided in an embodiment of the present application;

[0034] Figure 3 express Figure 1 A variation of the prefabricated ultrapure water terminal sampling manifold assembly shown. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0036] The following first introduces the application scenario of the prefabricated ultrapure water terminal sampling manifold assembly provided in the embodiment of the present application, please refer to Figure 1 Driven by the pump 500, the ultrapure water in the pure water tank 100 enters the polishing system 200 for polishing the ultrapure water. The polished water enters the prefabricated ultrapure water terminal sampling manifold assembly 300 in one way and enters the ultrapure water use point 400 in the other way. The return water after the prefabricated ultrapure water terminal sampling manifold assembly 30 monitors various indicators and the return water from the ultrapure water use point 400 flows back to the pure water tank 100.

[0037] Combine Figure 2 and Figure 3 The prefabricated ultrapure water terminal sampling manifold assembly provided in an embodiment of the present application includes: an online monitoring pipeline 10 and multiple sampling pipelines 24, and detachable interfaces (refer to T1 and T2) are respectively provided at both ends of the online monitoring pipeline 10. The multiple sampling pipelines 24 are connected to the online monitoring pipeline 10 in sequence and at intervals; the ends of at least some of the sampling pipelines 24 are connected to parameter monitoring instruments 30.

[0038] The prefabricated ultrapure water terminal sampling manifold assembly is prefabricated with an online monitoring line 10 and multiple sampling lines 24 to form a modular structure. This assembly can be removably assembled on-site into the same supply and return water loop via removable interfaces (see T1 and T2). This prevents further contamination of the ultrapure water due to on-site construction and improves monitoring accuracy. The ultrapure water to be monitored enters the online monitoring line 10 through the removable interface T1 at the water inlet. The ultrapure water in the online monitoring line 10 is then discharged into the sampling line 24. The parameter monitoring instrument 30 can be used to monitor the ultrapure water samples in the corresponding sampling line 24.

[0039] Among them, the detachable interface T1 is located at the water inlet of the online monitoring pipeline 10, and can be detachably connected to the pipeline outlet leading out of the polishing system 200; the detachable interface T2 is located at the return water outlet of the online monitoring pipeline 10, and can be detachably connected to a section of the return water pipeline connected to the pure water tank 100.

[0040] In the above, only the prefabricated ultrapure water terminal sampling manifold assembly with the highest technical requirements and the most complexity in the sampling pipeline is selected for prefabrication, standardization and commercialization, without prefabrication, standardization and commercialization of the entire sampling pipeline as a whole.

[0041] The reasons are as follows: First, the sampling manifold (prefabricated ultrapure water terminal sampling manifold assembly) is the core part of the sampling pipeline, and has the most value in prefabrication, standardization and productization; second, the sampling manifold part (prefabricated ultrapure water terminal sampling manifold assembly) is the part with the strongest commonality in different engineering projects. The sampling manifold parts in different engineering projects are similar, while other parts of the sampling pipeline are quite different and difficult to unify; third, the sampling manifold part (prefabricated ultrapure water terminal sampling manifold assembly) is cut out separately and becomes an independent unit. After prefabrication, standardization and productization, its size is smaller, the feasibility is stronger, and the routing direction of each interface is also clearer, while other parts of the sampling pipeline do not have this feature.

[0042] At the outset of a specific ultrapure water project, terminal sampling manifolds can be prefabricated in accordance with the principles of this patent and then installed into the on-site ultrapure water terminal sampling pipeline. Alternatively, multiple sampling manifolds can be prefabricated in batches, sealed and stored in a clean environment, and then installed as each project progresses. This approach not only helps minimize project costs and schedules, but also ensures the accuracy of design and implementation, reducing design errors, improper implementation, and secondary contamination.

[0043] In one specific embodiment, the parameter monitoring instrument 30 includes a particle monitoring instrument a, and a particle index monitoring instrument is located in the first upstream sampling line 24. Because particles can experience significant fluctuations in monitored values ​​when subjected to even minor disturbances—for example, when the pipeline experiences slight vibrations—ultrafine particles or bubbles adhering to the pipe wall can instantly break free and enter the particle monitoring instrument, causing a momentary, concentrated impact on the particle index. Placing the particle monitoring instrument a in the first upstream sampling line 24 can reduce contamination caused by water flow, thereby improving the accuracy of particle index monitoring. Furthermore, the entire sampling and monitoring pipeline must be securely and reliably installed, and the particle surface sampling tube should be positioned away from vibration sources to minimize the impact of vibration on particle monitoring.

[0044] In one specific embodiment, parameter monitoring instrument 30 also includes a dissolved oxygen monitoring instrument b, located at the end of the first sampling line 24 downstream of particle monitoring instrument a. Dissolved oxygen monitoring instrument b is susceptible to pipeline gas seepage and vibration. However, pipeline gas seepage is unavoidable. Therefore, the dissolved oxygen monitoring instrument b is positioned as far upstream as possible to minimize the number of upstream interfaces and reduce the risk of gas seepage.

[0045] In a specific embodiment, the parameter monitoring instrument 30 also includes a resistivity monitoring instrument c, a total organic carbon monitoring instrument d, a silicon monitoring instrument e, and a boron monitoring instrument f; the resistivity monitoring instrument c, the total organic carbon monitoring instrument d, the silicon monitoring instrument e, and the boron monitoring instrument f are sequentially located at the end of the sampling pipeline 24 downstream of the particle monitoring instrument a. When the resistivity indicator is impacted by carbon dioxide, it deteriorates rapidly. Placing the resistivity monitoring instrument c in the front can reduce the number of front-end interfaces, and the risk of carbon dioxide infiltration interference is lower. Total organic carbon is relatively less affected by gas permeation and vibration, and can be monitored after resistivity. Silicon and boron are least affected by gas permeation and vibration, so they can be monitored at the end. The silicon and boron indicators are placed 5th and 6th in the monitoring order, mainly considering the detection principle characteristics of the silicon and boron indicators, which are less affected by gas permeation and vibration.

[0046] However, it should be understood that the above ranking is not absolute. When the stringency of certain water quality indicators changes, they can be re-ranked according to the new stringency.

[0047] In a specific embodiment, the online monitoring pipeline 10 has a monitoring branch 21 corresponding one-to-one to the sampling pipeline 24. The monitoring branch 21 is provided with a control valve 22. The center distance of each control valve 22 from the online monitoring pipeline 10 is less than or equal to 3 times the outer diameter of the monitoring branch 21, so as to be as close to the root of the monitoring branch 21 as possible, thereby alleviating the problem of dead water easily forming in front of the control valve 22 when the control valve 22 is closed.

[0048] The online monitoring line 10 and monitoring branch 21 can be constructed of high-purity polyvinylidene fluoride (PVDF-HP). These two lines can be welded together using infrared heat-melt welding. The weld quality must be controlled, and excessively high weld bosses should be avoided. PVDF-HP offers a smooth, even surface, chemical stability, corrosion resistance, ease of cleaning, and disinfection, along with minimal chemical release. This material is less susceptible to secondary contamination and minimizes interference with monitoring indicators such as particle size, resistivity, TOC, silicon, and boron, preventing monitoring deviations.

[0049] In a specific embodiment, the control valve 22 is a diaphragm valve. The use of a diaphragm valve is also conducive to accurately adjusting the sampling flow rate and is less likely to retain dead water compared to a ball valve.

[0050] In a specific embodiment, when the parameter monitoring instrument 30 includes a dissolved oxygen monitoring instrument b, the sampling line 24 and control valve 22 corresponding to the dissolved oxygen monitoring instrument b are both made of stainless steel. For example, the sampling line 24 can be made of SS316 polished bundled tubes, rather than pipes and perfluoroalkoxy resin (PFA) hoses, to prevent fine bubbles from adhering to PVDF-HP pipes and PFA hoses and gradually releasing them, thereby interfering with the dissolved oxygen monitoring indicators and causing dissolved oxygen monitoring deviations. The above-mentioned stainless steel pipeline is welded using an argon arc welder, such as automatic argon arc welding, to control the welding quality and ensure that the weld is double-sided to avoid excessively high protrusions or excessively deep depressions.

[0051] In a specific embodiment, when the parameter monitoring instrument 30 includes a particle monitoring instrument a, a resistivity monitoring instrument c, a total organic carbon monitoring instrument d, a silicon monitoring instrument e, and a boron monitoring instrument f, the sampling lines 24 corresponding to the particle monitoring instrument a, the resistivity monitoring instrument c, the total organic carbon monitoring instrument d, the silicon monitoring instrument e, and the boron monitoring instrument f all use PFA hoses. The PFA hose has a smooth and flat surface, is chemically stable, corrosion-resistant, easy to clean, easy to disinfect, and has extremely low chemical component dissolution. Therefore, the PFA hose is not prone to secondary contamination, has low interference with monitoring indicators such as particles, resistivity, TOC, silicon, and boron, and is not likely to cause instrument monitoring deviations. However, stainless steel is less flat than PVDF-HP, and the dissolution of ions in stainless steel can easily affect the resistivity of ultrapure water.

[0052] The interface between the control valve 22 corresponding to the dissolved oxygen monitoring instrument b and the monitoring branch 21 can be a flange or a sanitary clamp (Tri-Clamp), and the monitoring branch 21 and the sampling line 24 can also be connected by a flange or a sanitary clamp (Tri-Clamp). The sampling line 24 is connected to the dissolved oxygen monitoring instrument b by a non-threaded, well-sealed, and low-risk method such as a VCR (Vacuum Coupling Radius Seal). When the parameter monitoring instrument 30 includes a particle monitoring instrument a, a resistivity monitoring instrument c, a total organic carbon monitoring instrument d, a silicon monitoring instrument e, and a boron monitoring instrument f, the interface of the parameter monitoring instrument 30 can use a non-threaded dedicated conversion connector. The above interfaces use non-threaded ports, and raw tape is prohibited to avoid contamination caused by dead water and permeated gas in the thread ports. The dissolved oxygen index of the ultrapure water supply for advanced semiconductor processes is often required to be less than 5ppb, or even more stringent, and even reach 1ppb. If threaded connections are used, even the slightest amount of air leakage can cause an increase in dissolved oxygen readings, leading to a greater risk of monitoring deviation. The raw tape will gradually release and precipitate tiny particles, which can easily cause stagnant water in contact areas, negatively impacting water quality indicators, particularly particle indicators. These measures can minimize the impact of stagnant water, reduce the risk of bacterial growth, and ensure accurate and reliable monitoring.

[0053] In a specific embodiment, the plurality of sampling pipelines 24 are all located on the same side of the online monitoring pipeline 10 to avoid occupying the space on the other side and to achieve a higher level of integration.

[0054] In a specific embodiment, the ends of some sampling pipelines 24 are not connected to the parameter monitoring instrument 30; the sampling pipelines 24 that are not connected to the parameter monitoring instrument 30 are all located downstream of the sampling pipeline 24 connected to the parameter monitoring instrument 30, which can avoid the tiny dead water area of ​​the spare sampling pipeline 24 (and the corresponding monitoring branch 21) from appearing upstream of the sampling pipeline 24 (and the corresponding monitoring branch 21) in use, avoiding the risk and interference of water quality monitoring in the downstream.

[0055] In one specific embodiment, the online monitoring pipeline 10 includes multiple segments 11 that are sequentially detachably connected. At least some of the segments 11 are each connected to at least one sampling pipeline 24. Because the segments 11 are detachably connected, the number of samples, the orientation of the monitoring branches 21, and the order of the monitoring branches 21 can be easily adjusted, providing greater flexibility.

[0056] In addition, in the online monitoring pipeline 10 , a first valve P1 is provided upstream of the first monitoring branch 21 , and a second valve P2 is provided downstream of the last monitoring branch 21 , for controlling the flow of ultrapure water into and out of the online monitoring pipeline 10 .

[0057] The calibers of the various pipelines may be as follows, but it should be understood that the following caliber data are merely exemplary and do not constitute a limitation on the scope of protection.

[0058] The diameter of the online monitoring pipeline 10 can be DN25, and the diameter of the monitoring branch 21 can be DN15. This is primarily determined through calculation based on the sampling flow rate, the total water inflow and return flow of the online monitoring pipeline 10, and the required pipeline flow rate. Larger pipeline diameters are not necessarily better. If the diameter is too large, the water flow rate will be too low, and the flushing and replacement of stagnant water may be insufficient, resulting in negative effects.

[0059] The caliber of the interface of the sampling line 24 corresponding to the parameter monitoring instrument 30 can be 1 / 4", because the instrument sampling flow requirement and the caliber of the instrument interface are usually designed to be 1 / 4".

[0060] The number of monitoring branches 21 can be greater than the number of parameter monitoring instruments 30 to reserve a certain number of spare monitoring branches 21. For example, if there are eight monitoring branches 21, six of them will be equipped with parameter monitoring instruments 30, and two will be spare. The number of spare monitoring branches 21 should not be too large, otherwise, dead water areas will increase, and the risks to water quality and monitoring indicators will also increase.

[0061] The materials used, tools used in the construction, and the construction environment of the prefabricated ultrapure water terminal sampling manifold assembly must be strictly oil-free to avoid oil pollution. The prefabrication and construction must be carried out in a dedicated clean booth, which can be equipped with a fan filter unit (FFU).

[0062] After the prefabricated ultrapure water terminal sampling manifold assembly is prefabricated, all interfaces are tightly sealed in the clean room to prevent particles and other contaminants from entering the sampling manifold. Do not open the clean seals until the sampling manifold is installed in the sampling pipeline.

[0063] The prefabricated ultrapure water terminal sampling manifold assembly consolidates complex and extensive design and practical experience, saving design time, ensuring design accuracy, and reducing design errors. This standardized, prefabricated product meets stringent professional construction requirements, eliminating the need for re-construction for each project. This reduces construction time and project duration, and reduces the risk of secondary contamination within the prefabricated ultrapure water terminal sampling manifold assembly. By adopting a technical approach with a high overall cost advantage, it avoids inappropriate technical route selection and unnecessary cost overload.

[0064] Based on the same utility model concept, an embodiment of the present application further provides an ultrapure water supply system, comprising: a co-flowing supply and return water loop and a prefabricated ultrapure water terminal sampling manifold assembly according to any of the above technical solutions; a detachable interface (see P1 and P2) at the inlet end of an online monitoring pipeline 10 connected to the co-flowing supply and return water loop, and an outer diameter of the online monitoring pipeline 10 is smaller than that of the co-flowing supply and return water loop. The beneficial effects of the ultrapure water supply system can be referenced in the relevant description of the prefabricated ultrapure water terminal sampling manifold assembly.

[0065] Obviously, those skilled in the art may make various changes and modifications to the embodiments of the present invention without departing from the spirit and scope of the present invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is intended to include such modifications and variations.

Claims

1. A prefabricated ultrapure water terminal sampling manifold assembly, characterized in that: include: An online monitoring pipeline and multiple sampling pipelines, wherein both ends of the online monitoring pipeline are respectively provided with detachable interfaces, and the multiple sampling pipelines are sequentially and spaced apart from each other and connected to the online monitoring pipeline; At least some of the ends of the sampling pipelines are connected to parameter monitoring instruments.

2. The prefabricated ultrapure water terminal sampling manifold assembly according to claim 1, characterized in that: The parameter monitoring instrument includes a particle monitoring instrument, and the particle monitoring instrument is located in the first upstream sampling pipeline.

3. The prefabricated ultrapure water terminal sampling manifold assembly according to claim 2, characterized in that: The parameter monitoring instrument further includes a dissolved oxygen monitoring instrument, which is located at the end of the first sampling pipeline downstream of the particle monitoring instrument.

4. The prefabricated ultrapure water terminal sampling manifold assembly according to claim 3, characterized in that: The parameter monitoring instruments also include resistivity monitoring instruments, total organic carbon monitoring instruments, silicon monitoring instruments and boron monitoring instruments; The resistivity monitoring instrument, the total organic carbon monitoring instrument, the silicon monitoring instrument, and the boron monitoring instrument are sequentially located at the end of the sampling pipeline downstream of the particle monitoring instrument.

5. The prefabricated ultrapure water terminal sampling manifold assembly according to claim 1, characterized in that: The online monitoring pipeline has monitoring branches corresponding one to one with the sampling pipeline. The monitoring branches are provided with control valves. The distance between the center of each control valve and the online monitoring pipeline is less than or equal to 3 times the outer diameter of the monitoring branch pipeline.

6. The prefabricated ultrapure water terminal sampling manifold assembly according to claim 5, characterized in that: The material of the online monitoring pipeline and the material of the monitoring branch are both high-purity polyvinylidene fluoride (PVDF-HP), and the monitoring branch is welded to the online monitoring pipeline by infrared heat welding; or, The control valve is a diaphragm valve; or, When the parameter monitoring instrument includes a dissolved oxygen monitoring instrument, the sampling pipeline and control valve corresponding to the dissolved oxygen monitoring instrument are made of stainless steel; or, When the parameter monitoring instrument includes a particle monitoring instrument, a resistivity monitoring instrument, a total organic carbon monitoring instrument, a silicon monitoring instrument and a boron monitoring instrument, the sampling pipelines corresponding to the particle monitoring instrument, the resistivity monitoring instrument, the total organic carbon monitoring instrument, the silicon monitoring instrument and the boron monitoring instrument are all made of perfluoroalkoxy resin (PFA) hose material.

7. The prefabricated ultrapure water terminal sampling manifold assembly according to any one of claims 1 to 6, characterized in that: The plurality of sampling pipelines are all located on the same side of the online monitoring pipeline.

8. The prefabricated ultrapure water terminal sampling manifold assembly according to any one of claims 1 to 6, characterized in that: The ends of some of the sampling lines are not connected to parameter monitoring instruments; The sampling pipelines not connected to the parameter monitoring instrument are all located downstream of the online monitoring pipelines connected to the parameter monitoring instrument.

9. The prefabricated ultrapure water terminal sampling manifold assembly according to any one of claims 1 to 6, characterized in that: The online monitoring pipeline comprises a plurality of segments that are detachably connected in sequence; In at least some of the segments, each segment is connected to at least one sampling pipeline.

10. An ultrapure water supply system, characterized in that: include: The same-process supply and return water loop and the prefabricated ultrapure water terminal sampling manifold assembly as described in any one of claims 1 to 9, the detachable interface at the inlet end of the online monitoring pipeline is connected to the same-process supply and return water loop, and the outer diameter of the online monitoring pipeline is smaller than the outer diameter of the same-process supply and return water loop.

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