High-pressure cleaning device

Abstract

The utility model discloses a high-pressure cleaning device which comprises a main frame, a motor, a high-pressure pump and a gas-liquid mixing device, the gas-liquid mixing device is arranged on the main frame, the motor is connected with the high-pressure pump, the high-pressure cleaning device further comprises a motor supporting plate, and the motor and the high-pressure pump are installed on the motor supporting plate. The motor has the advantages of simple structure, small occupied space, convenience in motor installation, replacement and maintenance and the like.

Description

Technical Field

[0001] The utility model relates to the technical field of substrate cleaning, in particular to a high-pressure cleaning device. Background Art

[0002] In the LCD panel and semiconductor production industries, different cleaning methods are used to clean impurities from the substrate surface. Currently, commonly used cleaning methods include ultraviolet cleaning, brush and roller brush cleaning, two-fluid cleaning, ultra-high pressure jet cleaning, and ultrapure water cleaning. Different cleaning methods have different effects on particles with different characteristics.

[0003] Among them, ultra-high pressure jet cleaning cleans the surface of the substrate by a fluid sprayed at high pressure, which can clean micron-sized particles and has a very good cleaning effect for particles of 1 to 5 microns. CN2020107459112 discloses an ultra-high pressure cleaning device, including: a supply pipe; a gas-liquid membrane tube, the two ends of which are connected to different parts of the supply pipe, and the gas-liquid membrane tube also has a vent end, which is connected to a carbon dioxide access pipe; a plunger pump, which is connected to the outlet of the supply pipe and driven by a motor; a filter tank, which is connected to the outlet of the plunger pump; and a discharge pipe, which is connected to the liquid outlet of the filter tank. After being pressurized by the plunger pump and filtered by the filter tank, the cleaning liquid is atomized at ultra-high pressure, which refines the liquid molecules, improves the removal rate of small-size particles, and improves the cleaning effect of the product. Carbon dioxide is dissolved in the cleaning liquid through the gas-liquid membrane tube, and the dissociated hydrogen ions and bicarbonate ions suppress the static electricity generated in the cleaning liquid, thereby reducing the partial dissolution of the metal wire or film on the substrate surface caused by the electrostatic current.

[0004] In the prior art, the motor, plunger pump, gas-liquid membrane tube and filter tank of the ultra-high pressure cleaning device are integrally installed in the middle of the main frame. When the motor needs to be repaired or replaced in the later stage, it is troublesome to replace the motor due to its heavy weight. It is laborious to move the motor and the plunger pump out of the main frame or lift them in. Since the motor, plunger pump, gas-liquid membrane tube and filter tank are integrally installed in the middle of the main frame, the motor and the plunger pump are integrally installed in the middle of the main frame. Figure 1-Figure 3 It can be seen that the motor, plunger pump, filter, etc. are basically installed on the same plane along the horizontal direction. When the motor and plunger pump are moved out and lifted in, they are likely to hit other components and cause damage to other components. In addition, the overall length of this device is long, which makes the overall length of the main frame long and occupies a large area. Utility Model Content

[0005] The purpose of the utility model is to solve the above-mentioned deficiencies in the prior art and to provide a high-pressure cleaning device with a simple structure, small space occupation, and convenient motor installation, replacement, and maintenance.

[0006] The technical solution adopted by the utility model to solve its technical problems is:

[0007] A high-pressure cleaning device includes a main frame, a motor, a high-pressure pump and a gas-liquid mixing device, wherein the gas-liquid mixing device is arranged on the main frame, and the motor and the high-pressure pump are connected. The device is characterized in that it also includes a motor support plate, and the motor and the high-pressure pump are mounted on the motor support plate; the motor and the high-pressure pump are installed separately, and when they need to be replaced or repaired, there is no need to inspect or lift them on the main frame, the operation is convenient, and other components on the main frame will not be affected.

[0008] The main frame of the utility model includes a left vertical support frame, a right vertical support frame and a middle support frame, the left vertical support frame and the right vertical support frame are arranged opposite to each other on the left and right sides, the middle support frame is arranged between the left vertical support frame and the right vertical support frame, the left end of the middle support frame is connected to the left vertical support frame, and the right end is connected to the right vertical support frame;

[0009] A motor accommodating cavity is formed between the left vertical support frame and the right vertical support frame below the middle support frame, and the motor support plate and the motor and high-pressure pump on the motor support plate are arranged in the motor accommodating cavity; the structure of the main frame is arranged so that the motor, the high-pressure pump and the motor support plate can be placed in the motor accommodating cavity, which has a compact structure and saves space. At the same time, there is no need to use lifting tools such as forklifts to lift the motor and the high-pressure pump.

[0010] The bottom of the motor support plate of the utility model is equipped with casters; when the motor is replaced or maintained, it can be smoothly dragged out, and the operation is convenient.

[0011] The bottom of the motor support plate of the utility model is equipped with telescopic legs to ensure the stability of the placement of the motor support plate.

[0012] The motor support plate of the utility model is detachably connected to the main frame, which can ensure the stability of the motor support plate after being pushed into the motor accommodating cavity, and can also be smoothly dragged out when the motor needs to be replaced or repaired.

[0013] The utility model provides a connecting plate between the motor supporting plate and the main frame, one end of the connecting plate is bolted to the motor supporting plate, and the other end is bolted to the main frame; the installation and disassembly are convenient.

[0014] The utility model is provided with a plurality of connecting plates to further ensure the stability of the connection.

[0015] The pump water inlet connecting pipe of the high-pressure pump of the utility model is detachably connected to the gas-liquid mixed water outlet pipeline, and the pump water outlet connecting pipe of the high-pressure pump is detachably connected to the high-pressure water outlet pipeline; so that when the motor and the high-pressure pump need to be replaced or maintained, the pipeline can be disassembled, and the motor and the high-pressure pump can be easily dragged out through the motor support plate.

[0016] The high-pressure pump of the utility model is further provided with a pump pressure relief connecting pipe, and the pump pressure relief connecting pipe is detachably connected to the pressure relief pipeline.

[0017] The utility model provides a lower liquid receiving pan fixed on the motor supporting plate; and an upper liquid receiving pan fixed on the main frame, which is used for receiving leaked liquid.

[0018] The beneficial effects of the utility model are as follows: the motor and the high-pressure pump are installed separately, and when they need to be replaced or repaired, there is no need to inspect or lift them on the main frame, which is easy to operate; the structural arrangement of the main frame allows the motor, the high-pressure pump and the motor tray to be placed in the motor accommodating cavity, which is compact and saves space; the arrangement of the casters and telescopic legs at the bottom of the motor tray makes it convenient to drag out the motor tray and ensure its stability during use; the motor tray is detachably connected to the main frame, which ensures the stability of the motor tray after it is pushed into the motor accommodating cavity, and when the motor needs to be replaced or repaired, the motor tray can be smoothly dragged out. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the cabinet of the utility model.

[0020] Figure 2 This is a schematic diagram of the overall structure of the utility model (with the cabinet cover hidden).

[0021] Figure 3 This is the rear view of the overall structure of the utility model (with the cabinet cover hidden).

[0022] Figure 4 It is a schematic diagram of the matching structure of the motor and the motor support plate of the utility model.

[0023] Figure 5 It is a schematic diagram of the connection structure between the plunger pump and the pipeline of the utility model.

[0024] Figure 6 yes Figure 5 Enlarged view of point A in the middle.

[0025] Figure 7 This is a structural schematic diagram of the connection between the plunger pump and the pipeline of the utility model from another angle.

[0026] Figure 8 yes Figure 7 Enlarged view of point B in the middle.

[0027] Figure 9 It is a structural schematic diagram of the gas-liquid mixing device of the utility model.

[0028] Reference numerals: main frame 1, left vertical support frame 101, right vertical support frame 102, top connecting frame 103, middle support frame 104;

[0029] Motor support plate-2;

[0030] Casters-3;

[0031] Telescopic legs-4;

[0032] Motor-5;

[0033] Plunger pump-6;

[0034] Gas-liquid mixing device-7, water inlet-701, air inlet-702, water outlet-703, drain outlet-704, exhaust outlet-705;

[0035] filter-8;

[0036] Water inlet pipe-9;

[0037] Intake pipe-10;

[0038] Gas-liquid mixed water outlet pipeline-11;

[0039] High-pressure water outlet pipe-12;

[0040] Filter high pressure water outlet pipe-13;

[0041] Pump water inlet connecting pipe-1401, pump water outlet connecting pipe-1402, pump pressure relief connecting pipe-1403;

[0042] Pressure relief line-15;

[0043] Upper liquid tray drainage pipeline-1601, lower liquid tray drainage pipeline-1602;

[0044] Filter drain line-17;

[0045] Cabinet-18;

[0046] Connecting plate-19;

[0047] Upper liquid tray-2001, lower liquid tray-2002. DETAILED DESCRIPTION

[0048] The present invention will be described below with reference to the accompanying drawings and embodiments.

[0049] As shown in the accompanying drawings, a high-pressure cleaning device includes a main frame 1, a motor 5, a high-pressure pump, a gas-liquid mixing device 7 and a filter 8. The gas-liquid mixing device 7 and the filter 8 are arranged on the main frame 1. The motor 5 is connected to the high-pressure pump, and the motor is connected to the controller. In this embodiment, the high-pressure pump adopts a plunger pump 6. The upper end of the gas-liquid mixing device 7 is provided with a water inlet 701 and an air inlet 702, the lower end is provided with a water outlet 703, the top is provided with an exhaust port 705, the exhaust port 705 is installed with an exhaust valve, the bottom is provided with a drain port 704, the drain port 704 is installed with a Drain valve; The gas-liquid mixing device adopts an internal hollow columnar structure, the inner wall of which is an inverted frustum shape, the water inlet 701 and the air inlet 702 are arranged at the large-diameter end of the inverted frustum, and the water outlet 703 is arranged at the small-diameter end of the inverted frustum to achieve gas-liquid mixing. When used for the first time, open the exhaust valve to discharge the internal gas. During maintenance, open the drain valve to discharge the residual liquid. The gas-liquid mixing device is a prior art and will not be described in detail here. The exhaust valve and the drain valve can be manual valves or electric valves. When the electric valve is used, the exhaust valve and the drain valve are connected to the controller;

[0050] The high-pressure cleaning device also includes a water inlet pipe 9, an air inlet pipe 10, a gas-liquid mixed water outlet pipe 11, a high-pressure water outlet pipe 12, a filtered high-pressure water outlet pipe 13, a pressure relief pipe 15, and a filter drainage pipe 17. The water inlet pipe 9 is divided into two routes, one of which is connected to the water inlet 701 of the gas-liquid mixing device 7, and the other is directly connected to the gas-liquid mixed water outlet pipe 11. The air inlet pipe 10 is connected to the air inlet 702 of the gas-liquid mixing device 7. The water outlet 703 of the gas-liquid mixing device 7 is connected to the gas-liquid mixed water outlet pipeline 11, the water inlet end of the plunger pump 6 is connected to the end of the gas-liquid mixed water outlet pipeline 11 away from the water outlet 703 of the gas-liquid mixing device, the water outlet end of the plunger pump 6 is connected to the high-pressure water outlet pipeline 12, and the pressure relief end of the plunger pump 6 is connected to the pressure relief pipeline 15. A pressure relief valve and a pressure sensor are installed on the pressure relief pipeline 15, and the pressure relief valve and the pressure sensor are connected to the controller;

[0051] One end of the high-pressure water outlet pipe 12 away from the water outlet end of the plunger pump 6 is connected to the filter 8, and the filter 8 is connected to the filtered high-pressure water outlet pipe 13. The filter 8 is also connected to a filter drain pipe 17, and a drain valve is installed on the filter drain pipe. The drain valve can be a manual valve or an electric valve. When an electric valve is used, the drain valve is connected to the controller.

[0052] This embodiment is provided with a motor support plate 2, and the motor 5 and the plunger pump 6 are installed on the motor support plate 2; the motor 5 and the plunger pump 6 are installed separately, and when they need to be replaced or repaired, there is no need to inspect or lift them on the main frame, which is easy to operate and will not affect other components on the main frame.

[0053] The main frame 1 includes a left vertical support frame 101, a right vertical support frame 102, a middle support frame 104 and a top connecting frame 103. The left vertical support frame 101 and the right vertical support frame 102 are arranged opposite to each other on the left and right sides. The middle support frame 104 is arranged between the left vertical support frame 101 and the right vertical support frame 102. The left end of the middle support frame 104 is connected to the left vertical support frame 101, and the right end is connected to the right vertical support frame 102. The top connecting frame 103 is arranged above the middle support frame 104. The left end of the top connecting frame 103 is connected to the left vertical support frame 101, and the right end is connected to the right vertical support frame 102.

[0054] A motor accommodating cavity is formed below the middle support frame 104 between the left vertical support frame 101 and the right vertical support frame 102, and the motor tray 2 and the motor 5 and plunger pump 6 on the motor tray 2 are arranged in the motor accommodating cavity; the structure of the main frame 1 is arranged so that the motor 5, the plunger pump 6 and the motor tray 2 can be placed in the motor accommodating cavity, which has a compact structure and saves space. At the same time, there is no need to use lifting tools such as forklifts to lift the motor and high-pressure pump.

[0055] In this embodiment, the left vertical support frame 101, the right vertical support frame 102, the middle support frame 104 and the top connecting frame 103 adopt a rectangular frame structure, and can also be set as a plate structure as needed.

[0056] In this embodiment, the filter 8 is installed on the middle support frame 104, the gas-liquid mixing device 7 is arranged above the filter 8 and fixed on the main frame 1, and the motor 5 and the plunger pump 6 are arranged below the middle support frame 104. The structure is compact, reducing the overall length of the main frame 1.

[0057] The bottom of the motor support plate 2 is provided with casters 3; when the motor 5 is replaced or maintained, it can be smoothly dragged out, and the operation is convenient.

[0058] The bottom of the motor support plate 2 is installed with a telescopic support leg 4 to ensure the stability of the placement of the motor support plate 2. When in use, the operator extends the telescopic support leg and presses it against the ground. When the motor support plate needs to be dragged out, the telescopic support leg is retracted. The telescopic support leg structure is an existing technology and will not be described in detail here.

[0059] The motor support plate 2 is detachably connected to the main frame 1 , which can ensure the stability of the motor support plate 2 after being pushed into the motor accommodating cavity, and can also be smoothly dragged out when the motor needs to be replaced or repaired.

[0060] In this embodiment, a connecting plate 19 is provided between the motor support plate 2 and the main frame 1 . One end of the connecting plate 19 is bolted to the motor support plate 2 , and the other end is bolted to the main frame 1 ; the connection plate 19 is easy to install and disassemble.

[0061] There are several connecting plates 19 to further ensure the stability of the connection.

[0062] In this embodiment, the length of the motor support plate 2 is smaller than the distance between the left vertical support frame 101 and the right vertical support frame 102, so that the motor support plate 2 can be smoothly dragged out between the left vertical support frame 101 and the right vertical support frame 102, and then connected by a connecting plate 19. Connecting plates 19 are provided between the left side of the motor support plate 2 and the left vertical support frame 101, and between the right side of the motor support plate 2 and the right vertical support frame 102 to ensure the stability of the left and right connections.

[0063] The manner of fixing the motor support plate 2 to the main frame 1 is not limited to this, and fixation can also be achieved through snap-fitting of grooves and protrusions, plug-fitting of pins, and the like.

[0064] The pump water inlet connecting pipe 1401 of the plunger pump 6 is detachably connected to the gas-liquid mixed water outlet pipeline 11, and the pump water outlet connecting pipe 1402 of the plunger pump 6 is detachably connected to the high-pressure water outlet pipeline 12. The plunger pump is also provided with a pump pressure relief connecting pipe 1403, and the pump pressure relief connecting pipe 1403 is detachably connected to the pressure relief pipeline 15; so that when the motor 5 and the plunger pump 6 need to be replaced or maintained, the pipelines can be disassembled, making it convenient to drag the motor 5 and the plunger pump 6 out through the motor support plate 2.

[0065] In this embodiment, the pump water inlet connecting pipe 1401 and the gas-liquid mixed water outlet pipeline 11, the pump water outlet connecting pipe 1402 and the high-pressure water outlet pipeline 12, and the pump pressure relief connecting pipe 1403 and the pressure relief pipeline 15 are detachably connected through a compression fitting. The compression fitting structure is an existing technology and will not be described in detail here.

[0066] A lower liquid tray 2002 is fixed on the motor support plate 2; the lower liquid tray 2002 is located below the connection between the plunger pump and each pipeline, so that when the pipeline joint leaks, it can hold the leaked liquid.

[0067] The lower liquid tray 2002 is connected to the lower liquid tray drainage pipeline 1602, and a drainage valve is installed on the lower liquid tray drainage pipeline 1602.

[0068] The middle support frame 104 is fixed with a liquid tray 2001, which is connected to a liquid tray drainage pipe 1601. A drain valve is installed on the liquid tray drainage pipe 1601 so that when there is water leakage at the pipe joint, the leaked liquid can be collected.

[0069] In this embodiment, casters and telescopic legs are installed at the bottom of the main frame 1, so that the main frame 1 can also be moved as needed. The outer fixed cover of the main frame 1 forms a cabinet 18, and a cabinet door is provided on the cabinet 18. The cabinet door can be opened to drag out the motor support plate 2.

[0070] In this embodiment, the intake pipe 10 is equipped with a manual valve for adjusting the intake amount, a solenoid valve for controlling the switch, a pressure-stabilizing valve for adjusting the intake pressure to maintain stability, a pressure gauge for displaying the intake pressure, a pressure sensor for detecting the intake pressure, a filter, a flow meter for measuring the intake flow rate, and a check valve for preventing liquid backflow. The solenoid valve, the pressure-stabilizing valve, the pressure sensor, and the flow meter are respectively connected to the controller.

[0071] The water inlet pipe 9 is equipped with a solenoid valve for controlling the switch, a filter, and a flow meter for measuring the inlet flow rate. The solenoid valve and the flow meter are connected to the controller respectively.

[0072] A pressure sensor and a water resistance meter for measuring liquid resistivity are installed on the gas-liquid mixed water outlet pipeline 11 , and the pressure sensor and the water resistance meter are connected to the controller respectively.

[0073] In this embodiment, the controller may be a PLC controller.

[0074] When using this utility model:

[0075] 1. The controller controls the solenoid valves on the water inlet pipe 9 and the air inlet pipe 10 to open, and the water supply system supplies water to the water inlet pipe 9, and the air supply system supplies air to the air inlet pipe 10. Water enters the water inlet 701 of the gas-liquid mixing device 7 through the water inlet pipe 9, and directly enters the gas-liquid mixed water outlet pipe 11 through the other way. Carbon dioxide enters the air inlet 702 of the gas-liquid mixing device 7 through the air inlet pipe 10. After water and carbon dioxide are mixed in the gas-liquid mixing device 7, they enter the gas-liquid mixed water outlet pipe 11 through the water outlet 703. The gas-liquid mixed water outlet pipe 11 enters the plunger pump 6 driven by the motor for pressurization. The high-pressure water enters the filter 8 from the high-pressure water outlet pipe 12 for filtration, and then flows out from the filtered high-pressure water outlet pipe 13 and is transported to the nozzle to clean the substrate;

[0076] 2. If the motor 5 or plunger pump 6 needs to be replaced or maintained, the operator removes the ferrule joints connecting the pump water inlet pipe 1401 and the gas-liquid mixed water outlet pipe 11, the pump water outlet connecting pipe 1402 and the high-pressure water outlet pipe 12, and the pump pressure relief connecting pipe 1403 and the filtered high-pressure water outlet pipe 13, then removes the connecting plate 19 and retracts the telescopic legs 4 upward off the ground, pulls the motor support plate 2 and directly drags the motor support plate 2 and the motor 5 and plunger pump 6 thereon out;

[0077] 3. After the replacement or repair of the motor 5 and the plunger pump 6 is completed, the motor support plate 2 is pushed into the motor accommodating cavity under the middle support frame 104. The operator extends the telescopic legs 4 and presses them against the ground. The motor support plate 2 is connected to the main frame 1 through the connecting plate 19 to fix the position of the motor support plate 2. The pump water inlet pipe 1401 and the gas-liquid mixed water outlet pipe 11, the pump water outlet connecting pipe 1402 and the high-pressure water outlet pipe 12, and the pump pressure relief connecting pipe 1403 and the filtered high-pressure water outlet pipe 13 are connected through the compression fitting.

Claims

1. A high-pressure cleaning device, comprising a main frame, a motor, a high-pressure pump and a gas-liquid mixing device, wherein the gas-liquid mixing device is arranged on the main frame, and the motor and the high-pressure pump are connected, characterized in that: It also includes a motor support plate, the motor and the high-pressure pump are mounted on the motor support plate, and casters and telescopic legs are installed at the bottom of the motor support plate; The main frame includes a left vertical support frame, a right vertical support frame and a middle support frame, the left vertical support frame and the right vertical support frame are arranged opposite to each other on the left and right sides, the middle support frame is arranged between the left vertical support frame and the right vertical support frame, the left end of the middle support frame is connected to the left vertical support frame, and the right end is connected to the right vertical support frame; A motor accommodating cavity is formed below the middle support frame between the left vertical support frame and the right vertical support frame, and the motor support plate and the motor and high-pressure pump on the motor support plate are arranged in the motor accommodating cavity; The motor support plate is detachably connected to the main frame; The pump water inlet connecting pipe of the high-pressure pump is detachably connected to the gas-liquid mixed water outlet pipeline via a ferrule joint, and the pump water outlet connecting pipe of the high-pressure pump is detachably connected to the high-pressure water outlet pipeline via a ferrule joint.

2. A high-pressure cleaning device according to claim 1, characterized in that: A connecting plate is provided between the motor supporting plate and the main frame. One end of the connecting plate is bolted to the motor supporting plate, and the other end is bolted to the main frame.

3. A high-pressure cleaning device according to claim 2, characterized in that: There are several connecting plates.

4. A high-pressure cleaning device according to claim 1, 2 or 3, characterized in that: The high-pressure pump is also provided with a pump pressure relief connecting pipe, and the pump pressure relief connecting pipe is detachably connected to the pressure relief pipeline.

5. A high-pressure cleaning device according to claim 1, 2 or 3, characterized in that: A lower liquid tray is fixed on the motor support plate; and an upper liquid tray is fixed on the middle support frame.

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