MEMS (Micro Electro Mechanical System) micromirror packaging workbench capable of freely ascending and descending

Abstract

The utility model provides an MEMS micromirror packaging workbench capable of freely lifting, which comprises a mounting bottom frame and a connecting rotating shaft, a group of working plates used for packaging an MEMS micromirror are arranged at the upper end of the middle position of the mounting bottom frame, and a group of fixing seats used for supporting the lower end of an outer frame are arranged at the upper end of the rear side of each working plate. The beneficial effects of the utility model are that the transverse movement assembly, the up-down movement assembly and the front-back movement assembly are used to carry out transverse, up-down and front-back position adjustment on the packaging head, thereby satisfying MEMS micromirror packaging operation at different accurate positions; through cooperative use of the transverse moving assembly, the up-down moving assembly and the front-back moving assembly, the moving tracks of the first moving seat, the second moving seat and the third moving seat are kept through the first outer frame, the second outer frame and the third outer frame, so that precise moving of the packaging head is met, and the rotating direction of a clamping piece is adjusted through a connecting rotating shaft.

Description

Technical Field

[0001] The utility model belongs to the technical field of MEMS micromirror packaging, and relates to a MEMS micromirror packaging workbench which can be lifted and lowered freely. Background Art

[0002] The disadvantages of MEMS micromirror packaging in terms of inconvenience in flexible lifting and adjustment are mainly reflected in its structural and material limitations. The packaging of MEMS micromirrors often requires precise alignment and fixation on a tiny scale, which easily leads to error accumulation during the packaging process and limits the flexibility of the micromirror lifting and adjustment.

[0003] The reason for these shortcomings is that the physical size of MEMS micromirrors is extremely small, and the precision requirements of the packaging process are extremely high. Conventional coping methods include adopting more sophisticated packaging technologies, such as bonding technology, using packaging materials with low expansion coefficients, etc., to reduce the impact of temperature and mechanical stress on the micromirrors. However, the disadvantages of these methods are that they often increase manufacturing costs and complexity, and have higher requirements for the manufacturing environment and equipment, which may lead to reduced production efficiency and lower yield rates. Therefore, there is an urgent need for a freely liftable MEMS micromirror packaging workbench to solve the above problems. Utility Model Content

[0004] In view of the shortcomings of the existing technology, the purpose of the present invention is to provide a MEMS micromirror packaging workbench that can be freely lifted and lowered, so as to solve the problems raised in the above background technology.

[0005] The utility model is realized by the following technical solution: a freely liftable MEMS micromirror packaging workbench, comprising: a mounting base and a connecting shaft, a set of working plates for MEMS micromirror packaging provided at the upper middle end of the mounting base, and a set of fixing seats for supporting the lower end of the outer frame provided at the upper rear end of the working plates;

[0006] The upper end of the fixed seat is provided with an outer frame 1 for limiting the upward and downward movement of the movable seat 1, and the inner side of the front end of the outer frame 1 is provided with a movable seat 1 for driving the packaging head to move up and down;

[0007] A group of electric cylinders are provided at the upper end of the outer frame for driving the movable seat to move up and down. The electric cylinder, movable seat and outer frame constitute a group of up and down moving components. A group of lateral moving components is provided on the rear side of the up and down moving components. A group of front and back moving components is provided on the right side of the lateral moving components. The lateral moving components, up and down moving components and front and back moving components have the same structure. By using the lateral moving components, up and down moving components and front and back moving components, the packaging head can be adjusted laterally, up and down and front and back, thereby meeting the MEMS micromirror packaging operations of different precise positions.

[0008] As a preferred embodiment, the lateral movement assembly includes an electric cylinder 2, a moving seat 2 and an outer frame 2, and the front side of the moving seat 2 is fixed to the rear side of the outer frame 1 by bolts.

[0009] As a preferred embodiment, the forward and backward moving assembly includes an electric cylinder three, a moving seat three and an outer frame three. The right side of the outer frame two is fixed to the moving seat three by several groups of bolts, and the lower end of the outer frame three is fixed to the mounting base by bolts. It can be used in coordination with the horizontal moving assembly, the up and down moving assembly and the forward and backward moving assembly.

[0010] As a preferred embodiment, the telescopic end of the electric cylinder one is connected and fixed to the movable seat one, the telescopic end of the electric cylinder two is connected and fixed to the movable seat two, and the telescopic end of the electric cylinder three is connected and fixed to the movable seat three.

[0011] As a preferred embodiment, the movable seat one, movable seat two and movable seat three are movably engaged with the inner side of the outer frame one, the inner side of the outer frame two and the inner side of the outer frame three, respectively, and the moving trajectories of the movable seat one, movable seat two and movable seat three are oriented. The moving trajectories of the movable seat one, movable seat two and movable seat three can be maintained by the outer frame one, outer frame two and outer frame three, thereby meeting the precise movement of the packaging head.

[0012] As a preferred embodiment, a group of clips are provided at the left and right ends of the front side of the mounting base. The clips are spring sheets, and an insulating rubber layer is provided on the outside of the clips. A group of connecting shafts for adjusting the rotation direction of the clips are provided inside the rear side of the clips. The rotation direction of the clips can be adjusted by using the connecting shafts.

[0013] As a preferred embodiment, each group of the connecting shafts is connected to a group of internal limiters on the front side of the clips and serves as a rotation fulcrum of the clips. The lower end of the working plate is provided with a group of bottom boxes for storing MEMS micromirror packaging related working equipment.

[0014] After adopting the above technical solution, the beneficial effects of the utility model are: by using the lateral moving component, the up and down moving component and the front and back moving component to adjust the lateral, up and down and front and back positions of the packaging head, thereby meeting the MEMS micromirror packaging operations of different precise positions; by using the lateral moving component, the up and down moving component and the front and back moving component to work together, the moving trajectories of the moving seat one, the moving seat two and the moving seat three are maintained by the outer frame one, the outer frame two and the outer frame three, thereby meeting the precise movement of the packaging head; and by using the connecting rotary shaft to adjust the rotation direction of the clip. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0016] Figure 1 This is a schematic diagram of the front side top view of a freely liftable MEMS micromirror packaging workbench of the present invention;

[0017] Figure 2 This is a schematic diagram of a top-down view of the right oblique front side of a lateral moving component, an up-and-down moving component, and a forward-and-backward moving component in a freely liftable MEMS micromirror packaging workbench of the present invention;

[0018] Figure 3 This is a schematic diagram of the structure of the movable seat 1, the movable seat 2 and the movable seat 3 in a freely liftable MEMS micromirror packaging workbench of the present invention, viewed from the left oblique front side;

[0019] Figure 4 for Figure 1 A magnified view of the internal structure at point A;

[0020] In the figure: 100-mounting base, 110-working plate, 120-bottom box, 130-fixed seat, 140-outer frame 1, 150-electric cylinder 1, 160-moving seat 1, 170-packaging head, 180-lateral moving assembly, 190-connecting frame, 200-forward and backward moving assembly, 210-moving seat 2, 220-clamp, 230-connecting swivel. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] See also Figure 1-Figure 4 A freely elevating MEMS micromirror packaging workbench includes: a mounting base 100, a working plate 110, a lateral movement assembly 180, and a connecting shaft 230. A set of working plates 110 for MEMS micromirror packaging is provided at the upper middle end of the mounting base 100. A set of fixing seats 130 for supporting the lower end of an outer frame 140 is provided at the upper rear end of the working plate 110.

[0023] The upper end of the fixed seat 130 is provided with a set of outer frames 140 for limiting the upward and downward movement of the movable seat 160. The inner side of the front end of the outer frame 140 is provided with a set of movable seats 160 for driving the packaging head 170 to move up and down.

[0024] A group of electric cylinders 150 are provided at the upper end of the outer frame 140 for driving the movable seat 160 to move up and down.

[0025] The transverse moving assembly 180 includes an electric cylinder 2, a moving base 210 and an outer frame 2. The front side of the moving base 210 is fixed to the rear side of the outer frame 140 by bolts.

[0026] The forward and backward moving assembly 200 includes an electric cylinder three, a moving seat three and an outer frame three. The right side of the outer frame two is fixed to the moving seat three by several groups of bolts, and the lower end of the outer frame three is fixed to the mounting base 100 by bolts. It can be used in coordination with the horizontal moving assembly 180, the up and down moving assembly and the forward and backward moving assembly 200.

[0027] The telescopic end of the electric cylinder 1 150 is connected and fixed to the movable seat 1 160 , the telescopic end of the electric cylinder 2 is connected and fixed to the movable seat 2 210 , and the telescopic end of the electric cylinder 3 is connected and fixed to the movable seat 3 .

[0028] The movable seat 1 160 , the movable seat 2 210 and the movable seat 3 are movably engaged with the inner sides of the outer frame 1 140 , the outer frame 2 and the outer frame 3 respectively.

[0029] Each set of connecting shafts 230 is connected to the front inner limit of a set of clips 220 and serves as the rotation fulcrum of the clips 220. A bottom box 120 for storing MEMS micromirror packaging related working equipment is provided at the lower end of the working plate 110.

[0030] See also Figure 1-Figure 4As the first embodiment of the present invention: First, the staff places the MEMS micromirror to be packaged on the upper end of the working plate 110 and uses the clip 220 to clamp the MEMS micromirror. When the staff needs to perform packaging operations on the MEMS micromirror, the electric cylinder 150, the moving seat 160 and the outer frame 140 form a set of vertical moving components. The vertical moving components can drive the moving seat 160 and the packaging head 170 to adjust the vertical position. A set of lateral moving components 180 is provided on the rear side of the vertical moving components. A set of front-to-back moving components 200 is provided on the right side of the lateral moving components 180. The lateral moving components 180, the vertical moving components and the front-to-back moving components 200 are arranged on the right side of the lateral moving components 180. The structures are the same, and the packaging head 170 can be adjusted laterally, up and down, and front and back by using the lateral moving component 180, the up and down moving component, and the front and back moving component 200, so as to meet the MEMS micromirror packaging operations at different precise positions. At the same time, since the outer frame 140, the outer frame 2, and the outer frame 3 orient the moving trajectories of the moving seat 160, the moving seat 210, and the moving seat 3, when the moving seat 160, the moving seat 210, and the moving seat 3 move inside the outer frame 140, the outer frame 2, and the outer frame 3, their moving trajectories in different directions can be maintained, thereby meeting the precise movement of the packaging head 170 and reducing displacement errors in other directions generated during the movement.

[0031] See also Figure 1-Figure 4 As the second embodiment of the present invention: Based on the description in the above embodiments, further, since a group of clips 220 are provided at the left and right ends of the front side of the mounting base 100, the clips 220 are a kind of spring sheets, and an insulating rubber layer is provided on the outside of the clips 220. When the clips 220 clamp the MEMS micromirror, the outer surface of the MEMS micromirror can be insulated and flexibly clamped. A group of connecting shafts 230 for adjusting the rotation direction of the clips 220 are provided inside the rear side of the clips 220. By using the connecting shafts 230 to adjust the rotation direction of the clips 220, different positions of the MEMS micromirror can be clamped with force to prevent the MEMS micromirror from being damaged during the clamping process.

[0032] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A freely liftable MEMS micromirror packaging workbench, comprising: A mounting base (100), a working plate (110), a lateral moving assembly (180) and a connecting rotary shaft (230) are provided, wherein: a group of working plates (110) for MEMS micromirror packaging is provided at the upper middle end of the mounting base (100), and a group of fixing seats (130) for supporting the lower end of the outer frame (140) is provided at the upper rear end of the working plate (110); The upper end of the fixed seat (130) is provided with a group of outer frames (140) for limiting the upward and downward movement of the movable seat (160), and the inner side of the front end of the outer frame (140) is provided with a group of movable seats (160) for driving the packaging head (170) to move upward and downward; A group of electric cylinders (150) for driving the movable seat (160) to move up and down are provided at the upper end of the outer frame (140). The electric cylinders (150), the movable seat (160) and the outer frame (140) constitute a group of up and down moving components. A group of lateral moving components (180) is provided on the rear side of the up and down moving components. A group of front and back moving components (200) is provided on the right side of the lateral moving components (180). The structures of the lateral moving components (180), the up and down moving components and the front and back moving components (200) are the same.

2. The freely liftable MEMS micromirror packaging workbench according to claim 1, characterized in that: The transverse moving assembly (180) comprises a second electric cylinder, a second moving seat (210) and a second outer frame, wherein the front side of the second moving seat (210) and the rear side of the first outer frame (140) are fixed by bolt connection.

3. The freely liftable MEMS micromirror packaging workbench according to claim 2, characterized in that: The front-rear moving assembly (200) comprises an electric cylinder three, a moving seat three and an outer frame three, the right side of the outer frame two is connected and fixed to the moving seat three via a plurality of groups of bolts, and the lower end of the outer frame three is connected and fixed to the mounting base (100) via bolts.

4. The freely liftable MEMS micromirror packaging workbench according to claim 3, characterized in that: The telescopic end of the electric cylinder one (150) is connected and fixed to the movable seat one (160), the telescopic end of the electric cylinder two is connected and fixed to the movable seat two (210), and the telescopic end of the electric cylinder three is connected and fixed to the movable seat three.

5. The freely liftable MEMS micromirror packaging workbench according to claim 4, characterized in that: The movable seat 1 (160), the movable seat 2 (210) and the movable seat 3 are movably connected with the inner side of the outer frame 1 (140), the inner side of the outer frame 2 and the inner side of the outer frame 3 respectively, and the moving trajectories of the movable seat 1 (160), the movable seat 2 (210) and the movable seat 3 are oriented.

6. The freely liftable MEMS micromirror packaging workbench according to claim 1, characterized in that: A group of clips (220) are provided at both left and right ends of the front side of the mounting base (100), the clips (220) are spring sheets, and an insulating rubber layer is provided on the outside of the clips (220), and a group of connecting shafts (230) for adjusting the rotation direction of the clips (220) are provided inside the rear side of the clips (220).

7. The freely liftable MEMS micromirror packaging workbench according to claim 6, characterized in that: Each set of the connecting rotating shafts (230) is connected to the front inner limit of a set of clips (220) and serves as a rotation fulcrum for the clips (220). A set of bottom boxes (120) for storing MEMS micromirror packaging related working equipment is provided at the lower end of the working plate (110).

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