Single crystal silicon rod cutting tool

Abstract

The utility model discloses a silicon single crystal rod cutting tool which comprises a working table, a supporting frame is arranged on the top of the working table, a first linear module is arranged on the top of the supporting frame, a mounting plate is arranged at the moving end of the first linear module, a second linear module is arranged on the mounting plate, and a first linear module is arranged on the second linear module. A supporting assembly is arranged at the moving end of the second linear module and used for supporting a silicon rod, a third linear module is arranged on one side of the second linear module, a cutting assembly is arranged at the moving end of the third linear module, the silicon rod is rapidly cut through the cutting assembly, and a first motor is installed on the working table. A rotating seat is arranged at the driving end of the first motor, a clamping assembly is arranged on the rotating seat, a silicon rod is positioned and installed in the clamping assembly, and the silicon rod cutting device has the advantages that rapid clamping and positioning can be conducted, the silicon rod is stably supported, rotary cutting is achieved, the cutting quality is improved, operation is easy, and a workpiece is not prone to being damaged by clamping.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon rod processing, and more specifically, relates to a single crystal silicon rod cutting tool. Background Art

[0002] Currently, crystalline silicon, a key semiconductor material, boasts excellent electrical properties and thermal stability. Since its discovery and utilization, it has rapidly replaced other semiconductor materials. Silicon is the most widely used semiconductor material due to its high-temperature and radiation resistance, making it particularly suitable for the manufacture of high-power devices. The majority of integrated circuit semiconductor devices are made of silicon.

[0003] Chinese patent publication number CN207930899U discloses a single crystal silicon ingot cutting tool. The tool comprises a cylinder with a guide rail fixed to the end of the cylinder piston rod. The guide rail defines a dovetail groove, within which a slider is positioned that can slide back and forth along the groove. A resin strip is bonded to the bottom of the slider via an adhesive layer A. The bottom of the resin strip is bonded to single crystal silicon ingots arranged in front and behind via an adhesive layer B. The bottom of the single crystal silicon ingot is provided with a rubber strip arranged axially therefrom. The advantages of this utility model include a compact structure, excellent protection for the cut single crystal silicon wafers, convenient collection of the cut single crystal silicon wafers, and simple operation.

[0004] Although this structure is simple and easy to clamp and cut, during the slicing process of the silicon rod, since the cutting body material is hard, the silicon rod needs to be stably clamped and supported during cutting. The existing equipment cannot flexibly clamp silicon rods of different sizes and lengths. At the same time, although the silicon rod is kept stable during the cutting process, the cutting time is long and the silicon rod cannot be cut while rotating. The cutting quality is poor and the operating flexibility is low. The waste chips generated by cutting the silicon rod cannot be cleaned in time, which is not conducive to the continuous cutting operation. Utility Model Content

[0005] In view of the deficiencies in the prior art, the present invention provides a single crystal silicon rod cutting tool to solve the problems raised in the above background technology.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: a single crystal silicon rod cutting tool, including a workbench, a support frame is provided on the top of the workbench, a first linear module is provided on the top of the support frame, a mounting plate is provided on the movable end of the first linear module, a second linear module is provided on the mounting plate, a support assembly is provided on the movable end of the second linear module for supporting the silicon rod, a third linear module is provided on one side of the second linear module, a cutting assembly is provided on the movable end of the third linear module, and the silicon rod is quickly cut by the cutting assembly, a first motor is installed on the workbench, a rotating seat is provided at the driving end of the first motor, a clamping assembly is provided on the rotating seat, and a silicon rod is positioned and installed in the clamping assembly.

[0007] The support assembly includes a lifting seat, which is fixed to the moving end of the second linear module. The bottom of the lifting seat is connected to an adjustment frame, and the adjustment frame is L-shaped as a whole. A positioning seat is provided at the bottom of the adjustment frame, and symmetrical rollers are installed in the positioning seat to support the silicon rods through the rollers.

[0008] The cutting assembly comprises a hanging frame, a superhard alloy blade is installed in the hanging frame, a driving motor is provided on one side of the hanging frame, and one end of the driving motor is connected to the superhard alloy blade.

[0009] The workbench is provided with a storage trough, through which the cut silicon rods are placed.

[0010] The clamping assembly includes a second motor, the second motor is installed in the rotating seat, the second motor driving end is provided with an adjusting gear, the adjusting gear is located on one side of the rotating seat, symmetrical slide rails are provided on both sides of the adjusting gear, the slide rails are slidably fitted with sliders, the clamping seat is installed on the slider, the adjusting gear is meshed with racks on the upper and lower sides, the racks are respectively installed on one side of the clamping seat, one side of the rack is limited and guided by a guide wheel, and the clamping seat is driven to move relative or toward each other through the adjusting gear, a clamping plate is provided at one end of the clamping seat, the clamping plate is V-shaped, and symmetrical clamping blocks are installed on the inner side of the clamping plate, and anti-slip strips are provided on the clamping blocks.

[0011] A mounting frame is provided at the bottom of the support frame, a dust hood is provided on the mounting frame, and the dust hood is connected to a dust suction pipe and is connected to an external dust suction device through the dust suction pipe.

[0012] The utility model provides a single crystal silicon rod cutting tool, which has the following beneficial effects:

[0013] The second motor drives the adjusting gear to rotate, driving the clamping seat to clamp and position quickly. At the same time, the second linear module drives the adjusting frame to rise and fall, so that the roller can quickly fit and support the silicon rod, thereby improving the cutting stability. During this period, the horizontal position can be adjusted by the first linear module to achieve the best cutting state, which is suitable for cutting silicon rods of different lengths. The first motor drives the rotating seat to rotate as a whole, realizing cutting and rotating at the same time, improving the cutting quality, and the dust collection operation is carried out quickly through the dust collection hood. The cut silicon rods will be stored in the storage trough. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural diagram of the utility model;

[0015] Figure 2 It is a front view of the utility model;

[0016] Figure 3 This is a partial enlarged view of area A of the present utility model;

[0017] Figure 4 This is a partial enlarged view of area B of the present invention.

[0018] In the figure: 1. Workbench; 101. Support frame; 102. Storage trough; 2. First linear module; 3. Second linear module; 301. Lifting seat; 302. Adjusting frame; 4. Third linear module; 5. Hoisting frame; 501. Super-hard alloy blade; 502. Driving motor; 6. Silicon rod; 7. Positioning seat; 701. Roller; 8. First motor; 9. Rotating seat; 901. Guide wheel; 902. Slide rail; 903. Slider; 10. Second motor; 11. Adjusting gear; 111. Rack; 112. Clamping seat; 12. Clamping plate; 121. Clamping block; 13. Mounting frame; 131. Dust hood; 132. Dust pipe. DETAILED DESCRIPTION

[0019] The following embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0020] In the description of this utility model, unless otherwise specified, "plurality" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "front end," "rear end," "head," "tail," etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific direction, be constructed, or operate in a specific direction, and therefore should not be construed as limiting this utility model. Furthermore, the terms "first," "second," "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0021] In the description of this utility model, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integral connection; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0022] See also Figures 1 to 4 The utility model provides a technical solution: a single crystal silicon rod cutting tool, including a workbench 1, a support frame 101 is provided on the top of the workbench 1, a first linear module 2 is provided on the top of the support frame 101, a mounting plate is provided at the movable end of the first linear module 2, a second linear module 3 is provided on the mounting plate, a supporting assembly is provided at the movable end of the second linear module 3, for supporting the silicon rod 6, the supporting assembly includes a lifting seat 301, the lifting seat 301 is fixed to the movable end of the second linear module 3, an adjusting frame 302 is connected to the bottom of the lifting seat 301, the adjusting frame 302 is L-shaped as a whole, a positioning seat 7 is provided at the bottom of the adjusting frame 302, symmetrical rollers 701 are installed in the positioning seat 7, and the silicon rod 6 is supported by the rollers 701, a third linear module 4 is provided on one side of the second linear module 3, and a cutting assembly is provided at the movable end of the third linear module 4, and the silicon rod 6 is quickly cut by the cutting assembly.

[0023] The cutting assembly includes a lifting frame 5, in which a super-hard alloy blade 501 is installed. A driving motor 502 is provided on one side of the lifting frame 5, and one end of the driving motor 502 is connected to the super-hard alloy blade 501, thereby driving the super-hard alloy blade 501 to rotate rapidly for cutting. A storage trough 102 is provided on the workbench 1, and the cut silicon rod 6 is placed through the storage trough 102. A first motor 8 is installed on the workbench 1, and a rotating seat 9 is provided at the driving end of the first motor 8. A clamping assembly is provided on the rotating seat 9, and the silicon rod 6 is positioned and installed in the clamping assembly.

[0024] The clamping assembly includes a second motor 10, which is installed in the rotating seat 9. The driving end of the second motor 10 is provided with an adjusting gear 11, which is located on one side of the rotating seat 9. Symmetrical slide rails 902 are provided on both sides of the adjusting gear 11. Slide blocks 903 are slidably matched on the slide rails 902. A clamping seat 112 is installed on the slider 903. Racks 111 are meshed with each other on the upper and lower sides of the adjusting gear 11. The racks 111 are respectively installed on one side of the clamping seat 112. One side of the rack 111 is limited and guided by the guide wheel 901 to improve the movement. Dynamic stability, by adjusting the gear 11 to drive the clamping seat 112 to move relative or toward each other, a clamping plate 12 is provided at one end of the clamping seat 112, the clamping plate 12 is V-shaped, and symmetrical clamping blocks 121 are installed on the inner side of the clamping plate 12, and anti-slip strips are provided on the clamping blocks 121 to avoid clamping the silicon rod 6. A mounting frame 13 is provided at the bottom of the support frame 101, and a dust hood 131 is provided on the mounting frame 13. The dust hood 131 is connected to the dust suction pipe 132, and the dust suction pipe 132 is connected to the external dust suction equipment, so that the waste chips generated by cutting can be collected in real time.

[0025] The specific usage and function of this embodiment are as follows: the silicon rod 6 is placed between the clamps 12, and the adjusting gear 11 is driven to rotate by the second motor 10, driving the clamping seat 112 to quickly clamp and position. At the same time, the second linear module 3 is started to drive the adjusting frame 302 to rise and fall, so that the roller 701 can quickly fit and support the silicon rod 6, thereby improving the cutting stability. During this period, the horizontal position can be adjusted by the first linear module 2 to achieve the best cutting state. After the positioning is completed, the drive motor 502 is started to start the cutting operation. At the same time, the first motor 8 drives the rotating seat 9 to rotate as a whole, thereby improving the cutting quality of the silicon rod 6 and quickly unloading. During this period, the dust collection operation is quickly performed through the dust collection hood 131. The cut silicon rod 6 will be stored in the storage trough 102.

[0026] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, i.e., they may be located in one location or distributed across multiple network units. Some or all of the modules may be selected based on actual needs to achieve the objectives of the present embodiment. Persons of ordinary skill in the art will be able to understand and implement the present invention without inventive effort.

[0027] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A single crystal silicon rod cutting tool, characterized by: The invention comprises a workbench (1), wherein a support frame (101) is provided on the top of the workbench (1), a first linear module (2) is provided on the top of the support frame (101), a mounting plate is provided on the movable end of the first linear module (2), a second linear module (3) is provided on the mounting plate, a support assembly is provided on the movable end of the second linear module (3), and the support assembly is used to support a silicon rod (6), a third linear module (4) is provided on one side of the second linear module (3), and a cutting assembly is provided on the movable end of the third linear module (4), and the silicon rod (6) is quickly cut by the cutting assembly, a first motor (8) is installed on the workbench (1), a rotating seat (9) is provided on the driving end of the first motor (8), a clamping assembly is provided on the rotating seat (9), and the silicon rod (6) is positioned and installed in the clamping assembly.

2. The single crystal silicon rod cutting tool according to claim 1, characterized in that: The support assembly comprises a lifting seat (301), the lifting seat (301) is fixed to the moving end of the second linear module (3), the bottom of the lifting seat (301) is connected to an adjustment frame (302), the adjustment frame (302) is L-shaped as a whole, a positioning seat (7) is provided at the bottom of the adjustment frame (302), and symmetrical rollers (701) are installed in the positioning seat (7), and the silicon rod (6) is supported by the rollers (701).

3. The single crystal silicon rod cutting tool according to claim 1, characterized in that: The cutting assembly comprises a hanging frame (5), a superhard alloy blade (501) is installed in the hanging frame (5), a driving motor (502) is provided on one side of the hanging frame (5), and one end of the driving motor (502) is connected to the superhard alloy blade (501).

4. The single crystal silicon rod cutting tool according to claim 1, characterized in that: A material storage trough (102) is provided on the workbench (1), and the cut silicon rods (6) are placed through the material storage trough (102).

5. The single crystal silicon rod cutting tool according to claim 1, characterized in that: The clamping assembly includes a second motor (10), the second motor (10) is installed in the rotating seat (9), the driving end of the second motor (10) is provided with an adjusting gear (11), the adjusting gear (11) is located on one side of the rotating seat (9), symmetrical slide rails (902) are provided on both sides of the adjusting gear (11), a slider (903) is slidably fitted on the slide rail (902), a clamping seat (112) is installed on the slider (903), and the adjusting gear (11) is provided with a plurality of symmetrical slide rails (902). The lower part is meshed with a rack (111), and the rack (111) is respectively installed on one side of the clamping seat (112). One side of the rack (111) is limited and guided by a guide wheel (901), and the clamping seat (112) is driven to move relative or toward each other by adjusting the gear (11). A clamping plate (12) is provided at one end of the clamping seat (112), and the clamping plate (12) is V-shaped. A symmetrical clamping block (121) is installed on the inner side of the clamping plate (12), and an anti-slip strip is provided on the clamping block (121).

6. The single crystal silicon rod cutting tool according to claim 1, characterized in that: A mounting frame (13) is provided at the bottom of the support frame (101), a dust collection hood (131) is provided on the mounting frame (13), and the dust collection hood (131) is connected to a dust collection pipe (132) and connected to an external dust collection device via the dust collection pipe (132).

Images