Thermocouple fixing seat mounting device

Abstract

The utility model discloses a thermocouple fixing seat mounting device, and relates to the technical field of thermocouples. The thermocouple fixing seat installation device comprises a first installation part and a second installation part, the first installation part comprises a sleeve connected with a thermocouple fixing seat in a sleeving mode, the sleeve is used for being clamped with a positioning column on the thermocouple fixing seat, and the second installation part is inserted into the sleeve so as to be clamped with an installation groove in the thermocouple fixing seat. The sleeve is clamped with the positioning column on the thermocouple fixing seat so as to guide, position and install the thermocouple fixing seat, the second installation piece is inserted in the sleeve so as to be clamped with the installation groove in the thermocouple fixing seat, and the second installation piece is clamped with the installation groove in the thermocouple fixing seat so as to lock and install the thermocouple fixing seat.

Description

Technical Field

[0001] The present application relates to the technical field of thermocouples, and in particular to a thermocouple fixing seat installation device. Background Art

[0002] During the wafer manufacturing process, wafers are placed in a controlled environment for multiple processing steps, including but not limited to photolithography, etching, and deposition. A ceramic electrostatic chuck secures the wafer, ensuring its position throughout the entire process. Thermocouples, installed near the heating zone, monitor and adjust the heater temperature to maintain the desired temperature conditions at each stage of the process.

[0003] Due to metal thermal fatigue, the threads of the thermocouple holder often expand and soften, resulting in uneven thread force or thread jamming during installation and disassembly. If forced disassembly or installation is performed, the threads of the thermocouple holder will be necrotic, thereby damaging the electrostatic chuck holder. Utility Model Content

[0004] The purpose of the present application is to provide a thermocouple fixing seat installation device, which can improve the assembly efficiency and assembly stability of the thermocouple fixing seat.

[0005] The embodiment of the present application is implemented as follows:

[0006] An embodiment of the present application provides a thermocouple fixing seat installation device, including a first mounting member and a second mounting member. The first mounting member includes a sleeve that is sleeved on the thermocouple fixing seat, and the sleeve is used to clamp with a positioning column on the thermocouple fixing seat. The second mounting member is inserted into the sleeve for clamping with a mounting groove on the thermocouple fixing seat.

[0007] Optionally, as an implementable manner, a limiting groove is provided on the side wall of the sleeve, and the limiting groove is clamped with a positioning column on the thermocouple fixing seat.

[0008] Optionally, as an implementable manner, the limiting groove includes a guiding section and a limiting section, the guiding section extends inward from the end of the sleeve, and the limiting section is clamped with the positioning column.

[0009] Optionally, as an implementable manner, the extending direction of the guide section is consistent with the extending direction of the sleeve, and the extending directions of the guide section and the limiting section are perpendicular to each other.

[0010] Optionally, as an implementable manner, the second mounting member includes a connecting rod and a second handle connected to the connecting rod, and the connecting rod is inserted into the sleeve.

[0011] Optionally, as an implementable manner, a locking protrusion is provided at the end of the connecting rod, and the locking protrusion extends radially along the rotation center of the connecting rod, and is clamped by the mounting groove on the thermocouple fixing seat through the locking protrusion.

[0012] Optionally, as an implementable manner, a torque slot is provided at one end of the connecting rod away from the locking protrusion, and the torque slot is used to engage the torque locking member.

[0013] Optionally, as an implementable method, the thermocouple fixing seat includes a threaded knob section and an installation section, the installation section is provided with a positioning column and an installation groove, the installation section is accommodated in the sleeve, the limiting groove is clamped with the positioning column, and the clamping protrusion is clamped with the installation groove.

[0014] Optionally, as an implementable manner, the first mounting member further includes a first handle provided on the sleeve.

[0015] Optionally, as an implementable manner, the length of the connecting rod is greater than the length of the sleeve.

[0016] The beneficial effects of the embodiments of the present application include:

[0017] The thermocouple fixing seat installation device provided in the present application includes a first mounting member and a second mounting member. The first mounting member includes a sleeve that is sleeved on the thermocouple fixing seat, and the sleeve is used to clamp with the positioning column on the thermocouple fixing seat. The second mounting member is inserted into the sleeve to clamp with the installation groove on the thermocouple fixing seat. The sleeve is clamped with the positioning column on the thermocouple fixing seat to guide and position the thermocouple fixing seat. The second mounting member is inserted into the sleeve to clamp with the installation groove on the thermocouple fixing seat. The second mounting member is clamped with the installation groove on the thermocouple fixing seat to lock the thermocouple fixing seat. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 A schematic structural diagram of a thermocouple fixing seat installation device provided in an embodiment of the present application;

[0020] Figure 2 A schematic structural diagram of a first mounting member in a thermocouple fixing seat mounting device provided in an embodiment of the present application;

[0021] Figure 3A schematic structural diagram of a second mounting member in a thermocouple fixing seat mounting device provided in an embodiment of the present application;

[0022] Figure 4 This is a schematic structural diagram of a thermocouple fixing seat in a thermocouple fixing seat installation device provided in an embodiment of the present application.

[0023] Icon: 100 - thermocouple fixing seat installation device; 110 - first mounting part; 111 - sleeve; 1111 - limiting groove; 1111a - guide section; 1111b - limiting section; 112 - first handle; 120 - second mounting part; 121 - connecting rod; 1211 - clamping protrusion; 1212 - torque clamping groove; 122 - second handle; 200 - thermocouple fixing seat; 210 - threaded knob section; 220 - mounting section; 221 - positioning column; 222 - mounting groove. DETAILED DESCRIPTION

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Generally, the components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments in the present application without creative work are within the scope of protection of the present application.

[0026] It should be noted that similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings. In addition, the terms "first," "second," "third," etc. are used only to distinguish the descriptions and are not to be understood as indicating or implying relative importance.

[0027] It should also be noted that, in the description of this application, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0028] Please refer to Figure 1 and Figure 4 This embodiment provides a thermocouple fixing seat installation device 100, including a first installation member 110 and a second installation member 120. The first installation member 110 includes a sleeve 111 that is sleeved on the thermocouple fixing seat 200. The sleeve 111 is used to clamp with the positioning column 221 on the thermocouple fixing seat 200. The second installation member 120 is inserted into the sleeve 111 to be clamped with the installation groove 222 on the thermocouple fixing seat 200.

[0029] Specifically, when using the thermocouple fixing seat installation device 100 of the present application to install the thermocouple fixing seat 200, first clamp the sleeve 111 of the first mounting member 110 with the thermocouple fixing seat 200, and then screw the first mounting member 110 to guide and position the thermocouple fixing seat 200 in the installation position. After the guidance and positioning of the thermocouple fixing seat 200 is completed, insert the second mounting member 120 into the sleeve 111, clamp the second mounting member 120 with the installation groove 222 on the thermocouple fixing seat 200, and then screw the second mounting member 120 to lock the thermocouple fixing seat 200 in the installation position.

[0030] When using the thermocouple fixing seat installation device 100 of the present application to disassemble the thermocouple fixing seat 200, first clamp the sleeve 111 of the first mounting member 110 with the thermocouple fixing seat 200, insert the second mounting member 120 into the sleeve 111, clamp the second mounting member 120 with the mounting groove 222 on the thermocouple fixing seat 200, and screw the second mounting member 120 to drive the thermocouple fixing seat 200 to release the threaded connection in the installation position. Then, screw the first mounting member 110 to drive the thermocouple fixing seat 200 to fall off the guide positioning in the installation position to complete the disassembly of the thermocouple fixing seat 200.

[0031] The thermocouple fixing seat installation device 100 provided in the present application includes a first mounting member 110 and a second mounting member 120. The first mounting member 110 includes a sleeve 111 that is sleeved on the thermocouple fixing seat 200. The sleeve 111 is used to clamp with the positioning column 221 on the thermocouple fixing seat 200. The second mounting member 120 is inserted into the sleeve 111 to be clamped with the installation groove 222 on the thermocouple fixing seat 200. The sleeve 111 is clamped with the positioning column 221 on the thermocouple fixing seat 200 to guide and position the thermocouple fixing seat 200. The second mounting member 120 is inserted into the sleeve 111 to be clamped with the installation groove 222 on the thermocouple fixing seat 200. The second mounting member 120 is clamped with the installation groove 222 on the thermocouple fixing seat 200 to lock the thermocouple fixing seat 200.

[0032] In a possible embodiment of the present application, Figure 1 、 Figure 2 and Figure 4As shown, a limiting groove 1111 is provided on the side wall of the sleeve 111 , and the limiting groove 1111 is clamped with the positioning column 221 on the thermocouple fixing seat 200 .

[0033] Specifically, when using the thermocouple fixing seat installation device 100 of the present application to install the thermocouple fixing seat 200, first clamp the limiting groove 1111 on the sleeve 111 with the thermocouple fixing seat 200, and screw the first mounting member 110 to guide and position the thermocouple fixing seat 200 in the installation position. After completing the guidance and positioning of the thermocouple fixing seat 200, insert the second mounting member 120 into the sleeve 111, clamp the second mounting member 120 with the installation groove 222 on the thermocouple fixing seat 200, and screw the second mounting member 120 to drive the thermocouple fixing seat 200 to be locked in the installation position.

[0034] When using the thermocouple fixing seat installation device 100 of the present application to disassemble the thermocouple fixing seat 200, first clamp the limiting groove 1111 on the sleeve 111 with the thermocouple fixing seat 200, insert the second mounting member 120 into the sleeve 111, clamp the second mounting member 120 with the mounting groove 222 on the thermocouple fixing seat 200, and screw the second mounting member 120 to drive the thermocouple fixing seat 200 to release the threaded connection in the installation position, and then screw the first mounting member 110 to drive the thermocouple fixing seat 200 to fall off the guide positioning in the installation position to complete the disassembly of the thermocouple fixing seat 200.

[0035] Furthermore, a plurality of limiting grooves 1111 may be provided to improve the convenience of clamping between the limiting grooves 1111 and the positioning columns 221 on the thermocouple fixing seat 200 .

[0036] In a possible embodiment of the present application, Figure 1 、 Figure 2 and Figure 4 As shown, the limiting groove 1111 includes a guiding section 1111 a and a limiting section 1111 b . The guiding section 1111 a extends inward from the end of the sleeve 111 , and the limiting section 1111 b is engaged with the positioning column 221 .

[0037] Furthermore, the extending direction of the guide section 1111 a is consistent with the extending direction of the sleeve 111 , and the extending directions of the guide section 1111 a and the limiting section 1111 b are perpendicular to each other.

[0038] Specifically, the limiting groove 1111 is set to a guide section 1111a and a limiting section 1111b that are interconnected. When the thermocouple fixing seat installation device 100 of the present application is used to install the thermocouple fixing seat 200, the positioning column 221 on the thermocouple fixing seat 200 enters the limiting section 1111b through the guide section 1111a. The extension direction of the guide section 1111a is consistent with the extension direction of the sleeve 111, and the extension directions of the guide section 1111a and the limiting section 1111b are perpendicular to each other. After the positioning column 221 on the thermocouple fixing seat 200 is inserted into the limiting section 1111b through the guide section 1111a, the thermocouple fixing seat 200 will not detach from the first mounting member 110.

[0039] In a possible embodiment of the present application, Figure 1 、 Figure 3 and Figure 4 As shown, the second mounting member 120 includes a connecting rod 121 and a second handle 122 connected to the connecting rod 121 , and the connecting rod 121 is inserted into the sleeve 111 .

[0040] Furthermore, the first mounting member 110 further includes a first handle 112 disposed on the sleeve 111 .

[0041] Specifically, when using the thermocouple fixing seat installation device 100 of the present application to install the thermocouple fixing seat 200, first clamp the limiting groove 1111 on the sleeve 111 with the thermocouple fixing seat 200, and screw the first mounting member 110 through the first handle 112 to drive the thermocouple fixing seat 200 to be guided and positioned in the installation position. After completing the guiding and positioning of the thermocouple fixing seat 200, insert the second mounting member 120 into the sleeve 111, clamp the second mounting member 120 with the installation groove 222 on the thermocouple fixing seat 200, and screw the second mounting member 120 through the second handle 122 to drive the thermocouple fixing seat 200 to be locked in the installation position.

[0042] When using the thermocouple fixing seat installation device 100 of the present application to disassemble the thermocouple fixing seat 200, first clamp the limiting groove 1111 on the sleeve 111 with the thermocouple fixing seat 200, insert the second mounting member 120 into the sleeve 111, clamp the second mounting member 120 with the mounting groove 222 on the thermocouple fixing seat 200, screw the second mounting member 120 through the second handle 122 to drive the thermocouple fixing seat 200 to release the threaded connection in the installation position, and then screw the first mounting member 110 through the first handle 112 to drive the thermocouple fixing seat 200 to fall off the guide positioning in the installation position to complete the disassembly of the thermocouple fixing seat 200.

[0043] In a possible embodiment of the present application, Figure 1 、 Figure 3 and Figure 4As shown, a locking protrusion 1211 is provided at the end of the connecting rod 121 , and the locking protrusion 1211 extends radially along the rotation center of the connecting rod 121 , and is locked with the mounting groove 222 on the thermocouple fixing seat 200 through the locking protrusion 1211 .

[0044] Specifically, when using the thermocouple fixing seat installation device 100 of the present application to install the thermocouple fixing seat 200, first clamp the limiting groove 1111 on the sleeve 111 with the thermocouple fixing seat 200, and screw the first mounting member 110 to guide and position the thermocouple fixing seat 200 in the installation position. After completing the guiding and positioning of the thermocouple fixing seat 200, insert the second mounting member 120 into the sleeve 111, clamp the protrusion 1211 at the end of the connecting rod 121 with the installation groove 222 on the thermocouple fixing seat 200, and screw the second mounting member 120 to lock the thermocouple fixing seat 200 in the installation position.

[0045] When using the thermocouple fixing seat installation device 100 of the present application to disassemble the thermocouple fixing seat 200, first clamp the limiting groove 1111 on the sleeve 111 with the thermocouple fixing seat 200, insert the second mounting member 120 into the sleeve 111, clamp the clamping protrusion 1211 at the end of the connecting rod 121 with the mounting groove 222 on the thermocouple fixing seat 200, and screw the second mounting member 120 to drive the thermocouple fixing seat 200 to release the threaded connection in the installation position, and then screw the first mounting member 110 to drive the thermocouple fixing seat 200 to fall off the guide positioning in the installation position to complete the disassembly of the thermocouple fixing seat 200.

[0046] In a possible embodiment of the present application, Figure 1 、 Figure 3 and Figure 4 As shown, a torque clamping groove 1212 is provided at one end of the connecting rod 121 away from the clamping protrusion 1211 , and the torque clamping groove 1212 is used for clamping the torque locking member.

[0047] Specifically, when using the thermocouple fixing seat installation device 100 of the present application to install the thermocouple fixing seat 200, first clamp the limiting groove 1111 on the sleeve 111 with the thermocouple fixing seat 200, and screw the first mounting member 110 to guide and position the thermocouple fixing seat 200 in the installation position. After completing the guiding and positioning of the thermocouple fixing seat 200, insert the second mounting member 120 into the sleeve 111, clamp the protrusion 1211 at the end of the connecting rod 121 with the installation groove 222 on the thermocouple fixing seat 200, and screw the second mounting member 120 to drive the thermocouple fixing seat 200 to be locked in the installation position, and then clamp the torque locking member on the torque clamping groove 1212, and the locking force of the thermocouple fixing seat 200 and the installation position is ensured by the torque locking member.

[0048] In a possible embodiment of the present application, Figure 1 、 Figure 2 、 Figure 3 and Figure 4 As shown, the thermocouple fixing seat 200 includes a threaded knob section 210 and an installation section 220. The installation section 220 is provided with a positioning column 221 and an installation groove 222. The installation section 220 is accommodated in the sleeve 111. The limiting groove 1111 is clamped with the positioning column 221, and the clamping protrusion 1211 is clamped with the installation groove 222.

[0049] Specifically, when using the thermocouple fixing seat installation device 100 of the present application to install the thermocouple fixing seat 200, first, the sleeve 111 is sleeved on the installation section 220, the limiting groove 1111 on the sleeve 111 is clamped with the positioning column 221, and the first mounting member 110 is screwed through the first handle 112 to drive the threaded knob section 210 of the thermocouple fixing seat 200 to be guided and positioned in the installation position. After completing the guiding and positioning of the thermocouple fixing seat 200, the second mounting member 120 is inserted into the sleeve 111, the locking protrusion 1211 is clamped with the installation groove 222, and the second mounting member 120 is screwed through the second handle 122 to drive the threaded knob section 210 of the thermocouple fixing seat 200 to be locked in the installation position.

[0050] When using the thermocouple fixing seat installation device 100 of the present application to disassemble the thermocouple fixing seat 200, first, the sleeve 111 is sleeved on the installation section 220, the limiting groove 1111 on the sleeve 111 is clamped with the positioning column 221, the second mounting member 120 is inserted into the sleeve 111, the locking protrusion 1211 is clamped with the installation groove 222, and the second mounting member 120 is screwed by the second handle 122 to drive the threaded knob section 210 of the thermocouple fixing seat 200 to release the threaded connection in the installation position, and then the first mounting member 110 is screwed by the first handle 112 to drive the thermocouple fixing seat 200 to fall off the guide positioning in the installation position to complete the disassembly of the thermocouple fixing seat 200.

[0051] In a possible embodiment of the present application, Figure 1 、 Figure 2 and Figure 3 As shown, the length of the connecting rod 121 is greater than the length of the sleeve 111.

[0052] Specifically, the length of the connecting rod 121 is greater than the length of the sleeve 111 to ensure that the protrusion 1211 can be clamped with the installation groove 222 after the second mounting member 120 is inserted into the sleeve 111, and the threaded knob section 210 can be screwed by screwing the second mounting member 120.

[0053] The above description is merely a preferred embodiment of the present application and is not intended to limit the present application. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. A thermocouple fixing seat installation device, characterized in that: It includes a first mounting member and a second mounting member. The first mounting member includes a sleeve that is sleeved on a thermocouple fixing seat. The sleeve is used to clamp with a positioning column on the thermocouple fixing seat. The second mounting member is inserted into the sleeve to clamp with a mounting groove on the thermocouple fixing seat.

2. The thermocouple fixing seat installation device according to claim 1, characterized in that: The side wall of the sleeve is provided with a limiting groove, which is clamped with the positioning column on the thermocouple fixing seat through the limiting groove.

3. The thermocouple fixing seat installation device according to claim 2, characterized in that: The limiting groove includes a guiding section and a limiting section, the guiding section extends inward from the end of the sleeve, and the limiting section is clamped with the positioning column.

4. The thermocouple fixing seat installation device according to claim 3, characterized in that: The extending direction of the guide section is consistent with the extending direction of the sleeve, and the extending directions of the guide section and the limiting section are perpendicular to each other.

5. The thermocouple fixing seat installation device according to claim 2, characterized in that: The second mounting member includes a connecting rod and a second handle connected to the connecting rod, and the connecting rod is inserted into the sleeve.

6. The thermocouple fixing seat installation device according to claim 5, characterized in that: The end of the connecting rod is provided with a clamping protrusion, which extends radially along the rotation center of the connecting rod and is clamped by the mounting groove on the thermocouple fixing seat through the clamping protrusion.

7. The thermocouple fixing seat installation device according to claim 6, characterized in that: The end of the connecting rod away from the locking protrusion is provided with a torque locking groove, and the torque locking groove is used for locking the torque locking piece.

8. The thermocouple fixing seat installation device according to claim 7, characterized in that: The thermocouple fixing seat includes a threaded knob section and a mounting section, the mounting section is provided with a positioning column and a mounting groove, the mounting section is accommodated in the sleeve, the limiting groove is clamped with the positioning column, and the clamping protrusion is clamped with the mounting groove.

9. The thermocouple fixing seat installation device according to claim 7, characterized in that: The first mounting member further includes a first handle disposed on the sleeve.

10. The thermocouple fixing seat installation device according to claim 5, characterized in that: The length of the connecting rod is greater than the length of the sleeve.

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