CVD (Chemical Vapor Deposition) dry etching lower electrode

Abstract

The utility model relates to the technical field of dry etching lower electrodes, and discloses a CVD (Chemical Vapor Deposition) dry etching lower electrode, which comprises a jig plate, hooks arranged on opposite side walls of the jig plate, and an electrode body. According to the CVD dry etching lower electrode, the anti-corrosion film is laid between the electrode body and the jig plate, the electrode body can be prevented from being corroded in the machining process, the two sets of anti-corrosion baffles are connected to the jig plate in a clamped mode, and therefore corrosion caused by contact between the electrode body and parts on the jig plate can be further prevented; the effect of protecting the electrode body is further achieved, a positioning rod and a positioning plate can keep the trend of moving downwards through the stretching elastic force of a positioning spring, and therefore the effect of fixing the anti-corrosion film to the jig plate is achieved, the anti-corrosion film can be effectively prevented from sliding, the electrode body is made to make direct contact with the jig plate, and the service life of the electrode body is prolonged. Therefore, the effect of comprehensively protecting the electrode body is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of dry-etched lower electrodes, in particular to a CVD dry-etched lower electrode. Background Art

[0002] During the manufacturing process of heterojunction solar cells, amorphous silicon is deposited on the surface of a single-crystal silicon wafer using a vapor deposition (CVD) technique to form a PN junction. The cell yield is particularly susceptible to environmental interference. A key component required in dry etching equipment is the lower electrode, which secures the glass substrate through electrostatic adsorption during the dry etching process, preventing it from moving. Currently, two common lower electrode structures are used: with a floating point and without a floating point. In dry etching, the lower electrode with a floating point is typically used. This structure primarily consists of a metal substrate, a lower dielectric layer, an electrode layer, an upper dielectric layer, a floating point, a peripheral protrusion, a helium channel, a power supply, and a lift-pin hole. During use, the glass substrate is placed on the lower electrode, supported by the peripheral protrusions and floating point on the surface. The voltage applied to the electrode layer generates an electrostatic adsorption force. Simultaneously, helium flows through the helium channel to the bottom surface of the glass substrate, cooling it and preventing it from overheating due to the heat released during the dry etching process.

[0003] Since the base material of the electrode is aluminum and the material of the jack is stainless steel, if the electrode is placed directly on the jack for processing, it is easy to cause deformation and damage to the back of the electrode. When the electrode is hit with a hammer to adjust the flatness, it is also easy to cause deformation and damage to the electrode surface. In addition, for the processing of the regenerated electrode, since electrical corrosion will occur on the back during its use, the back surface will be uneven and affect the flatness of the electrode surface after processing. Therefore, a CVD dry-etched lower electrode is proposed. Utility Model Content

[0004] (1) Technical problems solved

[0005] In view of the deficiencies of the prior art, the present invention provides a CVD dry-etched lower electrode, which has the advantages of preventing corrosion during the processing and solves the problem of corrosion of the dry-etched lower electrode during the processing.

[0006] (2) Technical solution

[0007] In order to achieve the purpose of corrosion during the above-mentioned processing, the utility model provides the following technical solutions:

[0008] A CVD dry-etched lower electrode comprises a jig plate, hooks mounted on opposite side walls of the jig plate, and an electrode body, wherein an anti-corrosion film is provided on the jig plate, wherein the electrode body is placed on the anti-corrosion film, and two mounting frames are relatively mounted on the upper surface of the jig plate, and elastic positioning components are provided inside the two mounting frames, and positioning plates are installed at the bottom of the elastic positioning components, wherein the two ends of the anti-corrosion film are respectively fixed between the two positioning plates and the jig plate, and two positioning blocks are clamped on the jig plate, and an anti-corrosion baffle is clamped between the two positioning blocks, and the anti-corrosion baffle is close to the side wall of the electrode body.

[0009] As a preferred technical solution of the present invention, the elastic positioning assembly includes a positioning spring fixedly installed at the bottom of the mounting frame, a positioning rod arranged inside the positioning spring, and a handle installed on the top of the positioning rod, wherein one end of the positioning spring is fixedly connected to the inner top wall of the mounting frame, and the other end is fixedly connected to the side wall of the positioning rod, wherein the positioning plate is fixedly installed at the bottom of the positioning rod.

[0010] As a preferred technical solution of the present invention, rubber bumps are fixedly installed on the bottom of the positioning plate.

[0011] As a preferred technical solution of the present invention, the jig plate is provided with no less than three positioning holes, and a positioning column is fixedly installed on the bottom of the positioning block, wherein the positioning column is engaged with the positioning hole.

[0012] As a preferred technical solution of the present invention, the positioning holes are evenly opened on the upper surface of the jig plate and are respectively located on both sides of the anti-corrosion film.

[0013] As a preferred technical solution of the present invention, a mounting groove is provided on the side wall of the positioning block, and an insert block is fixedly installed on the side wall of the anti-corrosion baffle, wherein the insert block is snap-connected with the positioning block through the mounting groove.

[0014] (3) Beneficial effects

[0015] Compared with the prior art, the present invention provides a CVD dry etching lower electrode with the following features:

[0016] Beneficial effects:

[0017] The CVD dry-etched lower electrode has an anti-corrosion film laid between the electrode body and the jig plate, so that the electrode body can be prevented from corrosion during the processing. By clamping two sets of anti-corrosion baffles on the jig plate, the electrode body can be further prevented from contacting with parts on the jig plate and causing corrosion, thereby further protecting the electrode body. The elastic force of the positioning spring is stretched to enable the positioning rod and the positioning plate to maintain a downward movement trend, thereby achieving the effect of fixing the anti-corrosion film on the jig plate, and then effectively preventing the anti-corrosion film from sliding, causing the electrode body to directly contact the jig plate and cause corrosion, thereby achieving the effect of fully protecting the electrode body. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic top view of the structure of the utility model;

[0019] Figure 2 This is a side cross-sectional schematic diagram of the connection structure between the structural positioning block and the jig plate of the utility model;

[0020] Figure 3 This is a side cross-sectional schematic diagram of the internal components of the structural mounting frame of the utility model.

[0021] In the figure: 1. jig plate; 2. mounting frame; 3. handle; 4. anti-corrosion baffle; 5. positioning block; 6. electrode body; 7. positioning hole; 8. hook; 9. mounting slot; 10. insert block; 11. positioning column; 12. positioning rod; 13. anti-corrosion film; 14. positioning spring; 15. positioning plate; 16. rubber bump. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0023] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0024] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to direct connections, indirect connections through an intermediate medium, or internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0025] See also Figure 1-3 A CVD dry etching lower electrode comprises a jig plate 1, a hook 8 mounted on the opposite side wall of the jig plate 1, and an electrode body 6. An anti-corrosion film 13 is provided on the jig plate 1, wherein the electrode body 6 is placed on the anti-corrosion film 13. Through the anti-corrosion film 13, the electrode body 6 can avoid direct contact with the jig plate 1 during the processing, thereby effectively preventing the electrode body 6 from being corroded by contact with foreign objects, thereby achieving an anti-corrosion effect on the electrode body 6. Two mounting brackets 2 are relatively mounted on the upper surface of the jig plate 1, and the interiors of the two mounting brackets 2 are provided with elastic fixing members. Positioning assembly, a positioning plate 15 is installed at the bottom of the elastic positioning assembly, wherein the two ends of the anti-corrosion film 13 are respectively fixed between the two positioning plates 15 and the jig plate 1, wherein the elastic positioning assembly includes a positioning spring 14 fixedly installed at the bottom of the mounting frame 2, a positioning rod 12 arranged inside the positioning spring 14, and a handle 3 installed at the top of the positioning rod 12, wherein one end of the positioning spring 14 is fixedly connected to the inner top wall of the mounting frame 2, and the other end is fixedly connected to the side wall of the positioning rod 12, wherein the positioning plate 15 is fixedly installed at the bottom of the positioning rod 12, so that The elastic force of the positioning spring 14 makes the positioning rod 12 keep the tendency to move downward, and then the positioning plate 15 can keep the tendency to move downward, so as to achieve the effect of fixing the anti-corrosion film 13 on the jig plate 1, thereby effectively preventing the anti-corrosion film 13 from sliding and causing corrosion of the electrode body 6 and the jig plate 1. The electrode body 6 further achieves the anti-corrosion effect. Two positioning blocks 5 are clamped on the jig plate 1. An anti-corrosion baffle 4 is clamped between the two positioning blocks 5. The anti-corrosion baffle 4 is close to the side wall of the electrode body 6. The jig plate 1 is provided with a There are no less than three positioning holes 7, and a positioning column 11 is fixedly installed on the bottom of the positioning block 5, wherein the positioning column 11 is snap-fitted with the positioning hole 7, wherein the positioning holes 7 are evenly opened on the upper surface of the jig plate 1, respectively located on both sides of the anti-corrosion film 13, so that the anti-corrosion baffle 4 can be used to limit the electrode body 6, thereby preventing the electrode body 6 from sliding and corroding due to contact with foreign objects. By snapping the positioning column 11 with the positioning hole 7, the number and position of the anti-corrosion baffle 4 can be adjusted according to actual needs, thereby increasing practicality.

[0026] In this embodiment, a mounting groove 9 is opened on the side wall of the positioning block 5, and an insert block 10 is fixedly installed on the side wall of the anti-corrosion baffle 4, wherein the insert block 10 is clamped with the positioning block 5 through the mounting groove 9, so that the anti-corrosion baffle 4 can be clamped with the positioning block 5 through the mounting groove 9, so that the anti-corrosion baffle 4 can be easily disassembled and installed, thereby increasing the mobility of the protective electrode body 6 and facilitating the replacement and maintenance of the anti-corrosion baffle 4.

[0027] In this embodiment, a rubber bump 16 is fixedly installed on the bottom of the positioning plate 15. The rubber material properties of the rubber bump 16 can increase the friction between the positioning plate 15 and the anti-corrosion film 13, thereby improving the fixing effect of the anti-corrosion film 13.

[0028] Working principle: Pull the handle 3 upwards, then lay the anti-corrosion film 13 on the jig plate 1, and then release the handle 3. The positioning rod 12 will move downward through the elastic force of the positioning spring 14 until the positioning plate 15 fixes the anti-corrosion film 13 on the jig plate 1, thereby achieving the effect of fixing the anti-corrosion film 13. Then, place the electrode body 6 on the anti-corrosion film 13. Further, clamp the positioning block 5 on the jig plate 1, and then clamp the anti-corrosion baffle 4 between the two positioning blocks 5, so as to prevent the electrode body 6 from sliding, thereby enabling the electrode body 6 to achieve an anti-corrosion effect during the processing process.

[0029] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A CVD dry etching lower electrode, comprising a tool plate (1), hooks (8) mounted on opposite side walls of the tool plate (1), and an electrode body (6), characterized in that: An anti-corrosion film (13) is provided on the jig plate (1), wherein the electrode body (6) is placed on the anti-corrosion film (13), two mounting frames (2) are relatively installed on the upper surface of the jig plate (1), and elastic positioning components are provided inside the two mounting frames (2), and a positioning plate (15) is installed at the bottom of the elastic positioning component, wherein the two ends of the anti-corrosion film (13) are respectively fixed between the two positioning plates (15) and the jig plate (1), and two positioning blocks (5) are clamped on the jig plate (1), and an anti-corrosion baffle (4) is clamped between the two positioning blocks (5), and the anti-corrosion baffle (4) is close to the side wall of the electrode body (6).

2. The CVD dry-etched lower electrode according to claim 1, characterized in that: The elastic positioning assembly comprises a positioning spring (14) fixedly mounted on the bottom of the mounting frame (2), a positioning rod (12) arranged inside the positioning spring (14), and a handle (3) mounted on the top of the positioning rod (12), wherein one end of the positioning spring (14) is fixedly connected to the inner top wall of the mounting frame (2), and the other end is fixedly connected to the side wall of the positioning rod (12), wherein the positioning plate (15) is fixedly mounted on the bottom of the positioning rod (12).

3. The CVD dry-etched lower electrode according to claim 1, characterized in that: A rubber bump (16) is fixedly mounted on the bottom of the positioning plate (15).

4. The CVD dry-etched lower electrode according to claim 1, characterized in that: The jig plate (1) is provided with no less than three positioning holes (7), and a positioning column (11) is fixedly installed on the bottom of the positioning block (5), wherein the positioning column (11) is engaged with the positioning hole (7).

5. The CVD dry-etched lower electrode according to claim 4, characterized in that: The positioning holes (7) are evenly opened on the upper surface of the jig plate (1) and are respectively located on both sides of the anti-corrosion film (13).

6. The CVD dry-etched lower electrode according to claim 1, characterized in that: A mounting groove (9) is provided on the side wall of the positioning block (5), and an insert block (10) is fixedly installed on the side wall of the anti-corrosion baffle (4), wherein the insert block (10) is clamped with the positioning block (5) through the mounting groove (9).

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