Portable wafer box cover opening and closing device

Abstract

The utility model discloses a portable wafer box cover opening and closing device which is provided with a groove-shaped support provided with a T-shaped key and a driving motor, and the driving motor drives the T-shaped key to rotate so as to control opening or closing of a locking device of a wafer box cover; the cover plate is mounted at the opening of the groove-shaped bracket and is used for sealing the driving motor in the groove-shaped bracket; the T-shaped key is exposed out of the groove-shaped bracket from one side of the cover plate; the grip is arranged on the groove-shaped bracket and is used for holding in the cover opening and closing process and providing a supporting point for vertical placement of the box cover after the cover is opened; and the switch button is arranged on the grip and is used for controlling the driving motor to drive the T-shaped key to open or close the locking device of the wafer box cover. According to the utility model, not only can the convenience of manual uncovering be realized, but also the pollution caused by random placement of the box cover after the box cover is manually opened can be effectively avoided, and the stability and mistake proofing of taking and placing of the wafer box cover are improved. The portable electronic cigarette is small in size, light in weight and good in portability.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a portable wafer box opening and closing cover device used in a wafer processing process. Background Art

[0002] In the semiconductor manufacturing industry, while automated processing equipment can automatically open and close wafer cassette lids, some processes are still largely manual. These include visual inspection, metal detection on silicon wafer surfaces, and customized semi-automated equipment. Typically, manual cassette lid opening and closing involves inserting a T-shaped key into the cassette lid's rotational hole, rotating two separate T-shaped keys, and then manually removing the lid. Manually removing the lid often inevitably results in contact with the inside of the lid, causing contamination. Furthermore, the removed lid can only be placed flat on a table; vertical placement requires a separate lid support. During this process, the lid lacks a suitable position for manual lifting, making it prone to slipping or falling onto the cassette, damaging the wafers. Alternatively, the lid could fall to the floor, damaging or contaminating the cassette lid. Furthermore, currently used automated cassette lid opening and closing devices are bulky and cumbersome, making them difficult to maneuver and unsuitable for manual operations. Utility Model Content

[0003] In view of the defects or shortcomings in the manual opening and closing of the wafer box cover in the current wafer production process, the purpose of the present utility model is to provide a portable wafer box cover opening and closing device, which can facilitate manual operation of the opening and closing of the box cover while effectively avoiding the pollution caused by its taking and placing methods and storage methods, while also ensuring its portability.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A portable wafer box cover opening and closing device, the device comprising:

[0006] A slot-shaped bracket is equipped with a T-shaped key and a drive motor, and the drive motor drives the T-shaped key to rotate to control the opening or closing of the locking device of the wafer box cover;

[0007] The cover plate is installed at the opening of the slot bracket and is used to seal the drive motor inside the slot bracket; the T-shaped key is exposed from one side of the cover plate to the outside of the slot bracket;

[0008] The handle is set on the slot-shaped bracket, which is used to hold the lid during opening and closing and to provide a support point for the lid to be placed vertically after opening;

[0009] The switch button is installed on the handle and is used to control the drive motor to drive the T-shaped key to open or close the locking device of the wafer box cover.

[0010] Furthermore, a positioning pin is provided on the cover plate for positioning the T-shaped key when it is inserted into the box cover and for supporting the box cover when it is taken out and placed.

[0011] Furthermore, the handles are provided with two, symmetrically mounted and fixed on the side opposite to the cover plate, and the switch button is provided on one of the handles. Preferably, the two handles are respectively bent downward.

[0012] Furthermore, a groove is provided at the opening of the groove-shaped bracket, and a sealing ring is installed in the groove to ensure the sealing inside the groove-shaped bracket.

[0013] Furthermore, the drive motor is a micro drive motor, which drives the T-shaped key to rotate through a coupling.

[0014] Furthermore, the T-shaped key is fixed to the cover plate through a bearing and is coaxially connected to the motor shaft of the drive motor through a coupling.

[0015] Furthermore, the cover plate is fixed to the groove bracket by fixing bolts.

[0016] Furthermore, the trough-type bracket is a rectangular trough-type bracket, and a fixing point for installing the drive motor is provided inside.

[0017] The advantages of the present invention are:

[0018] The portable wafer box lid opening and closing device of the present invention is convenient because it uses a T-shaped key mounted on a bracket to drive the opening and closing of the lid by a motor. A handle is provided to the user to improve the stability and safety of the lid when taking it in and out. The handle also provides a stable support point for the lid to be placed perpendicular to the table, greatly reducing the probability of the lid being contaminated. In addition, the portable wafer box lid opening and closing device is made of mostly non-metallic wear-resistant materials, which reduces the overall weight. It is also small in size and has good portability. Overall, the present invention not only improves the user's work efficiency, but also provides protection for the safety of products during the production process. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a three-dimensional view of the portable wafer box lid opening and closing device viewed from the side of the cover.

[0020] Figure 2 This is a three-dimensional view of the portable wafer box lid opening and closing device viewed from the handle side.

[0021] Figure 3 A schematic diagram showing the slotted bracket and the sealing ring slot provided thereon, the fixing bolt holes for fixing the cover plate, the installation position of the drive motor in the slotted bracket, and the connection between the drive motor and the T-key.

[0022] Figure 4 Schematic diagram of the cover structure.

[0023] Figure 5 A schematic diagram of the structure of a handle with a switch button.

[0024] Figure 6 A perspective view of the drive motor.

[0025] Figure 7 It is a three-dimensional diagram of a T-shaped key.

[0026] Figure 8 A three-dimensional diagram of a switch button.

[0027] Figure 9 This is a structural diagram of using a portable wafer box cover opening and closing device to open and close the wafer box cover.

[0028] Figure 10 Schematic diagram of a portable wafer box lid opening and closing device supporting the box lid and placing it on a table.

[0029] Figure 11 Schematic diagram of the structure of the wafer box cover.

[0030] Reference numerals:

[0031] 1-handle, 2-slot-type bracket, 3-cover, 4-T-type key, 5-fixing bolt, 6-switch button, 7-drive motor, 8-wafer box, 9-wafer box cover, 201-groove, 202-slot-type bracket fixing bolt hole, 301-locating pin, 302-T-type key installation hole, 303-cover fixing bolt hole, 901-locating hole, 902-T-type key insertion hole. DETAILED DESCRIPTION

[0032] The present invention will be further described in detail below in conjunction with the accompanying drawings. It should be noted that the following description of the present invention is merely an illustration of a specific embodiment of the present invention and does not constitute a limitation on the present invention. It should also be emphasized that, for the purpose of facilitating the description of the present invention, the accompanying drawings only list at least the parts included in the present invention, and any extensions thereof are also included in the present invention.

[0033] like Figures 1 to 8 As shown, the portable wafer box cover switch device of the present invention includes a handle 1, a groove bracket 2, a cover plate 3, a T-shaped key 4, a fixing bolt 5, a switch button 6, a drive motor 7 and other components.

[0034] Among them, such as Figure 1 、 2As shown, there are two handles 1, which are symmetrically mounted and fixed on the slot bracket 2, for holding with both hands during the process of opening and closing the cover. The slot bracket 2 is a rectangular slot structure, and its interior provides space and fixing points for the installation of the drive motor 7. Figure 3 As shown, the cover plate 3 is installed at the opening of the slot bracket 2. The slot bracket 2 is provided with a groove 201 at its opening. A sealing ring is installed in the groove 201 to ensure the sealing inside the slot bracket 2. In addition, as shown in FIG. Figure 4 As shown, the slot bracket 2 and the cover plate 3 are fixedly connected by fixing bolts. That is, the slot bracket 2 is provided with a plurality of fixing bolt holes 202, and the cover plate 3 has a plurality of cover plate fixing bolt holes 303 corresponding to the slot bracket fixing bolt holes 202. A plurality of fixing bolts 5 are respectively fastened to the cover plate fixing bolt holes 303 and the slot bracket fixing bolt holes 202, thereby fixing the cover plate 3 to the slot bracket 2. Two T-shaped keys 4 are symmetrically arranged in the slot bracket 2 and are exposed to the outside of the slot bracket 2 from one side of the cover plate. Figure 6 As shown, the two drive motors 7 are micro drive motors, symmetrically installed inside the slot bracket 2, and powered by batteries. Figure 4 As shown, two T-shaped keys 4 are fixed to two T-shaped key mounting holes 302 on the cover plate 3 through bearings, and are coaxially connected to the motor shaft of the drive motor 7 through a coupling. The drive motor 7 drives the T-shaped key 4 to rotate to open and close the wafer box cover. Two positioning pins 301 are provided on the cover plate 3 for inserting into the corresponding two positioning holes 901 on the wafer box cover 9 (as shown in FIG. Figure 11 As shown), it plays the role of positioning and supporting the entire wafer box cover device when opening and closing the box cover. Figure 5 As shown, the switch button 6 is installed on the handle 1 at a position convenient for the user to press with his fingers. The user presses the switch button to control the drive motor 7 to drive the T-shaped key 4 to rotate, thereby opening and closing the wafer box cover.

[0035] like Figure 9 、 Figure 10 、 Figure 11As shown, when a user uses the portable wafer cassette lid opening and closing device to open the wafer cassette lid 9 of the wafer cassette 8, the user grasps the handle 1 with both hands and aligns the two locating pins 301 on the cover plate 3 with the two locating holes 901 on the wafer cassette lid 9. Simultaneously, the left and right T-keys 4 align with the two T-key insertion holes 902 on the wafer cassette lid 9. After the T-keys 4 are inserted into the T-key insertion holes 902, the cover plate 3 is firmly against the wafer cassette lid 9. The operator then presses the switch button 6 on the handle 1, controlling the drive motor 7 to rotate the T-key 4. The rotation of the T-key 4 drives the locking device of the wafer cassette lid 9 to open the lid. The T-key 4 then secures the lid to the portable wafer cassette lid opening and closing device, and, supported by the two locating pins 301, enhances its stability. The user then lifts the portable wafer cassette lid opening and closing device and the wafer cassette lid 9 together using the handle 1 and places them on a table or other flat surface to complete the lid opening operation. In this case, the portable wafer box cover opening and closing device and the wafer box cover 9 form a whole. Benefiting from the support of the handle 4, it can be stably placed on a desktop or other flat surface vertically or at a certain tilt angle without falling over.

[0036] like Figure 9 、 Figure 10 、 Figure 11 As shown, in the process of the user closing the wafer box cover, the user holds the handle 1 with both hands to pick up the whole consisting of the portable wafer box switch cover device and the wafer box cover 9, aligns it with the cover position of the wafer box 8 and places the wafer box cover 9 on the wafer box 8. With the support of the portable wafer box switch cover device, the user presses the switch button 6 on the handle 1 to control the drive motor 7 to drive the T-shaped key 4 to rotate in the opposite direction. During the rotation, the T-shaped key 4 drives the locking device of the wafer box cover 9 to lock the cover. After the T-shaped key 4 completes locking the locking device of the wafer box cover 9, its rotation angle is aligned with the T-shaped key insertion hole of the wafer box cover 9. At this time, the user can remove the portable wafer box switch cover device to complete the cover closing operation.

[0037] In addition, in the portable wafer box switch cover device of the present invention, the handle 4 is bent downward, which provides a good direction mark for the user when reinstalling the box cover. In the case of the box cover being tilted, the direction of the box cover can also be quickly identified, thereby improving work efficiency. The switch button is installed on the vertical surface of the handle and is set at a position that is convenient for the user to press when holding the handle. Most components of the portable wafer box switch cover device of the present invention, such as the groove bracket, cover plate, handle, T-shaped key, etc., are made of non-metallic wear-resistant materials, which reduces the overall weight, and its volume is small, and it has good portability.

[0038] In view of the defects or shortcomings of the manual wafer box cover opening and closing in the current wafer production process, the utility model designs a portable wafer box cover opening and closing device, which not only facilitates manual operation of opening and closing the box cover, but also effectively avoids the box cover contamination caused by the taking and placing method and the storage method, thereby causing wafer contamination; in addition, the device is highly convenient and error-proof, thereby improving the user's work efficiency; finally, the device is small in size, light in weight, and also highly portable.

Claims

1. A portable wafer box cover opening and closing device, characterized in that: The device has: A slot-shaped bracket is equipped with a T-shaped key and a drive motor, and the drive motor drives the T-shaped key to rotate to control the opening or closing of the locking device of the wafer box cover; A cover plate is installed at the opening of the slot bracket and is used to seal the drive motor inside the slot bracket; The T-shaped key is exposed from one side of the cover plate to the outside of the slotted bracket; The handle is set on the slot-shaped bracket, which is used to hold the lid during opening and closing and to provide a support point for the lid to be placed vertically after opening; The switch button is installed on the handle and is used to control the drive motor to drive the T-shaped key to open or close the locking device of the wafer box cover.

2. The portable wafer box cover opening and closing device according to claim 1, characterized in that: The cover plate is provided with a positioning pin for positioning the T-shaped key when it is inserted into the box cover and for supporting the box cover when it is taken out and placed.

3. The portable wafer box cover opening and closing device according to claim 1, characterized in that: There are two handles, which are symmetrically mounted and fixed on the side opposite to the cover plate, and the switch button is arranged on one of the handles.

4. The portable wafer box cover opening and closing device according to claim 3, characterized in that: The two handles are bent downwards respectively.

5. The portable wafer box cover opening and closing device according to claim 1, characterized in that: A groove is provided at the opening of the groove-shaped bracket, and a sealing ring is installed in the groove.

6. The portable wafer box cover opening and closing device according to claim 1, characterized in that: The driving motor is a micro driving motor, which drives the T-shaped key to rotate through a coupling.

7. The portable wafer box cover opening and closing device according to claim 6, characterized in that: The T-shaped key is fixed to the cover plate through a bearing and is coaxially connected to the motor shaft of the drive motor through a coupling.

8. The portable wafer box cover opening and closing device according to claim 1, characterized in that: The cover plate is fixed to the groove bracket by fixing bolts.

9. The portable wafer box cover opening and closing device according to claim 1, characterized in that: The trough-type bracket is a rectangular trough-type bracket, and a fixing point for installing the drive motor is provided inside.

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