Three-dimensional magnetic field generator

Abstract

The utility model provides a three-dimensional magnetic field generator, which comprises three groups of magnetic field extension ends respectively arranged along a first shaft, a second shaft and a third shaft, at least one coil is arranged in a magnetic circuit where the magnetic field extension ends are located, and a required three-dimensional magnetic field can be generated at a position to be detected to meet detection requirements. Meanwhile, an accommodating space is provided for the fixing assembly and the displacement assembly of the probe; when the electromagnet is applied to the magnetic field probe station, the position of the probe can be conveniently adjusted, the probe can be in contact with a measured object conveniently, the problem that the large size of the electromagnet interferes probe insertion can be solved, and the use of the magnetic field probe station is facilitated.

Description

Technical Field

[0001] The utility model belongs to the field of detection equipment, relates to a device for generating a magnetic field environment of a probe station, and specifically relates to a three-dimensional magnetic field generator. Background Art

[0002] Probe station testing equipment is a widely used non-destructive testing method, with extensive applications in the fields of physics and semiconductors. During the test process, the probe needs to contact the preset position or contact point of the object being tested, and the probe inputs and / or receives signals from the object being tested. The performance of the object being tested is then analyzed based on the probe input and / or output signals. The probe position needs to be adjusted according to the test requirements to ensure that the probe reaches the corresponding position.

[0003] In some cases, it's necessary to test the performance of the object under test in a magnetic field. This requires using a corresponding excitation component to generate a magnetic field and placing the object under test within the magnetic field. To generate this magnetic field, an electromagnet is typically used. Because the distribution and intensity of the magnetic field can vary spatially, the object under test typically needs to be placed close to the electromagnet to minimize variations in the magnetic field and facilitate establishing a clear magnetic field environment for testing. However, when the electromagnet is close to the object under test, it occupies a larger space, preventing the probe from contacting the object, and interfering with needle insertion and testing.

[0004] Therefore, there is an urgent need for an electromagnet that can be easily used in a magnetic field probe station.

[0005] The above information disclosed in the background technology section is only used to enhance understanding of the background of the present invention and therefore may contain information that does not constitute the prior art known to ordinary technicians in this field. Utility Model Content

[0006] In response to the problem of electromagnet interference with probe needle insertion in the prior art, the utility model provides a three-dimensional magnetic field generator, including three groups of magnetic field extension ends arranged along the first axis, the second axis, and the third axis respectively, each group of magnetic field extension ends including two magnetic field extension ends arranged opposite to each other, the first axis and the second axis intersect at a first preset point in the first plane, the grouped magnetic field extension ends are located on both sides of the first preset point on the first axis and the second axis respectively, the ends of the magnetic field extension ends arranged along the first axis and the second axis form a preset area, the third axis passes through the preset area and is perpendicular to the first plane; at least one coil is arranged in the magnetic circuit where the magnetic field extension end is located; the coil is constructed in a form that can allow current of variable intensity and direction to pass through it.

[0007] According to one embodiment of the present invention, the first axis and the second axis are perpendicular to each other.

[0008] According to one embodiment of the present invention, each magnetic field extension end is respectively sleeved with at least one coil.

[0009] According to one embodiment of the present invention, in the magnetic field extension ends arranged along the first axis and the second axis, the ends of adjacent magnetic field extension ends are provided with end surfaces arranged facing each other.

[0010] According to one embodiment of the present invention, the end of the same magnetic field extension end is provided with two end surfaces, and the two end surfaces are perpendicular to each other.

[0011] According to one embodiment of the present invention, the two magnetic field extension ends arranged along the third axis are respectively located on two sides of the first plane.

[0012] According to one embodiment of the present invention, the third axis passes through the first preset point.

[0013] According to one embodiment of the present invention, the three-dimensional magnetic field generator further includes a first magnetic yoke, and the magnetic field extension ends arranged along the first axis and the second axis are respectively connected to the first magnetic yoke.

[0014] According to one embodiment of the present invention, one of the magnetic field extension ends arranged along the third axis is connected to the first magnetic yoke.

[0015] According to one embodiment of the present invention, the two magnetic field extension ends arranged along the third axis are respectively provided with end faces and are arranged facing each other.

[0016] According to one embodiment of the present invention, projections of end surfaces of two magnetic field extension ends arranged along the third axis on the first plane are at least partially located within the preset area.

[0017] The present invention has at least the following beneficial effects: it can generate the required three-dimensional magnetic field at the position to be measured to meet the detection requirements, and at the same time, by arranging magnetic field extension ends along the first axis, the second axis, and the third axis, a gap is formed to enable the probe to extend toward the object to be measured, and at the same time, the gap gradually becomes larger in the direction from the preset area to the external space of the three-dimensional magnetic field generator, thereby providing an accommodation space for the fixed component and the displacement component of the probe; when applied to a magnetic field probe station, the position of the probe can be easily adjusted to facilitate the contact between the probe and the object to be measured, which can solve the problem that the larger volume of the electromagnet interferes with the probe needle insertion, and is convenient for the use of the magnetic field probe station. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 Schematic diagram of the overall structure of an embodiment of a three-dimensional magnetic field generator.

[0019] Figure 2 for Figure 1A view from another perspective of the schematic diagram shown.

[0020] Figure 3 A schematic diagram of the positional relationship between a three-dimensional magnetic field generator, a probe assembly, and an object under test.

[0021] Figure 4 for Figure 3 A view from another perspective of the schematic diagram shown.

[0022] Figure 5 for Figure 1 A partial enlarged view of the vicinity of the magnetic field extension end of the illustrated embodiment.

[0023] Figure 6 A schematic diagram of the positions of magnetic field extension ends arranged along the first axis and the second axis according to an embodiment.

[0024] Figure 7 Schematic diagram of another embodiment of a magnetic field extension end arranged along the first axis and the second axis. DETAILED DESCRIPTION

[0025] In order to make the purpose and features of the present invention more obvious and easy to understand, the following is a further description of the specific embodiments of the present invention in conjunction with the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise ratios, which are only used for the purpose of conveniently and clearly assisting in explaining the embodiments of the present invention.

[0026] The utility model provides a three-dimensional magnetic field generator, including three groups of magnetic field extension ends respectively arranged along the first axis L1, the second axis L2, and the third axis L3, each group of magnetic field extension ends including two magnetic field extension ends arranged opposite to each other. Figures 1 to 6 , shows a feasible form, wherein a first magnetic field extension end 111 and a second magnetic field extension end 112 are arranged along the first axis L1, a third magnetic field extension end 121 and a fourth magnetic field extension end 122 are arranged along the second axis L2, and a fifth magnetic field extension end 131 and a sixth magnetic field extension end 132 are arranged along the third axis L3.

[0027] The first axis L1 and the second axis L2 intersect at a first preset point P1 in the first plane S1, and the grouped magnetic field extension ends are located on both sides of the first preset point P1 on the first axis L1 and the second axis L2, respectively. Accordingly, the ends of the magnetic field extension ends arranged along the first axis L1 and the second axis L2 can be made close to each other and enclose a preset area C1, thereby forming a magnetic field in the preset area C1 that is at least transformable and controllable within the first plane S1.

[0028] The third axis L3 passes through the preset area C1 and is perpendicular to the first plane S1. An area C2 is formed between the extension ends of the magnetic field arranged along the third axis L3. Figure 6, showing a positional relationship between area C2 and a preset area C1, wherein the preset area C1 at least partially overlaps with area C2.

[0029] At least within the overlapping range of the preset area C1 and area C2, the magnetic field can be simultaneously affected by three sets of magnetic field extension ends set along the first axis L1, the second axis L2, and the third axis L3, thereby generating a three-dimensionally variable magnetic field within the area to meet the testing requirements under the three-dimensional magnetic field.

[0030] In order to enable the ends of the magnetic field extension ends to form an outwardly extending magnetic field, at least one coil 200 can be provided as needed in the magnetic circuit where the magnetic field extension ends are located to provide a magnetic field to the corresponding magnetic field extension end. Specifically, when only one magnetic field extension end is required to extend the magnetic field outward, at least one coil 200 can be provided in the magnetic circuit where the one magnetic field extension end is located. When two magnetic field extension ends are required to extend the magnetic field outward, if the two magnetic field extension ends are in the same magnetic circuit, at least one coil 200 can be provided in that magnetic circuit. When the two magnetic field extension ends are in substantially different magnetic circuits, at least one coil 200 can be provided in each of the corresponding different magnetic circuits. When three magnetic field extension ends are required to extend the magnetic field outward, if the three magnetic field extension ends are substantially in the same magnetic circuit, at least one coil can be provided in each corresponding magnetic circuit. If the three magnetic field extension ends are in three magnetic circuits, at least one coil 200 can be provided in each corresponding magnetic circuit. When the three magnetic field extension ends are in two magnetic circuits, the configuration is similar to the above situation. As a more feasible form, at least one coil 200 may be respectively arranged in the magnetic circuits where the magnetic field extension ends arranged along the first axis L1 , the second axis L2 , and the third axis L3 are located, so as to provide corresponding magnetic fields.

[0031] In addition, when a plurality of coils 200 are provided, current may be supplied to only some of the coils to form magnetic fields extending outward at the corresponding extension ends of the geomagnetic field.

[0032] Specifically, when the magnetic field extension ends 111 and 112 set along the first axis L1 extend through the same magnetic circuit, a coil 200 can be set on the magnetic circuit where the magnetic field extension ends 111 and 112 are located, so that the coil 200 generates a magnetic field and transmits it to the magnetic field extension ends 111 and 112 along the magnetic circuit, and then extends outward through the magnetic field extension ends 111 and 112; when the magnetic field extension ends 111 and 112 set along the first axis L1 extend through different magnetic circuits, coils 200 can be respectively set on the magnetic circuit where the magnetic field extension end 111 is located and the magnetic circuit where the magnetic field extension end 112 is located, so as to form a magnetic field extending outward at the ends of the magnetic field extension ends 111 and 112.

[0033] For the magnetic field extension ends set along the first axis L1 and the second axis L2, generally, corresponding coils 200 need to be set for the magnetic field extension ends set along the first axis L1 and the second axis L2, respectively. For example, coils 200 are set on the magnetic circuit where the magnetic field extension ends 111 and 112 set along the first axis L1 are located, and coils 200 are set on the magnetic circuit where the magnetic field extension ends 121 and 122 set along the second axis L2 are located. The coils 200 corresponding to the magnetic field extension ends along different axes are controlled separately, so that the direction, intensity and other characteristics of the magnetic field extending in the preset area C1 can be adjusted.

[0034] When the magnetic field extension ends 131 and 132 arranged along the third axis L3 are arranged in the same magnetic circuit, a coil 200 can be set in the corresponding magnetic circuit to form an extended magnetic field at the ends of the magnetic field extension ends 131 and 132 arranged along the third axis L3; when the magnetic field extension ends 131 and 132 set along the third axis L3 are not set in the same magnetic circuit, coils 120 need to be respectively set for the corresponding magnetic field extension ends 131 and 132 to form an extended magnetic field at the ends of the corresponding magnetic field extension ends 131 and 132.

[0035] It's important to note that the aforementioned magnetic circuit refers to the path along which the magnetic field extends. For example, within a magnetic core, the magnetic field generally extends along the core; within a pole piece, the magnetic field generally extends along the pole piece; and on the surface of a pole piece, the magnetic field extends from the pole piece surface into the surrounding environment. In other words, a magnetic circuit can manifest itself as a path along a physical object or within a specific space. Generally, the path along which the magnetic field useful for detection is considered a magnetic circuit.

[0036] Coil 200 is configured to pass current of variable strength and direction through it, thereby varying the direction and strength of the magnetic field it generates, thereby adjusting the strength and direction of the magnetic field extending outward from the corresponding magnetic field extension end. Each magnetic field extension end can be fitted with at least one coil 200. In other words, in some cases, multiple coils 200 can be fitted around a single magnetic field extension end to meet specific magnetic field control requirements.

[0037] See also Figure 3 、 Figure 4, shows a schematic diagram of probe detection when using the three-dimensional magnetic field generator provided by the present invention. The probe assembly 400 is fixed to the external device through the probe holder 420. The probe assembly 400 controls and adjusts the position of the probe 410 so that it can contact or separate from the object to be measured 500. The plane to be measured S2 of the object to be measured 500 is set close to the first plane S1. By utilizing the divergence characteristics of the magnetic field in space, the magnetic field formed by the magnetic field extension end set along the first axis L1 and the second axis L2 in the preset area C1 can act on the test area of ​​the plane to be measured S2 corresponding to the preset area C1 with very similar or the same field strength and direction; the end of the magnetic field extension end set along the third axis L3 approaches the test area from both sides of the plane to be measured S2 of the object to be measured 500, so that its extended magnetic field can act on the position to be measured of the object to be measured 500. When the magnetic field extension end arranged along at least one of the first axis L1 and the second axis L2 extends the magnetic field outward, it can at least affect the magnetism of the object under test 500 along the direction of the plane to be measured S2. Combined with the probe assembly 400, the object under test 500 can be detected when it is in an in-plane magnetic field; when at least one of the magnetic field extension ends 131 and 132 arranged along the third axis L3 extends the magnetic field outward, it can at least affect the magnetism of the object under test 500 in a direction substantially perpendicular to the plane S2. Combined with the probe assembly 400, the object under test 500 can be detected when it is in a vertical magnetic field; combined with the above two, the required three-dimensional magnetic field can be generated at the position to be measured of the object under test 500 to achieve comprehensive detection of the object under test 500.

[0038] See also Figure 6 The magnetic field extension ends are distributed along the first axis L1 and the second axis L2, so that a gap can be formed between the magnetic field extension ends, and the gap can be used to allow the probe 410 to extend into. At the same time, the gap gradually increases in the direction from the preset area C1 to the external space of the three-dimensional magnetic field generator, thereby providing a storage space for the fixed component and the displacement component of the probe 410; the magnetic field extension ends 131 and 132 arranged along the third axis L3 are close to the preset area C1 and the object to be measured 500 through their ends, thereby avoiding the end of the magnetic field extension end being too large to cause the probe 410 to be unable to extend into. Therefore, the three-dimensional magnetic field generator provided by the utility model, when applied to a magnetic field probe station, can conveniently adjust the position of the probe 410 to facilitate the contact between the probe 410 and the object to be measured 500, and can solve the problem of the large volume of the electromagnet interfering with the probe needle, thereby facilitating use.

[0039] See also Figure 6 As a feasible approach, the first axis L1 and the second axis L2 are perpendicular to each other, thereby forming an overall uniformly distributed accommodation and operation area for the probe 410 , thereby enabling substantially the same convenience when operating different probes 410 .

[0040] For the magnetic field extension ends arranged along the first axis L1 and the second axis L2, the preset area C1 is mainly determined by the end positions of the magnetic field extension ends. Specifically, the area enclosed by the ends of the magnetic field extension ends can generally be regarded as the preset area C1, or the preset area C1 can be determined based on the form of the magnetic field extended by the ends of the magnetic field extension ends. In some cases, the ends of the magnetic field extension ends arranged along the first axis L1 and the second axis L2 can be respectively provided with corresponding end surfaces to further facilitate the calculation and adjustment of the magnetic field in the preset area C1. Please refer to Figure 7 , shows a feasible end structure of the magnetic field extension end, wherein the end of each magnetic field extension end 111, 112, 121, 122 is respectively provided with an end surface 111a, 112a, 121a, 122a, and the position of the end surface 111a, 112a, 121a, 122a can be used to easily determine the preset area C1.

[0041] In some cases, the end faces of the magnetic field extension ends can be further adjusted to further optimize the preset area C1 and the magnetic field therein. As a feasible approach, the ends of the adjacent magnetic field extension ends arranged along the first axis L1 and the second axis L2 are provided with end faces arranged opposite to each other, so that the magnetic field extending outward from the magnetic field extension ends can extend outward from the end faces, thereby improving the uniformity and controllability of the magnetic field in the preset area C1. For details, please refer to Figure 5 、 Figure 6 The first magnetic field extension end 111 set along the first axis L1 and the third magnetic field extension end 121 set along the second axis L2 are adjacent to each other, and are respectively provided with end faces 111a and 121a facing each other; the first magnetic field extension end 111 set along the first axis L1 and the second magnetic field extension end 122 set along the second axis L2 are adjacent to each other, and are respectively provided with end faces 111b and 122b facing each other; and the other magnetic field extension ends are similarly provided with corresponding end faces.

[0042] In some cases, the end of the same magnetic field extension end may be further provided with two end surfaces, the two end surfaces being perpendicular to each other, for example, see Figure 6 For the first magnetic field extension end 111 arranged along the first axis L1, its end is provided with two end surfaces 111a and 111b, and the two end surfaces 111a and 111b are perpendicular to each other, and the same applies to the pressure magnetic field extension end.

[0043] The two magnetic field extension ends 131 and 132 arranged along the third axis L3 are respectively located on both sides of the first plane S1; more specifically, please refer to Figure 3When inspecting a wafer or other object to be tested 500, the two magnetic field extension ends 131 and 132 arranged along the third axis L3 need to be further arranged on both sides of the object to be tested 500, thereby forming a corresponding area C2 near the preset area C1. The magnetic field extending in the area C2 is affected by at least one of the magnetic field extension ends 131 and 132 arranged along the third axis L3.

[0044] For the two magnetic field extension ends 131 and 132 arranged along the third axis L3, end surfaces may also be provided on opposite sides of the two ends to facilitate determining the magnitude and direction of the magnetic field extending between the magnetic field extension ends 131 and 132. For details, see Figure 2 、 Figure 5 , shows a feasible approach, wherein the end of the magnetic field extension end 132 is provided with a flat end 132a, and correspondingly, the end of the magnetic field extension end 131 is also provided with a corresponding end 131a, and the ends 131a and 132a of the two magnetic field extension ends 131 and 132 are arranged opposite each other. Preferably, the ends of the magnetic field extension ends 131 and 132 can be arranged directly opposite each other.

[0045] The size of region C2 can be larger than or smaller than the end areas of magnetic field extension ends 131 and 132, or can be substantially the same as the end areas of magnetic field extension ends 131 and 132. The size of region C2 can be adjusted based on the allowable magnetic field variation range, error range, detection range, and the characteristics of magnetic field extension ends 131 and 132 and the corresponding coil 200.

[0046] See also Figure 6 , for the relative range of the preset area C1 and area C2, the two can be made to overlap as much as possible to obtain the largest possible three-dimensional magnetic field area. Figure 2 、 Figure 6 , the third axis L3 can be made to pass through the first preset point P, so that the area C2 is substantially located near the center of the preset area C1, thereby increasing the overlapping range of the two.

[0047] As a preferred embodiment, the end faces 131a, 132a of the two magnetic field extension ends 131, 132 arranged along the third axis L3 are of the same size and face each other, and the projection area C2 of the end faces 131a, 132a on the first plane S1 is located within the aforementioned preset area C1.

[0048] In some cases, the three-dimensional magnetic field generator provided by the present invention further includes a first magnetic yoke 301. Magnetic field extension ends disposed along the first axis L1 and the second axis L2 are respectively connected to the first magnetic yoke 301. This not only secures the magnetic field extension ends, but also provides a path and foundation for the magnetic circuit. Furthermore, in some cases, a fixing plate 311 may be further provided on a side of the first magnetic yoke 301 away from the magnetic field extension ends to facilitate connection to external equipment.

[0049] Furthermore, in some cases, the magnetic field extension end disposed along the third axis L3 can be further connected to the first magnetic yoke 301. In some cases, both the magnetic field extension ends 131 and 132 disposed along the third axis L3 can be connected to the first magnetic yoke 301. However, in actual use, in many cases, it is necessary to adjust the distance between at least the two poles disposed along the third axis L3 to accommodate objects 500 of varying thicknesses. Therefore, one of the magnetic field extension ends disposed along the third axis L3 can be fixed to the first magnetic yoke 301, while the other can be fixed to the second magnetic yoke 302. For the magnetic field extension end 132 that is separately fixed to the magnetic yoke 302, in some cases, the magnetic yoke 302 can also serve as a fixing plate 312 for securing the magnetic field extension end to an external device.

[0050] The above shows and describes the basic principles, main features and advantages of the present invention. Therefore, the above description is only an embodiment of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiment. The above embodiment and description only describe the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention also includes various equivalent changes and improvements, which will fall within the scope of the present invention.

Claims

1. A three-dimensional magnetic field generator, characterized in that: The invention comprises three groups of magnetic field extension ends respectively arranged along a first axis, a second axis and a third axis, each group of magnetic field extension ends comprising two magnetic field extension ends arranged opposite to each other, the first axis and the second axis intersecting at a first preset point in a first plane, the grouped magnetic field extension ends being respectively located on both sides of the first preset point on the first axis and the second axis, the ends of the magnetic field extension ends arranged along the first axis and the second axis enclosing a preset area, the third axis passing through the preset area and being perpendicular to the first plane; at least one coil is arranged in the magnetic circuit where the magnetic field extension ends are located; the coil is constructed in a form capable of allowing current of variable intensity and direction to pass through it.

2. The three-dimensional magnetic field generator according to claim 1, wherein: The first axis and the second axis are perpendicular to each other.

3. The three-dimensional magnetic field generator according to claim 1, wherein: Each magnetic field extension end is respectively sleeved with at least one coil.

4. The three-dimensional magnetic field generator according to claim 1, wherein: Among the magnetic field extension ends arranged along the first axis and the second axis, ends of adjacent magnetic field extension ends are provided with end surfaces arranged opposite to each other.

5. The three-dimensional magnetic field generator according to claim 4, characterized in that: The end of the same magnetic field extension end is provided with two end surfaces, and the two end surfaces are perpendicular to each other.

6. The three-dimensional magnetic field generator according to claim 1, wherein: The two magnetic field extension ends arranged along the third axis are respectively located on two sides of the first plane.

7. The three-dimensional magnetic field generator according to claim 1, characterized in that: The third axis passes through the first preset point.

8. The three-dimensional magnetic field generator according to claim 1, wherein: The three-dimensional magnetic field generator further includes a first magnetic yoke, and the magnetic field extension ends arranged along the first axis and the second axis are respectively connected to the first magnetic yoke.

9. The three-dimensional magnetic field generator according to claim 8, characterized in that: At least one of the magnetic field extension ends disposed along the third axis is connected to the first magnetic yoke.

10. The three-dimensional magnetic field generator according to claim 9, characterized in that: The two magnetic field extension ends arranged along the third axis are respectively provided with end surfaces, and the projections of the end surfaces of the two magnetic field extension ends arranged along the third axis on the first plane are at least partially located in the preset area.

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