Factory-leaving infrared detection equipment for quartz boat slotted sheets

Abstract

The utility model relates to factory infrared detection equipment for a quartz boat slotted vane. The detection equipment comprises a rack, and a conveying mechanism, a purging mechanism and a detection mechanism which are sequentially arranged on the rack along the conveying direction of the quartz boat slotted vane, the conveying mechanism comprises a feeding transverse conveying belt, a turning conveying belt and a discharging transverse conveying belt, a housing is further fixedly arranged on the top face of the rack, an air pipe is fixedly arranged on the outer wall of the top of the housing, an air outlet right facing the feeding transverse conveying belt is formed in the bottom of the front end of the air pipe, and the rear end of the air pipe is connected with a fan through a pipeline. The detection mechanism comprises an infrared thermal imager I and an infrared thermal imager II; before detection, the blowing mechanism consisting of the air pipe and the fan is used for blowing the quartz boat slotted vane, so that impurities such as dust and oil dirt on the surface of the quartz boat slotted vane are effectively removed, the accuracy and reliability of a detection result are ensured, and the design not only improves the detection precision, but also avoids the phenomenon of misjudgment or missed judgment caused by impurity interference.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz boat slot production and processing, in particular to infrared detection equipment for quartz boat slots before they leave the factory. Background Art

[0002] As a key semiconductor material processing tool, quartz boat trough wafers play a vital role in the semiconductor manufacturing process. However, in the quality inspection link before they leave the factory, traditional inspection methods often have problems such as low efficiency and insufficient precision. Specifically, existing quartz boat trough wafer inspection equipment can usually only inspect single or small amounts of samples, and it is difficult to achieve a continuous and automated inspection process, which not only leads to low inspection efficiency, but also increases manpower and time costs.

[0003] In addition, during the processing and transportation of the quartz boat trough, dust, oil and other impurities may adhere to its surface. These impurities will interfere with the normal operation of the detection equipment and cause inaccurate detection results. The existing detection methods often lack effective means of cleaning the surface of the quartz boat trough before detection, which further affects the accuracy and reliability of the detection.

[0004] Therefore, there is an urgent need for a factory inspection equipment that can realize continuous transportation and automatic inspection of quartz boat slots and effectively clean their inspection surfaces before inspection, so as to improve inspection efficiency, reduce costs, and ensure the accuracy and reliability of inspection results. Utility Model Content

[0005] The technical problem to be solved by the present invention is to address the deficiencies of the existing technology and provide an infrared inspection device for quartz boat trough sheets before delivery, which can detect defects during the continuous transportation of quartz boat trough sheets and can purge the inspection surface before inspection to obtain more accurate inspection results.

[0006] The technical problem to be solved by the utility model is achieved through the following technical solution. The detection device includes a frame, a conveying mechanism, a purge mechanism and a detection mechanism arranged on the frame in sequence according to the feeding direction of the quartz boat slot;

[0007] The conveying mechanism includes a feed transverse conveyor belt, a turning conveyor belt, and a discharge transverse conveyor belt. The turning conveyor belt is arranged between the feed transverse conveyor belt and the discharge transverse conveyor belt. Quartz boat slot placement areas are sprayed at intervals on the conveyor belt surface of the feed transverse conveyor belt to accommodate containers carrying quartz boat slots.

[0008] A cover is fixed on the top surface of the frame. The feed transverse conveyor belt, the turning conveyor belt and the discharge transverse conveyor belt are all located inside the cover. An air duct is fixed on the top outer wall of the cover. An air outlet facing the feed transverse conveyor belt is opened at the bottom of the front end of the air duct, and a fan is connected to the rear end through a pipeline. The fan is installed on the outer wall of the cover near the feed transverse conveyor belt. The fan supplies air to the air duct, thereby blowing the quartz boat slots on the feed transverse conveyor belt through the air outlet.

[0009] The detection mechanism includes an infrared thermal imager I and an infrared thermal imager II. The infrared thermal imager I and the infrared thermal imager II are respectively fixed at the inlet end and the outlet end of the cover near the discharging transverse conveyor belt, so as to detect the quartz boat slot after being purged by the purging mechanism.

[0010] The technical problem to be solved by the present invention can also be achieved through the following technical solutions: the above-mentioned infrared detection equipment for quartz boat slots, the feeding transverse conveyor belt and the discharging transverse conveyor belt have the same conveying stroke, and the two conveyor belts are arranged in parallel.

[0011] The technical problem to be solved by the present invention can also be achieved through the following technical solutions. In the above-mentioned infrared detection equipment for quartz boat slots, the cover is formed into a roughly square cover.

[0012] The technical problem to be solved by the present invention can also be achieved through the following technical solutions. In the above-mentioned factory infrared detection equipment for quartz boat slots, a mounting plate is welded on the bottom surface of the air duct, a plurality of bolt holes are opened on the mounting plate, and the mounting plate is screwed to the top surface of the cover.

[0013] The technical problem to be solved by the present invention can also be achieved through the following technical solutions: the above-mentioned infrared detection equipment for quartz boat trough sheets, the quartz boat trough sheet placement area is centrally sprayed on the surface of the feed transverse conveyor belt.

[0014] Compared with the prior art, the beneficial technical effects of the present invention are:

[0015] (1) Through the integrated conveying mechanism design, including the feed transverse conveyor belt, the turning conveyor belt and the discharge transverse conveyor belt, the continuous conveying and automated inspection process of the quartz boat slots is realized. This improvement not only greatly improves the inspection efficiency, but also significantly reduces the manpower and time costs, bringing great convenience to the production process of semiconductor manufacturing companies;

[0016] (2) Before testing, the quartz boat slot is purged by a purge mechanism composed of an air duct and a fan, effectively removing dust, oil and other impurities on its surface, thereby ensuring the accuracy and reliability of the test results. This design not only improves the detection accuracy, but also avoids misjudgment or missed judgment caused by interference from impurities;

[0017] (3) The design of the cover protects the conveying mechanism and the detection mechanism from interference from the external environment, ensuring the long-term stable operation of the equipment; in addition, the design of the air duct being screwed to the top surface of the cover through the mounting plate also enhances the overall stability and durability of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the top structure of the utility model;

[0019] Figure 2 This is a side structural schematic diagram of the feed transverse conveyor belt of the present invention.

[0020] Attached photos

[0021] 1. Frame; 2. Quartz boat trough sheet; 3. Feed transverse conveyor belt; 4. Turning conveyor belt; 5. Discharge transverse conveyor belt; 6. Quartz boat trough sheet placement area; 7. Cover; 8. Air duct; 9. Air outlet; 10. Fan; 11. Mounting plate; 12. Infrared thermal imager I; 13. Infrared thermal imager II; 14. Curtain fabric. DETAILED DESCRIPTION

[0022] The following further describes the specific technical solutions of the present invention with reference to the accompanying drawings, so as to facilitate further understanding of the present invention by those skilled in the art, and does not constitute a limitation to their rights.

[0023] Example 1, reference Figure 1-2 , used for the factory infrared detection equipment of quartz boat trough pieces, the detection equipment includes a frame 1, the frame 1 is formed into a roughly square frame structure, and a conveying mechanism, a purge mechanism and a detection mechanism are arranged on the frame 1 in sequence according to the feeding direction of the quartz boat trough pieces 2;

[0024] The conveying mechanism includes a feed transverse conveyor belt 3, a turning conveyor belt 4 and a discharge transverse conveyor belt 5. The feed transverse conveyor belt 3 and the discharge transverse conveyor belt 5 have the same conveying stroke, and the two conveyor belts are arranged in parallel. The turning conveyor belt 4 is arranged between the feed transverse conveyor belt 3 and the discharge transverse conveyor belt 5. Quartz boat trough sheet placement areas 6 are sprayed at intervals on the conveyor belt surface of the feed transverse conveyor belt 3 to place containers carrying quartz boat trough sheets 2, such as square disc-shaped containers with a trough body for accommodating quartz boat trough sheets 2 on the top surface. The quartz boat trough sheet placement area 6 is sprayed centrally on the surface of the feed transverse conveyor belt 3;

[0025] The top surface of the frame 1 is also fixed with a cover shell 7, which is formed into a roughly square cover shell 7. The feed transverse conveyor belt 3, the turning conveyor belt 4 and the discharging transverse conveyor belt 5 are all located inside the cover shell 7. An air duct 8 is fixed on the top outer wall of the cover shell 7. The air duct 8 is formed into a roughly square tube structure. The front end bottom of the air duct 8 is provided with an air outlet 9 facing the feed transverse conveyor belt 3, and the rear end is connected with a fan 10 through a pipeline. The fan 10 is a prior art and its specifications and models can be selected according to the needs of use. The bottom surface of the air duct 8 is welded with a mounting plate 11, which is formed into a roughly square plate-shaped structure and has several bolt holes on the mounting plate 11. The mounting plate 11 is screwed on the top surface of the cover shell 7. The fan 10 is installed on the outer wall of the cover shell 7 near the feed transverse conveyor belt 3, and air is supplied to the air duct 8 through the fan 10, so as to blow the quartz boat slot 2 on the feed transverse conveyor belt 3 through the air outlet 9;

[0026] The detection mechanism includes an infrared thermal imager I12 and an infrared thermal imager II13. The infrared thermal imager I12 and the infrared thermal imager II13 are existing technologies and their specifications and models can be selected according to the use requirements. The infrared thermal imager I12 and the infrared thermal imager II13 are respectively fixed on the cover 7 near the inlet end and the outlet end of the discharging transverse conveyor 5, so as to detect the quartz boat trough sheet 2 after being purged by the purging mechanism. The infrared thermal imager I12 and the infrared thermal imager II13 are mainly used to observe and record abnormal areas in the temperature distribution image. These areas usually correspond to the position and shape of the scratches. The staff can remove and replace the quartz boat trough sheet 2 with obvious scratches according to the abnormal areas in the temperature distribution image;

[0027] In addition, in order to further avoid external interference with the detection operation, we also fix a curtain 12 on the top outer wall of the cover 7 near the air outlet 9. The bottom of the curtain 12 is located above the feed transverse conveyor belt 3 and does not contact the top surface of the feed transverse conveyor belt 3.

[0028] The working principle of the infrared detection equipment for quartz boat slots is as follows:

[0029] (1) Conveying process: After the equipment is started, the container (such as a square disc container) carrying the quartz boat trough sheet 2 is placed on the quartz boat trough sheet placement area 6 of the feed transverse conveyor 3. These areas are pre-sprayed on the surface of the conveyor belt to ensure that the container can be placed stably and centrally on the conveyor belt. The feed transverse conveyor 3 starts to operate and conveys the container and the quartz boat trough sheet 2 inside it to the turning conveyor 4 along the set feeding direction. The turning conveyor 4 is responsible for smoothly transitioning the container from the feed transverse conveyor 3 to the discharge transverse conveyor 5. The container and the quartz boat trough sheet 2 inside it are finally output by the discharge transverse conveyor 5, completing the entire conveying process.

[0030] (2) Purge process: When the container and the quartz boat trough sheet 2 inside it are located on the feed transverse conveyor belt 3, the fan 10 starts to work and supplies air to the air outlet 9 through the air duct 8. The air outlet 9 is facing the quartz boat trough sheet 2 on the feed transverse conveyor belt 3. The blown air flow can effectively remove dust, oil and other impurities on the surface of the quartz boat trough sheet 2. The purge process ensures that the quartz boat trough sheet 2 is in a clean state before detection, thereby improving the accuracy and reliability of the detection.

[0031] (3) Inspection process: After being purged by the purging mechanism, the quartz boat trough piece 2 enters the discharging transverse conveyor belt 5 as the container moves. At the inlet end and the outlet end of the discharging transverse conveyor belt 5, infrared thermal imagers I12 and infrared thermal imagers II13 are fixed respectively. Infrared thermal imagers I12 and infrared thermal imagers II13 perform infrared thermal imaging inspection on the passing quartz boat trough piece 2. They can observe and record abnormal areas in the temperature distribution image. These areas usually correspond to the position and shape of defects such as scratches and cracks. According to the temperature distribution image provided by the infrared thermal imager, the staff can intuitively identify the quartz boat trough piece 2 with obvious scratches or defects and remove or replace them.

Claims

1. Infrared detection equipment for quartz boat slots, characterized by: The detection equipment includes a frame, a conveying mechanism, a purge mechanism and a detection mechanism arranged on the frame in sequence according to the feeding direction of the quartz boat slot; The conveying mechanism includes a feed transverse conveyor belt, a turning conveyor belt, and a discharge transverse conveyor belt. The turning conveyor belt is arranged between the feed transverse conveyor belt and the discharge transverse conveyor belt. Quartz boat slot placement areas are sprayed at intervals on the conveyor belt surface of the feed transverse conveyor belt to accommodate containers carrying quartz boat slots. A cover is fixed on the top surface of the frame. The feed transverse conveyor belt, the turning conveyor belt and the discharge transverse conveyor belt are all located inside the cover. An air duct is fixed on the top outer wall of the cover. An air outlet facing the feed transverse conveyor belt is opened at the bottom of the front end of the air duct, and a fan is connected to the rear end through a pipeline. The fan is installed on the outer wall of the cover near the feed transverse conveyor belt. The fan supplies air to the air duct, thereby blowing the quartz boat slots on the feed transverse conveyor belt through the air outlet. The detection mechanism includes an infrared thermal imager I and an infrared thermal imager II. The infrared thermal imager I and the infrared thermal imager II are respectively fixed at the inlet end and the outlet end of the cover near the discharging transverse conveyor belt, so as to detect the quartz boat slot after being purged by the purging mechanism.

2. The infrared detection device for quartz boat trough wafers according to claim 1, characterized in that: The conveying strokes of the feed transverse conveyor belt and the discharge transverse conveyor belt are the same, and the two conveyor belts are arranged in parallel.

3. The infrared detection device for quartz boat trough wafers according to claim 1, characterized in that: The cover is formed as a substantially square cover.

4. The infrared detection device for quartz boat trough wafers according to claim 1, characterized in that: A mounting plate is welded to the bottom surface of the air duct, a plurality of bolt holes are opened on the mounting plate, and the mounting plate is screwed to the top surface of the cover shell.

5. The infrared detection device for quartz boat trough wafers according to claim 1, characterized in that: The quartz boat slot placement area is centrally sprayed on the surface of the feed transverse conveyor belt.

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