Automatic stabilizing device for seed crystal rope of single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnaces, in particular to an automatic stabilizing device for a seed crystal rope of a single crystal furnace, which comprises an air pressure telescopic rod, an opening and closing component is mounted on one side of an output end of the air pressure telescopic rod, a driving mechanism is mounted on the other side of the air pressure telescopic rod, and one side of the air pressure telescopic rod is mounted on the surface of an isolating valve of the single crystal furnace. One end of the opening and closing assembly is provided with two clamping pieces, the two clamping pieces are hinged to one end of the single crystal furnace isolating valve, a clamping space is formed between the two clamping pieces, the surface of each clamping piece is provided with an adjusting device, the air pressure telescopic rod and the single crystal furnace isolating valve are in hard connection, and the hard connection is rigid connection. By means of the scheme, crystal oscillation abnormity occurring in the crystal pulling process can be relieved, the crystal forming rate is increased, the possibility that crystals fall due to oscillation is reduced, partial automation of a factory is achieved, the workload is reduced, meanwhile, the productivity is improved, and losses caused by accidents are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to an automatic stabilizing device for a seed crystal rope of a single crystal furnace. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows dislocation-free single crystals using the Czochralski method. The seed crystal rope of a single crystal furnace is an important component used to pull crystals in a single crystal furnace. It is usually made of high-strength, high-temperature resistant materials with good flexibility and wear resistance, such as special metal wire or fiber materials. The main function of the seed crystal rope is to connect the seed crystal and the pulling mechanism. The seed crystal is a small crystal with a specific crystal structure and orientation. Through the pulling action of the seed crystal rope, the molten raw material gradually grows a single crystal that meets the requirements on the basis of the seed crystal.

[0003] In daily work, it is found that in the process of pulling single crystal silicon, a steel wire rope is required to suspend the seed crystal and pull out the crystal rod in the molten liquid silicon. There is a certain degree of shaking after the seed crystal is rotated and during the pulling process, and the seed crystal stabilization step needs to be performed manually. In addition, during the pulling process, with the rotation of the crystal, the rotation of the crucible and the influence of the airflow, the crystal will also shake, which affects the crystallization rate and increases the chance of the crystal being bumped or dropped during the pulling process, which leads to a certain degree of shaking after the seed crystal is rotated and during the pulling process, and is prone to bumping and falling. Utility Model Content

[0004] The purpose of the utility model is to solve the shortcomings of the prior art that the seed crystal shakes to a certain extent after rotation and during the pulling process, and is easy to knock and fall, and an automatic stabilizing device for the seed crystal rope of a single crystal furnace is proposed.

[0005] In order to achieve the above-mentioned purpose, the present invention adopts the following technical solutions: an automatic stabilization device for a single crystal furnace seed crystal rope, comprising a pneumatic telescopic rod, an opening and closing assembly is installed on one side of the output end of the pneumatic telescopic rod, and a driving mechanism is installed on the other side of the pneumatic telescopic rod. One side of the pneumatic telescopic rod is installed on the surface of the single crystal furnace isolation valve, and two clamping members are installed on one end of the opening and closing assembly. The two clamping members are hinged on one end of the single crystal furnace isolation valve, and a clamping space is formed between the two clamping members. An adjustment device is provided on the surface of the clamping member. Through the above-mentioned components, when in use, the pneumatic telescopic rod is driven to move by the driving mechanism, and the pneumatic telescopic rod can drive the opening and closing assembly to move, and the opening and closing assembly thereby controls the two clamping members to open or close. When the two clamping members are closed, a clamping space is formed, which can stabilize the steel wire rope, thereby achieving the purpose of stabilizing the seed crystal or crystal, and can alleviate the abnormal crystal shaking that occurs during the crystal pulling process, improve the crystallization rate, reduce the possibility of the crystal falling due to shaking, realize partial automation of the factory, reduce workload while improving production capacity, and reduce losses caused by accidents.

[0006] Preferably, the pneumatic telescopic rod and the single crystal furnace isolation valve are installed in a hard connection manner, and the hard connection is a rigid connection.

[0007] Preferably, the two clamping members are arranged in an arc shape.

[0008] Preferably, the inner diameter of the clamping space formed by the two clamping members is slightly larger than the outer diameter of the wire rope.

[0009] Preferably, the adjusting device includes an adjusting ring, a groove is provided on the surface of the clamping member, the adjusting ring is arranged in the groove, two sliders are fixedly connected to the surface of one side of the adjusting ring, the sliders are slidably connected to the inner wall of the clamping member, the surface of the adjusting ring is rotatably connected to an adjusting screw, a threaded hole is provided on the inner wall of the clamping member, and the adjusting screw is threadedly connected to the inner wall of the threaded hole. Through the above components, when the two clamping members are closed, the adjusting screw can be rotated, the adjusting screw can drive the adjusting ring to move, and the adjusting ring drives the slider to move on the inner wall of the clamping member, so that the size can be adjusted according to different wire ropes, thereby improving the overall flexibility of the equipment.

[0010] Preferably, two shells are fixedly connected to one side surface of the clamping member, the slider is slidably connected to the inner wall of the shell, an indicator block is fixedly connected to the surface of the slider, and a scale is provided on the surface of the shell. Through the above components, when the slider moves in the shell, the indicator block can move on the scale, and cooperate with the scale to achieve precise adjustment.

[0011] Preferably, one end of the adjusting screw is fixedly connected to a rotating handle. By rotating the rotating handle through the above components, the rotating handle can drive the adjusting screw to rotate, thereby realizing the adjustment operation.

[0012] Compared with the prior art, the utility model has the advantages and positive effects that:

[0013] 1、Through this scheme, can alleviate the crystal that occurs in the process of pulling the abnormality of shaking, promote the crystal rate, reduce the possibility of falling of the crystal due to shaking, realize the partial automation of factory, reduce the work load while improving the production capacity, and reduce the loss caused by the accident.

[0014] 2、The utility model discloses a adjusting device can be realized on the device action and seed crystal rope of different sizes, thereby improve the flexibility of the whole equipment, need not replace different types of clamping parts, improve the use of the whole equipment. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 A three-dimensional structure schematic diagram of the automatic stabilizing device of the seed crystal rope of the single crystal furnace is provided for the utility model;

[0016] Figure 2 An adjusting device structure schematic diagram of the automatic stabilizing device of the seed crystal rope of the single crystal furnace is provided for the utility model;

[0017] Figure 3 An adjusting device structure schematic diagram of the automatic stabilizing device of the seed crystal rope of the single crystal furnace is provided for the utility model; Figure 2 An A structure schematic diagram in the utility model is provided;

[0018] Figure 4 An adjusting device partial structure schematic diagram of the automatic stabilizing device of the seed crystal rope of the single crystal furnace is provided for the utility model;

[0019] Figure 5 Another adjusting device partial structure schematic diagram of the automatic stabilizing device of the seed crystal rope of the single crystal furnace is provided for the utility model.

[0020] LEGEND:

[0021] 1, air pressure telescopic rod;2, drive mechanism;3, open-close assembly;4, clamping piece;5, adjusting device;51, adjusting ring;52, adjusting screw;53, shell;54, scale;55, indicating block;56, sliding block;47, groove;58, threaded hole;59, rotating handle. DETAILED DESCRIPTION

[0022] Please refer to Figure 1-Figure 5The utility model provides a technical solution: an automatic stabilization device for a single crystal furnace seed crystal rope, comprising a pneumatic telescopic rod 1, an opening and closing component 3 is installed on one side of the output end of the pneumatic telescopic rod 1, a driving mechanism 2 is installed on the other side of the pneumatic telescopic rod 1, one side of the pneumatic telescopic rod 1 is installed on the surface of the single crystal furnace isolation valve, two clamping parts 4 are installed on one end of the opening and closing component 3, the two clamping parts 4 are hinged on one end of the single crystal furnace isolation valve, a clamping space is formed between the two clamping parts 4, and an adjustment device 5 is provided on the surface of the clamping part 4.

[0023] In this embodiment: when in use, the driving mechanism 2 drives the pneumatic telescopic rod 1 to move, and the pneumatic telescopic rod 1 can drive the opening and closing component 3 to move, and the opening and closing component 3 controls the two clamping parts 4 to open or close. When the two clamping parts 4 are closed, a clamping space is formed, which can stabilize the wire rope, thereby achieving the purpose of stabilizing the seed crystal or crystal, and can alleviate the abnormal crystal shaking that occurs during the crystal pulling process, improve the crystallization rate, reduce the possibility of the crystal falling due to shaking, realize partial automation of the factory, reduce workload while increasing production capacity, and reduce losses caused by accidents.

[0024] Specifically, the pneumatic telescopic rod 1 and the single crystal furnace isolation valve are installed in a hard connection manner, which is a rigid connection.

[0025] Specifically, the two clamping members 4 are arranged in an arc shape.

[0026] Specifically, the inner diameter of the clamping space formed by the two clamping members 4 is slightly larger than the outer diameter of the wire rope.

[0027] Specifically, the adjusting device 5 includes an adjusting ring 51, a groove 47 is provided on the surface of the clamping member 4, the adjusting ring 51 is arranged in the groove 47, two sliders 56 are fixedly connected to the surface of one side of the adjusting ring 51, the sliders 56 are slidingly connected to the inner wall of the clamping member 4, the surface of the adjusting ring 51 is rotatably connected to the adjusting screw 52, ​​a threaded hole 58 is provided on the inner wall of the clamping member 4, and the adjusting screw 52 is threadedly connected to the inner wall of the threaded hole 58.

[0028] In this embodiment: when the two clamping members 4 are closed, the adjusting screw 52 can be rotated, and the adjusting screw 52 can drive the adjusting ring 51 to move, and the adjusting ring 51 drives the slider 56 to move on the inner wall of the clamping member 4, so that the size can be adjusted according to different wire ropes, thereby improving the overall flexibility of the equipment.

[0029] Specifically, two sleeves 53 are fixedly connected to one side surface of the clamping member 4 , a slider 56 is slidably connected to the inner wall of the sleeve 53 , an indicator block 55 is fixedly connected to the surface of the slider 56 , and a scale 54 is opened on the surface of the sleeve 53 .

[0030] In this embodiment, when the slider 56 moves in the housing 53 , the indicator block 55 can move on the scale 54 and cooperate with the scale 54 to achieve precise adjustment.

[0031] Specifically, one end of the adjusting screw 52 is fixedly connected to a rotating handle 59 . By rotating the rotating handle 59 , the adjusting screw 52 can be driven to rotate, thereby achieving an adjusting operation.

[0032] Working principle: When this solution is in use, the driving mechanism 2 is used to control the pneumatic telescopic rod 1 to move. The pneumatic telescopic rod 1 can control the opening and closing component 3 to drive the two clamping parts 4 to close. The two clamping parts 4 form a clamping space. The inner diameter of the clamping space is slightly larger than the size of the wire rope. Therefore, the clamping space formed by the two clamping parts 4 can limit the wire rope and stabilize the wire rope, thereby achieving the purpose of stabilizing the seed crystal or crystal, alleviating the abnormal crystal shaking during the crystal pulling process, improving the crystallization rate, and reducing the possibility of the crystal falling due to shaking, thereby realizing partial automation of the factory and reducing the workload. Improve production capacity and reduce losses caused by accidents. After the end, the pneumatic telescopic rod 1 is reset through the driving mechanism 2. After the reset, the opening and closing component 3 drives the two clamping parts 4 to reset and open. When encountering steel ropes of different sizes, the rotating handle 59 can be rotated after the two clamping parts 4 are closed. The rotating handle 59 drives the adjusting screw 52 to rotate, and the adjusting screw 52 can drive the adjusting ring 51 to move. The adjusting ring 51 drives the slider 56 to move on the inner wall of the clamping part 4 and the shell 53. The indicator block 55 can cooperate with the scale 54 on the surface of the shell 53 to achieve precise adjustment, thereby improving the overall flexibility of the equipment.

Claims

1. An automatic stabilizing device for a single crystal furnace seed rope, comprising a pneumatic telescopic rod (1), characterized in that: An opening and closing assembly (3) is installed on one side of the output end of the pneumatic telescopic rod (1), a driving mechanism (2) is installed on the other side of the pneumatic telescopic rod (1), one side of the pneumatic telescopic rod (1) is installed on the surface of the single crystal furnace isolation valve, one end of the opening and closing assembly (3) is installed with two clamping members (4), the two clamping members (4) are hinged on one end of the single crystal furnace isolation valve, a clamping space is formed between the two clamping members (4), and an adjusting device (5) is provided on the surface of the clamping member (4).

2. The automatic stabilization device for a single crystal furnace seed rope according to claim 1, characterized in that: The pneumatic telescopic rod (1) and the single crystal furnace isolation valve are installed in a hard connection manner, and the hard connection is a rigid connection.

3. The automatic stabilization device for a single crystal furnace seed rope according to claim 1, characterized in that: The two clamping members (4) are arranged in an arc shape.

4. The automatic stabilization device for a single crystal furnace seed rope according to claim 1, characterized in that: The inner diameter of the clamping space formed by the two clamping members (4) is slightly larger than the outer diameter of the wire rope.

5. The automatic stabilization device for a single crystal furnace seed rope according to claim 1, characterized in that: The adjusting device (5) comprises an adjusting ring (51), a groove (47) is provided on the surface of the clamping member (4), and the adjusting ring (51) is arranged in the groove (47). Two sliders (56) are fixedly connected to one side surface of the adjusting ring (51), and the sliders (56) are slidably connected to the inner wall of the clamping member (4). An adjusting screw (52) is rotatably connected to the surface of the adjusting ring (51), and a threaded hole (58) is provided on the inner wall of the clamping member (4), and the adjusting screw (52) is threadedly connected to the inner wall of the threaded hole (58).

6. The automatic stabilization device for a single crystal furnace seed rope according to claim 5, characterized in that: Two housings (53) are fixedly connected to one side surface of the clamping member (4), the slider (56) is slidably connected to the inner wall of the housing (53), an indicator block (55) is fixedly connected to the surface of the slider (56), and a scale (54) is provided on the surface of the housing (53).

7. The automatic stabilization device for a single crystal furnace seed rope according to claim 5, characterized in that: One end of the adjusting screw (52) is fixedly connected to a rotating handle (59).

Images