Novel cold pump helium end fixing device and cold pump

Abstract

The novel cold pump helium end fixing device comprises an outer connecting body, an inner connecting body and a plurality of fixing holes, the inner connecting body is I-shaped and penetrates through the outer connecting body, cylindrical protrusions are formed at the two ends of the outer connecting body, the cylindrical protrusions are sealed by a first cover plate and a second cover plate, and the fixing holes are formed in the outer connecting body. The side face of the outer connecting body is fixedly connected with a fixing block, a helium channel is arranged on the fixing block, the helium channel penetrates through the outer connecting body and extends inwards, and the fixing holes are formed in the inner connecting body and the outer connecting body. By adopting the mode of combining the inner connector and the outer connector and the design of the fixing holes in the inner connector and the outer connector, tightness and firmness between equipment are greatly enhanced, and it is ensured that the helium cooling pump can still keep a good working state in the long-time operation or high-vibration environment; and through the arrangement of a fixing block, the helium pipeline is prevented from moving during use, and the stability of the whole equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of cold pump equipment, in particular to a novel cold pump helium end fixing device and a cold pump. Background Art

[0002] With the advancement of technology, helium gas cooling pumps have gained widespread application in numerous fields, including semiconductor manufacturing, scientific research, and vacuum coating, due to their high efficiency and reliability. Through low-temperature adsorption, helium gas cooling pumps can effectively remove gases from the system and achieve a high vacuum environment. However, traditional helium gas cooling pump designs have some shortcomings, such as the instability of the fixed structure at the connection between the helium end and the cylinder. These issues not only affect the efficiency of the helium gas cooling pump but also increase the risk of leakage, thereby affecting the safety and stability of the entire system. Utility Model Content

[0003] To solve the above problems, the present invention provides a new type of cold pump helium end fixing device, including an outer connector, an inner connector, and a plurality of fixing holes. The inner connector is I-shaped, passes through the outer connector, and forms cylindrical protrusions at both ends of the outer connector. The first cover plate and the second cover plate close the cylindrical protrusions. The side of the outer connector is fixedly connected to a fixing block, and the fixing block is provided with a helium channel. The helium channel passes through the outer connector and extends inward. The fixing holes are provided on the inner connector and the outer connector.

[0004] On the basis of the above solution, a plurality of connection holes are provided on the external connector. The connection holes are arranged in groups of three, with a total of four groups. Each group of connection holes passes through the external connector and is located at four corners.

[0005] Based on the above solution, a first groove and a second groove are provided on the side of the external connector.

[0006] On the basis of the above solution, a first fixing hole and a second fixing hole are provided on the first cover plate for auxiliary connection, and a partially embedded connecting piece is provided on the second cover plate.

[0007] On the basis of the above solution, the external connector is further provided with a mounting hole for connecting the helium tube.

[0008] The utility model also provides a cold pump, comprising the novel cold pump helium end fixing device described in the above technical solution.

[0009] Compared with the prior art, the beneficial effects of the present invention are as follows: by adopting the method of combining the inner and outer connectors and the design of the fixing holes on the inner and outer connectors, the tightness and firmness between the devices are greatly enhanced, ensuring that the helium cooling pump can still maintain a good working condition during long-term operation or high-vibration environment; by setting the fixing block, the helium pipeline is prevented from moving during use, thereby improving the stability of the overall equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 This is a schematic diagram of the overall structure of the utility model from above;

[0011] Figure 2 This is a side structural diagram of the utility model;

[0012] Figure 3 This is another side structural diagram of the utility model;

[0013] Figure 4 This is a schematic diagram of the three-dimensional structure of the utility model; DETAILED DESCRIPTION

[0014] The present invention will be further described below with reference to the accompanying drawings:

[0015] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; they can refer to direct connection or indirect connection through an intermediate medium; they can refer to internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0016] In the description of the present invention, it should be understood that the terms "left", "right", "front", "back", "top", "bottom", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0017] like Figures 1 to 4As shown, the utility model provides a new type of cold pump helium end fixing device, including an outer connector 1, an inner connector 2, and a plurality of fixing holes. The inner connector is in an I-shape, passes through the outer connector, and forms cylindrical protrusions at both ends of the outer connector. The first cover plate 21 and the second cover plate 22 close the cylindrical protrusions. A fixing block is fixedly connected to the side of the outer connector. A helium channel 31 is provided on the fixing block 3. The helium channel passes through the outer connector and extends inward. The fixing holes are provided on the inner connector and the outer connector.

[0018] Furthermore, a plurality of connection holes 9 are provided on the external connector. The connection holes are arranged in groups of three, with a total of four groups. Each group of connection holes passes through the external connector and is located at four corners.

[0019] Furthermore, a first groove 10 and a second groove 11 are provided on the side of the external connector.

[0020] Furthermore, the two arc-shaped corners of the external connector close to the fixing block are wavy in shape, and the tightness with the assembly components is increased through reasonable design.

[0021] When connecting, place the whole body into the installation place, so that the first groove and the second groove of the outer connector will be respectively stuck in the installation point to further fix the whole body. Then place the cylinder on the first cover plate on the top of the inner connector, and then use screws to insert into the connection hole to further fix it.

[0022] Furthermore, the first cover plate is provided with a first fixing hole 7 and a second fixing hole 8 for auxiliary connection, and the second cover plate is provided with a partially embedded connector 4 to increase the stability of the cylinder and the helium end.

[0023] Furthermore, the external connector is provided with a mounting hole 5 for connecting a helium tube.

[0024] The present invention also provides a cold pump, including the novel cold pump helium end fixing device described in the above embodiment. Through the combination of the above components, the helium end of the cold pump and the cylinder can be effectively connected, thereby improving the stability between the two and preventing the two from loosening. This not only improves the overall performance of the helium cold pump, but also enhances the reliability and safety of the system.

[0025] The cold pump provided by the utility model can effectively generate a vacuum environment in the application environment, especially in the semiconductor manufacturing industry, and can provide a good vacuum environment to ensure the processing accuracy of semiconductor manufacturing.

[0026] The basic principles and main features of the present invention are shown and described above. It is obvious to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments. Therefore, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is limited by the appended claims rather than the above description. Therefore, it is intended that all changes that fall within the meaning and scope of the equivalent elements of the claims are included in the present invention.

[0027] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A new type of cold pump helium end fixing device, characterized in that: The invention comprises an outer connector (1), an inner connector (2), and a plurality of fixing holes, wherein the inner connector (2) is in an I-shape and passes through the outer connector, and forms cylindrical protrusions at both ends of the outer connector (1), and a first cover plate (21) and a second cover plate (22) close the cylindrical protrusions, and a fixing block (3) is fixedly connected to the side of the outer connector (1), and a helium channel (31) is provided on the fixing block (3), and the helium channel (31) passes through the outer connector (1) and extends inwardly, and the fixing holes are provided on the inner connector (2) and the outer connector (1).

2. A novel cold pump helium end fixing device according to claim 1, characterized in that: The outer connector (1) is provided with a plurality of connection holes (9), the connection holes (9) are arranged in groups of three, with a total of four groups, and each group of connection holes (9) passes through the outer connector (1) and is located at four corners.

3. A novel cold pump helium end fixing device according to claim 1, characterized in that: A first groove (10) and a second groove (11) are provided on the side of the external connector.

4. A novel cold pump helium end fixing device according to claim 1, characterized in that: The first cover plate (21) is provided with a first fixing hole (7) and a second fixing hole (8) for auxiliary connection, and the second cover plate (22) is provided with a partially embedded connecting piece (4).

5. A novel cold pump helium end fixing device according to claim 1, characterized in that: The external connector (1) is also provided with a mounting hole (5) for connecting a helium tube.

6. A cold pump, characterized in that: The invention comprises a novel cold pump helium end fixing device as described in any one of claims 1 to 5.

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