Single crystal furnace feeder

Abstract

The utility model discloses a single crystal furnace feeder, which comprises a quartz cylinder, a first polytetrafluoroethylene sleeve and a second polytetrafluoroethylene sleeve, the two ends of the quartz cylinder are opened, the first polytetrafluoroethylene sleeve is arranged at the upper end of the quartz cylinder, and the first polytetrafluoroethylene sleeve comprises a first flange and a first connecting sleeve body; the second polytetrafluoroethylene sleeve is used for being connected with a polytetrafluoroethylene limiting disc, the second polytetrafluoroethylene sleeve is arranged in the middle of the quartz cylinder, and the second polytetrafluoroethylene sleeve comprises a second flange and a second connecting sleeve body; the first connecting sleeve body and the second connecting sleeve body are fixedly connected with the quartz cylinder in a sleeved mode, and the first teflon sleeve and the second teflon sleeve are of sleeve structures made of teflon materials. According to the single crystal furnace feeder disclosed by the utility model, the damage to the flange caused by collision in the using process of the feeder is reduced, the service life of the feeder is prolonged, and the production cost of the quartz cylinder is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to solar production equipment technical field, especially in a single crystal furnace feeder. BACKGROUND

[0002] Single crystal furnace is a kind of in inert gas environment, with graphite heater polycrystalline silicon etc. Polycrystalline material is melted, and the equipment of the growth of dislocation-free single crystal by vertical pulling method. In the production process, it needs to use feeder to add silicon material to single crystal furnace regularly. Feeder sends polycrystalline silicon raw material to single crystal furnace in the process of single crystal drawing.

[0003] In prior art, feeder includes core component quartz cylinder 01, the upper end of quartz cylinder 01 is welded with first quartz flange 011, middle part is welded with second quartz flange 012, as shown in Figure 1 Two quartz flanges are load-bearing structure of feeder, and quartz flange is connected with limit disc, thereby carrying out feeder limiting and unloading feeding operation. In the process of single crystal furnace feeding, first quartz flange 011 and second quartz flange 012 are easy to collide with vice room furnace body, and quartz flange is easy to be damaged, and the risk of feeder damage is great. UTILITY MODEL CONTENT

[0004] Therefore, the utility model provides a single crystal furnace feeder, reduces the damage of flange in the process of feeder use, prolongs the service life of feeder, and reduces the production cost of quartz cylinder.

[0005] To achieve the above object, the utility model provides the following technical scheme:

[0006] A single crystal furnace feeder, comprising:

[0007] Quartz cylinder with two open ends;

[0008] First tetrafluoro jacket is arranged at the upper end of the quartz cylinder, and the first tetrafluoro jacket comprises a first flange and a first connecting sleeve body;

[0009] Second tetrafluoro jacket is used to be connected with tetrafluoro limit disc, and the second tetrafluoro jacket is arranged at the middle part of the quartz cylinder, and the second tetrafluoro jacket comprises a second flange and a second connecting sleeve body;

[0010] The first connecting sleeve body and the second connecting sleeve body are fixedly sleeved with the quartz cylinder, and the first tetrafluoro jacket and the second tetrafluoro jacket are sleeve structures made of polytetrafluoroethylene material.

[0011] Optionally, the first connecting sleeve body is fastened on the quartz cylinder by a first hoop, and the second connecting sleeve body is fastened on the quartz cylinder by a second hoop;

[0012] The first hoop and the second hoop are stainless steel hoops.

[0013] Optionally, a first rubber damping layer is arranged between the contact surface of the first connecting sleeve and the quartz cylinder, and a second rubber damping layer is arranged between the contact surface of the second connecting sleeve and the quartz cylinder.

[0014] The first rubber damping layer is fixedly connected to the inner surface of the first connecting sleeve, and the second rubber damping layer is fixedly connected to the inner surface of the second connecting sleeve.

[0015] Optionally, the second flange is connected with the PTFE limiting disc, the outer diameter of the second flange is the same as that of the PTFE limiting disc, and a metal limiting disc is arranged between the second flange and the PTFE limiting disc.

[0016] The diameter of the metal limiting disc is not greater than the outer diameter of the second flange.

[0017] Optionally, the second flange, the metal limiting disc and the PTFE limiting disc are connected through a connecting piece.

[0018] Optionally, a connecting rod is slidingly connected in the quartz cylinder, and the connecting rod penetrates a cylinder cover at the cylinder opening position of the quartz cylinder.

[0019] A PTFE cross beam is connected to the first flange, and the connecting rod is slidingly connected in a guide hole of the PTFE cross beam.

[0020] Optionally, the PTFE cross beam comprises a guide cross beam and a fixed plate, the guide cross beam and the fixed plate are connected together through a connecting arm, and the guide cross beam is suspended on the cylinder cover.

[0021] The guide hole is arranged on the guide cross beam, and the fixed plate is connected with the first flange.

[0022] Optionally, the cylinder cover comprises two half cover bodies spliced together, each half cover body comprises a semicircular main plate body, a half through hole is arranged on the main plate body, and the half through hole is located on the side of the main plate body spliced with another half cover body.

[0023] The outer diameter of the main plate body is greater than the outer diameter of the cylinder opening of the quartz cylinder, and a clearance opening is arranged on the main plate body for the PTFE cross beam.

[0024] Optionally, a limiting ring table is arranged on the side of the main plate body close to the quartz cylinder, and the outer edge of the limiting ring table is arranged in correspondence with the inner surface of the cylinder opening of the quartz cylinder.

[0025] Optionally, an isolation tube is sleeved on the connecting rod, and a plugging cone is arranged on the connecting rod close to the bottom opening of the quartz cylinder, and the plugging cone blocks the bottom opening of the quartz cylinder in a non-feeding state.

[0026] As can be seen from the above technical solution, the single crystal furnace feeder provided by the present invention utilizes a first PTFE sleeve and a second PTFE sleeve on a quartz cylinder as the feeder's load-bearing structure, replacing the quartz flange used in the prior art. This reduces damage to the flange caused by collision with the furnace body, lowers the flange's failure rate during use, and thus extends the feeder's service life. By eliminating the quartz flange from the quartz cylinder, the production cycle is shortened and production costs are reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0028] Figure 1 It is a structural diagram of a quartz cylinder in the prior art;

[0029] Figure 2 A schematic structural diagram of a single crystal furnace feeder provided by an embodiment of the present utility model from one angle;

[0030] Figure 3 A schematic structural diagram of a single crystal furnace feeder provided by an embodiment of the present invention from another angle;

[0031] Figure 4 A schematic cross-sectional view of a single crystal furnace feeder according to an embodiment of the present invention;

[0032] Figure 5 for Figure 4 A schematic diagram of the partial enlarged structure of part A in FIG;

[0033] Figure 6 for Figure 4 A schematic diagram of the partially enlarged structure of part B in FIG.

[0034] Figure 7 A schematic structural diagram of a first polytetrafluoroethylene sleeve provided in an embodiment of the present utility model;

[0035] Figure 8 A schematic cross-sectional view of the first polytetrafluoroethylene sleeve provided in an embodiment of the present utility model;

[0036] Figure 9 A schematic cross-sectional view of the connection between the second PTFE sleeve and the PTFE limiting plate provided in an embodiment of the present invention;

[0037] Figure 10 A schematic structural diagram of a second polytetrafluoroethylene sleeve provided by an embodiment of the present utility model at one angle;

[0038] Figure 11 Another angle structural schematic view of the second tetrafluoro sleeve provided by the embodiment of the utility model;

[0039] Figure 12 Structural schematic view of the tetrafluoro limiting disc provided by the embodiment of the utility model;

[0040] Figure 13 Structural schematic view of the tetrafluoro crossbeam provided by the embodiment of the utility model;

[0041] Figure 14 Structural schematic view of one angle of the half cover body of the cylinder cover provided by the embodiment of the utility model;

[0042] Figure 15 Structural schematic view of another angle of the half cover body of the cylinder cover provided by the embodiment of the utility model.

[0043] Wherein:

[0044] 01, quartz cylinder, 011, first quartz flange, 012, second quartz flange,

[0045] 1, quartz cylinder,

[0046] 2, second tetrafluoro sleeve,

[0047] 201, second flange, 202, second connecting sleeve body, 203, first connecting through hole,

[0048] 3, second hoop,

[0049] 4, plugging cone,

[0050] 5, first tetrafluoro sleeve,

[0051] 501, first connecting sleeve body, 502, first flange, 503, fifth connecting through hole,

[0052] 6, connecting rod,

[0053] 7, tetrafluoro crossbeam,

[0054] 701, guide crossbeam, 702, guide hole, 703, reinforcing plate, 704, fixed plate, 705, connecting arm,

[0055] 8, cylinder cover,

[0056] 801, main plate body, 802, let-out opening, 803, half through hole, 804, limiting ring table,

[0057] 9, tetrafluoro limiting disc,

[0058] 901 main disc body, 902 through cavity, 903 shielding wall, 904 second connecting through hole,

[0059] 10, isolation tube,

[0060] 11, metal limiting disc,

[0061] 12, first connecting bolt,

[0062] 13, second connecting bolt. DETAILED DESCRIPTION

[0063] The utility model discloses a single crystal furnace feeder reduces the damage of the knock to the flange in the use process of feeder, prolongs the service life of feeder, and reduces the production cost of quartz cylinder.

[0064] The technical solutions in the embodiments of the utility model will be clearly and completely described in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skilled in the art without creative labor belong to the protection scope of the utility model.

[0065] Referring to Figures 2 to 15 The single crystal furnace feeder of the utility model, including quartz cylinder 1, first tetrafluoro set 5 and second tetrafluoro set 2. Quartz cylinder 1 is the cylinder body of quartz material with both ends open. First tetrafluoro set 5 and second tetrafluoro set 2 are the sleeve body of polytetrafluoroethylene material.

[0066] Among them, first tetrafluoro set 5 is fixedly connected to the upper end of quartz cylinder 1, and second tetrafluoro set 2 is fixedly connected to the middle part of quartz cylinder 1. First tetrafluoro set 5 includes first flange 502 and first connecting sleeve body 501, as Figure 7 And Figure 8 Second tetrafluoro set 2 includes second flange 201 and second connecting sleeve body 202, as Figures 9 to 11 Indicated. Second tetrafluoro set 2 is used for being connected with tetrafluoro limiting disc 9, and tetrafluoro limiting disc 9 is of polytetrafluoroethylene material. First tetrafluoro set 5 and second tetrafluoro set 2 are sleeved on quartz cylinder 1.

[0067] The utility model discloses a single crystal furnace feeder, through setting up first tetrafluoro sleeve 5 and second tetrafluoro sleeve 2 on quartz cylinder 1 as the load -bearing structure of feeder, first flange 502 on first tetrafluoro sleeve 5 replaces the first quartz flange 011 of quartz material in prior art, and second flange 201 on second tetrafluoro sleeve 2 replaces the second quartz flange 012 of quartz material in prior art, namely using the first flange 502 and second flange 201 of polytetrafluoroethylene material to replace the quartz flange structure in prior art, reduce the damage caused by the knock of furnace body to flange, reduce the accident rate of flange in the use of feeder, thereby prolong the service life of feeder. Remove quartz flange on quartz cylinder 1, and the production cycle is shorter, and the production cost is low.

[0068] Specifically, the first connecting sleeve body 501 is fastened on the quartz cylinder 1 through the first hoop (not shown in the figure), and the second connecting sleeve body 202 is fastened on the quartz cylinder 1 through the second hoop 3. The structure of the first hoop refers to the structure of the second hoop 3. In order to improve the reliability of the connection, the first hoop and the second hoop 3 are both stainless steel hoops.

[0069] In order to avoid the first tetrafluoro sleeve 5 and the second tetrafluoro sleeve 2 from sliding off the quartz cylinder 1, a first rubber damping layer is arranged between the contact surface of the first connecting sleeve body 501 and the quartz cylinder 1, and a second rubber damping layer is arranged between the contact surface of the second connecting sleeve body 202 and the quartz cylinder 1. In an embodiment, the first rubber damping layer is fixedly connected to the inner surface of the first connecting sleeve body 501, and the second rubber damping layer is fixedly connected to the inner surface of the second connecting sleeve body 202.

[0070] Specifically, the second flange 201 is connected with the tetrafluoro limiting disc 9, and the tetrafluoro limiting disc 9 is placed on the supporting flange in the auxiliary chamber of the single crystal furnace. In order to improve the supporting strength of the position of the second flange 201, a metal limiting disc 11 is arranged between the second flange 201 and the tetrafluoro limiting disc 9; the metal limiting disc 11 is preferably made of stainless steel material, and can also be made of other corrosion-resistant materials commonly used in the art. In order to avoid the metal limiting disc 11 from directly colliding with the furnace body and reduce the collision damage, the outer diameter of the second flange 201 is the same as that of the tetrafluoro limiting disc 9, and the diameter of the metal limiting disc 11 is not greater than the outer diameter of the second flange 201, so that the upper surface and the lower surface of the metal limiting disc 11 are covered. The second flange 201, the metal limiting disc 11 and the tetrafluoro limiting disc 9 are connected through a connecting piece, and the connecting piece is a first connecting bolt 12 and a first connecting nut used in cooperation. The first connecting nut is threadedly connected to the first connecting bolt 12.

[0071] In an embodiment, as shown in Figure 10As shown, the second flange 201 is provided with a plurality of first connecting through holes 203, the four-fluorine limiting disc 9 is provided with a plurality of second connecting through holes 904, and the metal limiting disc 11 is provided with third connecting through holes, the third connecting through holes, the second connecting through holes 904 and the first connecting through holes 203 are correspondingly arranged, and the corresponding arrangement here includes the number of holes arranged, the position of the holes arranged and the size of the holes.

[0072] Further, the four-fluorine limiting disc 9 includes a main disc body 901, and a through cavity 902 for the quartz cylinder 1 to pass through is arranged at a central position of the main disc body 901, as shown in Figure 12 As shown, the main disc body 901 is provided with the second connecting through holes 904, and a shielding wall 903 is arranged at an edge position of the main disc body 901 close to the through cavity 902. The shielding wall 903 can be a convex ring table of an integral structure, or a plurality of arc-shaped bosses arranged at intervals, as shown in Figure 12 As shown, a plurality of the arc-shaped bosses are arranged around the through cavity 902.

[0073] Specifically, the quartz cylinder 1 is slidably connected with a connecting rod 6, as shown in Figures 4 to 6 As shown, one end of the connecting rod 6 is arranged on the cylinder cover 8 at a cylinder opening position of the quartz cylinder 1, and the other end is connected with the plugging cone body 4. The plugging cone body 4 is used for plugging the bottom of the quartz cylinder 1, and the cylinder cover 8 is used for covering the cylinder opening of the quartz cylinder 1. A separation tube 10 is sleeved on the connecting rod 6, the separation tube 10 is a silicon material tube body, is sleeved on the outer surface of the connecting rod 6, is used for separating the silicon material from the connecting rod 6, and protects the connecting rod 6. In order to facilitate processing, the separation tube 10 is stacked by a plurality of sub-tubes with the same diameter and does not need to be bonded. The bottom end of the separation tube 10 is limited by the plugging cone body 4, and the top end is fixed by a locking sleeve connected to the connecting rod 6, and the locking sleeve is fixedly connected to the connecting rod 6. The conical surface of the plugging cone body 4 is used for plugging the bottom opening of the quartz cylinder 1, that is, the large end diameter of the plugging cone body 4 is greater than the diameter of the bottom opening of the quartz cylinder 1, and the plugging cone body 4 plugs the bottom opening of the quartz cylinder 1 in the non-feeding state.

[0074] In order to guide and limit the sliding connecting rod 6, the first flange 502 is connected with a four-fluorine cross beam 7, and the four-fluorine cross beam 7 includes a guide cross beam 701 and a fixed plate 704, as shown in Figure 13 As shown, the guide cross beam 701 and the fixed plate 704 are connected together through a connecting arm 705. The fixed plate 704 is used for connecting with the first flange 502. The guide cross beam 701 is suspended on the cylinder cover 8, and the connecting rod 6 is slidably connected in a guide hole 702 of the guide cross beam 701, and the guide hole 702 is arranged on the guide cross beam 701, as shown in Figure 13To improve the reliability of the connection between the guide beam 701 and the fixed plate 704, the four-fluorine beam 7 further comprises a reinforcing plate 703, one end of which is connected to the guide beam 701, the other end is connected to the fixed plate 704, and the middle part is connected to the connecting arm 705. The fixed plate 704 is provided with a fourth connecting through hole, and the first flange 502 is provided with a fifth connecting through hole 503. The fixed plate 704 and the first flange 502 are connected by a second connecting bolt 13, which is connected in the fourth connecting through hole and the fifth connecting through hole 503. The second connecting bolt 13 is threadedly connected with a second connecting nut.

[0075] To avoid the opening and closing of the cylinder cover 8 being interfered by the four-fluorine beam 7, the cylinder cover 8 comprises two half cover bodies spliced together. As shown in Figure 14 and Figure 15 The half cover body comprises a semicircular main plate body 801, which is provided with a half through hole 803 on one side of the main plate body 801 spliced with another half cover body. The half through holes 803 of the two half cover bodies are spliced into a through hole of an integral structure for the connecting rod 6 to pass through. In order to facilitate the edge of the half cover body to be placed in the barrel port of the quartz barrel 1, the outer diameter of the main plate body 801 is larger than the outer diameter of the barrel port of the quartz barrel 1. At the same time, in order not to affect the installation of the four-fluorine beam 7, the main plate body 801 is provided with a clearance opening 802 for the four-fluorine beam 7. The two half cover bodies are spliced into the cylinder cover 8, and the clearance openings 802 of the two half cover bodies are communicated into a complete notch, so as to facilitate the connection of the fixed plate 704 of the four-fluorine beam 7 and the first four-fluorine sleeve 5, and avoid the interference between the cylinder cover 8 and the four-fluorine beam 7.

[0076] In order to limit the cylinder cover 8, the main plate body 801 is provided with a limiting ring table 804 on the side close to the quartz barrel 1, as shown in Figure 14 The outer edge of the limiting ring table 804 is correspondingly provided with the inner surface of the barrel port of the quartz barrel 1, so as to realize the limiting of the cylinder cover 8.

[0077] In order to facilitate installation, the side surface of the first four-fluorine sleeve 5 and the second four-fluorine sleeve 2 is provided with a longitudinal slit, so as to reduce the machining precision requirement of the first four-fluorine sleeve 5 and the second four-fluorine sleeve 2, reduce the machining cost, and facilitate installation.

[0078] The utility model discloses a single crystal furnace feeder, the second four fluorine cover 2 is fastened in the cylinder body of quartz cylinder 1 through the second hoop 3 on quartz cylinder 1, and the second rubber damping layer of rubber material is arranged between the second four fluorine cover 2 and quartz cylinder 1, which ensures that the second four fluorine cover 2 does not slide on the quartz cylinder 1, and the metal limiting disc 11, the four fluorine limiting disc 9 and the second four fluorine cover 2 are connected and fixed through the first connecting bolt 12, and the load bearing structure of the feeder as a whole is formed.

[0079] The single crystal furnace feeder of the utility model does not need to set up quartz flange on quartz cylinder 1, can shorten production cycle, reduce the cost of quartz cylinder and reduce the overall cost of feeder. The flange structure of polytetrafluoroethylene material is used instead of quartz flange structure, and the flange structure of polytetrafluoroethylene material is used as the load bearing structure of feeder, which can avoid damage of quartz cylinder 1 caused by collision, reduce the accident rate of feeder and prolong the service life of feeder.

[0080] In the description of the present scheme, it should be understood that the orientation or position relationship indicated by the terms "upper", "lower", "vertical", "inner", "outer" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present scheme.

[0081] In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present scheme, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0082] Each embodiment in the specification is described in a progressive manner, and each embodiment focuses on the difference from other embodiments, and the same or similar parts between each embodiment can be referred to each other.

[0083] The above description of disclosed embodiments enables one of ordinary skill in the art to make or use the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A single crystal furnace feeder, characterized in that, include: A quartz cylinder open at both ends; A first PTFE sleeve is provided at the upper end of the quartz cylinder, wherein the first PTFE sleeve comprises a first flange and a first connecting sleeve body; A second PTFE sleeve is used to connect with the PTFE limiting plate, the second PTFE sleeve is arranged in the middle of the quartz cylinder, and the second PTFE sleeve includes a second flange and a second connecting sleeve body; The first connecting sleeve and the second connecting sleeve are fixedly sleeved with the quartz cylinder, and the first tetrafluoroethylene sleeve and the second tetrafluoroethylene sleeve are sleeve structures made of polytetrafluoroethylene.

2. The single crystal furnace feeder according to claim 1, characterized in that: The first connecting sleeve is fastened to the quartz cylinder via a first clamp, and the second connecting sleeve is fastened to the quartz cylinder via a second clamp; The first clamp and the second clamp are both stainless steel clamps.

3. The single crystal furnace feeder according to claim 1 or 2, characterized in that: A first rubber damping layer is provided between the contact surface of the first connecting sleeve and the quartz cylinder, and a second rubber damping layer is provided between the contact surface of the second connecting sleeve and the quartz cylinder; The first rubber damping layer is fixedly connected to the inner surface of the first connecting sleeve, and the second rubber damping layer is fixedly connected to the inner surface of the second connecting sleeve.

4. The single crystal furnace feeder according to claim 1 or 2, characterized in that: The second flange is connected to the PTFE limiting disk, the second flange and the PTFE limiting disk have the same outer diameter, and a metal limiting disk is provided between the second flange and the PTFE limiting disk; The diameter of the metal limiting plate is not greater than the outer diameter of the second flange.

5. The single crystal furnace feeder according to claim 4, characterized in that: The second flange, the metal limiting plate and the PTFE limiting plate are connected via a connecting piece.

6. The single crystal furnace feeder according to claim 1, characterized in that: A connecting rod is slidably connected in the quartz cylinder, and the connecting rod is passed through the cylinder cover at the cylinder mouth of the quartz cylinder; A polytetrafluoroethylene beam is connected to the first flange, and the connecting rod is slidably connected to the guide hole of the polytetrafluoroethylene beam.

7. The single crystal furnace feeder according to claim 6, characterized in that: The PTFE beam includes a guide beam and a fixed plate, the guide beam and the fixed plate are connected together by a connecting arm, and the guide beam is suspended on the cylinder cover; The guide hole is provided on the guide beam, and the fixing plate is connected to the first flange.

8. The single crystal furnace feeder according to claim 6, characterized in that: The cylinder cover comprises two half-cover bodies spliced ​​together, each half-cover body comprising a semicircular main body, the main body being provided with a half-through hole, the half-through hole being located on a side where the main body and the other half-cover body are spliced ​​together; The outer diameter of the main plate body is larger than the outer diameter of the tube opening of the quartz tube, and the main plate body is provided with a making way opening for the PTFE beam.

9. The single crystal furnace feeder according to claim 8, characterized in that: A limiting ring platform is provided on one side of the main body close to the quartz cylinder, and the outer edge of the limiting ring platform is arranged corresponding to the inner surface of the cylinder opening of the quartz cylinder.

10. The single crystal furnace feeder according to claim 6, characterized in that: An isolation tube is sleeved on the connecting rod, and a blocking cone is provided at a position of the connecting rod close to the bottom opening of the quartz cylinder. The blocking cone blocks the bottom opening of the quartz cylinder in a non-feeding state.

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