Wafer box feeding device

Abstract

The utility model belongs to the technical field of wafer box packaging, and particularly relates to a wafer box feeding device which comprises a feeding table, a plurality of feeding positions arranged on the feeding table at intervals, a plurality of posture detection mechanisms arranged on the feeding positions respectively and used for detecting postures of wafer boxes, and a transferring mechanism used for carrying the wafer boxes outwards from the feeding positions. The structure of the feeding device is limited, the posture detection mechanism used for detecting the postures of the wafer boxes is arranged on the feeding position so as to detect the postures of the wafer boxes on the feeding position, and when the wafer boxes are placed badly, an alarm can be given out to remind workers to intervene in treatment, so that the working efficiency is improved, and the working efficiency is improved. And it is ensured that the transfer mechanism can smoothly jack the wafer box at the feeding position upwards and convey the wafer box outwards to the next work station.

Description

TECHNICAL FIELD

[0001] The utility model belongs to wafer box packaging technical field, concretely relates to a wafer box feeding device. BACKGROUND

[0002] Wafer refers to the silicon wafer used for making silicon semiconductor integrated circuit, since its shape is circular, it is called wafer.Wafer can be loaded in wafer frame box, wafer frame box can be further understood as: wafer cassette, it can also be understood as wafer box.

[0003] Wafer needs to be chamfered, polished and cleaned before photoetch, after the above process, wafer is loaded into clean wafer packaging box, and double-layer aluminum foil bag is used to store and transport in vacuum state.Wafer packaging box is very important in vacuum packaging process, can effectively prevent wafer packaging box from being damaged and isolated from particle pollution, and ensure the yield of wafer photoetch process.Wafer box is sent to the loading frame by the mechanical hand when packaging, and the wafer box is sent into the packaging machine one by one by the conveying mechanism, if the position of the wafer box placed by the mechanical hand is not suitable, the conveying mechanism cannot work and the wafer box is conveyed to the packaging machine, which is not conducive to the alignment and receiving of the empty wafer box, and improvement is needed. UTILITARIAN CONTENT

[0004] The utility model aims at overcoming the defects of prior art, and provides a wafer box feeding device.

[0005] The utility model adopts the following technical scheme:

[0006] A wafer box feeding device, comprising a feeding table, a plurality of feeding positions arranged at intervals on the feeding table, a plurality of attitude detection mechanisms arranged on the plurality of feeding positions respectively for detecting the attitude of the wafer box, and a transfer mechanism for transferring the wafer box from the feeding position outwardly, the transfer mechanism comprising a transfer table moving along the arrangement direction of the plurality of feeding positions, a jacking assembly capable of moving the transfer table upwardly and downwardly, and a moving module arranged in the feeding table to drive the jacking assembly to move the transfer table, the feeding table is provided with a moving channel for the movement of the transfer table, and the jacking assembly can move the transfer table upwardly to move the wafer box upwardly and away from the feeding position.

[0007] Preferably, the transfer table comprises a transfer seat connected with the jacking assembly, a mounting plate arranged on the transfer seat for supporting the wafer box, and a photoelectric sensor arranged on the mounting plate, the two ends of the mounting plate are respectively formed with limiting blocks protruding upwardly for limiting the position of the wafer box, and the photoelectric sensor is located between the two limiting blocks.

[0008] Preferably, the jacking assembly comprises a jacking frame connected with the moving module and a jacking cylinder arranged on the jacking frame and connected with the transfer seat.

[0009] Preferably, the posture detection mechanism comprises four micro switches arranged in a matrix on the loading position, a controller connected with the four micro switches and arranged on the loading table, and an alarm lamp connected with the controller.

[0010] Preferably, the posture detection mechanism further comprises a diffuse reflection photoelectric switch arranged on the loading table and located on one side of the loading position.

[0011] Preferably, the loading position is provided with four limiting plates arranged in a matrix, and the four limiting plates are arranged on the two sides of the moving channel in pairs.

[0012] Preferably, the loading table further comprises a limiting strip arranged on one side of the moving channel, the limiting strip is located between the two limiting plates arranged on the same side, and the loading position is formed between the limiting strip and the four limiting plates.

[0013] Preferably, the loading table is provided with a first mounting hole for mounting the limiting plate and a second mounting hole for mounting the limiting strip.

[0014] Preferably, the moving module comprises a moving seat extending along the extension direction of the moving channel arranged in the loading table, a moving plate movably arranged on the moving seat and connected with the jacking assembly, a driving assembly arranged on the moving seat and connected with and driving the moving plate to move, a unloading position arranged on the moving seat, a sensor arranged on the moving seat and opposite to the unloading position, and a sensing sheet arranged on the side edge of the moving plate and matched with the sensor.

[0015] As can be known from the above description of the present application, compared with the prior art, the present application has the following beneficial effects: by limiting the structure of the loading device, the posture detection mechanism for detecting the posture of the wafer box is arranged on the loading position, so as to detect the posture of the wafer box on the loading position, and when the wafer box is placed improperly, an alarm can be sent to remind the staff to intervene and handle, so as to ensure that the transfer mechanism can smoothly lift the wafer box on the loading position upward and transport it outward to the next work station, ensure the processing of the wafer box by the next work station, and prevent the problem that the wafer box cannot be lifted upward and transported outward due to improper posture. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 Structure diagram of the loading device Figure 1 ;

[0017] Figure 2 Structure diagram of the loading device Figure 2 ;

[0018] Figure 3 Structure diagram of the transfer mechanism

[0019] Figure 4 Part structure diagram of the transfer mechanism;

[0020] Figure 5 Structure diagram of the transfer table and the lifting assembly;

[0021] Figure 6 Part structure diagram of the transfer mechanism; Figure 1 Part structure diagram of the transfer mechanism;

[0022] In the figure, 1, the loading table; 2, the loading position; 3, the posture detection mechanism; 4, the transfer mechanism; 5, the wafer box; 11, the moving channel; 21, the limiting plate; 22, the limiting strip; 23, the first mounting hole; 24, the second mounting hole; 31, the micro switch; 32, the alarm lamp; 33, the diffuse reflection photoelectric switch; 41, the transfer table; 411, the transfer seat; 412, the mounting plate; 413, the photoelectric sensor; 414, the limiting block; 42, the lifting assembly; 421, the lifting frame; 422, the lifting cylinder; 43, the moving module; 431, the moving seat; 432, the moving plate; 433, the driving assembly; 434, the unloading position; 435, the inductor; 436, the inductive sheet. DETAILED DESCRIPTION

[0023] The utility model will be further described below through the specific implementation.

[0024] Referring to Figures 1 to 6 The figure shows a wafer box loading device, which comprises a loading table 1, a plurality of loading positions 2 arranged at intervals on the loading table 1, a plurality of posture detection mechanisms 3 arranged on the plurality of loading positions 2 respectively for detecting the posture of a wafer box 5, and a transfer mechanism 4 for carrying the wafer box 5 outward from the loading position 2, wherein the loading position 2 is provided with four limiting plates 21 arranged in a matrix and a limiting strip 22 arranged on the loading position 2, and the wafer box 5 can be supported on the loading table 1 between the four limiting plates 21 and the limiting strip 22; specifically, the loading table 1 is provided with a first mounting hole 23 for mounting the limiting plate 21 and a second mounting hole 24 for mounting the limiting strip 22, and the first mounting hole 23 is provided with a plurality of first mounting holes 23, and the second mounting hole 24 is provided with a plurality of second mounting holes 24, the plurality of first mounting holes 23 are arranged at intervals along the conveying direction of the transfer mechanism 4, and the plurality of second mounting holes 24 are arranged at intervals along the direction perpendicular to the conveying direction of the transfer mechanism 4, so that the limiting plate 21 and the limiting strip 22 can be adjusted in position according to different models of wafer boxes 5.

[0025] The transfer mechanism 4 comprises a transfer table 41 moving along the arrangement direction of the plurality of loading positions 2, a lifting assembly 42 capable of driving the transfer table 41 to move up and down, and a moving module 43 arranged in the loading table 1 for driving the lifting assembly 42 to move the transfer table 41, wherein the loading table 1 is provided with a moving channel 11 for the movement of the transfer table 41, and the lifting assembly 42 can drive the transfer table 41 to move upwards to drive the wafer box 5 to move upwards and disengage from the loading position 2.

[0026] The transfer station 41 comprises a transfer seat 411 connected with the jacking assembly 42, a mounting plate 412 arranged on the transfer seat 411 for supporting the wafer box 5, and a photoelectric sensor 413 arranged on the mounting plate 412, wherein the mounting plate 412 is formed with limiting blocks 414 protruding upward at both ends for limiting the position of the wafer box 5, and the photoelectric sensor 413 is located between the two limiting blocks 414.

[0027] The jacking assembly 42 comprises a jacking frame 421 connected with the moving module 43 and a jacking cylinder 422 arranged on the jacking frame 421 and connected with the transfer seat 411, which drives the transfer station 41 to move upward, jacks up the wafer box 5 on the feeding station 2, and then cooperates with the moving module 43 to drive the wafer box 5 to move outward and be transported to the next work station.

[0028] The moving module 43 comprises a moving seat 431 arranged in the feeding station 1 and extending along the extension direction of the moving channel 11, a moving plate 432 movably arranged on the moving seat 431 and connected with the jacking assembly 42, a driving assembly 433 arranged on the moving seat 431 and connected with and driving the moving plate 432 to move, a discharging station 434 arranged on the moving seat 431, a sensor 435 arranged on the moving seat 431 and opposite to the discharging station 434, and a sensing sheet 436 arranged on the side of the moving plate 432 and cooperating with the sensor 435, which limits the moving position of the moving plate 432 through the cooperation of the sensing sheet 436 and the sensor 435, so that the wafer box 5 can smoothly proceed to the next work station; specifically, the sensor 435 can adopt a slot-shaped photoelectric sensor; the driving assembly 433 can adopt a driving motor cooperating with a gear and a rack to realize the movement of the moving plate 432, which is a common structure in the mechanical field, and the specific working principle thereof will not be further described here.

[0029] The attitude detection mechanism 3 comprises four micro switches 31 arranged in a matrix on the feeding station 2, a controller arranged on the feeding station 1 and connected with the four micro switches 31, an alarm lamp 32 connected with the controller, and a diffuse reflection photoelectric switch 33 arranged on the feeding station 1 and located on the side opposite to the feeding station 2, wherein the four micro switches 31 are arranged opposite to each other on both sides of the moving channel 11, the four limiting plates 21 are arranged opposite to each other on both sides of the moving channel 11, the four micro switches 31 are arranged between the four limiting plates 21, and the limiting strips 22 are located between the two limiting plates 21 arranged on the same side; specifically, the alarm lamp 32 adopts a three-color alarm lamp; the feeding attitude information of the wafer box 5 on the feeding station 2 is detected through the cooperation of the four micro switches 31, and then the diffuse reflection photoelectric switch 33 is used to determine whether the wafer box 5 is present on the feeding station 2; when the wafer box 5 on the feeding station 2 is placed improperly, the controller controls the alarm lamp 32 to sound and light to remind and alarm, and the staff intervenes to handle.

[0030] In operation, the mobile module 43 sequentially carries the wafer boxes 5 on the multiple loading positions 2 to the next work station according to the cooperation of the transfer seats 411 and the jacking assembly 42. When there is no wafer box on the front end of the loading position 2, the transfer mechanism 4 will automatically carry the wafer boxes 5 on the rear end of the loading position 2 layer by layer to the front end, without affecting the operation, to ensure the continuity of the operation of the equipment.

[0031] The wafer box 5 posture detection mechanism 3 is arranged on the loading position 2 to detect the posture of the wafer box 5 on the loading position 2. When the wafer box 5 is placed in a poor posture, an alarm can be sent to remind the staff to intervene and handle, to ensure that the transfer mechanism 4 can smoothly jack up the wafer box 5 on the loading position 2 and transport it to the next work station, to ensure the processing of the wafer box 5 by the next work station, and to prevent the wafer box 5 from being unable to be jacked up and transported outwards due to a poor posture.

[0032] The above is only a preferred embodiment of the present application, and therefore cannot limit the scope of the present application. Equivalent changes and modifications made in accordance with the scope and content of the present application should still be within the scope of the present application.

Claims

1. A wafer boat loading device, characterized by: The wafer box loading table comprises a loading table, a plurality of loading positions arranged at intervals on the loading table, a plurality of posture detection mechanisms arranged on the loading positions respectively for detecting the posture of the wafer box, and a transfer mechanism for transferring the wafer box from the loading position to outside, wherein the transfer mechanism comprises a transfer table moving along the arrangement direction of the plurality of loading positions, a jacking assembly capable of moving the transfer table up and down, and a moving module arranged in the loading table for driving the jacking assembly to move the transfer table, and the loading table is provided with a moving channel for the movement of the transfer table, and the jacking assembly can move the transfer table upward to move the wafer box upward and away from the loading position.

2. The wafer boat loading device of claim 1, wherein: The transfer table comprises a transfer seat connected with the jacking assembly, a mounting plate arranged on the transfer seat for supporting the wafer box, and a photoelectric sensor arranged on the mounting plate, and the mounting plate is formed with limiting blocks protruding upward at both ends for limiting the position of the wafer box.

3. The wafer boat loading device of claim 2, wherein: The jacking assembly comprises a jacking frame connected with the moving module and a jacking cylinder arranged on the jacking frame and connected with the transfer seat.

4. The wafer boat loading device of claim 1, wherein: The posture detection mechanism comprises four micro switches arranged in a matrix on the loading position, a controller arranged on the loading table and connected with the four micro switches, and an alarm lamp connected with the controller, and the four micro switches are arranged on both sides of the moving channel in pairs.

5. The wafer boat loading device of claim 4, wherein: The posture detection mechanism further comprises a diffuse reflection photoelectric switch arranged on the loading table on the side opposite to the loading position.

6. The wafer boat loading device of claim 4, wherein: The loading position is provided with four limiting plates arranged in a matrix, and the four limiting plates are arranged on both sides of the moving channel in pairs, and the four micro switches are arranged between the four limiting plates.

7. The wafer boat loading device of claim 6, wherein: The loading table further comprises a limiting strip arranged on one side of the moving channel, and the limiting strip is located between the two limiting plates arranged on the same side, and the loading position is formed between the limiting strip and the four limiting plates.

8. The wafer boat loading device of claim 7, wherein: The loading table is provided with a first mounting hole for mounting the limiting plate and a second mounting hole for mounting the limiting strip.

9. The wafer boat loading device of claim 1, wherein: The moving module comprises a moving seat arranged in the loading table and extending along the extension direction of the moving channel, a moving plate movably arranged on the moving seat and connected with the jacking assembly, a driving assembly arranged on the moving seat and connected with and driving the moving plate to move, a unloading position arranged on the moving seat, a sensor arranged on the moving seat opposite to the unloading position, and a sensing sheet arranged on the side edge of the moving plate and matched with the sensor.

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