Plasma etching machine shielding case heating structure

Abstract

The utility model relates to the field of plasma etching machines, in particular to a plasma etching machine shielding cover heating structure, which comprises a chassis and a cover body, a plurality of vertically upward heating rods are arranged on the chassis, and a plurality of vertically downward heat conduction holes communicated to the bottom surface of the cover body are arranged on the inner side of the side wall of the cover body; the cover body is detachably and fixedly connected with the base plate, and the two opposite sides of the heating rod are provided with elastic heat conduction pieces and then penetrate into the heat conduction holes in an aligned mode so as to ensure that the heating rod can be tightly attached to the inner walls of the heat conduction holes. According to the structure, the heating rod is arranged in the cover body, and the heat conduction elastic pieces are arranged on the two opposite sides of the heating rod, so that the heating rod can be well attached to the inner wall of the heat conduction hole, the safety during heating can be ensured, and efficient control over the temperature of the shielding cover can be achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of plasma etching machine especially relates to a plasma etching machine shield cover heating structure. BACKGROUND

[0002] The plasma etching machine is a kind of equipment for the field such as semiconductor manufacturing, micro electro mechanical system (MEMS) manufacturing, it is etched to material by generating plasma to realize high-precision pattern transfer and microstructure manufacturing.

[0003] In the plasma etching machine, certain proportion gas (such as fluorine gas, chlorine gas and other reactive gas and inert gas such as argon mixed gas) is usually introduced into reaction chamber. High-frequency electric field is applied by radio frequency (RF) power supply, and gas molecules are ionized to generate plasma. For example, when etching silicon wafer, CF4 (carbon tetrafluoride) gas can be used, under the action of radio frequency electric field, CF4 molecule will decompose into CF3 +, F- and other active ions and free radicals, and active ions and free radicals in plasma will react with the surface of the etched material. Taking the etching of silicon as an example, F- ion will react with silicon to generate volatile SiF4 gas, thereby removing silicon atoms from the material surface. At the same time, the ions in the plasma also physically bombard the material surface, accelerating the etching process and improving the anisotropy (i.e. the difference between the vertical etching rate and the horizontal etching rate) of etching.

[0004] The waste gas generated by etching is continuously discharged, and the whole etching process ensures the sealing of the reaction chamber. The peripheral wall of the chamber is called shield cover. The inner wall of the shield cover needs to be kept at a certain temperature interval during the reaction process to prevent the waste gas from condensing on the inner wall before being discharged. The existing heating method sets an electric heating ring outside the shield cover. However, such an exposed electric heating ring has poor safety, and the control effect of the shield cover temperature is not ideal due to the thick thickness of the shield cover. UTILITY MODEL CONTENTS

[0005] In order to overcome the above problems, the utility model provides a kind of plasma etching machine shield cover heating structure, and the utility model solves the technical problems thereof using the technical scheme that:

[0006] A kind of plasma etching machine shield cover heating structure, including chassis and cover body, several vertical upward heating rods are provided on the chassis, several vertical downward intercommunication to the bottom surface of cover body are provided in the side wall of cover body;Cover body and chassis are detachably fixedly connected, and the opposite sides of heating rod are all provided with elastic heat conduction piece and are positioned and inserted into heat conduction hole, to ensure that heating rod and heat conduction hole inner wall are closely combined.

[0007] Further, the heating rods are evenly distributed on the chassis.

[0008] Further, the chassis and the heating rod are detachably fixedly connected.

[0009] Further, the heating rod side wall is provided with symmetric accommodation grooves, and the elastic heat conductors are arranged in the accommodation grooves.

[0010] Further, the upper section, the middle section and the lower end of the heating rod are all provided with the accommodation grooves, and the elastic heat conductors are arranged in the accommodation grooves.

[0011] Further, the heating rod comprises a detachably fixedly connected heating core and a heat conducting sleeve, the heat conducting sleeve is sleeved on the heating core, and the accommodation grooves are arranged on the heat conducting sleeve.

[0012] Further, the bottom surface of the cover body is provided with a guide inclined surface surrounding the heat conducting hole, so as to guide the heating rod to penetrate into the heat conducting hole.

[0013] The beneficial effects of the utility model are as follows:

[0014] The shielding cover heating structure comprises a chassis and a cover body, a plurality of vertical upward heating rods are arranged on the chassis, a plurality of vertical downward heat conducting holes communicated to the bottom surface of the cover body are arranged on the inner side of the side wall of the cover body, the cover body and the chassis are detachably fixedly connected, and the elastic heat conductors are arranged on the opposite sides of the heating rod and are penetrated into the heat conducting holes in a rear alignment mode, so as to ensure that the heating rod is tightly combined with the inner wall of the heat conducting hole. The structure embeds the heating rod in the cover body, and the elastic heat conductors are arranged on the opposite sides of the heating rod, so that the heating rod can be tightly combined with the inner wall of the heat conducting hole, the safety and uniformity during heating can be ensured, and efficient control of the temperature of the shielding cover can be realized. BRIEF DESCRIPTION OF DRAWINGS

[0015] The utility model will be further described below in combination with the drawings and specific embodiments, wherein:

[0016] Figure 1 It is an explosion view and a local enlarged view of the shielding cover heating structure;

[0017] Figure 2 It is a perspective view and a local enlarged view of the cover body;

[0018] Figure 3 It is an explosion view of the heating rod.

[0019] Figure number mark:

[0020] 100, chassis; 101, cover body; 102, heating rod; 1021, heating core; 1022, heat conducting sleeve; 103, heat conducting hole; 104, elastic heat conductor; 105, accommodation groove; 106, guide inclined surface. DETAILED DESCRIPTION

[0021] In order to better understand the purpose, structure and function of the utility model, specific embodiments of the utility model "a plasma etching machine shielding cover heating structure" are described in further detail below in conjunction with the drawings.

[0022] Referring to Figure 1 and Figure 2 In the embodiment, the plasma etching machine shielding cover heating structure comprises a base plate 100 and a cover body 101, the base plate 100 is provided with a plurality of vertically upward heating rods 102, and the cover body 101 is provided with a plurality of vertically downward heat conduction holes 103 communicated to the bottom surface of the cover body 101 in the sidewall; the cover body 101 and the base plate 100 are detachably fixedly connected, and the two opposite sides of the heating rod 102 are provided with elastic heat conduction members 104 and then aligned and inserted into the heat conduction holes 103, so as to ensure that the heating rod 102 is tightly attached to the inner wall of the heat conduction hole 103. The structure sets the heating rod 102 in the sidewall of the cover body 101, so that there is no safety problem of heat source exposure during heating, and the elastic heat conduction members 104 are symmetrically arranged on the two sides of the heating rod 102 before the heating rod 102 is inserted into the heat conduction hole 103, so that the elastic heat conduction members can make the heating rod 102 symmetrically and tightly attached to the inner wall of the heat conduction hole 103, ensuring the uniformity of the shielding cover heating, internal heating, uniform heat conduction, and improving the temperature control efficiency of the shielding cover.

[0023] It should be noted that in the embodiment, the elastic heat conduction member 104 is a heat-conducting spring, the number of heating rods is at least three, and the heating rods 102 are uniformly distributed on the base plate 100, so as to ensure that the cover body 101 can be uniformly heated; and the base plate 100 and the heating rod 102 are detachably fixedly connected, which is matched with the detachable fixed connection of the cover body 101 and the base plate 100, so as to facilitate the replacement of the heating rod 102.

[0024] Further referring to Figure 2 and Figure 3 In the embodiment, the sidewall of the heating rod 102 is provided with symmetric accommodating grooves 105, the elastic heat conduction members 104 are arranged in the accommodating grooves 105, the length of the accommodating groove 105 is greater than the length of the elastic heat conduction member 104, the width of the accommodating groove 105 is greater than the diameter of the elastic heat conduction member 104, and the depth of the accommodating groove 105 is less than the diameter of the elastic heat conduction member 104, so as to ensure that the elastic heat conduction member 104 cannot easily separate from the heating rod 102, and at the same time can continuously press the heating rod 102 in the heat conduction hole 103, so as to ensure that the heating rod 102 and the hole wall of the heat conduction hole 103 are tightly attached.

[0025] More specifically, referring to Figure 2 In the embodiment, the bottom surface of the cover body 101 is provided with a guide inclined surface 106 surrounding the heat conduction hole 103, so as to guide the heating rod 102 to be inserted into the heat conduction hole 103.

[0026] Further referring toFigure 3 In the embodiment, the upper section, the middle section and the lower end position of the heating rod 102 are provided with accommodating grooves 105, and the elastic heat-conducting members 104 are arranged in the accommodating grooves 105, so that the full length of the heating rod 102 can be well fitted to the hole wall of the heat-conducting hole 103, and the heating efficiency is improved.

[0027] More specifically, in the embodiment, the heating rod 102 comprises a detachably fixedly connected heating core 1021 and a heat-conducting sleeve 1022, the heat-conducting sleeve 1022 is sleeved on the heating core 1021, and the accommodating grooves 105 are arranged on the heat-conducting sleeve 1022, so that when the heating rod 102 has a problem, the heating core 1021 or the heat-conducting sleeve 1022 can be replaced correspondingly, and the cost can be saved.

[0028] It can be understood that the utility model is described through some embodiments, and the person skilled in the art knows that various changes or equivalent replacements can be made to these features and embodiments without departing from the spirit and scope of the utility model. In addition, under the guidance of the utility model, these features and embodiments can be modified to adapt to specific conditions and materials without departing from the spirit and scope of the utility model. Therefore, the utility model is not limited by the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of the present application belong to the scope protected by the utility model.

[0029] In the description of the utility model, it should be explained that the orientation or position relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and cannot be understood as indicating or implying that the indicated device or element must have a specific orientation, a specific orientation and operation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

Claims

1. A plasma etcher shield heat structure, comprising: The utility model provides a heating device, including bottom plate (100) and cover (101), be provided with a plurality of vertical upward heating rod (102) on bottom plate (100), be provided with a plurality of vertical downward intercommunication to the heat conduction hole (103) of cover (101) bottom surface in the side wall of cover (101);Cover (101) with bottom plate (100) detachable fixed connection, the heating rod (102) opposite two sides are provided with elastic heat conduction spare (104) back -to -position and pass into heat conduction hole (103), to ensure that the heating rod (102) and heat conduction hole (103) inner wall closely fit.

2. The heating structure for a shield of a plasma etching machine according to claim 1, wherein The heating rod (102) is evenly distributed on the bottom plate (100).

3. The heating structure for a shield of a plasma etching machine according to claim 2, wherein The bottom plate (100) and the heating rod (102) are detachably fixedly connected.

4. The heating structure for a shield of a plasma etching machine according to claim 3, wherein The heating rod (102) is provided with a receiving groove (105) on the side wall, the elastic heat conduction member (104) is arranged in the receiving groove (105), the length of the receiving groove (105) is greater than the length of the elastic heat conduction member (104), the width of the receiving groove (105) is greater than the diameter of the elastic heat conduction member (104), and the depth of the receiving groove (105) is less than the diameter of the elastic heat conduction member (104).

5. The heating structure for a shield of a plasma etching machine according to claim 4, wherein The upper section, the middle section and the lower end of the heating rod (102) are provided with the receiving groove (105), and the elastic heat conduction member (104) is arranged in the receiving groove (105).

6. The heating structure for a shield of a plasma etching machine according to claim 5, wherein The heating rod (102) comprises a detachable heating core (1021) and a heat conduction sleeve (1022), the heat conduction sleeve (1022) is sleeved on the heating core (1021), and the receiving groove (105) is arranged on the heat conduction sleeve (1022).

7. The heating structure for a shield of a plasma etching machine according to claim 1, wherein The bottom surface of the cover (101) is provided with a guide slope (106) surrounding the heat conduction hole (103) to guide the heating rod (102) to pass into the heat conduction hole (103).

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