Gas runner block assembly and gas path system

Abstract

The utility model discloses a gas flow channel block assembly and a gas path system, and relates to the technical field of semiconductor processing equipment, the gas flow channel block assembly comprises: a female member provided with a flow channel, and an inlet, an outlet and a machining port communicated with the flow channel; the parent part and the child part are arranged in a split mode, the child part is provided with a containing groove, and the parent part is arranged in the containing groove; the positioning assembly comprises a first positioning part and a second positioning part, the first positioning part is arranged on the parent part, the second positioning part is arranged on the child part, and the first positioning part and the second positioning part are arranged in a matched mode. According to the technical scheme, the parent part of the gas runner block assembly can be used as a standard component for modular production, the production benefit is improved, and the style of the child part can be freely changed according to the design requirements of various products without influencing the gas flowing function.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and in particular to a gas flow channel block assembly and gas path system. Background Technology

[0002] IGS Integrated Gas Systems have been developed and used in the semiconductor industry abroad for over 20 years. They use modular components that are interconnected. The required gas circuits are built according to the gas circuit requirements, such as assembling sealing systems, valve bodies, flow controllers, filters, etc., to synthesize various gas circuit integrated systems with multiple possible combinations.

[0003] As a key component in building the gas path system, the flow channel block base has high material requirements to meet the requirements of the gas flow channel. However, depending on the product requirements, different styles of flow channel block bases need to be designed and the gas flow channels need to be processed separately. After the shape of the flow channel block is changed and assembled, it can easily affect the flow of gas in the flow channel, thereby affecting the function of the entire gas path system. Utility Model Content

[0004] The main purpose of this utility model is to provide a gas flow channel block assembly, which aims to solve the technical problem that the current flow channel block base assembly easily affects the gas flow in the flow channel, thereby affecting the function of the entire gas circuit system.

[0005] To achieve the above objectives, the gas flow channel block assembly proposed in this utility model includes:

[0006] The mother component is provided with a flow channel and an inlet, an outlet and a machining port communicating with the flow channel;

[0007] The parent component and the child component are separately disposed, and the child component has a receiving groove, and the parent component is disposed in the receiving groove; and

[0008] The positioning component includes a first positioning part and a second positioning part. The first positioning part is disposed on the mother component, and the second positioning part is disposed on the daughter component. The first positioning part and the second positioning part are configured to cooperate with each other.

[0009] In one embodiment, the mother component is provided with a first connecting groove, and the daughter component is provided with a second connecting groove. The first connecting groove and the second connecting groove are opposite to and communicate with each other. The first connecting groove and the second connecting groove together form a welding groove. The gas flow channel block assembly also includes a connector, which is disposed in the welding groove and connects the mother component and the daughter component.

[0010] In one embodiment, the mother component is made of ultra-high purity stainless steel or high-nickel alloy, and the mother component is welded to the daughter component, wherein the connecting component is configured as a weld.

[0011] In one embodiment, the mother component is made of ceramic, and the connector is configured as a metal sheet. The metal sheet is welded and melted and then connected to the mother component and the daughter component.

[0012] In one embodiment, the first positioning part is configured as a positioning groove, which is disposed on the side wall of the mother part, and the second positioning part is configured as a positioning protrusion, which protrudes from the inner wall of the receiving groove, and the first positioning part and the second positioning part are bonded together.

[0013] In one embodiment, the gas flow channel block assembly further includes a sealing cap for sealing the machining port.

[0014] In one embodiment, the sub-component includes a first connecting portion and / or a second connecting portion, and is used to connect to an external structure, respectively.

[0015] In one embodiment, when the sub-component includes a first connecting portion and a second connecting portion, the first connecting portion has a connecting hole, the sub-component has an external groove at one end near the second connecting portion, the external groove is also provided with a fixing member, and the machining port is located at one end of the mother component facing the external groove.

[0016] When the sub-component includes a first connecting portion, the first connecting portion has a connecting hole, and the machining port is located at one end of the mother component facing the first connecting portion.

[0017] When the sub-component includes a second connecting portion, an external groove is provided at one end of the sub-component near the second connecting portion, and a fixing member is also provided in the external groove. The outlet is located at one end of the mother component away from the external groove, and the outlet and the machining port are configured to be the same and connected to a connecting pipe.

[0018] This invention also proposes a gas path system, including the gas flow channel block assembly as described above.

[0019] In one embodiment, the gas path system further includes a base plate, a locking member, and a plurality of flow channel blocks, wherein the plurality of flow channel blocks are overlapped and assembled with the gas flow channel block assembly, and the flow channel blocks and the gas flow channel block assembly are respectively connected to the base plate.

[0020] This utility model's technical solution employs a separate design for the mother and daughter components. The mother component features flow channels, inlets, outlets, and machining ports, allowing for modular production as a standard component, thus improving production efficiency. The daughter component has a receiving groove, within which the mother component is installed and positioned using a positioning component, ensuring the installation reference and accuracy between the mother and daughter components. This allows for flexible changes in the daughter component's design to meet various product requirements without affecting gas flow functionality. The separate design of the mother and daughter components allows for mass production of the mother component as a standard part, while the daughter component can flexibly meet product needs without compromising the overall gas flow function of the gas system. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0022] Figure 1 A schematic diagram of a gas flow channel block assembly according to an embodiment of the present invention;

[0023] Figure 2 An exploded structural diagram of an embodiment of the gas flow channel block assembly provided by this utility model;

[0024] Figure 3 This is a schematic diagram of the structure of the parent component of the gas flow channel block assembly provided by this utility model;

[0025] Figure 4 A cross-sectional structural schematic diagram of the parent component of the gas flow channel block assembly embodiment provided by this utility model;

[0026] Figure 5 A schematic diagram of another embodiment of the gas flow channel block assembly provided by this utility model;

[0027] Figure 6 An exploded structural diagram of another embodiment of the gas flow channel block assembly provided by this utility model;

[0028] Figure 7 A schematic diagram of another embodiment of the gas flow channel block assembly provided by this utility model;

[0029] Figure 8 An exploded structural diagram of yet another embodiment of the gas flow channel block assembly provided by this utility model;

[0030] Figure 9 A schematic diagram of the structure of an embodiment of the pneumatic system provided by this utility model;

[0031] Figure 10 An exploded structural diagram of an embodiment of the gas path system provided by this utility model.

[0032] Explanation of icon numbers:

[0033] 100. Mother component; 110. Flow channel; 120. Outlet; 130. Inlet; 140. Machining port; 150. First connecting groove;

[0034] 200, Sub-component; 210, Receiving groove; 220, Second connecting groove; 230, First connecting part; 231, Connecting hole; 240, Second connecting part; 250, External groove; 251, Fixing member; 260, Connecting pipe;

[0035] 300. Positioning component; 310. First positioning part; 320. Second positioning part;

[0036] 400. Connectors;

[0037] 500. Sealing cap;

[0038] 10. Substrate; 20. Locking component; 30. Type I flow channel block; 40. Type H flow channel block; 50. Assembly body flow channel block; 60. Flow channel block with output port; 70. Tail flat flow channel block.

[0039] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0040] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0041] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0042] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0043] In the existing technology, the flow channel block base is used as the main component to build the gas path system. In order to meet the requirements of the gas flow channel, the material requirements of the flow channel block base are relatively high. However, depending on the product requirements, the flow channel block base needs to be designed in different styles and the gas flow channel needs to be processed separately. After the shape of the flow channel block is changed and assembled, it is easy to affect the flow of gas in the flow channel, thereby affecting the function of the entire gas path system.

[0044] This utility model proposes a gas flow channel block assembly.

[0045] Please see Figures 1 to 8 As shown, in one embodiment of this utility model, the gas flow channel block assembly includes: a mother component 100, a daughter component 200, and a positioning component 300. The mother component 100 is provided with a flow channel 110 and an inlet 130, an outlet 120, and a machining port 140 communicating with the flow channel 110. The mother component 100 and the daughter component 200 are separately arranged, and the daughter component 200 has a receiving groove 210, in which the mother component 100 is disposed. The positioning component 300 includes a first positioning part 310 and a second positioning part 320. The first positioning part 310 is disposed on the mother component 100, and the second positioning part 320 is disposed on the daughter component 200. The first positioning part 310 and the second positioning part 320 are configured to cooperate with each other.

[0046] In the specific implementation process, refer to Figure 3 and Figure 4As shown, gas enters the flow channel 110 through inlet 130 and flows out through outlet 120. The flow channel 110 is machined through machining port 140, and then sealed to ensure its airtightness. The parent component 100 has a cuboid structure, and the positions of inlet 130, outlet 120, and machining port 140 can be set according to the requirements of the mating component and the gas path system. Furthermore, the gas inlet, outlet 120, and machining port 140 are generally located on the top surface or the end faces of both ends along the length of the parent component 100. The shape of the parent component 100 will not change significantly, and it can be modularly produced as a standard component.

[0047] refer to Figure 1 and Figure 2 As shown, the top surface of the sub-component 200 is recessed to form a receiving groove 210, which is used to install the mother component 100. The sub-component 200 and the mother component 100 are separately configured. The shape of the sub-component 200 can be changed according to the needs of the gas path without affecting the flow of the internal flow channel 110 of the mother component. Specifically, when designing the gas flow channel 110 according to product requirements, the sub-component 200 can be flexible. While retaining the assembly and positioning reference of the sub-component 200 and the mother component 100, the shape of the sub-component 200 can be freely changed according to product design requirements without affecting the gas flow function. In addition, the material of the mother component 100 meets the requirements of the gas flow channel 110, while the material of the sub-component 200 can be metal or non-metal, which greatly saves the amount of ultra-high purity materials used, solves the bottleneck problem of imported 130 materials, increases production capacity and saves costs. In the specific implementation process, the material of the sub-component 200 can be one of stainless steel, titanium alloy or non-metal. When the sub-component 200 is made of stainless steel or titanium alloy, it is integrally formed using casting technology, such as MIM (Metal Injection Moulding) technology, eliminating the need for further machining and saving machining costs.

[0048] In addition, the sub-component 200 and the mother component 100 are assembled and positioned by the positioning assembly 300 to ensure the assembly reference of the sub-component 200 and the mother component 100. The first positioning part 310 and the second positioning part 320 cooperate smoothly to meet the assembly reference requirements.

[0049] In one embodiment, the first positioning part 310 is configured as a positioning groove, which is located on the side wall of the mother part 100, and the second positioning part 320 is configured as a positioning protrusion, which protrudes from the inner wall of the receiving groove 210. The first positioning part 310 and the second positioning part 320 are bonded together.

[0050] Specifically, the two opposite sidewalls of the mother component 100 are recessed to form positioning grooves, which extend from one side of the mother component 100 to the opposite side. The positioning grooves are semi-circular notches, and the positioning protrusions are protruding semi-circular protrusions, which cooperate with each other. The positioning protrusions are provided on the two opposite sidewalls of the receiving groove 210 of the daughter component 200, and the positioning protrusions are configured to cooperate with the positioning grooves. After the mother component 100 is assembled into the receiving groove 210, the positioning protrusions are received in the positioning grooves and fit against the positioning grooves, and are bonded and fixed. Furthermore, the positioning grooves on the two sidewalls of the mother component 100 can be staggered to improve the positioning accuracy. Of course, it is understandable that the positioning protrusions are configured to cooperate accordingly.

[0051] This utility model's technical solution employs a separate design of a mother component 100 and a daughter component 200. The mother component 100 has a flow channel 110, an inlet 130, an outlet 120, and a machining port 140. The mother component 100 can be modularly produced as a standard component, improving production efficiency. The daughter component 200 has a receiving groove 210, within which the mother component 100 is installed and positioned using a positioning component 300. This ensures the installation reference and accuracy between the daughter component 200 and the mother component 100. Thus, the design of the daughter component 200 can be freely modified to meet various product design requirements without affecting the gas flow function. The separate design of the daughter component 200 and the mother component 100 allows the mother component 100 to be mass-produced as a standard part, while the daughter component 200 can flexibly meet product requirements without affecting the gas flow function of the entire gas path system.

[0052] In one embodiment, the mother component 100 is provided with a first connecting groove 150, and the daughter component 200 is provided with a second connecting groove 220. The first connecting groove 150 and the second connecting groove 220 are opposite to and connected to each other. The first connecting groove 150 and the second connecting groove 220 together form a welding groove. The gas flow channel block assembly also includes a connector 400, which is disposed in the welding groove and connects the mother component 100 and the daughter component 200.

[0053] In the specific implementation process, the first connecting groove 150 and the second connecting groove 220 are both semi-circular structures, with one side extending to the edge of the mother component 100. After the mother component 100 is assembled to the daughter component 200, the first connecting groove 150 and the second connecting groove 220 are opposite to each other and interconnected to form a welding groove in the shape of a complete circle. The assembly status and whether the assembly requirements are met can be judged by visually inspecting the shape of the welding groove. In this embodiment, after the mother component 100 is assembled into the receiving groove 210, in order to ensure the stability and positioning accuracy of the mother component 100, the mother component 100 and the daughter component 200 are fixedly connected. Specifically, the daughter component 200 and the mother component 100 are connected by the connector 400, thereby realizing the fixed connection assembly of the mother component 100 and the daughter component 200.

[0054] In one embodiment, the mother component 100 is made of ultra-high purity stainless steel or high-nickel alloy. The mother component 100 is welded to the daughter component 200, and the connector 400 is configured as a weld. Specifically, the mother component 100 is a simple cuboid structure with post-processing surface treatment, such as electropolishing (EP) to passivate the surface. This allows for more even etching or coating without obstructions, thereby improving the corrosion resistance of the wet flow channel 110. After the mother component 100 is installed in the receiving groove 210 of the daughter component 200, the two are welded together within the groove to form a weld. The weld is located within the welding groove, ensuring the flatness of the top surfaces of both the mother component 100 and the daughter component 200, facilitating the installation of electrical components and ensuring airtightness. It should be noted that the welded connection between the mother component 100 and the daughter component 200 ensures a pull-out force greater than 30 kgf and an impact resistance distance of 25 cm to 35 cm.

[0055] In one embodiment, the mother component 100 is made of ceramic, and the connector 400 is configured as a metal sheet. The metal sheet is welded and melted, then connected to both the mother component 100 and the daughter component 200. In specific implementations, the ceramic can be zirconia ceramic. The mother component 100 is integrally molded by injection molding, exhibiting good corrosion resistance and high hardness, thus improving the service life of the components. The metal sheet is placed in a welding groove and melted using laser welding. The molten metal sheet firmly connects to the mother component 100, thereby achieving relative fixation between the mother component 100 and the daughter component 200.

[0056] In one embodiment, the gas flow channel block assembly further includes a sealing cap 500, which is used to seal the machining port 140. In specific implementation, when the mother part 100 is made of metal, after the flow channel 110 is machined, the sealing cap 500 seals the machining port 140 and is welded and sealed to the mother part. When the mother part 100 is ceramic, the mother part 100 and the sealing cap 500 are pressed and pre-sintered separately. The sealing cap 500 is then assembled to the machining port 140, followed by final ceramic sintering to form a single unit with the mother part 100, ensuring a tight seal between the sealing cap 500 and the machining port 140.

[0057] Continue to refer Figure 1 and Figure 2 As shown, in one embodiment, the sub-component 200 includes a first connecting portion 230 and a second connecting portion 240. The first connecting portion 230 has a connecting hole 231. The sub-component 200 has an external groove 250 at one end near the second connecting portion 240. A fixing member 251 is also provided in the external groove 250. A machining port 140 is provided at one end of the mother component 100 facing the external groove 250.

[0058] The first connecting portion 230 and the second connecting portion 240 are used to connect to an external structure. This external structure can be a sub-component 200 of another gas flow channel 110 block, or an external structure according to product requirements, assembled to form a complete product gas path system. In specific implementation, the first connecting portion 230 extends, and a receiving groove 210 divides the first connecting portion 230 into two first sub-components. Each sub-component has a connecting hole 231 for connecting to the external structure. A second connecting portion 240 and an external groove 250 are provided at the end of the sub-component 200 opposite to the first connecting portion 230. The external groove 250 allows the second connecting portion 240 to form two opposing second sub-components, and the external groove 250 communicates with the receiving groove 210. A fixing member 251, such as a fixing pin, is provided within the external groove 250 for connecting to the external structure and for positioning. It should be noted that in this embodiment, the machining port 140 of the mother body is oriented towards the connecting groove to protect the sealing cover 500 from wear that could affect the air passage's sealing performance.

[0059] refer to Figure 5 and Figure 6 As shown, in another embodiment, the sub-component 200 includes a first connecting portion 230, which has a connecting hole 231. A machining port 140 is located at the end of the mother component 100 facing the first connecting portion 230. In this embodiment, the shape and structure of the first connecting portion 230 are similar to those in the above embodiment. After the sub-component 200 is assembled with the mother component 100, it serves as the flow channel 110 block at the tail of the gas flow system, wherein the end opposite to the first connecting portion 230 is the tail of the gas flow system. The first connecting portion 230 mates with the second connecting portion 240 and the external groove 250 of the corresponding gas flow channel 110 block and is located within the external groove 250. The fixing member 251 is press-fitted into the connecting hole 231 for positioning, thereby achieving assembly.

[0060] refer to Figure 7 and Figure 8As shown, in another embodiment, when the sub-component 200 includes a second connecting portion 240, an external groove 250 is formed at one end of the sub-component 200 near the second connecting portion 240. A fixing member 251 is also provided within the external groove 250. An outlet 120 is located at one end of the mother component 100 away from the external groove 250, and the outlet 120 and the machining port 140 are configured to be the same, and connected to a connecting pipe 260. The shape and structure of the second connecting portion 240 are referenced in the above embodiment. In this embodiment, the outlet 120 and the machining port 140 are configured to be the same, and connected to the connecting pipe 260, satisfying the product's requirements for airflow direction. The second connecting part 240 and the external groove 250 are used to connect the first connecting part 230 of another gas flow channel 110 block. The external groove 250 is used to accommodate the first connecting part 230. The second connecting part 240 fits with the first connecting part 230. The positioning member is interference-fitted with the connecting hole 231, thereby realizing the assembly between the flow channel 110 blocks, so as to further assemble them into a product gas path system.

[0061] In this way, the parent component serves as a standard part, and through modular production, the sub-components 200 can be flexibly varied. The parent component 100 is installed on sub-components 200 with different structures, and can be assembled into different gas flow channels 110 blocks according to product requirements. On the one hand, this can improve production efficiency and significantly reduce the amount of ultra-high purity materials used; on the other hand, it can also save machining costs and improve production efficiency. In addition, it can be assembled with existing flow channel 110 blocks without affecting product maintenance.

[0062] refer to Figure 9 and Figure 10 As shown, this utility model also proposes a gas path system, including a gas flow channel block assembly. The specific structure of the gas flow channel block assembly is as described in the above embodiments. Since this gas path system adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here.

[0063] In one embodiment, the gas path system further includes a substrate 10, a locking member 20, and a plurality of flow channel blocks, which are overlapped and assembled with a gas flow channel block assembly, and the flow channel blocks and the gas flow channel block assembly are respectively connected to the substrate 10.

[0064] In practical implementation, the locking component 20 serves as the mounting plate for the entire gas path system, securing the flow channel block and gas flow channel block assembly to the base plate 10. The gas flow channel block assembly cooperates with the flow channel block, enabling the flow channel 110 to connect and allowing airflow within the flow channel 110 to meet product requirements. The shapes of the multiple flow channel blocks are designed according to requirements and they cooperate and connect with each other to achieve the conduction of the flow channel 110.

[0065] It should be noted that multiple gas flow channel block assemblies can be provided as required, and they can be interchanged with existing flow channel blocks, facilitating product maintenance and saving costs. Specifically, the multiple flow channel blocks include type I flow channel block 30 and type H flow channel block 40. The gas flow channel block assembly includes a main assembly flow channel block 50, a flow channel block 60 with an output port, and a tail planar flow channel block 70. Among them, one end of the flow channel block 60 with the output port is connected to the type I flow channel block 30, and the type I flow channel block 30 is also connected to the assembly of the type H flow channel block 40. The main assembly flow channel block 50 is assembled and connected to the type H flow channel block 40, and multiple main assembly flow channel blocks 50 can be provided as required, and they are connected sequentially, finally connecting to the tail planar flow channel block 70. The locking member 20 uses bolts and is locked and connected to the base plate 10 to complete the assembly of the entire gas circuit system.

[0066] The above description is merely an exemplary embodiment of the present utility model and does not limit the patent scope of the present utility model. Any equivalent structural transformations made based on the inventive concept of the present utility model and the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A gas flow channel block assembly, characterized in that, include: The mother component is provided with a flow channel and an inlet, an outlet and a machining port communicating with the flow channel; The sub-component and the mother component are separately disposed, and the sub-component has a receiving groove, and the mother component is disposed in the receiving groove; as well as The positioning component includes a first positioning part and a second positioning part. The first positioning part is disposed on the mother component, and the second positioning part is disposed on the daughter component. The first positioning part and the second positioning part are configured to cooperate with each other.

2. The gas flow channel block assembly as described in claim 1, characterized in that, The mother component is provided with a first connecting groove, and the daughter component is provided with a second connecting groove. The first connecting groove and the second connecting groove are opposite to and connected to each other. The first connecting groove and the second connecting groove together form a welding groove. The gas flow channel block assembly also includes a connector. The connector is disposed in the welding groove and connects the mother component and the daughter component.

3. The gas flow channel block assembly as described in claim 2, characterized in that, The mother component is made of ultra-high purity stainless steel or high-nickel alloy. The mother component is welded to the daughter component, and the connecting component is configured as a weld.

4. The gas flow channel block assembly as described in claim 2, characterized in that, The mother component is made of ceramic, and the connector is configured as a metal sheet. After the metal sheet is welded and melted, it is connected to the mother component and the daughter component.

5. The gas flow channel block assembly as claimed in claim 1, characterized in that, The first positioning part is configured as a positioning groove, which is located on the side wall of the mother part. The second positioning part is configured as a positioning protrusion, which protrudes from the inner wall of the receiving groove. The first positioning part and the second positioning part are bonded together.

6. The gas flow channel block assembly as claimed in claim 1, characterized in that, The gas flow channel block assembly also includes a sealing cap for sealing the machining port.

7. The gas flow channel block assembly as claimed in claim 1, characterized in that, The sub-component includes a first connecting portion and / or a second connecting portion, and is used to connect to an external structure, respectively.

8. The gas flow channel block assembly as claimed in claim 7, characterized in that, When the sub-component includes a first connecting portion and a second connecting portion, the first connecting portion has a connecting hole, and the sub-component has an external groove at one end near the second connecting portion. A fixing member is also provided in the external groove, and the machining port is located at one end of the mother component facing the external groove. When the sub-component includes a first connecting portion, the first connecting portion has a connecting hole, and the machining port is located at one end of the mother component facing the first connecting portion. When the sub-component includes a second connecting portion, an external groove is provided at one end of the sub-component near the second connecting portion, and a fixing member is also provided in the external groove. The outlet is located at one end of the mother component away from the external groove, and the outlet and the machining port are configured to be the same and connected to a connecting pipe.

9. A pneumatic system, characterized in that, Includes the gas flow channel block assembly as described in any one of claims 1-8.

10. The gas path system as described in claim 9, characterized in that, The gas path system further includes a base plate, a locking member, and multiple flow channel blocks. The multiple flow channel blocks are overlapped and assembled with the gas flow channel block assembly, and the flow channel blocks and the gas flow channel block assembly are respectively connected to the base plate.

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