Substrate clamping device

Abstract

The utility model relates to a substrate clamping device. The substrate clamping device comprises a first driving piece, a second driving piece and a clamping piece, wherein the first driving piece is provided with an output shaft; the turntable is connected to the output shaft and can rotate along with the output shaft under the driving force of the first driving part; the retaining assembly comprises a plurality of clamping pieces which are circumferentially distributed around the axis of the rotating disc, each clamping piece is connected with the rotating disc through a rotating shaft, each clamping piece comprises a clamping jaw part and an abutting part which are arranged on the two sides of the rotating shaft, and the side, facing the rotating disc, of each abutting part is connected with an elastic piece; acting force is applied to the abutting part, and the abutting part overcomes the elastic force of the elastic piece to rotate anticlockwise along the rotating shaft so as to drive the clamping jaw part to move outwards; when the acting force applied to the abutting part is cancelled, the abutting part rotates clockwise along the rotating shaft under the action of the elastic force of the elastic piece so as to drive the clamping jaw part to move inwards. According to the substrate clamping device, the phenomena of cracks, edge breakage and the like of the substrate due to excessively concentrated stress can be greatly reduced, and the clamping effect of the substrate clamping device is further improved.

Description

Technical Field

[0001] This application relates to the field of substrate processing technology, and in particular to a substrate clamping device. Background Technology

[0002] During the processing of substrates (e.g., wafers), clamping devices are used to hold them in order to perform operations such as drying and cleaning.

[0003] Clamping devices typically use mechanical rigid contact to hold substrates. When the substrate is subjected to external impact or vibration, the impact force is directly transmitted to the substrate, which may cause damage to the substrate. Utility Model Content

[0004] In view of this, the present application provides a substrate clamping device to solve at least one problem existing in the prior art.

[0005] In a first aspect, embodiments of this application provide a substrate clamping device, including:

[0006] The first driving component has an output shaft;

[0007] A turntable is connected to the output shaft and can rotate with the output shaft under the driving force of the first driving member;

[0008] The retaining assembly includes a plurality of retaining members circumferentially distributed around the axis of the turntable. Each retaining member is connected to the turntable via a rotating shaft. Each retaining member includes a gripper portion and a supporting portion disposed on both sides of the rotating shaft. An elastic member is connected to the supporting portion on the side facing the turntable.

[0009] A force is applied to the supporting part, and the supporting part overcomes the elastic force of the elastic element and rotates counterclockwise along the rotating shaft, thereby driving the gripper part to move outward;

[0010] The force applied to the supporting part is removed, and the supporting part rotates clockwise along the rotating shaft under the elastic force of the elastic member, thereby driving the gripper part to move inward;

[0011] The second driving member is movable relative to the abutting part and is used to provide force to the abutting part or to remove the force applied to the abutting part.

[0012] In conjunction with the first aspect of this application, in an optional embodiment, the turntable further includes a main body and a plurality of mounting portions disposed above the main body, wherein the plurality of mounting portions are evenly spaced along the circumference of the main body, each mounting portion is provided with a first through hole, the gripper portion is inserted through the first through hole and protrudes from the surface of the mounting portion, and the abutment portion is located below the mounting portion.

[0013] In conjunction with the first aspect of this application, in an optional embodiment, the end of the gripper portion has an arc-shaped structure.

[0014] In conjunction with the first aspect of this application, in an optional embodiment, the abutment portion includes a horizontal portion and a bent portion connected to the horizontal portion, the bent portion being disposed inclined from top to bottom along the horizontal portion;

[0015] A counterweight is also connected to the bent portion.

[0016] In conjunction with the first aspect of this application, in an optional embodiment, the substrate clamping device further includes a drive plate located below the abutment portion, the second drive member being capable of driving the drive plate to move up and down, so as to simultaneously apply force to the abutment portions or simultaneously remove the force applied to the abutment portions.

[0017] In conjunction with the first aspect of this application, in an optional embodiment, the retaining component further includes a plurality of support members disposed on the turntable, the support members being disposed close to the retaining member for supporting the substrate.

[0018] In conjunction with the first aspect of this application, in an optional embodiment, the output shaft is provided with a hollow conduit;

[0019] The substrate clamping device further includes:

[0020] A water outlet pipe is connected to the hollow pipe and is used to spray liquid onto the back of the substrate so that the water curtain formed on the back of the substrate prevents the cleaning liquid from overflowing from the front of the substrate.

[0021] In conjunction with the first aspect of this application, in an optional embodiment, the water outlet pipe has a water outlet, and the axis of the water outlet pipe located at the water outlet forms an angle with the plane where the turntable is located, the angle being an acute angle or an obtuse angle, so that the liquid sprayed from the water outlet is directed toward the edge of the turntable.

[0022] In conjunction with the first aspect of this application, in an optional embodiment, the substrate clamping device further includes:

[0023] An exhaust pipe is connected to the hollow pipe and is used to blow gas toward the back of the substrate to dry the back of the substrate.

[0024] In conjunction with the first aspect of this application, in an optional embodiment, the air outlet pipe has an air outlet, both the water outlet and the air outlet are higher than the main body of the turntable, and a shielding member is provided on the outside, the lower end of the shielding member forming a misaligned structure with the main body.

[0025] The substrate clamping device provided in this application embodiment has an elastic member connected to the side of the abutment portion facing the turntable. When the force applied to the abutment portion is removed, the abutment portion moves the gripper portion inward under the elastic force of the elastic member to clamp the substrate. Since the substrate is clamped by maintaining the elastic force of the elastic member, the elastic member acts as a buffer when the substrate is subjected to external impact or vibration, greatly reducing the occurrence of cracks, chipping, and other phenomena caused by excessively concentrated stress on the substrate, further improving the clamping effect of the substrate clamping device. In addition, by using the second driving member to apply or remove the applied force to the abutment portion, the multiple gripper portions are brought together or spread out towards the axis of the output shaft, ensuring the clamping effect of the substrate and facilitating the removal of the substrate.

[0026] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through practice of the present application. Attached Figure Description

[0027] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0028] Figure 1 This is a three-dimensional structural diagram of the substrate clamping device provided in the embodiments of this application;

[0029] Figure 2 This is a cross-sectional schematic diagram of the substrate clamping device provided in the embodiments of this application;

[0030] Figure 3 for Figure 2 Enlarged view of point B in the middle;

[0031] Figure 4 for Figure 3 The diagram shows another state of the clamping component;

[0032] Figure 5 This is a top view of the substrate clamping device provided in the embodiments of this application;

[0033] Figure 6 Another cross-sectional view of the substrate clamping device provided in the embodiments of this application;

[0034] Figure 7 for Figure 1 Enlarged view of point A in the middle.

[0035] Figure label:

[0036] a. Substrate;

[0037] 110. Output shaft; 111. Hollow tubing;

[0038] 20. Turntable; 210. Main body; 220. Mounting part; 221. First through hole;

[0039] 30. Holding component; 310. Rotating shaft; 320. Clamping component; 321. Gripper part; 323. Supporting part; 3231. Horizontal part; 3232. Bending part; 3233. Counterweight; 340. Elastic element; 350. Supporting element;

[0040] 40. Second drive component; 50. Drive board;

[0041] 61. Water outlet pipe; 610. Water outlet; 62. Air outlet pipe; 620. Air outlet;

[0042] 70. Inspection item; 80. Obstruction item. Detailed Implementation

[0043] To make the technical solution and beneficial effects of this utility model more apparent and understandable, a detailed description is provided below by listing specific embodiments. The accompanying drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly show the details of the local features; unless otherwise defined, the technical and scientific terms used herein have the same meanings as those in the technical field to which this application pertains.

[0044] In the description of this utility model, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "height", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", and "counterclockwise" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the purpose of simplifying the description of this utility model and do not indicate that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. In other words, they should not be construed as limitations on this utility model.

[0045] In this utility model, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating the relative importance of the indicated features or the number of indicated technical features. Therefore, a feature specified as "first" or "second" can explicitly indicate that at least one of those features is included. In the description of this utility model, "multiple" means at least two, such as two, three, etc.; "several" means at least one, such as one, two, three, etc., unless otherwise explicitly specified.

[0046] In this utility model, unless otherwise explicitly defined, the terms "installation," "connection," "linking," "fixing," and "setting," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can also refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0047] In this utility model, unless otherwise explicitly defined, the terms "above," "on top of," "above," "over," "below," "below," "below," or "below" for "first feature above second feature" can refer to direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Furthermore, "above," "above," and "over" for "first feature above second feature" can mean the first feature is directly above or diagonally above the second feature, or simply indicates that the horizontal height of the first feature is higher than the horizontal height of the second feature. Similarly, "below," "below," and "below" for "first feature below second feature" can mean the first feature is directly below or diagonally below the second feature, or simply indicates that the horizontal height of the first feature is lower than the horizontal height of the second feature.

[0048] The substrate a provided in this embodiment is a semiconductor wafer.

[0049] The substrate clamping device provided in this application embodiment is used to clamp substrate a so that the cleaning device and the drying device can respectively perform cleaning and drying operations on substrate a.

[0050] Please refer to Figures 1 to 3 The substrate clamping device provided in this application embodiment includes a first driving member, a turntable 20, a holding assembly 30, and a second driving member 40. The first driving member is preferably a motor (not shown in the figure). The motor has an output shaft 110. The output shaft 110 rotates under the driving action of the motor and drives the turntable 20 connected to the output shaft 110 to rotate synchronously.

[0051] The retaining component 30 includes a plurality of retaining members 320 circumferentially distributed around the axis of the turntable 20. Each retaining member 320 is connected to the turntable 20 via a rotating shaft 310. Each retaining member 320 includes a gripper portion 321 and a holding portion 323 disposed on both sides of the rotating shaft 310. An elastic member 340 is disposed on the side of the holding portion 323 facing the turntable 20.

[0052] A force is applied to the holding part 323, which overcomes the elastic force of the elastic member 340 and rotates counterclockwise along the rotating shaft 310 to drive the gripper part 321 to move outward, thereby causing the multiple gripper parts 321 to move away from the substrate a.

[0053] The force applied to the supporting part 323 is removed, that is, no external force is applied to the supporting part 323. Under the elastic force of the elastic member 340, the supporting part 323 rotates clockwise along the rotating shaft 310 to drive the gripper part 321 to move inward, so that multiple gripper parts 321 abut against the substrate a, thereby achieving the clamping of the substrate a.

[0054] The second driving member 40 is preferably a cylinder, but it is not limited to this. The second driving member 40 can move relative to the supporting part 323. The second driving member 40 is used to provide force to the supporting part 323 or to remove the force applied to the supporting part 323. It can be understood that the second driving member 40 does not rotate with the turntable 20. When the second driving member 40 is in the driving state, it can apply force to the supporting part 323; when the second driving member 40 is in the non-driving state, it can remove the force applied to the supporting part 323.

[0055] In the above substrate clamping device, when the turntable 20 is driven to rotate by the first driving member, the second driving member 40 does not need to rotate with it. This can greatly reduce the pressure of the first driving member driving the turntable 20 to rotate and further improve the processing efficiency of substrate a. In addition, by applying or removing the applied force to the holding part 323 by the second driving member 40, the multiple gripper parts 321 are brought together or spread towards the axis of the output shaft 110, ensuring the clamping effect of substrate a and facilitating the removal of substrate a.

[0056] Figure 3 The diagram shows that the second driving member 40 cancels the force applied to the abutment portion 323. Under the action of the elastic force of the elastic member 340, the abutment portion 323 drives the gripper portion 321 to move inward, that is, to move closer to the axis of the output shaft 110, so as to achieve clamping of the substrate a.

[0057] Figure 4 The diagram shows that the second driving member 40 applies a force to the holding part 323, which overcomes the elastic force of the elastic member 340 and rotates counterclockwise around the rotating shaft 310, thereby driving the gripper part 321 to move outward, that is, to move in the direction away from the axis of the output shaft 110, so as to release the substrate a and facilitate the removal of the substrate a.

[0058] Furthermore, the driving direction of the second drive member 40 is parallel to the axis of the output shaft 110. The second drive member 40 is located below the turntable 20. The second drive member 40 can move along the axis of the output shaft 110 to apply force to or remove the applied force from the abutment portion 323.

[0059] Furthermore, the second drive unit 40 is connected to the housing of the substrate clamping device, and the second drive unit 40 does not need to rotate with the turntable 20 and the output shaft 110.

[0060] In an alternative embodiment, such as Figure 1 and Figure 5 As shown, the turntable 20 also includes a main body 210 and a plurality of mounting portions 220 disposed above the main body 210. The plurality of mounting portions 220 are evenly spaced around the circumference of the main body 210. Each mounting portion 220 has a first through hole 221. A gripper portion 321 is inserted through the first through hole 221 and protrudes from the surface of the mounting portion 220. A supporting portion 323 is located below the mounting portion 220. By disposing the plurality of mounting portions 220 above the main body 210, a distance is created between them in the height direction, forming a clearance space that facilitates the subsequent installation of the water outlet pipe 61 and the air outlet pipe 62. The plurality of mounting portions 220 are evenly spaced around the circumference of the main body 210, and a notch is formed between each two adjacent mounting portions 220. When the turntable 20 rotates, due to the centrifugal force, the liquid present on the main body 210 is thrown out through the plurality of notches.

[0061] In one optional embodiment, the end of the gripper portion 321 has an arc-shaped structure. First, the arc-shaped gripper portion 321 can better conform to the edge contour of the circular substrate a, resulting in a tighter and more uniform contact with the substrate a. This allows the gripper portion 321 to apply clamping force evenly in all directions, reducing the likelihood of the substrate a shaking or shifting. Second, the arc-shaped structure generates less local pressure when in contact with the substrate, effectively reducing the risk of scratches, indentations, or other damage to the substrate, ensuring the quality and performance of the substrate and minimizing damage. Furthermore, this design improves the versatility of the clamping device. Substrates of different sizes may have varying edge curvatures, but the arc-shaped gripper portion can adapt to substrates of different diameters to a certain extent, improving the compatibility of the clamping device with various substrate specifications and reducing equipment costs and the frequency of gripper replacement.

[0062] The number of gripper portions 321 can be six, eight, ten, or twelve. The number of gripper portions 321 is set based on requirements, and this application embodiment does not impose a specific limitation.

[0063] Preferably, the number of gripper portions 321 is six, and the six gripper portions 321 are evenly distributed circumferentially around the axis of the output shaft 110. This arrangement aims to ensure that six gripper portions 321 represent the minimum number of grippers capable of holding an irregular substrate. For example, if four gripper portions 321 are provided, and the irregular substrate results in only three gripper portions 321 being able to hold the substrate edge, these three gripper portions 321 can only provide a clamping force in one direction, leading to poor stability of the substrate and making it prone to displacement, shaking, or falling during clamping. Figure 5As shown, six gripper portions 321 are provided. When the irregular substrate causes only five gripper portions 321 to be able to clamp the edge of the substrate, the four gripper portions 321 can actually provide clamping force to the substrate in two directions. Compared with clamping force in one direction, the stability is greatly improved.

[0064] Please refer to Figure 3 and Figure 4 The supporting part 323 includes a horizontal part 3231 and a bent part 3232 connected to the horizontal part 3231. The bent part 3232 is inclined from top to bottom along the horizontal part 3231, and a counterweight 3233 is also connected to the bent part 3232.

[0065] One end of the elastic member 340 is connected to the mounting portion 220, and the other end is connected to the horizontal portion 3231. The bending portion 3232 is inclined from top to bottom along the horizontal portion 3231 to facilitate the action of the second driving member 40 on the supporting portion 323. The counterweight 3233 connected to the bending portion 3232 can increase the supporting force of the gripper portion 321 against the substrate a, and further improve the clamping stability of the substrate a.

[0066] In an alternative embodiment, such as Figure 1 and Figure 5 As shown, the substrate clamping device also includes a drive plate 50 located below the abutment portion 323. The second drive member 40 can drive the drive plate 50 to move up and down, so as to simultaneously apply force to the abutment portions 323 or simultaneously remove the force applied to the abutment portions 323.

[0067] This can be understood as follows: the drive plate 50 has a ring structure, and simultaneously corresponds to multiple mounting portions 220 and multiple supporting portions 323. The number of second drive members 40 can be set according to specific requirements. The drive plate 50 is simultaneously connected to one or more second drive members 40. Under the driving force of one or more second drive members 40, the drive plate 50 moves along the axial direction of the output shaft 110 and can simultaneously act on multiple supporting portions 323 or simultaneously remove the applied force to multiple supporting portions 323. The embodiments of this application can ensure the synchronization of multiple supporting portions 323, thereby ensuring the uniformity of clamping the substrate a.

[0068] In an optional embodiment, the retaining component 30 further includes a plurality of support members 350 disposed on the turntable 20, the support members 350 being disposed close to the retaining member 320, and the support members 350 being used to support the substrate a.

[0069] When the gripper 321 is not holding the substrate a, the support member 350 can support the substrate a to facilitate the picking and putting of the substrate a; in addition, before the gripper 321 clamps the substrate a, the multiple support members 350 can play a certain limiting role on the substrate a, so that the multiple gripper 321 can clamp the substrate a more evenly and ensure the uniformity of the force on the substrate a.

[0070] Furthermore, the support member 350 is connected to the mounting part 220, and the support members 350 are provided on both sides adjacent to the gripper part 321 to ensure the uniformity of force on the substrate a when the gripper part 321 clamps the substrate a.

[0071] Furthermore, the support member 350 includes a support portion and a blocking portion. The blocking portion protrudes from a portion of the end face of the support portion. The end face of the support portion is used to support the substrate a, and the limiting portion is used to block the position of the substrate a on the support portion.

[0072] In an alternative embodiment, such as Figure 1 , Figure 2 , Figure 6 and Figure 7 As shown, the substrate clamping device also includes a water outlet pipe 61. The water outlet pipe 61 is connected to a hollow pipe 111 inside the output shaft 110. The water outlet pipe 61 is used to spray liquid onto the back side of the substrate a, so that the water curtain formed on the back side of the substrate a prevents the cleaning liquid from overflowing from the front side of the substrate a. The liquid sprayed by the water outlet pipe 61 is preferably pure water, but it is not limited to this.

[0073] It can be understood that the cleaning device cleans the front side of the substrate a clamped by the gripper 321. During the cleaning process, there is a situation where the cleaning liquid overflows from the edge of the substrate a to the back side of the substrate a. In this embodiment, the liquid is sprayed to the back side of the substrate a by the water outlet pipe 61, which can make the water curtain formed on the back side of the substrate a block the overflow of the cleaning liquid on the front side of the substrate a, thereby greatly reducing the impact of the cleaning liquid on the back side of the substrate a and ensuring the cleaning effect of the substrate a.

[0074] Furthermore, the water outlet pipe 61 has a water outlet 610, and the axis of the water outlet pipe 61 is at an angle to the plane of the turntable 20. This angle is either acute or obtuse, so that the liquid sprayed from the water outlet 610 is directed toward the edge of the turntable 20.

[0075] The angle between the axis of the outlet 610 and the plane of the turntable 20 allows the sprayed liquid to be sprayed out at a certain angle, so as to form an inclined water curtain barrier on the back of the substrate a. This water curtain barrier can effectively block the overflow of the cleaning liquid on the front of the substrate a, and play a physical barrier role; in addition, it can make the substrate a uniformly bear the impact force of the water flow.

[0076] From another perspective, if the axis of the water outlet 610 is perpendicular to the plane of the turntable 20, that is, the water is sprayed out vertically, the impact force of the vertical water flow is mainly concentrated in the area of ​​the substrate a directly opposite the water outlet 610, while other areas of the substrate a are less affected by the impact force of the water flow. The strong impact force of the vertical water flow may cause excessive pressure on the local area of ​​the substrate a, especially for thin substrates or fragile substrate structures, which can easily cause the substrate to crack or be damaged.

[0077] In an optional embodiment, the substrate clamping device further includes an exhaust conduit 62 connected to the hollow conduit 111. The exhaust conduit 62 is used to blow gas toward the back side of the substrate a for drying the back side of the substrate a. The gas blown by the exhaust conduit 62 is preferably nitrogen, but is not limited to nitrogen.

[0078] Furthermore, the air outlet 62 has an air outlet 620, the axis of which is perpendicular to the plane of the turntable 20. Under the action of centrifugal force generated during the rotation of the substrate a, the vertically ejected nitrogen gas can easily diffuse on the back side of the substrate a, uniformly covering the entire surface of the substrate a, and forming a relatively uniform airflow on the back side of the substrate a, so as to ensure that every part of the substrate a can be fully dried.

[0079] From another perspective, if the air outlet pipe 62 and the plane where the turntable 20 is located form an acute or obtuse angle, the airflow may become turbulent during the rotation of the substrate a, forming vortices or unstable airflow areas, resulting in uneven drying of the substrate a.

[0080] In an optional embodiment, both the water outlet 610 and the air outlet 620 are higher than the main body 210 of the turntable 20 to prevent liquid on the main body 210 from flowing into or out of the water outlet or air outlet through the water outlet 610 or the air outlet 620.

[0081] Furthermore, a shielding member 80 is provided on the outer side of the water outlet 610 and the air outlet 620, and the lower end of the shielding member 80 forms a misaligned structure with the main body 210. On the one hand, the shielding member 80 with a slope can guide the liquid dripping on it so that the dripping liquid flows into the main body 210 along the slope. On the other hand, the misalignment of the shielding member 80 with the main body 210 can prevent liquid or other fluids on the main body 210 from entering the first drive member and the bearing, thus preventing damage to them.

[0082] In an optional embodiment, the substrate clamping device further includes a detection element 70. In this embodiment, the detection element 70 is disposed on the shielding member and located on one side of the air outlet, and is used to detect whether substrate a is present on the turntable 20. The detection element 70 is preferably a laser sensor, but is not limited to this. This detection element 70 can ensure the clamping effectiveness of the substrate clamping device and avoid gaps in the clamping.

[0083] It should be understood that the above embodiments are exemplary and are not intended to encompass all possible implementations included in the claims. Various modifications and changes can be made to the above embodiments without departing from the scope of this disclosure. Similarly, the various technical features of the above embodiments can be arbitrarily combined to form other embodiments of this application that may not be explicitly described. Therefore, the above embodiments only illustrate several implementations of this application and do not limit the scope of protection of this patent application.

Claims

1. A substrate clamping device, characterized in that, include: The first driving element has an output shaft (110); A turntable (20) is connected to the output shaft (110) and can rotate with the output shaft (110) under the driving force of the first driving member; The retaining component (30) includes a plurality of retaining members (320) circumferentially distributed around the axis of the turntable (20). Each retaining member (320) is connected to the turntable (20) via a pivot (310). Each retaining member (320) includes a gripper portion (321) and a supporting portion (323) disposed on both sides of the pivot (310). An elastic member (340) is connected to the side of the supporting portion (323) facing the turntable (20). When a force is applied to the abutment (323), the abutment (323) overcomes the elastic force of the elastic member (340) and rotates counterclockwise along the rotating shaft (310) to drive the gripper (321) to move outward; The force applied to the abutment (323) is removed, and the abutment (323) rotates clockwise along the pivot (310) under the elastic force of the elastic member (340), thereby driving the gripper (321) to move inward; The second drive member (40) is movable relative to the abutment (323) and is used to provide force to the abutment (323) or to remove the force applied to the abutment (323).

2. The substrate clamping device according to claim 1, characterized in that, The turntable (20) further includes a main body (210) and a plurality of mounting portions (220) disposed above the main body (210). The plurality of mounting portions are evenly spaced along the circumference of the main body (210). Each mounting portion (220) is provided with a first through hole (221). The gripper portion (321) is inserted through the first through hole (221) and protrudes from the surface of the mounting portion (220). The abutment portion (323) is located below the mounting portion (220).

3. The substrate clamping device according to claim 1, characterized in that, The end of the gripper (321) has an arc-shaped structure.

4. The substrate clamping device according to claim 1, characterized in that, The supporting part (323) includes a horizontal part (3231) and a bent part (3232) connected to the horizontal part (3231), the bent part (3232) being inclined from top to bottom along the horizontal part (3231); A counterweight (3233) is also connected to the bent portion (3232).

5. The substrate clamping device according to claim 1, characterized in that, It also includes a drive plate (50) located below the abutment (323), and the second drive member (40) can drive the drive plate (50) to move up and down to simultaneously apply force to the abutment (323) or simultaneously remove the force applied to the abutment (323).

6. The substrate clamping device according to claim 1, characterized in that, The retaining assembly (30) further includes a plurality of support members (350) disposed on the turntable (20), the support members (350) being disposed close to the retaining member (320) for supporting the substrate (a).

7. The substrate clamping device according to claim 1, characterized in that, The output shaft (110) is provided with a hollow tube (111); The substrate clamping device further includes: A water outlet pipe (61) is connected to the hollow pipe (111) and is used to spray liquid onto the back side of the substrate (a) so that the water curtain formed on the back side of the substrate (a) blocks the overflow of cleaning liquid from the front side of the substrate (a).

8. The substrate clamping device according to claim 7, characterized in that, The water outlet pipe (61) has an outlet (610). The axis of the water outlet pipe (61) located at the outlet (610) forms an angle with the plane where the turntable (20) is located. The angle is acute or obtuse, so that the liquid sprayed from the outlet (610) is directed toward the edge of the turntable (20).

9. The substrate clamping device according to claim 8, characterized in that, The substrate clamping device further includes: An exhaust pipe (62) is connected to the hollow pipe (111) and is used to blow gas toward the back of the substrate (a) to dry the back of the substrate (a).

10. The substrate clamping device according to claim 9, characterized in that, The air outlet pipe (62) has an air outlet (620). Both the water outlet (610) and the air outlet (620) are higher than the main body (210) of the turntable (20), and a shielding member (80) is provided on the outside. The lower end of the shielding member (80) forms a misaligned structure with the main body (210).

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