Negative pressure drainage cover and negative pressure adsorption device

Abstract

The utility model relates to a negative pressure drainage cover and a negative pressure adsorption device. The negative pressure drainage cover comprises a cover body, a support part and an installation part. A plurality of negative pressure adsorption holes are formed in the upper part of the cover body; the support part and the mounting part are connected to the lower surface of the cover body, and the mounting part and the support part are sequentially arranged in the radial direction of the cover body; through holes distributed in the circumferential direction are formed in the portion, between the cover body and the installation part, of the support part. The mounting parts are used for positioning and mounting the negative pressure drainage cover, and a space defined by the adjacent mounting parts is communicated with the negative pressure channel; the face, facing the support part, of the cover body and the face, deviating from the support part, of the cover body are in fluid communication through the through hole. The negative pressure paths of the negative pressure adsorption holes close to the negative pressure channel are prolonged, the length consistency of the negative pressure paths between the negative pressure adsorption holes close to the negative pressure channel and the negative pressure adsorption holes far away from the negative pressure channel is improved, and the negative pressure balance between the negative pressure adsorption holes is improved. And the negative pressure adsorption hole is closer to the negative pressure channel.

Description

Technical Field

[0001] This application relates to the field of negative pressure adsorption, and in particular to negative pressure drainage covers and negative pressure adsorption devices. Background Technology

[0002] Negative pressure adsorption devices are used to adsorb target objects under negative pressure. Negative pressure adsorption devices usually have negative pressure adsorption holes on the panel or cover. Through the built-in or external negative pressure generator, air is drawn into the negative pressure chamber through the negative pressure channel to form an adsorption force at the negative pressure adsorption hole, thereby adsorbing the target object.

[0003] However, for a negative pressure adsorption device with a large number of negative pressure adsorption holes, the number of negative pressure adsorption holes is much greater than the number of negative pressure channels connected to the negative pressure generating device. This results in a significant difference in adsorption force between the negative pressure adsorption holes near the negative pressure channels and those far from them. In other words, the adsorption force received by the negative pressure adsorption holes near the negative pressure channels is relatively strong, while the adsorption force received by the negative pressure adsorption holes far from them is relatively weak. This causes uneven force on the adsorbed object, which in turn affects the processing accuracy. Utility Model Content

[0004] Therefore, it is necessary to provide a negative pressure drainage cover and a negative pressure adsorption device to address the technical problem of uneven force on the adsorbed object caused by uneven negative pressure adsorption force.

[0005] In one embodiment of this application, a negative pressure drainage cover includes a cover body, a support portion, and a mounting portion; several negative pressure adsorption holes are provided on the upper part of the cover body;

[0006] The bracket portion and the mounting portion are connected to the lower surface of the cover, and the mounting portion and the bracket portion are arranged sequentially along the radial direction of the cover; wherein, the bracket portion forms circumferentially distributed through holes between the cover and the mounting portion;

[0007] The mounting part is used to position and install the negative pressure drainage cover, and the space enclosed between adjacent mounting parts is connected to the negative pressure channel;

[0008] The side of the cover facing the support portion and the side of the cover away from the support portion are fluidly connected through the through hole.

[0009] The above technical solution of the present application has the following advantages: The negative pressure adsorption device with multiple negative pressure adsorption holes is suitable for the design of the through hole, the cover body, the support part and the mounting part, so that the negative pressure adsorption hole closer to the negative pressure channel must pass through the through hole and bypass the cover body to communicate with the negative pressure channel. In this way, the negative pressure path of the negative pressure adsorption hole closer to the negative pressure channel is relatively lengthened, the adsorption force of the negative pressure adsorption hole closer to the negative pressure channel is weakened, the length consistency of the negative pressure paths between the negative pressure adsorption hole closer to the negative pressure channel and the negative pressure adsorption hole far away from the negative pressure channel is improved, and the negative pressure balance between the negative pressure adsorption holes is improved. This is beneficial to ensure the processing precision of the product and avoid surface defects caused by uneven stress.

[0010] In some embodiments, the cover body, the support part and the mounting part form a stepped structure.

[0011] In some embodiments, the through hole is arranged in the support part.

[0012] In some embodiments, the number of the support parts is at least two, and each of the support parts is uniformly distributed between the cover body and the mounting part. A through hole is arranged between two adjacent support parts.

[0013] In some embodiments, the outer contour size of the cover body, the support part and the mounting part decreases in turn along the negative pressure direction.

[0014] In some embodiments, the cover body, the support part and the mounting part are integrally arranged.

[0015] In some embodiments, a negative pressure adsorption device includes a bearing table, a negative pressure panel and the negative pressure drainage cover of any one of the embodiments.

[0016] The bearing table is arranged on the negative pressure panel, and a negative pressure chamber is formed between the bearing table and the negative pressure panel.

[0017] The bearing table is provided with a negative pressure adsorption hole in fluid communication with the negative pressure chamber along the thickness direction of the bearing table.

[0018] The negative pressure panel is provided with a negative pressure channel in fluid communication with the negative pressure chamber.

[0019] The mounting part of the negative pressure drainage cover is mounted on the negative pressure panel, so that the cover body of the negative pressure drainage cover is located between the bearing table and the negative pressure panel. There is a gap between the cover body and the bearing table, and the cover body blocks the negative pressure channel.

[0020] The negative pressure channel is in fluid communication with the gap through the through hole of the negative pressure drainage cover.

[0021] In some embodiments, the cover has a shielding surface for shielding fluid passage, and a protrusion is arranged on the shielding surface, the protrusion is configured to abut against the bearing table to have a gap between the cover and the bearing table.

[0022] In some embodiments, the negative pressure adsorption holes are distributed in areas; or, the negative pressure adsorption holes are distributed in a matrix; or, the negative pressure adsorption holes are distributed in a concentric ring or a uniform radial relative to the negative pressure drainage cover.

[0023] In some embodiments, the negative pressure adsorption device further comprises a support arranged in the negative pressure chamber, two ends of the support abut against the bearing table and the negative pressure panel respectively; the number of the supports is at least two, and each of the supports is uniformly arranged around the negative pressure channel. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0025] Figure 1 It is a structural schematic diagram of the first embodiment of the vacuum adsorption device of the present application.

[0026] Figure 2 It is a structural schematic diagram of the first embodiment of the vacuum adsorption device of the present application. Figure 1 It is a structural exploded schematic diagram of the embodiment shown.

[0027] Figure 3 It is a structural exploded schematic diagram of the embodiment shown. Figure 2 It is an enlarged schematic diagram of A of the embodiment shown.

[0028] Figure 4 It is another direction schematic diagram of the embodiment shown. Figure 1 It is another direction schematic diagram of the embodiment shown.

[0029] Figure 5 It is another direction schematic diagram of the embodiment shown. Figure 4 It is a B-B direction sectional view schematic diagram of the embodiment shown.

[0030] Figure 6 It is an enlarged schematic diagram of C of the embodiment shown. Figure 5 It is an enlarged schematic diagram of C of the embodiment shown.

[0031] Figure 7 It is another identification schematic diagram of the embodiment shown. Figure 6 It is another identification schematic diagram of the embodiment shown.

[0032] Figure 8 Part structure application diagram of the second embodiment of the vacuum suction device of the present application;

[0033] Figure 9 Part structure application diagram of the second embodiment of the vacuum suction device of the present application; Figure 4 Another direction diagram of the embodiment shown;

[0034] Figure 10 Structure diagram of the first embodiment of the vacuum drainage cover of the present application;

[0035] Figure 11 Structure diagram of the first embodiment of the vacuum drainage cover of the present application; Figure 10 Application state diagram of the embodiment shown;

[0036] Figure 12 Structure diagram of the second embodiment of the vacuum drainage cover of the present application;

[0037] Figure 13 Application diagram of the third embodiment of the vacuum drainage cover of the present application;

[0038] Figure 14 Structure diagram of the fourth embodiment of the vacuum drainage cover of the present application.

[0039] Reference signs: 100, negative pressure suction device; 110, negative pressure drainage cover; 111, cover body; 112, support part; 113, mounting part; 114, through hole; 115, shielding surface; 116, protruding part; 120, bearing table surface; 121, negative pressure suction area; 122, negative pressure suction hole; 130, negative pressure panel; 131, negative pressure channel; 140, negative pressure chamber; 141, gap; 150, support; 160, gasket; 200, air flow direction; 300, negative pressure direction. DETAILED DESCRIPTION

[0040] In order to make the above objectives, features and advantages of the present application more apparent, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. In the following description, a lot of specific details are set forth in order to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the spirit of the present application, so the present application is not limited to the specific embodiments disclosed below.

[0041] It is to be understood that when a component is referred to as being "on" or "disposed on" another component, it can be directly on the other component or intervening components can also be present. When a component is referred to as being "connected" to another component, it can be directly connected to the other component, or intervening components can be present. The terms "vertical", "horizontal", "up", "down", "left", "right", and similar expressions as used in the description of the present specification are for the purpose of illustration only and do not indicate the only orientation of the embodiments.

[0042] In addition, the terms "first", "second", etc. are used herein only to describe various conditions, and are not to be construed as indicating relative importance or a specific number of the technical features indicated thereby. Thus, the features defined with "first", "second", etc. can explicitly or implicitly include at least one of the features. In the description of the present specification, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise explicitly specified and limited.

[0043] In the present specification, unless otherwise explicitly specified and limited, "on", "under", "above", and "over" of a first feature to a second feature can be that the first feature is in direct contact with the second feature, or the first feature is in indirect contact with the second feature through an intermediate medium. Moreover, "on", "above", and "over" of a first feature to a second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the first feature is horizontally higher than the second feature. "Under", "below", and "underneath" of a first feature to a second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the first feature is horizontally lower than the second feature.

[0044] Unless otherwise defined, all technical and scientific terms used in the present specification have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terms used in the present specification are only for the purpose of describing specific embodiments and are not intended to limit the present application. The term "and / or" used in the present specification includes any and all combinations of one or more of the associated listed items.

[0045] The following will be described in detail Figures 1 to 14 The negative pressure drainage cover and the negative pressure adsorption device will be described in detail.

[0046] The traditional negative pressure adsorption device generates negative pressure through a negative pressure generator, and generates adsorption force on the adsorbed object on the adsorption surface through the negative pressure adsorption hole. However, because the number of negative pressure adsorption holes is much larger than the number of negative pressure channels connected to the negative pressure generator, the negative pressure path lengths of the negative pressure adsorption holes close to the negative pressure channel are different from those of the negative pressure adsorption holes far from the negative pressure channel, resulting in a large difference in adsorption force, thereby causing an adsorption force imbalance for the adsorbed object. For example, the adsorption force at some positions is too large, which can easily cause deformation and even damage, or the adsorption force at some positions is too small, which can easily cause unstable adsorption, or other problems caused by the imbalance of the adsorption force, which can cause process defects.

[0047] Therefore, in order to solve the problem of adsorption force imbalance caused by different negative pressure path lengths, in one embodiment of the present application, a negative pressure adsorption device 100 as shown in the figure, which includes a bearing table 120 and a negative pressure panel 130; in combination with Figure 1 and Figure 2 and Figure 3 , the negative pressure adsorption device 100 further includes a negative pressure drainage cover 110, wherein the negative pressure drainage cover 110 is the negative pressure drainage cover 110 of any embodiment herein; in combination with Figure 4 and Figure 5 , the bearing table 120 is arranged on the negative pressure panel 130, and a negative pressure chamber 140 is formed between the bearing table 120 and the negative pressure panel 130; in combination with Figure 6 and Figure 7 , the bearing table 120 is provided with negative pressure adsorption holes 122 along the thickness direction of the bearing table 120, which are in fluid communication with the negative pressure chamber 140; the negative pressure panel 130 is provided with negative pressure channels 131 in fluid communication with the negative pressure chamber 140; the mounting part 113 of the negative pressure drainage cover 110 is positioned and mounted on the negative pressure panel 130, so that the cover body 111 of the negative pressure drainage cover 110 is located between the bearing table 120 and the negative pressure panel 130, in combination with Figure 8 , there is a gap 141 between the cover body 111 and the bearing table 120, and the cover body 111 blocks the negative pressure channels 131; in combination with Figure 3 , the negative pressure channels 131 are in fluid communication with the gap 141 through the through hole 114 of the negative pressure drainage cover 110.

[0048] The negative pressure drainage cover 110 comprises a cover body 111, a support part 112 and a mounting part 113; a plurality of negative pressure suction holes 122 are arranged on the upper surface of the cover body 111; the support part 112 and the mounting part 113 are connected to the lower surface of the cover body 111, and the mounting part 113 and the support part 112 are arranged along the radial direction of the cover body 111 in sequence; wherein the support part 112 forms a through hole 114 distributed in the circumferential direction between the cover body 111 and the mounting part 113; the mounting part 113 is used for positioning and mounting the negative pressure drainage cover 110, and the space enclosed between adjacent mounting parts 113 is in communication with the negative pressure channel 131; the side of the cover body 111 facing the support part 112 and the side of the cover body 111 away from the support part 112 are in fluid communication through the through hole 114.

[0049] Such a structure design is suitable for the negative pressure suction device 100 with a plurality of negative pressure suction holes 122, and the negative pressure drainage cover 110 is arranged in the negative pressure cavity 140 of the bearing table 120 and the negative pressure panel 130. The negative pressure drainage cover 110 is positioned and mounted on the negative pressure panel 130 through the mounting part 113. The negative pressure drainage cover 110 is improved in design by cooperating with the cover body 111 through the through hole 114. The negative pressure drainage cover 110 blocks the negative pressure channel 131 through the cover body 111, so that the negative pressure suction holes 122 closer to the negative pressure channel 131 must pass through the gap 141 and then bypass the cover body 111 through the through hole 114 before being in communication with the negative pressure channel 131. In this way, the negative pressure path of the negative pressure suction holes 122 closer to the negative pressure channel 131 is relatively lengthened. The negative pressure path can refer to the airflow direction 200 shown in Figure 7 and Figure 8 It can be understood that Figure 7 and Figure 8 are only schematic diagrams, Figure 7 and Figure 8 the airflow direction 200 shown is only a schematic and does not necessarily represent the actual airflow direction 200 as shown in Figure 7 or Figure 8 .

[0050] Through the design of the through hole 114 cooperating with the cover body 111, the support part 112 and the mounting part 113, the negative pressure suction holes 122 closer to the negative pressure channel 131 must pass through the through hole 114 and bypass the cover body 111 before being in communication with the negative pressure channel 131. In this way, the negative pressure path of the negative pressure suction holes 122 closer to the negative pressure channel 131 is relatively lengthened, the suction force of the negative pressure suction holes 122 closer to the negative pressure channel 131 is weakened, the length consistency of the negative pressure paths between the negative pressure suction holes 122 closer to the negative pressure channel 131 and the negative pressure suction holes 122 farther away from the negative pressure channel 131 is improved, and the negative pressure balance between the negative pressure suction holes 122 is improved. This is conducive to ensuring the processing precision of the product and avoiding surface defects caused by uneven stress.

[0051] In some embodiments, the negative pressure adsorption holes 122 are distributed in areas; in some embodiments, as shown in Figure 9 The plurality of negative pressure adsorption holes 122 form a negative pressure adsorption area 121 on the bearing table 120; as an example, the negative pressure adsorption area 121 can be a whole to collectively adsorb a structure, such as a flexible circuit board; or a combination of multiple adsorption areas, each adsorption area corresponding to an adsorption of a structure, such as a flexible circuit board. Alternatively, the negative pressure adsorption holes 122 are distributed in a matrix; or the negative pressure adsorption holes 122 are distributed in concentric rings or uniform rays relative to the negative pressure drainage cover 110. In addition, in specific implementations, the number of negative pressure chambers 140 can be one, two or more, as an example, one negative pressure channel 131 corresponds to one negative pressure chamber 140, one negative pressure chamber 140 corresponds to one negative pressure channel 131, and one negative pressure chamber 140 corresponds to multiple negative pressure adsorption holes 122. In addition, in specific implementations, the negative pressure adsorption holes 122 can have different distribution forms to meet the needs of various products for negative pressure adsorption positions.

[0052] Such a structure design is suitable for the negative pressure adsorption device 100 with multiple negative pressure adsorption holes 122, so that the bearing table 120 forms certain adsorption positions as negative pressure adsorption areas 121, the negative pressure adsorption areas 121 are related to the distribution of the negative pressure adsorption holes 122, and also related to the design of the negative pressure chamber 140, one negative pressure chamber 140 can correspond to one adsorption area of the negative pressure adsorption area 121, and all negative pressure chambers 140 correspond to the negative pressure adsorption area 121; the negative pressure adsorption area 121 and its adsorption area can be adjusted according to actual product needs; because the negative pressure adsorption holes 122 directly opposite the negative pressure channel 131 must bypass the cover body 111 and then pass through the through hole 114 to be connected with the negative pressure channel 131, so that the airflow path of each negative pressure adsorption hole 122 of the negative pressure adsorption area 121 to the negative pressure channel 131, that is, the negative pressure path, is roughly balanced, that is, the negative pressure adsorption holes 122 close to the negative pressure channel 131 and the negative pressure adsorption holes 122 away from the negative pressure channel 131 have balanced negative pressure paths, thereby improving the uniformity of negative pressure for each negative pressure adsorption hole 122, and further balancing the adsorption force of each negative pressure adsorption hole 122, which is beneficial to ensure the processing precision of the product and avoids surface defects caused by uneven stress, especially suitable for flexible circuit boards.

[0053] In some embodiments, as shown in Figure 2 and Figure 5As shown, the negative pressure adsorption device 100 further includes a support member 150 disposed in the negative pressure chamber 140, with both ends of the support member 150 abutting against the support platform 120 and the negative pressure panel 130, respectively; the number of support members 150 is at least two, and each support member 150 is evenly arranged around the negative pressure channel 131. Based on the above embodiment with support members 150, the negative pressure adsorption device 100, exemplarily, further includes a gasket 160, through which the support member 150 is connected to the negative pressure panel 130; or, the support member 150 is connected to the support platform 120 through the gasket 160. Exemplarily, the support member 150 passes through the gasket 160 and is screwed onto the negative pressure panel 130. Exemplarily, the gasket 160 is an elastic rubber gasket.

[0054] This structural design serves two purposes. First, it helps maintain the relative distance between the support platform 120 and the negative pressure panel 130, minimizing the risk of deformation of the support platform 120 under negative pressure, preventing it from pressing against the negative pressure drainage cover 110 or its cover 111 and causing the negative pressure adsorption holes 122 above the cover 111 to lose their adsorption force, thus ensuring the normal operation of the negative pressure adsorption device 100. Second, in embodiments with a gasket 160, the cooperation between the gasket 160 and the support member 150 allows the support member 150 to have a certain degree of adjustability for the support platform 120 and the negative pressure panel 130, thereby helping to protect the support platform 120 and the negative pressure panel 130. On the other hand, in the embodiment where there is a gap 141 between the cover 111 and the support platform 120 as described below, the support member 150 maintains the relative distance between the support platform 120 and the negative pressure panel 130, which helps to maintain the stability of the gap 141 and further prevents the support platform 120 from deforming under the action of negative pressure and pressing on the negative pressure drainage cover 110 or its cover 111, causing the negative pressure adsorption hole 122 above the cover 111 to lose its adsorption force, thereby ensuring the normal use of the negative pressure adsorption device 100.

[0055] In some embodiments, a negative pressure drainage cap 110 is as follows: Figure 10 As shown, it includes a cover 111, a support portion 112, and a mounting portion 113; the cover 111 is connected to the mounting portion 113 through the support portion 112, the support portion 112 is located between the cover 111 and the mounting portion 113, and the support portion 112 forms circumferentially distributed through holes 114 between the cover 111 and the mounting portion 113; the mounting portion 113 is used to position and install the negative pressure drainage cover 110; the side of the cover 111 facing the support portion 112 and the side of the cover 111 away from the support portion 112 are fluidly connected through the through holes 114.

[0056] The structure design is suitable for the negative pressure adsorption device 100 with multiple negative pressure adsorption holes 122. By matching the design of the cover body 111, the support portion 112 and the mounting portion 113 with the through hole 114, the negative pressure adsorption hole 122 opposite to the negative pressure passage 131 must bypass the cover body 111 and then pass through the through hole 114 to be connected with the negative pressure passage 131. Thus, the negative pressure path of the negative pressure adsorption hole 122 close to the negative pressure passage 131 is relatively lengthened, the adsorption force of the negative pressure adsorption hole 122 close to the negative pressure passage 131 is weakened, the length of the negative pressure path of the negative pressure adsorption hole 122 close to the negative pressure passage 131 and the negative pressure adsorption hole 122 far from the negative pressure passage 131 is balanced, the uniformity of the negative pressure to each negative pressure adsorption hole 122 is improved, and the adsorption force of each negative pressure adsorption hole 122 is balanced as a whole. This is beneficial to ensure the machining precision of the product and avoids surface defects caused by uneven stress.

[0057] As an example, when the adsorbed object is a flexible circuit board, there is a certain range requirement for the negative pressure adsorption force. If the negative pressure adsorption force is too large, deformation is easy to occur. If the negative pressure adsorption force is too small, displacement is easy to occur. Whether displacement or deformation will affect the machining precision, and in severe cases, will cause product defects. By using the negative pressure drainage cover 110 of the embodiments of the present application, the adsorption force at the negative pressure adsorption hole 122 close to the negative pressure passage 131 and the adsorption force at the negative pressure adsorption hole 122 far from the negative pressure passage 131 are balanced under the action of the negative pressure drainage cover 110. Therefore, the adsorbed object is effectively prevented from moving or deforming during the machining process, the adsorbed object is protected, and the machining precision is ensured.

[0058] The cover body 111 plays a shielding role for the negative pressure passage 131. As an example, Figure 10 In the illustrated embodiment, the cover body 111 has a shielding surface 115 for shielding fluid passing. Under the action of the negative pressure of the negative pressure passage 131, the airflow direction 200 is as shown in Figure 11 As can be understood, Figure 11 The airflow direction 200 shown is only an example, and does not mean that the actual airflow direction 200 must be as shown in Figure 11As an example, in a macroscopic view, the blocking surface 115 is a complete surface without any aperture, to block the fluid from flowing into the negative pressure channel 131 directly through the blocking surface 115. In this embodiment, the blocking surface 115 is a planar surface; or, in other embodiments, the blocking surface 115 is a conical surface or a partial spherical surface; as an example, the conical surface includes a circular conical surface, a pyramid conical surface, an elliptical conical surface, etc.; the partial spherical surface is a part of a complete spherical surface; as an example, the conical surface includes a circular spherical surface and an elliptical spherical surface, etc. The embodiment of the blocking surface 115 being a conical surface or a partial spherical surface is beneficial to adjust the relative distance between the negative pressure adsorption hole 122 directly opposite to the negative pressure channel 131 and the negative pressure channel 131 according to the requirement or actual situation.

[0059] In combination Figure 9 It can be seen that such a structure design, on the one hand, relatively prolongs the negative pressure path of the negative pressure adsorption hole 122 close to the negative pressure channel 131, and thus relatively weakens the adsorption force of the negative pressure adsorption hole 122 close to the negative pressure channel 131, so that the length of the negative pressure path of the negative pressure adsorption hole 122 close to the negative pressure channel 131 and the negative pressure adsorption hole 122 far from the negative pressure channel 131 is balanced, thereby improving the uniformity of the negative pressure to each negative pressure adsorption hole 122, and further balancing the adsorption force of each negative pressure adsorption hole 122. On the other hand, as shown in the direction, Figure 11 a physical barrier is formed above and below the isolation cover 111, so that the negative pressure adsorption hole 122 directly opposite to the negative pressure channel 131 must bypass the cover 111 and then pass through the through hole 114 to be in communication with the negative pressure channel 131, thereby relatively prolonging the negative pressure path of the negative pressure adsorption hole 122 close to the negative pressure channel 131, and the specific effect is as described above.

[0060] In order to facilitate the assembly of the cover 111, further improvements can be made to the embodiments with the blocking surface 115. In some embodiments, as shown in Figure 12 the cover 111 has a blocking surface 115 for shielding the fluid, and a protruding portion 116 is arranged on the blocking surface 115, in combination Figure 13 the protruding portion 116 is configured to abut against the bearing table 120, so that there is a gap 141 between the cover 111 and the bearing table 120. As an example, the protruding portion 116 can be cylindrical or prismatic; as an example, the protruding portion 116 can be uniformly distributed on the blocking surface 115; as an example, the number of the protruding portion 116 can be one, two or more. In other embodiments, the cover 111 is inserted with the bearing table 120 through the protruding portion 116, or is adsorbed under the bearing table 120, or is adhered to the bearing table 120. As an example, the protruding portion 116 has a horizontal and vertical frame structure, for example, the protruding portion 116 has a structure of multiple horizontal strips and multiple vertical strips, to avoid each negative pressure adsorption hole 122 of the bearing table 120.

[0061] Such a structural design, on the one hand, is conducive to maintaining the gap 141 between the cover body 111 and the bearing table 120 through the protruding part 116, avoiding the bearing table 120 being pressed on the negative pressure drainage cover 110 or the cover body 111 due to deformation, resulting in the loss of adsorption force of the negative pressure adsorption hole 122 above the cover body 111, thereby ensuring the normal use of the negative pressure adsorption device 100. On the other hand, it is possible to avoid the negative pressure adsorption hole 122 near the cover body 111 being completely blocked by the cover body 111, thereby facilitating the realization of the negative pressure adsorption function; on the other hand, it is conducive to cooperating with the embodiment with the support 150, playing a more uniform supporting role on the bearing table 120, and avoiding deformation of the bearing table 120 under the action of negative pressure as much as possible.

[0062] In some embodiments, as shown in Figure 10 and Figure 11 , the cover body 111, the bracket part 112 and the mounting part 113 form a stepped structure. In combination with Figure 5 and Figure 6 , it can be seen that the cover body 111, the bracket part 112 and the mounting part 113 form a three-level stepped structure. As an example, as shown in Figure 5 and Figure 6 , the mounting part 113 is at least partially arranged in the negative pressure channel 131, for example, the mounting part 113 has a part structure located in the negative pressure channel 131; in other embodiments, the mounting part 113 can also be arranged on the negative pressure panel 130.

[0063] Such a structural design, on the one hand, is conducive to realizing a stepped structure with clear functional areas, and is easy to design the position of the through hole 114, so that the through hole 114 forms a circumferential distribution design between the cover body 111 and the mounting part 113, and is conducive to cooperating to realize the position, shape and size design of the through hole 114; on the other hand, the negative pressure adsorption hole 122 opposite the negative pressure channel 131 must bypass the cover body 111 and then pass through the through hole 114 to be connected with the negative pressure channel 131, which relatively prolongs the negative pressure path of the negative pressure adsorption hole 122 near the negative pressure channel 131, so that the length of the negative pressure path of the negative pressure adsorption hole 122 near the negative pressure channel 131 and the negative pressure adsorption hole 122 away from the negative pressure channel 131 is balanced; on the other hand, it is conducive to cooperating with the embodiment in which the mounting part 113 is arranged in the negative pressure channel 131, so that the cover body 111 blocks the negative pressure channel 131, and the positional stability between the cover body 111 and the negative pressure channel 131 is maintained as much as possible, and the negative pressure drainage cover 110 is easily installed on the negative pressure panel 130.

[0064] As an example, Figure 10In the illustrated embodiment, the through hole 114 is the gap between the two support portions 112. In other embodiments, the through hole 114 can also be a channel. As an example, the position, number, and passage area of ​​the channel are set according to the position of the negative pressure adsorption hole 122, so that the adsorption force of the negative pressure adsorption hole 122 near the negative pressure channel 131 is reduced, while the adsorption force of the negative pressure adsorption hole 122 far from the negative pressure channel 131 is unaffected. Therefore, the adsorption force of each negative pressure adsorption hole 122 is balanced, that is, the adsorption force of the negative pressure adsorption hole 122 at each position is balanced. The passage area reflects the channel's ability to pass through fluid; as an example, the passage area is the cross-sectional area of ​​the fluid flow path.

[0065] This structural design, through the through hole 114 and the cover 111 that blocks the negative pressure channel 131, forces the negative pressure adsorption hole 122 facing the negative pressure channel 131 to bypass the cover 111 and pass through the through hole 114 before connecting to the negative pressure channel 131. This relatively weakens the adsorption force of the negative pressure adsorption hole 122 near the negative pressure channel 131. Furthermore, the circumferential arrangement of the through hole 114 causes the negative pressure of the negative pressure channel 131 to change direction relative to the blocking surface 115, thereby improving the uniformity of the negative pressure on each negative pressure adsorption hole 122 and thus balancing the adsorption force of each negative pressure adsorption hole 122 as a whole.

[0066] In various embodiments, the through holes 114 are circumferentially distributed; as an example, for a circular cross-section, the through holes 114 are distributed along the circumference of the cross-section. In some embodiments, the through holes 114 are disposed in the support portion 112. As an example, the support portion 112 is an annular or cylindrical structure, and the through holes 114 are circumferentially distributed at the edge of the annular or cylindrical structure. In some embodiments, such as Figure 14 As shown, the through hole 114 is provided in the bracket part 112, and the cover 111, the bracket part 112 and the mounting part 113 are integrally formed into a whole.

[0067] This structural design has several advantages. First, it facilitates the circumferential distribution of the through holes 114 between the cover 111 and the mounting portion 113, ensuring their uniform distribution. This results in a longer path from the negative pressure adsorption holes 122 near the negative pressure channel 131 to the negative pressure channel 131. While the adsorption force of the negative pressure adsorption holes 122 further away from the negative pressure channel is almost unaffected, the adsorption force of the holes 122 near the negative pressure channel 131 is weakened. Second, the integrated cover 111, support portion 112, and mounting portion 113 simplify the assembly process, improve assembly efficiency, and enhance the installation stability of the negative pressure drainage cover 110.

[0068] In some embodiments, the number of support portions 112 is at least two, and each support portion 112 is evenly distributed between the cover 111 and the mounting portion 113, with a through hole 114 provided between two adjacent support portions 112. As an example, such as Figure 10 As shown, there are four support parts 112, and the four support parts 112 are evenly distributed between the cover 111 and the mounting part 113. A through hole 114 is provided between two adjacent support parts 112, and there are a total of four through holes 114.

[0069] This structural design facilitates the creation of circumferentially evenly distributed through holes 114 between the cover 111 and the mounting part 113; in the working state, the negative pressure transmitted by the negative pressure channel 131 acts on the negative pressure drainage cover 110, forming an airflow direction 200 as shown in the figure. Figure 11 or Figure 13 As shown, due to the blocking effect of the cover 111, for the negative pressure adsorption holes 122 facing the negative pressure channel 131, the airflow drawn in by the negative pressure must bypass the cover 111 and pass through the guide hole 114 from the periphery of the cover 111 before entering the negative pressure channel 131. This relatively weakens the adsorption force of the negative pressure adsorption holes 122 near the negative pressure channel 131. Furthermore, the circumferential arrangement of the guide hole 114 causes the negative pressure of the negative pressure channel 131 to change direction relative to the blocking surface 115, improving the uniformity of the negative pressure on each negative pressure adsorption hole 122. This balances the adsorption force of each negative pressure adsorption hole 122, which is beneficial to ensuring the processing accuracy of the product and avoiding surface defects caused by uneven force.

[0070] In some of these embodiments, such as Figure 11 As shown, the outer contour dimensions of the cover 111, the bracket portion 112, and the mounting portion 113 decrease sequentially along the negative pressure direction 300. (Combined) Figure 5 and Figure 6 As can be seen, when projected along the negative pressure direction 300, the outer contours of the cover 111, the support portion 112, and the mounting portion 113 decrease in size sequentially. As an example, the cover 111, the support portion 112, and the mounting portion 113 all have circular outer contours, with the outer contour diameter of the cover 111 being the largest, the outer contour diameter of the support portion 112 being the second largest, and the outer contour diameter of the mounting portion 113 being the smallest.

[0071] This structural design has two advantages. First, it facilitates the circumferential distribution of the through holes 114 between the cover 111 and the mounting part 113, and also facilitates the uniform distribution of the through holes 114. Second, it ensures that the negative pressure adsorption hole 122 facing the negative pressure channel 131 must bypass the cover 111 and pass through the through holes 114 before it can connect with the negative pressure channel 131. This relatively extends the negative pressure path of the negative pressure adsorption hole 122 near the negative pressure channel 131.

[0072] To facilitate the manufacture of the negative pressure drainage cover 110, in some embodiments, the support portion 112 and the mounting portion 113 are integrally formed; or, in some embodiments, such as Figure 8 or Figure 5 As shown, the cover 111, the support portion 112, and the mounting portion 113 are integrally formed. As an example, the support portion 112 can be a frame structure or a plate structure.

[0073] This structural design is beneficial in two ways: firstly, it facilitates the manufacture of the negative pressure drainage cover 110, and secondly, it facilitates the formation of circumferentially distributed through holes 114 between the cover body 111 and the mounting part 113 in the support part 112; thirdly, it simplifies the assembly process, improves assembly efficiency, and enhances the installation stability of the negative pressure drainage cover 110.

[0074] It should be noted that other embodiments of this application also include a negative pressure drainage cover and a negative pressure adsorption device formed by combining the technical features of the above embodiments.

[0075] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0076] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.

Claims

1. A negative pressure drainage cap (110), characterized in that, It includes a cover (111), a support (112), and a mounting part (113); several negative pressure adsorption holes (122) are provided on the top of the cover (111). The bracket portion (112) and the mounting portion (113) are connected to the lower surface of the cover (111), and the mounting portion (113) and the bracket portion (112) are arranged sequentially along the radial direction of the cover (111); wherein, the bracket portion (112) forms circumferentially distributed through holes (114) between the cover (111) and the mounting portion (113). The mounting part (113) is used to position and install the negative pressure drainage cover (110), and the space enclosed between adjacent mounting parts (113) is connected to the negative pressure channel (131); The side of the cover (111) facing the support portion (112) and the side of the cover (111) away from the support portion (112) are in fluid communication through the through hole (114).

2. The negative pressure drainage cover (110) according to claim 1, characterized in that, The cover (111), the support (112), and the mounting (113) form a stepped structure.

3. The negative pressure drainage cap (110) according to claim 1, characterized in that, The through hole (114) is disposed in the bracket part (112).

4. The negative pressure drainage cover (110) according to claim 1, characterized in that, The number of the bracket parts (112) is at least two, and each bracket part (112) is evenly distributed between the cover (111) and the mounting part (113), and a through hole (114) is provided between two adjacent bracket parts (112).

5. The negative pressure drainage cover (110) according to claim 1, characterized in that, The outer contour dimensions of the cover (111), the support part (112), and the mounting part (113) decrease sequentially along the negative pressure direction (300).

6. The negative pressure drainage cover (110) according to claim 1, characterized in that, The cover (111), the bracket (112), and the mounting part (113) are integrally formed.

7. A negative pressure adsorption device (100), characterized in that, It includes a support platform (120), a negative pressure panel (130), and a negative pressure drainage cover (110) as described in any one of claims 1 to 6. The support platform (120) is disposed on the negative pressure panel (130), and a negative pressure chamber (140) is formed between the support platform (120) and the negative pressure panel (130). The support platform (120) has a negative pressure adsorption hole (122) along its thickness direction that is in fluid communication with the negative pressure chamber (140). The negative pressure panel (130) has a negative pressure channel (131) that is in fluid communication with the negative pressure chamber (140). The mounting part (113) of the negative pressure drainage cover (110) is positioned and installed on the negative pressure panel (130) so that the cover body (111) of the negative pressure drainage cover (110) is located between the support platform (120) and the negative pressure panel (130), there is a gap (141) between the cover body (111) and the support platform (120), and the cover body (111) covers the negative pressure channel (131). The negative pressure channel (131) is in fluid communication with the gap (141) through the through hole (114) of the negative pressure drainage cover (110).

8. The negative pressure adsorption device (100) according to claim 7, characterized in that, The cover (111) has a shielding surface (115) for shielding the passage of fluid, and a protrusion (116) is provided on the shielding surface (115), the protrusion (116) being configured to abut against the support platform (120) so that there is a gap (141) between the cover (111) and the support platform (120).

9. The negative pressure adsorption device (100) according to claim 7, characterized in that, The negative pressure adsorption holes (122) are distributed in a region; or, the negative pressure adsorption holes (122) are distributed in a matrix; or, the negative pressure adsorption holes (122) are distributed in a concentric ring or a uniform ray distribution relative to the negative pressure drainage cover (110).

10. The negative pressure adsorption device (100) according to claim 7, characterized in that, It also includes a support member (150) disposed in the negative pressure chamber (140), the two ends of the support member (150) respectively abutting the bearing platform (120) and the negative pressure panel (130); the number of the support members (150) is at least two, and each support member (150) is evenly disposed around the negative pressure channel (131).

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