Multi-position ultrahigh vacuum high-temperature furnace

Abstract

The utility model relates to the technical field of vacuum high-temperature furnaces, in particular to a multi-position ultrahigh vacuum high-temperature furnace which comprises a furnace body, the furnace body is cylindrical, a plurality of vacuum bins used for exhausting air in the furnace are arranged on the side wall of the furnace body, and operation equipment used for starting the vacuum bins is arranged on the side wall of the furnace body. A partition plate used for reducing air leakage is arranged on the vacuum bin, a plurality of first vacuum pipes are arranged in the vacuum bin, a fixing frame is arranged on the vacuum bin, and the partition plate is fixed to the fixing frame through fasteners. Through the arrangement of the first vacuum pipe and the vacuum bin, the starting operation of the vacuum bin can be determined according to the quantity of heating materials in the furnace body before the furnace body is processed, faults such as overload caused by long-time repeated use of a single vacuum bin can be avoided, and meanwhile, the vacuum bin can be used under the action of the first vacuum pipe. The aging of entering the vacuum effect in the furnace body can be improved, the fault probability of the vacuum bin is further reduced, and then the machining efficiency of a production line is improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum high-temperature furnace technology, and in particular to a multi-position ultra-high vacuum high-temperature furnace. Background Technology

[0002] High-vacuum ultra-high temperature furnaces heat materials to the required temperature using resistance heaters and then maintain and cool them under a vacuum or inert atmosphere. These devices typically feature multi-zone temperature control with high precision, employing PID regulation to achieve multi-segment heating and cooling programs, resulting in rapid heating rates and a stable experimental schedule.

[0003] In the operation of existing high-temperature furnaces, vacuum equipment is usually used to improve heating efficiency. However, existing technologies typically only have one vacuum device. When dealing with a small amount of heating material, this increases the time required for vacuum removal. Furthermore, prolonged use of a single vacuum device increases the failure rate. If a failure occurs before the high-temperature furnace is put into operation, it will extend the processing time of the entire production line.

[0004] To address this, we designed multiple ultra-high vacuum high-temperature furnaces. Utility Model Content

[0005] The purpose of this invention is to address the problem of limited quantity and susceptibility to malfunction in existing technologies by proposing a multi-position ultra-high vacuum high-temperature furnace.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A multi-position ultra-high vacuum high temperature furnace includes a furnace body, which is cylindrical in shape. The side wall of the furnace body is provided with multiple vacuum chambers for venting air from the furnace. The side wall of the furnace body is provided with operating devices for activating the vacuum chambers.

[0008] The vacuum chamber is equipped with a partition to reduce air leakage, and the vacuum chamber contains multiple first vacuum tubes.

[0009] Preferably, the vacuum chamber is provided with a fixed frame, and the partition is fixed to the fixed frame by fasteners.

[0010] Preferably, the operating device is fixedly connected to the vacuum chamber via an extension tube, and the extension tube is equipped with an air valve for improving airtightness.

[0011] Preferably, a first pad is symmetrically arranged inside the vacuum chamber, and the first pad is fixedly connected to the inner wall of the vacuum chamber by welding. A second pad is provided on the side wall of the first pad and is fixedly connected by welding.

[0012] Preferably, the second pad is provided with a first guide plate for fixing the first vacuum tube, the first vacuum tube is linearly arranged on the first guide plate, and the first vacuum tube is fixedly connected to the first guide plate by fasteners.

[0013] Preferably, the vacuum chamber is symmetrically provided with second vacuum tubes for improving exhaust efficiency. The second vacuum tubes are fixedly connected to the side wall of the vacuum chamber by welding. The inner wall of the furnace body is provided with a through cavity. The bottom of the vacuum chamber is provided with an exhaust cavity, which is connected to a gas valve. The furnace body is provided with a second guide plate.

[0014] The beneficial effects of this utility model are as follows:

[0015] 1. By setting up a first vacuum tube and a vacuum chamber, this utility model allows the vacuum chamber to be started before processing based on the amount of heating material inside the furnace. This avoids overload and other malfunctions that may occur when a single vacuum chamber is used repeatedly for a long time. At the same time, the multiple vacuum chambers, under the action of the first vacuum tube, can improve the timeliness of the vacuum effect inside the furnace, further reducing the probability of vacuum chamber malfunctions, thereby improving the processing efficiency of the production line.

[0016] 2. By setting up a second vacuum tube and a first guide plate, this utility model can prevent gas leakage from the connection of the vacuum chamber when the vacuum chamber is venting air from the furnace body, which can effectively improve the efficiency of air venting from the vacuum chamber. In addition, the first guide plate can correctly guide the gas into the first vacuum tube, thereby improving the timeliness of the vacuum effect. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of the multi-position ultra-high vacuum high-temperature furnace proposed in this utility model;

[0018] Figure 2 This is a rear view of the multi-position ultra-high vacuum high-temperature furnace proposed in this utility model;

[0019] Figure 3 This is a structural diagram of the internal structure of the vacuum chamber of the multi-position ultra-high vacuum high-temperature furnace proposed in this utility model;

[0020] Figure 4 This is a cross-sectional view of the multi-position ultra-high vacuum high-temperature furnace proposed in this utility model.

[0021] In the diagram: 1. Furnace body; 2. Vacuum chamber; 3. Fixing frame; 4. Operating equipment; 5. Extension tube; 6. Partition plate; 7. First pad plate; 8. Second pad plate; 9. Exhaust chamber; 10. First guide plate; 11. First vacuum tube; 12. Second vacuum tube; 13. Gas valve; 14. Second guide plate; 15. Through chamber. Detailed Implementation

[0022] Reference Figures 1-4The multi-position ultra-high vacuum high-temperature furnace includes a furnace body 1, which is a vacuum high-temperature furnace in the prior art. The furnace body 1 is cylindrical in shape and has a round cover at the front end. The vacuum chamber 2 is a device in the prior art furnace body 1 used to exhaust air. Four vacuum chambers 2 are uniformly set on the rear side of the furnace body 1, mainly to improve the air exhaust effect. The operating device 4 is a prior art device, which is mainly used to control the operation of the internal components of the vacuum chamber 2. The operating device 4 is hung on the side wall of the furnace body 1 by fasteners and is driven by an external power supply.

[0023] The vacuum chamber 2 is equipped with a partition 6 to reduce air leakage. The partition 6 is made of existing acrylic material and is semi-transparent. It is mainly used to reduce air leakage from the side wall of the vacuum chamber 2, thereby improving the overall airtightness of the vacuum chamber 2. The vacuum chamber 2 is equipped with a fixing frame 3, which is existing technology and is made of aluminum alloy. The partition 6 is fixed to the fixing frame 3 by fasteners. The fasteners are existing auxiliary components used to improve the connection between the partition 6 and the fixing frame 3. At the same time, the joint between the two is sealed with sealant to improve the overall airtightness.

[0024] The operating device 4 is fixedly connected to the vacuum chamber 2 via the extension pipe 5. The extension pipe 5 is an existing component, made entirely of steel, and is used for gas transportation. The extension pipe 5 is equipped with a gas valve 13 to improve airtightness. The gas valve 13 is a component used in the prior art to control gas valves, further improving the emission effect in the vacuum chamber 2.

[0025] A first pad 7 is symmetrically arranged inside the vacuum chamber 2. The first pad 7 is made of aluminum plate and is supported as a whole inside the vacuum chamber 2, ensuring the air circulation effect at the bottom. The first pad 7 is fixedly connected to the inner wall of the vacuum chamber 2 by welding. Welding is an existing connection technology to improve the connection strength of the first pad 7 inside the vacuum chamber 2. Welding only needs to be done along both sides of the first pad 7. A second pad 8 is provided on the side wall of the first pad 7. The second pad 8 is placed between the two first pads 7 to increase the air circulation effect and is fixedly connected by welding.

[0026] The vacuum chamber 2 is equipped with multiple first vacuum tubes 11. The first vacuum tubes 11 are existing components used for exhausting gas. There are a total of three tubes, which can effectively improve the efficiency of vacuum chamber 2 in performing vacuum processes. The second pad 8 is equipped with a first guide plate 10 for fixing the first vacuum tubes 11. The first guide plate 10 is used to fix the first vacuum tubes 11 and also to improve the air diversion effect. The first vacuum tubes 11 are arranged linearly on the first guide plate 10. The first vacuum tubes 11 are fixedly connected to the first guide plate 10 by fasteners. The fasteners are existing auxiliary components that can improve the fixing effect of the first vacuum tubes 11 and facilitate disassembly later.

[0027] The vacuum chamber 2 is symmetrically equipped with second vacuum tubes 12 to improve exhaust efficiency. The second vacuum tubes 12 are auxiliary components used to improve the exhaust effect of air in the vacuum chamber 2 and avoid gas residue on both sides of the vacuum chamber 2, thereby further improving the exhaust effect. The whole is connected to the operating device 4 through an external power supply. The second vacuum tubes 12 are fixedly connected to the side wall of the vacuum chamber 2 by welding. Welding can improve the connection strength and service life of the two. The inner wall of the furnace body 1 has a through cavity 15, which is the air intake cavity of the vacuum chamber 2 extending into the furnace body 1, which can improve the concentration of gas. The bottom of the vacuum chamber 2 has an exhaust cavity 9, which is the cavity for the first vacuum tube 11 and the second vacuum tube 12 to exhaust gas. The exhaust cavity 9 is connected to the gas valve 13. The furnace body 1 is equipped with a second guide plate 14, which is used to divide the gas that has been attracted.

[0028] The working principle of this utility model is as follows:

[0029] Ensure that the furnace body 1, vacuum chamber 2, partition 6, fixed frame 3, operating equipment 4, etc., are correctly installed and fixed. Check all connections to ensure good airtightness, especially the joint between partition 6 and fixed frame 3 and the air valve 13 on extension pipe 5. Ensure that the external power supply is connected and can supply power to the operating equipment 4 normally. Turn on the external power supply and start the operating equipment 4. Control the operation of the internal components of vacuum chamber 2 through the operating equipment 4 to start venting air from the furnace body 1. Air enters vacuum chamber 2 from the furnace body 1 through the through cavity 15. In vacuum chamber 2, the design of the first pad 7 and the second pad 8 ensures effective air circulation. The first vacuum tube 11 and the second vacuum tube 12 start working to improve exhaust efficiency and reduce gas residue. The air valve 13 is adjusted as needed to control the gas emission speed and amount. The operator needs to continuously monitor the operating status of the operating equipment 4 and the pressure changes in the furnace body 1, and adjust the settings of the operating equipment 4 in a timely manner to ensure that the required vacuum degree is achieved. Adjust the working status of the first vacuum tube 11 and the second vacuum tube 12 through the operating equipment 4.

[0030] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A multi-position ultra-high vacuum high-temperature furnace, comprising a furnace body (1), the furnace body (1) being cylindrical, the side wall of the furnace body (1) being provided with a plurality of vacuum chambers (2) for venting air from the furnace, and the side wall of the furnace body (1) being provided with operating devices (4) for activating the vacuum chambers (2), characterized in that... ； The vacuum chamber (2) is provided with a partition (6) for reducing air leakage, and the vacuum chamber (2) is provided with a plurality of first vacuum tubes (11).

2. The multi-position ultra-high vacuum high-temperature furnace according to claim 1, characterized in that, The vacuum chamber (2) is provided with a fixed frame (3), and the partition (6) is fixed to the fixed frame (3) by fasteners.

3. The multi-position ultra-high vacuum high-temperature furnace according to claim 2, characterized in that, The operating device (4) is fixedly connected to the vacuum chamber (2) through an extension tube (5), and the extension tube (5) is provided with an air valve (13) for improving airtightness.

4. The multi-position ultra-high vacuum high-temperature furnace according to claim 3, characterized in that, The vacuum chamber (2) is symmetrically provided with a first pad (7), and the first pad (7) is fixedly connected to the inner wall of the vacuum chamber (2) by welding. The side wall of the first pad (7) is provided with a second pad (8), and is fixedly connected by welding.

5. The multi-position ultra-high vacuum high-temperature furnace according to claim 4, characterized in that, The second pad (8) is provided with a first guide plate (10) for fixing the first vacuum tube (11). The first vacuum tube (11) is arranged linearly on the first guide plate (10). The first vacuum tube (11) is fixedly connected to the first guide plate (10) by fasteners.

6. The multi-position ultra-high vacuum high-temperature furnace according to claim 5, characterized in that, The vacuum chamber (2) is symmetrically provided with a second vacuum tube (12) for improving exhaust efficiency. The second vacuum tube (12) is fixedly connected to the side wall of the vacuum chamber (2) by welding. The inner wall of the furnace body (1) is provided with a through cavity (15). The bottom of the vacuum chamber (2) is provided with an exhaust cavity (9), and the exhaust cavity (9) is connected to the gas valve (13). The furnace body (1) is provided with a second guide plate (14).

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