Repetition frequency excimer laser energy automatic detection circuit

Abstract

The utility model discloses a repetition frequency excimer laser energy automatic detection circuit, comprising an excimer laser detection circuit which is switched on under the irradiation of excimer laser; the laser energy detection circuit is connected with the excimer laser detection circuit and is used for detecting the energy of the primary excimer laser; the external trigger acquisition circuit is connected with the excimer laser detection circuit and is used for outputting an external trigger acquisition signal to the outside; the reset circuit is connected with the laser energy detection circuit and used for resetting the laser energy detection circuit; the single chip microcomputer circuit board has a storage function, is respectively connected with the laser energy detection circuit, the external trigger acquisition circuit and the zero clearing circuit, and is used for acquiring the energy of the excimer laser of the laser energy detection circuit, converting the energy into a digital signal and storing the digital signal after receiving an external trigger acquisition signal of the external trigger acquisition circuit; and after acquisition, the zero clearing circuit is controlled to reset the laser energy detection circuit, so that the functions of peak holding, automatic detection and automatic zero clearing are realized.

Description

[Technical Field]

[0001] This utility model relates to an automatic detection circuit for the energy of an excimer laser with a repetition frequency. [Background Technology]

[0002] The excimer laser energy detection circuit is mainly used to measure and monitor the laser energy output by the excimer laser, ensuring the safety and effectiveness of laser equipment in medical, scientific research and industrial applications.

[0003] However, existing excimer laser energy detection circuits do not have peak hold functionality, requiring a dedicated peak hold chip to maintain the laser energy peak during detection. Furthermore, existing excimer laser energy detection circuits cannot automatically detect and automatically zero out the laser energy. On the other hand, existing excimer laser energy detection circuits cannot accurately detect 4kHz high repetition rate excimer laser energy. [Utility Model Content]

[0004] This invention overcomes the shortcomings of the prior art and provides an automatic detection circuit for repetition frequency excimer laser energy.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] An automatic detection circuit for repetition frequency excimer laser energy, characterized in that it includes an excimer laser detection circuit that is turned on when irradiated by an excimer laser.

[0007] The laser energy detection circuit is connected to the excimer laser detection circuit and is used to detect the energy of a single excimer laser beam.

[0008] An external trigger acquisition circuit, connected to the excimer laser detection circuit, is used to output an external trigger acquisition signal.

[0009] The zeroing circuit, connected to the laser energy detection circuit, is used to zero out the laser energy detection circuit.

[0010] The microcontroller circuit board has a storage function and is connected to the laser energy detection circuit, the external trigger acquisition circuit, and the zeroing circuit respectively. It is used to acquire the energy of the excimer laser in the laser energy detection circuit after receiving the external trigger acquisition signal from the external trigger acquisition circuit, convert it into a digital signal and store it, and control the zeroing circuit to clear the laser energy detection circuit after acquisition.

[0011] The automatic detection circuit for excimer laser energy with repetition frequency as described above is characterized in that it further includes a display component connected to a microcontroller circuit board for displaying digital signals of excimer laser energy.

[0012] The repetition frequency excimer laser energy automatic detection circuit described above is characterized in that: the microcontroller circuit board is provided with an external trigger port connected to an external trigger acquisition circuit, a zeroing output port connected to a zeroing circuit, and an AD conversion port connected to the external trigger acquisition circuit.

[0013] The excimer laser energy automatic detection circuit with repetition frequency described above is characterized in that: the excimer laser detection circuit includes a silicon photodiode Q1, the positive terminal of the silicon photodiode Q1 is grounded, the negative terminal of the silicon photodiode Q1 is connected to an external trigger acquisition circuit, and the two ends of the silicon photodiode Q1 are respectively connected to the laser energy detection circuit.

[0014] The above-described automatic detection circuit for excimer laser energy at repetition rate is characterized in that: the laser energy detection circuit includes an operational amplifier IC1, pin 1 of operational amplifier IC1 is connected to the positive terminal of silicon photodiode Q1, pin 2 of operational amplifier IC1 is connected to the negative terminal of silicon photodiode Q1, pin 3 of operational amplifier IC1 is connected to the +VCC power supply, pin 4 of operational amplifier IC1 is connected to the -VCC power supply, pin 5 of operational amplifier IC1 is connected to one end of energy detection capacitor C2 and the AD conversion port respectively, and the other end of energy detection capacitor C2 is connected to the negative terminal of silicon photodiode Q1.

[0015] The above-described automatic energy detection circuit for excimer laser repetition frequency is characterized in that: the external trigger acquisition circuit includes a pulse transformer T1, pin 1 of the pulse transformer T1 is connected to the negative terminal of the silicon photodiode Q1, pin 2 of the pulse transformer T1 is connected to the other end of the energy detection capacitor C2, pin 3 of the pulse transformer T1 is connected to one end of the resistor R1, one end of the capacitor C1 and the external trigger port through the resistor R2, and pin 4 of the pulse transformer T1, the other end of the resistor R1 and the other end of the capacitor C1 are respectively grounded.

[0016] The repetition frequency excimer laser energy automatic detection circuit described above is characterized in that: the zeroing circuit includes a zeroing switch S1, pin 1 of the zeroing switch S1 is connected to one end of the energy detection capacitor C2 through resistor R3, pin 2 of the zeroing switch S1 is connected to the other end of the energy detection capacitor C2, and pin 3 of the zeroing switch S1 is connected to the zeroing output port.

[0017] The automatic detection circuit for repetition frequency excimer laser energy as described above is characterized in that: a Zener diode D1 is connected in parallel across the two ends of capacitor C1, and the negative terminal of Zener diode D1 is connected to the external trigger port, while the positive terminal of Zener diode D1 is grounded.

[0018] The automatic detection circuit for repetition rate excimer laser energy described above is characterized in that: Zener diode D1 is a 5V voltage clamping diode.

[0019] The automatic detection circuit for repetition frequency excimer laser energy described above is characterized in that: the microcontroller circuit board is a PIC microcontroller circuit, the operational amplifier IC1 is a high-impedance input operational amplifier, and the clear switch S1 is a high-impedance input switch chip.

[0020] The beneficial effects of this utility model are:

[0021] This invention features a zeroing circuit, in which the zeroing switch S1 is a high-impedance input switch chip, and the AD conversion port is a high-impedance input port. This allows the energy detection capacitor C2 in the laser energy detection circuit to maintain its peak voltage, achieving a built-in peak hold function without the need for a dedicated peak hold chip. The invention also includes an external trigger acquisition circuit. After the microcontroller circuit receives the external trigger acquisition signal, it automatically acquires the energy of the excimer laser from the laser energy detection circuit, converts it into a digital signal, and stores it. Furthermore, it automatically controls the zeroing circuit after acquisition to zero the laser energy detection circuit, achieving automatic detection and automatic zeroing. The detected digital signal data is stored on the microcontroller circuit board and displayed on the display component. This invention can detect the energy of a 4kHz high-repetition-rate excimer laser. [Image Description]

[0022] Figure 1 This is the circuit diagram of this utility model;

[0023] Figure 2 This is a timing diagram of the circuit operation signals of this utility model. [Detailed Implementation]

[0024] The technical solutions in the embodiments of this utility model will now be clearly and completely described in conjunction with the accompanying drawings.

[0025] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of this utility model are only used to explain the relative positional relationship and movement of the components in a specific posture (as shown in the attached figure). If the specific posture changes, the directional indication will also change accordingly. Furthermore, descriptions involving "preferred," "second-best," etc., in this utility model are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined as "preferred" or "second-best" may explicitly or implicitly include at least one of those features.

[0026] like Figure 1 As shown, an automatic detection circuit for repetition frequency excimer laser energy includes an excimer laser detection circuit 1, which is turned on when irradiated by an excimer laser.

[0027] Laser energy detection circuit 2 is connected to excimer laser detection circuit 1 and is used to detect the energy of a single excimer laser.

[0028] The external trigger acquisition circuit 3 is connected to the excimer laser detection circuit 1 and is used to output the external trigger acquisition signal.

[0029] Zeroing circuit 4 is connected to laser energy detection circuit 2 and is used to zero out laser energy detection circuit 2.

[0030] The microcontroller circuit board 5 has a storage function and is connected to the laser energy detection circuit 2, the external trigger acquisition circuit 3, and the clear circuit 4, respectively. It is used to acquire the energy of the excimer laser from the laser energy detection circuit 2 after receiving the external trigger acquisition signal from the external trigger acquisition circuit 3, convert it into a digital signal, and store it. After acquisition, it controls the clear circuit 4 to clear the laser energy detection circuit 2 to zero. The microcontroller circuit board 5 is a PIC microcontroller circuit.

[0031] Display component 6, connected to the microcontroller circuit board 5, is used to display the digital signal of excimer laser energy. Display component 6 is an LCD screen.

[0032] like Figure 1-2 As shown, the working principle of the circuit in this case is as follows:

[0033] 1. The silicon photodiode Q1 in the excimer laser detection circuit 1 conducts after being irradiated by the excimer pulse laser. Its conduction capability is proportional to the light intensity. At this time, a current I will flow through the silicon photodiode Q1. Q1 .

[0034] 2. In the laser energy detection circuit 2, the input terminals of pin 1 and pin 2 of the operational amplifier IC1 are high impedance. When the silicon photodiode Q1 is turned on, a current I flows through it. Q1时 No current flows into the input terminal of operational amplifier IC1. Since current flows through silicon photodiode Q1, there must be a voltage difference U across its two ends. Q1 Pressure difference U Q1 After being amplified by op-amp IC1, the output from pin 5 of op-amp IC1 charges the energy detection capacitor C2 (capacitance value of 0.1uF), and the capacitor voltage rise time is about 1us.

[0035] 3. Because the silicon photodiode Q1 is irradiated by an excimer pulsed laser for a short time (typically 5-200 ns), and its conductivity gradually decreases after irradiation, the current flowing through the silicon photodiode Q1 is directly proportional to the voltage difference U across its terminals. Q1 The voltage will gradually decrease, and the output of IC1 will stop charging the energy detection capacitor C2, while simultaneously reducing the voltage U of the energy detection capacitor C2. C2 It gradually rises to a stable value.

[0036] 4. The reset switch S1 in the reset circuit 4 uses a high-impedance input switch chip, and the AD conversion port 53 of the PIC microcontroller circuit 5 is also a high-impedance input. Therefore, the voltage of the energy detection capacitor C2 will be maintained at the peak voltage, realizing the built-in peak hold function, without the need to set up a dedicated peak hold chip.

[0037] 5. When the silicon photodiode Q1 is turned on, a current I flows through it. Q1 At this time, a current I flows through the primary coil on one side of pin 1 and pin 2 of the pulse transformer T1 of the external trigger acquisition circuit 3. T1 =I Q1 The secondary winding of the pulse transformer T1, located on pins 3 and 4, also generates current. This current flows through resistors R1 and R2, producing a pulse voltage U across resistor R2. R2 Pulse voltage U R2 The rising edge of the signal triggers the external interrupt routine of the PIC microcontroller circuit 5, that is, it sends an external trigger acquisition signal to the external trigger port 51 of the PIC microcontroller circuit 5. At this time, the PIC microcontroller circuit 5 performs AD conversion within the external interrupt routine, and acquires the voltage U on the energy detection capacitor C2 through the AD conversion port 53 of the PIC microcontroller circuit 5. C2 The signal is converted into a digital signal and then displayed on the LCD screen after being calibrated by an external energy meter, thus realizing the automatic detection function. The detected digital signal data is stored on the microcontroller circuit board and displayed on the LCD screen.

[0038] 6. After the PIC microcontroller circuit 5 completes the data acquisition, it sends a clear signal to the clear switch S1 of the clear circuit 4 through the clear output port 52, so that the clear switch S1 is closed, the charge on the energy detection capacitor C2 is released, the voltage of the energy detection capacitor C2 is restored to 0 volts, and it waits for the next pulse to arrive, thus realizing the automatic clear function.

[0039] In this case, resistor R3 in the reset circuit 4 is a current-limiting resistor with a resistance of 1-10Ω. Zener diode D1 connected in parallel across capacitor C1 is a 5V voltage clamping diode, designed to protect the PIC microcontroller circuit from input voltage exceeding 5V. The reset time is approximately 1µs.

[0040] The above are merely preferred embodiments of this utility model and do not limit the patent scope of this utility model. Any equivalent structural transformations made based on the inventive concept of this utility model and the contents of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are included within the patent protection scope of this utility model.

Claims

1. An automatic detection circuit for repetition rate excimer laser energy, characterized in that: It includes an excimer laser detection circuit (1), which is turned on when irradiated by an excimer laser; The laser energy detection circuit (2) is connected to the excimer laser detection circuit (1) and is used to detect the energy of a single excimer laser. An external trigger acquisition circuit (3) is connected to an excimer laser detection circuit (1) and is used to output an external trigger acquisition signal. The zeroing circuit (4) is connected to the laser energy detection circuit (2) and is used to zero out the laser energy detection circuit (2). The microcontroller circuit board (5) has a storage function and is connected to the laser energy detection circuit (2), the external trigger acquisition circuit (3) and the clearing circuit (4) respectively. It is used to collect the energy of the excimer laser of the laser energy detection circuit (2) after receiving the external trigger acquisition signal of the external trigger acquisition circuit (3), convert it into a digital signal and store it, and control the clearing circuit (4) to clear the laser energy detection circuit (2) after acquisition.

2. The automatic detection circuit for repetition rate excimer laser energy according to claim 1, characterized in that: It also includes a display component (6), which is connected to the microcontroller circuit board (5) for displaying digital signals of excimer laser energy.

3. The automatic detection circuit for repetition rate excimer laser energy according to claim 1, characterized in that: The microcontroller circuit board (5) is provided with an external trigger port (51) connected to the external trigger acquisition circuit (3), a clear output port (52) connected to the clear circuit (4), and an AD conversion port (53) connected to the external trigger acquisition circuit (3).

4. The automatic detection circuit for repetition rate excimer laser energy according to claim 3, characterized in that: The excimer laser detection circuit (1) includes a silicon photodiode Q1. The positive terminal of the silicon photodiode Q1 is grounded, the negative terminal of the silicon photodiode Q1 is connected to the external trigger acquisition circuit (3), and the two ends of the silicon photodiode Q1 are respectively connected to the laser energy detection circuit (2).

5. The automatic detection circuit for repetition rate excimer laser energy according to claim 4, characterized in that: The laser energy detection circuit (2) includes an operational amplifier IC1. Pin 1 of the operational amplifier IC1 is connected to the positive terminal of the silicon photodiode Q1. Pin 2 of the operational amplifier IC1 is connected to the negative terminal of the silicon photodiode Q1. Pin 3 of the operational amplifier IC1 is connected to the +VCC power supply. Pin 4 of the operational amplifier IC1 is connected to the -VCC power supply. Pin 5 of the operational amplifier IC1 is connected to one end of the energy detection capacitor C2 and the AD conversion port (53) respectively. The other end of the energy detection capacitor C2 is connected to the negative terminal of the silicon photodiode Q1.

6. The automatic detection circuit for repetition rate excimer laser energy according to claim 5, characterized in that: The external trigger acquisition circuit (3) includes a pulse transformer T1. Pin 1 of the pulse transformer T1 is connected to the negative terminal of the silicon photodiode Q1. Pin 2 of the pulse transformer T1 is connected to the other end of the energy detection capacitor C2. Pin 3 of the pulse transformer T1 is connected to one end of the resistor R1, one end of the capacitor C1, and the external trigger port (51) through the resistor R2. Pin 4 of the pulse transformer T1, the other end of the resistor R1, and the other end of the capacitor C1 are grounded respectively.

7. The automatic detection circuit for repetition rate excimer laser energy according to claim 6, characterized in that: The reset circuit (4) includes a reset switch S1. Pin 1 of the reset switch S1 is connected to one end of the energy detection capacitor C2 through resistor R3. Pin 2 of the reset switch S1 is connected to the other end of the energy detection capacitor C2. Pin 3 of the reset switch S1 is connected to the reset output port (52).

8. The automatic detection circuit for repetition rate excimer laser energy according to claim 6, characterized in that: A Zener diode D1 is connected in parallel across the two ends of capacitor C1, with the negative terminal of Zener diode D1 connected to the external trigger port (51) and the positive terminal of Zener diode D1 grounded.

9. The automatic detection circuit for repetition rate excimer laser energy according to claim 8, characterized in that: Zener diode D1 is a 5V voltage clamping diode.

10. The automatic detection circuit for repetition rate excimer laser energy according to claim 7, characterized in that: The microcontroller circuit board (5) is a PIC microcontroller circuit, the op-amp IC1 is a high-impedance input op-amp, and the clear switch S1 is a high-impedance input switch chip.

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