Electrode holder and deposition equipment

Abstract

The utility model relates to an electrode holder and deposition equipment, the electrode holder is used for being electrically connected with a graphite boat, the electrode holder comprises a holder body and a connecting plate, the holder body and the connecting plate can conduct electricity, the connecting plate is arranged on the outer side of the holder body, the holder body is electrically connected with the connecting plate, and the graphite boat is electrically connected with the holder body. One side, far away from the seat body, of the connecting plate is provided with a connecting surface used for connecting the graphite boat, and the connecting surface is a plane. The electrode holder provided by the utility model is provided with the connecting plate used for connecting the graphite boat, the connecting surface used for connecting the graphite boat is arranged on one side, far away from the holder body, of the connecting plate, and the connecting surface is a plane, so that the connecting surface of the connecting plate is in more sufficient and more stable contact with the graphite boat; therefore, poor contact between the electrode holder and the graphite boat can be avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of photovoltaic module production, and particularly relates to an electrode seat and a deposition device. BACKGROUND

[0002] In the field of cell production of photovoltaic modules, the vapor phase electrolytic deposition technology (PECVD) is widely applied. The technology usually uses a graphite boat (graphite tooling) as a carrier of the cell, and then the graphite boat is placed on an electrode seat. The graphite boat and the electrode seat are jointly placed in a quartz tube of a deposition device. The electrode seat is connected with an external discharge power source through a metal electrode rod. In a near-vacuum environment, the reactants are ionized, so as to generate target substances on the surface of the cell.

[0003] In this repeated discharging process, the contact surface of the electrode seat and the graphite boat may occasionally have a poor contact phenomenon, which leads to poor conduction between the electrode seat and the graphite boat, arc and fire, and thus causes the frequency of the external discharge power source to be too high, causes high frequency, and leads to the reactants in the reaction cavity in the quartz tube being unable to form a good state, and further affects the product quality. CONTENT OF THE UTILITY MODEL

[0004] Therefore, it is necessary to provide an electrode seat and a deposition device which can avoid poor contact with a graphite boat.

[0005] An electrode seat for electrically connecting a graphite boat, the electrode seat comprising a seat body and a connecting plate, the seat body and the connecting plate being capable of conducting electricity, the connecting plate being arranged on the outside of the seat body, the seat body and the connecting plate being electrically connected, and the connecting plate being provided with a connecting surface for connecting the graphite boat on the side away from the seat body, the connecting surface being a plane.

[0006] In one of the embodiments, the outer wall of the seat body has a first surface, the first surface is provided with a groove, the connecting plate is fixed in the groove, and the connecting surface is protruded from or flush with the first surface.

[0007] In one of the embodiments, the first surface is further provided with a dismounting groove, the dismounting groove is arranged on one side of the groove and communicates with the groove.

[0008] In one of the embodiments, the bottom surface of the dismounting groove is a first inclined surface, the first inclined surface is arranged to be inclined from the first surface towards the inside of the groove.

[0009] In one of the embodiments, the electrode seat is further used for electrically connecting an electrode rod.

[0010] The seat body is provided with a connecting hole extending along the length direction of the seat body, and the connecting hole is used for allowing the electrode rod to pass through.

[0011] In one of the embodiments, the connecting hole is a threaded hole.

[0012] In one of the embodiments, the electrode holder is also used for connecting a support rod, the holder body is provided with a mounting hole extending along the length direction of the holder body, and the mounting hole is used for allowing the support rod to pass through.

[0013] The connecting hole and the groove are both located on the outer peripheral side of the mounting hole.

[0014] In one of the embodiments, the holder body is further provided with a plurality of planes located on the outer peripheral side of the mounting hole, the plurality of planes are connected by a plurality of arc surfaces, and the planes and the first plane are connected by the arc surfaces.

[0015] In one of the embodiments, the planes include a second plane, a third plane, a fourth plane and a fifth plane, the first plane, the second plane, the third plane, the fourth plane and the fifth plane are sequentially connected by a plurality of arc surfaces in the circumferential direction of the electrode holder, and form a closed ring body.

[0016] The included angle between the first plane and the second plane is less than or equal to 90 degrees, the included angle between the second plane and the third plane is greater than 90 degrees, the included angle between the third plane and the fourth plane is greater than 90 degrees, and the included angle between the fourth plane and the fifth plane is less than or equal to 90 degrees.

[0017] The application also provides a deposition device comprising the electrode holder according to any one of the above embodiments.

[0018] Compared with the prior art, the electrode holder provided by the application is provided with a connecting plate for connecting a graphite boat, and the side of the connecting plate away from the holder body is provided with a connecting surface for connecting the graphite boat. Since the connecting surface is a plane, the connecting surface of the connecting plate can be in more sufficient and stable contact with the graphite boat, so that the poor contact between the electrode holder and the graphite boat can be avoided. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative effort.

[0020] Figure 1 FIG. 1 is a structural schematic view of an electrode holder in an embodiment of the application;

[0021] Figure 2 FIG. 2 is a structural schematic view of an electrode holder in another embodiment of the application;

[0022] Figure 3 Fig. 1 is a structural schematic view of a seat body in an embodiment of the present application.

[0023] Reference numerals: 100, seat body; 110, first face; 111, groove; 112, dismounting groove; 1121, first inclined surface; 120, second face; 130, third face; 140, fourth face; 150, fifth face; 160, arc face; 101, connecting hole; 102, mounting hole; 200, connecting plate; 210, connecting face. DETAILED DESCRIPTION

[0024] In order to make the above objectives, features and advantages of the present application more apparent, the specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. It will be apparent, however, to one skilled in the art, that the present application can be practiced in a variety of ways beyond the specific embodiments described herein without departing from the spirit of the present application, and it is intended that the present application cover all such modifications and changes. Thus, the present application should not be limited by the specific embodiments set forth below.

[0025] It should be noted that when an element is referred to as being "on" or "connected to" another element, it can be directly on or connected to the other element, or intervening elements can also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element, or intervening elements can also be present. The terms "vertical", "horizontal", "upper", "lower", "left", "right", and similar terms as used in the description of the present application are used for the purpose of illustration only and do not indicate or imply absolute orientation.

[0026] In addition, the terms "first", "second", etc. are used herein only to describe various elements, but do not imply or suggest relative importance or a number of the indicated technical features. Thus, the features defined with "first", "second" can include at least one of the features explicitly or implicitly. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise explicitly specified and limited.

[0027] In the present application, unless otherwise explicitly specified and limited, the "on", "under", "above" and "over" of the first feature to the second feature can be that the first feature is directly in contact with the second feature, or the first feature is indirectly in contact with the second feature through an intermediate medium. Moreover, the "above" and "over" of the first feature to the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The "below" and "under" of the first feature to the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0028] Unless otherwise defined, all technical and scientific terms used in the application's specification are intended to have the same meaning as commonly understood by one of ordinary skill in the art to which the application pertains. The description of the application's specification is merely intended to describe certain embodiments and is not intended to limit the application. The term "and / or" used in the application's specification includes any and all combinations of one or more related items.

[0029] Please refer to Figures 1 to 3 The application provides an electrode seat for electrically connecting a graphite boat, the electrode seat comprising a seat body 100 and a connecting plate 200, the seat body 100 and the connecting plate 200 are both capable of conducting electricity, the connecting plate 200 is arranged on the outer side of the seat body 100, the seat body 100 and the connecting plate 200 are electrically connected, and the side of the connecting plate 200 away from the seat body 100 is provided with a connecting surface 210 for connecting the graphite boat, the connecting surface 210 is a plane.

[0030] It can be understood that the electrode seat in the embodiment is provided with the connecting plate 200 for connecting the graphite boat, and the side of the connecting plate 200 away from the seat body 100 is provided with the connecting surface 210 for connecting the graphite boat. Since the connecting surface 210 is a plane, the connecting surface 210 of the connecting plate 200 is more fully and stably in contact with the graphite boat, so that the poor contact between the electrode seat and the graphite boat can be avoided.

[0031] It can also be understood that the electrode seat is applied to a deposition device, the seat body 100 of the electrode seat is further electrically connected to an electrode rod, so that the electrode seat is electrically connected to an external power supply, and then the electrode seat can be powered on and conduct electricity. The working mode of the electrode seat is that after the seat body 100 is powered on, the seat body 100 transmits the electric energy of the external power supply to the connecting plate 200, the connecting plate 200 transmits the electric energy to the graphite boat, and after the graphite boat is powered on, the graphite boat can ionize the related medium, and then the graphite boat can deposit target substances on the surface of the battery piece.

[0032] Further, the seat body 100 is made of stainless steel, so that the electrical conductivity of the seat body 100 can be ensured, and the cost of the seat body 100 is relatively low. In other embodiments, the seat body 100 can be made of other materials, as long as the electrical conductivity thereof is ensured, and the application does not limit this.

[0033] Further, the seat body 100 is integrally formed and has no supporting weak points, so that the mechanical strength of the seat body 100 can be ensured and the seat body 100 is not easy to be damaged.

[0034] Further, the connecting plate 200 is made of copper material, and the electrical conductivity of the copper material is better than that of graphite material and stainless steel material, so that the electrode seat is less likely to have high frequency, arc striking and other adverse phenomena. In other embodiments, the connecting plate 200 can be made of other materials, as long as the electrical conductivity thereof is ensured, and the application does not limit this.

[0035] Illustratively, the connection plate 200 is detachably connected with the seat body 100, after the surface of the connection plate 200 is damaged, only the connection plate 200 can be replaced, without replacing the seat body 100, thus, the replacement cost can be reduced, and the maintenance of the electrode seat is facilitated.

[0036] In an embodiment, the outer wall of the seat body 100 has a first surface 110, the first surface 110 is provided with a groove 111 (as shown in the figure) Figure 1 and Figure 2 indicated by the dashed line), the connection plate 200 is fixed in the groove 111, and the connection surface 210 protrudes from or is flush with the first surface 110. Directly placing the connection plate 200 in the groove 111 can realize the electrical connection between the seat body 100 and the connection plate 200, and then the graphite boat can be conductive. In this way, not only can the connection plate 200 be fixed to prevent it from shaking, but also the manufacturing is simple.

[0037] Further, the connection surface 210 protrudes from the first surface 110, the connection plate 200 can be put into or taken out of the groove 111 through the part of the connection plate 200 protruding from the groove 111, thus, the installation and replacement of the connection plate 200 are facilitated.

[0038] In an embodiment, referring to Figure 3 , the first surface 110 is further provided with a dismounting groove 112, the dismounting groove 112 is arranged on one side of the groove 111 and communicates with the groove 111. It can be understood that in this embodiment, the connection plate 200 is detachably connected with the seat body 100, when the connection plate 200 needs to be replaced, the connection plate 200 can be dismounted and installed through the dismounting groove 112, thereby simplifying the replacement steps of the connection plate 200 and reducing the maintenance cost.

[0039] In an embodiment, the bottom surface of the dismounting groove 112 is a first inclined surface 1121, the first inclined surface 1121 is arranged inclinedly from the first surface 110 towards the inside of the groove 111. It can be understood that the first inclined surface 1121 provides a force surface and a force angle for dismounting the connection plate 200, and the force surface and the force angle are both inclined towards the groove 111, thus, the connection plate 200 can be put into the groove 111 more conveniently, and the connection plate 200 can be taken out of the groove 111 more conveniently, thereby reducing the difficulty of installing and replacing the connection plate 200.

[0040] In an embodiment, the seat body 100 is provided with a connecting hole 101 extending along the length direction of the seat body 100, the connecting hole 101 is used for allowing the electrode rod to pass through. The connecting rod passes through the connecting hole 101, the electrode seat can be electrically connected with the electrode rod; in this way, the seat body 100 can be powered, and then the graphite boat can be powered.

[0041] Further, the connecting hole 101 is a threaded hole. It can be understood that the electrode plate is provided with threads matched with the threaded hole. In this way, the connection between the seat body 100 and the electrode rod is more secure, and the contact area between the seat body 100 and the electrode rod is increased, so that the electrical conductivity between the electrode seat and the electrode rod is more stable.

[0042] In one embodiment, the electrode seat is also used to connect the support rod, and the seat body 100 is provided with a mounting hole 102 extending along the length direction of the seat body 100, which is used for the support rod to pass through. The support rod provides a fixed point for the seat body 100, so that the seat body 100 can be fixed on the support rod.

[0043] Further, the connecting hole 101 and the groove 111 are both located on the outer peripheral side of the mounting hole 102. In this way, the support rod and the electrode rod can be independently arranged, improving the universality of the seat body 100. It should be explained that the "outer peripheral side of the mounting hole 102" in this embodiment refers to the part from the inside of the mounting hole 102 towards the circumference of the mounting hole 102, and does not mean that the mounting hole 102 can only be a circular hole. It can be understood that the mounting hole 102 can be a circular hole, or a square, oval or irregular shaped hole, which is not limited in this application. Further, the cross section of the support rod can be circular, square, oval or irregular, as long as the shape of the support rod matches the shape of the mounting hole 102.

[0044] In one embodiment, the seat body 100 is also provided with a plurality of flat surfaces on the outer peripheral side of the mounting hole 102, and the plurality of flat surfaces are connected by a plurality of arc surfaces 160, and the flat surface and the first surface 110 are connected by the arc surface 160. In this way, the volume and weight of the seat body 100 can be reduced, and the cost can be saved. When the electrode seat is applied in a deposition device, the electrode seat is placed inside the quartz tube of the deposition device, and reducing the volume of the seat body 100 and providing the arc surface 160 on the seat body 100 helps to avoid the seat body 100 from accidentally touching and damaging the quartz tube during installation; at the same time, it can also reduce the pressure of the electrode seat on the support rod, thereby prolonging the service life of the support rod.

[0045] In one embodiment, with reference to Figure 1 and Figure 2The planes include the second plane 120, the third plane 130, the fourth plane 140 and the fifth plane 150, the first plane 110, the second plane 120, the third plane 130, the fourth plane 140 and the fifth plane 150 are sequentially connected by a plurality of arc surfaces 160 in the circumferential direction of the electrode holder, and form a closed ring body; the included angle between the first plane 110 and the second plane 120 is α, which is less than or equal to 90 degrees, the included angle between the second plane 120 and the third plane 130 is β, which is greater than 90 degrees, the included angle between the third plane 130 and the fourth plane 140 is γ, which is greater than 90 degrees, and the included angle between the fourth plane 140 and the fifth plane 150 is δ, which is less than or equal to 90 degrees. In this way, the position of the mounting hole 102 can be ensured, and the volume of the holder body 100 can be reduced.

[0046] Further, the connecting hole 101 can be arranged between any two planes, which is not limited in the present application. Illustratively, the connecting hole 101 can be arranged between the first plane 110 and the second plane 120, or between the fourth plane 140 and the fifth plane 150, so that the space on the holder body 100 can be reasonably utilized, thereby reducing the volume of the holder body 100.

[0047] The present application also provides a deposition device comprising the electrode holder in any one of the above embodiments. It can be understood that the deposition device further comprises a graphite boat and an electrode rod, the electrode holder is electrically connected to the graphite boat and the electrode rod, the electrode rod is used to supply power to the electrode holder, the electrode holder transmits the electric energy to the graphite boat, and the graphite boat can ionize the related medium after being electrified, and then can deposit target substances on the surface of the battery piece. Since the connecting plate of the electrode holder is connected to the plane of the graphite boat, the probability of poor contact between the electrode holder and the graphite boat is low, thereby solving the high-frequency arc abnormal phenomenon caused by poor contact between the electrode holder and the graphite boat, and thereby reducing the rework rate and improving the production capacity of the deposition device.

[0048] The technical features of the above-described embodiments can be combined in any manner. To make the description concise, all possible combinations of the technical features in the above-described embodiments are not described, but as long as the combinations of the technical features do not exist contradictory, they should be considered as the scope of the present application.

[0049] The above-described embodiments only express several implementation manners of the present application, and the description is more specific and detailed, but it should not be understood as a limitation on the patent scope of the application. It should be pointed out that for ordinary skilled persons in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. An electrode holder for electrically connecting a graphite boat, characterized by, The electrode seat comprises a seat body (100) and a connecting plate (200), the seat body (100) and the connecting plate (200) are both capable of conducting electricity, the connecting plate (200) is arranged outside the seat body (100), the seat body (100) and the connecting plate (200) are electrically connected, and a connecting surface (210) for connecting the graphite boat is arranged on the side of the connecting plate (200) away from the seat body (100), and the connecting surface (210) is a plane.

2. The electrode holder of claim 1, wherein The outer wall of the seat body (100) has a first surface (110), the first surface (110) is provided with a groove (111), the connecting plate (200) is fixed in the groove (111), and the connecting surface (210) protrudes from or is flush with the first surface (110).

3. The electrode holder of claim 2, wherein The first surface (110) is further provided with a dismounting groove (112), the dismounting groove (112) is arranged on one side of the groove (111) and communicates with the groove (111).

4. The electrode holder of claim 3, wherein The bottom surface of the dismounting groove (112) is a first inclined surface (1121), and the first inclined surface (1121) is arranged to be inclined from the first surface (110) toward the inside of the groove (111).

5. The electrode holder of claim 2, wherein The electrode seat is also used for electrically connecting electrode rods. The seat body (100) is provided with a connecting hole (101) extending along the length direction of the seat body (100), and the connecting hole (101) is used for allowing an electrode rod to pass therethrough.

6. The electrode holder of claim 5, wherein The connecting hole (101) is a threaded hole.

7. The electrode holder of claim 5, wherein The electrode seat is also used for connecting a support rod, the seat body (100) is provided with a mounting hole (102) extending along the length direction of the seat body (100), and the mounting hole (102) is used for allowing the support rod to pass therethrough. The connecting hole (101) and the groove (111) are both located on the outer circumferential side of the mounting hole (102).

8. The electrode holder of claim 7, wherein The seat body (100) is further provided with a plurality of planes located on the outer circumferential side of the mounting hole (102), a plurality of the planes are connected through a plurality of arc surfaces (160), and the planes and the first surface (110) are connected through the arc surfaces (160).

9. The electrode holder of claim 8, wherein, The planes include a second surface (120), a third surface (130), a fourth surface (140), and a fifth surface (150), in the circumferential direction of the electrode seat, the first surface (110), the second surface (120), the third surface (130), the fourth surface (140), and the fifth surface (150) are sequentially connected through a plurality of arc surfaces (160) and form a closed ring body. The included angle between the first surface (110) and the second surface (120) is less than or equal to 90 degrees, the included angle between the second surface (120) and the third surface (130) is greater than 90 degrees, the included angle between the third surface (130) and the fourth surface (140) is greater than 90 degrees, and the included angle between the fourth surface (140) and the fifth surface (150) is less than or equal to 90 degrees.

10. A deposition apparatus, characterized by, The electrode seat comprises a seat body (100) and a connecting plate (200), the seat body (100) and the connecting plate (200) are both capable of conducting electricity, the connecting plate (200) is arranged outside the seat body (100), the seat body (100) and the connecting plate (200) are electrically connected, and a connecting surface (210) for connecting the graphite boat is arranged on the side of the connecting plate (200) away from the seat body (100), and the connecting surface (210) is a plane. The electrode seat comprises a seat body (100) and a connecting plate (200), the seat body (100) and the connecting plate (200) are both capable of conducting electricity, the connecting plate (200) is arranged outside the seat body (100), the seat body (100) and the connecting plate (200) are electrically connected, and a connecting surface (210) for connecting the graphite boat is arranged on the side of the connecting plate (200) away from the seat body (100), and the connecting surface (210) is a plane.

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