Probe card precision testing device

Abstract

The utility model relates to the field of precision testing devices, in particular to a probe card precision testing device, which is characterized in that a detection assembly is mounted on a table body, a transverse moving assembly is arranged on the table body and below the detection assembly, and a longitudinal moving assembly is arranged at the top of the transverse moving assembly; a detachable bearing plate is mounted at the top of the longitudinal moving assembly; and a mounting groove is adaptively formed in the top of the longitudinal moving assembly corresponding to the bearing plate, mounting columns are fixedly and vertically arranged at the corners of the mounting groove upwards, limiting plates are movably arranged on the two sides of the longitudinal moving assembly, and limiting cavities are adaptively formed in the mounting columns corresponding to the limiting plates. According to the utility model, through the arrangement of the detection assembly, the detection of the probe card can be realized, the probe card is adaptively installed on the bearing plate, and through the adaptive arrangement of the limiting plate and the installation column, the fixed installation of the bearing plate can be realized, so that the positioning of the probe card can be realized, and the accuracy of the probe card during detection is not affected.

Description

TECHNICAL FIELD

[0001] The utility model relates to precision testing device technical field especially relates to a kind of probe card precision testing device. BACKGROUND

[0002] Probe card precision testing device is used to ensure that probe card can accurately and stably work in semiconductor testing process.The probe card precision testing device is mainly used to evaluate the performance of probe card under different test conditions, including its precision, stability, reliability and other key indicators.

[0003] The "probe card detection device" disclosed in the authorized announcement No. "CN 212109902 U" has solved the problem that the existing detection device cannot accurately measure the depth (distance) of the probe card pin and other 3D information. However, in the actual use of similar devices, it is found that it still has some defects, for example:

[0004] The bearing table in the comparative document does not have a positioning mechanism for the probe card, which causes displacement of the probe card during detection, affecting the detection accuracy of the probe card. Moreover, the operation process of the positioning mechanism on the market is relatively complicated, which is not conducive to the use of users. UTILITY MODEL CONTENT

[0005] The utility model aims at solving the shortcomings in the prior art and provides a kind of probe card precision testing device.

[0006] To achieve the above object, the utility model adopts the following technical scheme:

[0007] A kind of probe card precision testing device, including table body, detection assembly is installed on the table body, and horizontal moving assembly is arranged below detection assembly on the table body, and vertical moving assembly is arranged on the top of horizontal moving assembly, and detachable bearing plate is installed on the top of vertical moving assembly;The installation groove is opened in the top of vertical moving assembly corresponding to bearing plate, and installation column is vertically arranged and fixed upward in the corner of installation groove, and limit plate is movably arranged on the both sides of vertical moving assembly, and limit cavity is opened in the installation column corresponding to limit plate.

[0008] In addition, the preferred structure is that the bearing plate is fitted in the installation groove, the installation cavity is opened in the installation column corresponding to the installation column on the bearing plate, and the height of the installation column is greater than the height of the bearing plate.

[0009] In addition, the preferred structure is that the top of vertical moving assembly is fixedly provided with fixed seat on both sides of installation groove, and transverse through hole is opened in both ends of fixed seat.

[0010] In addition, preferably, a limiting plate is arranged on the longitudinal moving assembly on the inner side of the fixing base, and a connecting column is fixedly arranged on the side of the limiting plate facing the fixing base.

[0011] In addition, preferably, the connecting column passes through the through hole, and an anti-falling piece is fixedly arranged on the end of the connecting column.

[0012] In addition, preferably, a plurality of springs are mounted on the side of the fixing base facing the limiting plate, and the other end of the spring is connected with the limiting plate.

[0013] The probe card precision testing device has the advantages that the detection assembly can realize detection of the probe card, the probe card is adaptively arranged on the bearing plate, the bearing plate can be fixedly arranged through the adaptive arrangement between the limiting plate and the mounting column, the probe card can be positioned, and the precision of the probe card during detection is not affected. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 FIG. 1 is a structural schematic view of a probe card precision testing device according to the present application;

[0015] Figure 2 FIG. 2 is a structural schematic view of a longitudinal moving assembly of the probe card precision testing device according to the present application;

[0016] Figure 3 FIG. 3 is an exploded structural schematic view of the probe card precision testing device according to the present application; Figure 2 FIG. 4 is an exploded structural schematic view of the probe card precision testing device according to the present application;

[0017] Figure 4 FIG. 5 is a structural schematic view of a bearing plate, a limiting plate and a spring of the probe card precision testing device according to the present application; Figure 2 FIG. 6 is a structural schematic view of the limiting plate of the probe card precision testing device according to the present application.

[0018] Figure 5 FIG. 6 is a structural schematic view of the limiting plate of the probe card precision testing device according to the present application.

[0019] In the figure: 1 table body, 11 detection assembly, 2 horizontal moving assembly, 21 longitudinal moving assembly, 22 mounting groove, 23 mounting column, 231 limiting cavity, 3 bearing plate, 31 mounting cavity, 4 fixing base, 41 through hole, 5 limiting plate, 51 connecting column, 52 anti-falling piece, 6 spring. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present application will be clearly and completely described with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments.

[0021] Referring to Figures 1-5The utility model provides a kind of probe card precision testing device, including table body 1, and detection assembly 11 is installed on table body 1, and transverse moving assembly 2 is arranged below detection assembly 11 on table body 1, and longitudinal moving assembly 21 is provided on the top of transverse moving assembly 2, and detachable bearing plate 3 is installed on the top of longitudinal moving assembly 21.The top of longitudinal moving assembly 21 is adapted to be provided with mounting groove 22 corresponding bearing plate 3, and mounting column 23 is vertically fixed upward in the corner of mounting groove 22, and limit plate 5 is movably arranged on the both sides of longitudinal moving assembly 21, and limit cavity 231 is adapted to be provided with in mounting column 23 corresponding limit plate 5.

[0022] Wherein, detection assembly 11 includes light source scanning unit, image acquisition unit and comparison unit. It is all prior art disclosed in the comparison document, so it is not described in detail in the utility model.

[0023] Wherein, the horizontal slide rail is arranged on the table body 1, the transverse moving assembly 2 is slid on the horizontal slide rail by the sliding block, the longitudinal slide rail is arranged on the top of the transverse sliding assembly 2, and the longitudinal sliding assembly 21 is slid on the longitudinal slide rail by the sliding block. It is all prior art, so it is not described in detail.

[0024] Wherein, bearing plate 3 is adapted to be assembled in mounting groove 22, mounting cavity 31 is adapted to be provided with in bearing plate 3 corresponding mounting column 23, and the height of mounting column 23 is greater than the height of bearing plate 3. The top of bearing plate 3 is provided with positioning cavity adapted to probe card to realize the positioning of probe card.

[0025] Wherein, the top of longitudinal moving assembly 21 is fixedly provided with fixed seat 4 on the both sides of mounting groove 22, and the both ends of fixed seat 4 are provided with transverse through hole 41. Limit plate 5 is arranged on the inner side of fixed seat 4 on longitudinal moving assembly 21, and the side of limit plate 5 towards fixed seat 4 is fixedly and vertically provided with connecting column 51. By the adaptation between connecting column 51 and through hole 41, limit plate 5 can be guided when moving.

[0026] Wherein, connecting column 51 passes through through hole 41, and the end of connecting column 51 is fixedly provided with anti-falling part 52. By the setting of anti-falling part 52, connecting column 51 can be prevented from falling off from through hole 41.

[0027] Wherein, the side of fixed seat 4 towards limit plate 5 is mounted with a plurality of springs 6, and the other end of spring 6 is connected with limit plate 5. By the setting of elastic force in spring 6, limit plate 5 can be pushed outwards.

[0028] When the user needs to detect the precision of the probe card, the probe card is only needed to be placed on the bearing plate 3 for positioning, and then the bearing plate 3 is installed on the longitudinal moving assembly 21. In this way, the bearing plate 3 and the probe card can be moved by the transverse moving assembly 2 and the longitudinal moving assembly 21. And through the setting of the detection assembly 11, the detection of the probe card can be realized.

[0029] Further, the top of the bearing plate 3 is provided with a positioning cavity matched with the probe card. By installing the probe card in the positioning cavity, the fixing between the probe card and the bearing plate 3 can be realized. When the user needs to detect the probe cards with different shapes and sizes, the matched bearing plate 3 can be selected. This is the prior art, and no more description is made.

[0030] Further, when the user needs to install the bearing plate 3, the limiting plates 5 on both sides are only needed to be pressed outward, and at this time, the springs 6 are compressed. Then the bearing plate 3 is installed in the installation groove 22, and at this time, the installation columns 23 are matched and inserted into the installation cavities 31 on the bearing plate 3. Then the user can release the limiting plates 5 on both sides, and at this time, the springs 6 are automatically reset by the elastic force, and the limiting plates 5 are reset to the limiting cavities 231 on the installation columns 23 by the elastic force, so that the fixing of the bearing plate 3 can be realized by the clamping of the limiting plates 5, and the positioning of the bearing plate 3 and the probe card can be realized.

[0031] Further, since the connecting columns 51 pass through the through holes 41, through the setting of the connecting columns 51, the limiting plates 5 on both sides can be kept stable during the movement.

[0032] In the utility model, through the setting of the detection assembly 11, the detection of the probe card can be realized. The probe card is matched and installed on the bearing plate 3, and through the matched setting between the limiting plates 5 and the installation columns 23, the fixed installation of the bearing plate 3 can be realized, so that the positioning of the probe card can be realized, and the precision of the probe card during the detection is not affected.

[0033] The above is only the preferred specific embodiment of the utility model, but the protection scope of the utility model is not limited to this. Any skilled person in the technical field according to the technical scheme and the utility model concept of the utility model within the technical range disclosed by the utility model can make equivalent replacement or change, which should be covered in the protection scope of the utility model.

Claims

1. A probe card precision testing apparatus comprising a table body (1), characterized in that, The detection assembly (11) is installed on the table body (1), a transverse moving assembly (2) is arranged below the detection assembly (11) on the table body (1), a longitudinal moving assembly (21) is arranged on the top of the transverse moving assembly (2), and a detachable bearing plate (3) is installed on the top of the longitudinal moving assembly (21); The top of the longitudinal moving assembly (21) is provided with an installation groove (22) corresponding to the bearing plate (3), and a mounting column (23) is vertically arranged at the edge of the installation groove (22), limit plates (5) are movably arranged on the two sides of the longitudinal moving assembly (21), and a limit cavity (231) is formed in the mounting column (23) corresponding to the limit plate (5).

2. The probe card accuracy test apparatus of claim 1, wherein The bearing plate (3) is fitted in the installation groove (22), the bearing plate (3) is provided with an installation cavity (31) corresponding to the mounting column (23), and the height of the mounting column (23) is greater than the height of the bearing plate (3).

3. The probe card accuracy test apparatus of claim 2, wherein The top of the longitudinal moving assembly (21) is provided with a fixed seat (4) on both sides of the installation groove (22), and a transverse through hole (41) is formed in the two ends of the fixed seat (4).

4. The probe card accuracy test apparatus of claim 3, wherein The limit plates (5) are arranged on the inner side of the fixed seat (4) of the longitudinal moving assembly (21), and a connecting column (51) is vertically arranged on the side of the limit plate (5) facing the fixed seat (4).

5. The probe card accuracy test apparatus of claim 4, wherein The connecting column (51) passes through the through hole (41), and the end of the connecting column (51) is fixedly provided with an anti-falling piece (52).

6. A probe card accuracy test apparatus according to claim 5, wherein A plurality of springs (6) are installed on the side of the fixed seat (4) facing the limit plate (5), and the other end of the spring (6) is connected with the limit plate (5).

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