Safety separation blade and light source protection device

Abstract

The utility model provides a safety separation blade and a light source protection device, the safety separation blade is used for being arranged between a light source and a lens so as to shield light rays emitted by the light source, and the safety separation blade is made of copper materials. The copper has higher melting point, higher heat capacity, better heat dissipation performance and higher hardness, so that the heat dissipation of the safety separation blade is facilitated, the working temperature of the safety separation blade can be reduced, the safety separation blade is prevented from being heated and deformed, and the service life of the safety separation blade is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially to a safety baffle and light source protection device. BACKGROUND

[0002] In the prior art, the light source of a 365nm photoetching machine is a high-pressure mercury lamp. Once the mercury lamp is lit, the mercury lamp will continuously provide light source. In order to avoid the frequent lighting or extinguishing of the mercury lamp affecting its service life, during the idle or maintenance of the machine, the light at the mercury lamp light source outlet of the machine generally needs to be completely intercepted to reduce the damage of the light source to the lens of the lighting system and the influence of the light on the maintenance work.

[0003] Therefore, a safety baffle (safety blade for short) is arranged between the high-pressure mercury lamp light source and the lens of the ASML 365nm photoetching machine (such as the XT400 series).

[0004] In a manufacturing workshop with low production capacity, the frequency of deformation and damage of the safety baffle is very high, and it generally needs to be replaced once every few months. This is because when the machine is idle for a long time or is maintained for a long time, the high-intensity light source will continuously irradiate the safety baffle, heat the safety baffle, and the safety baffle will gradually bend and deform under long-time high-temperature irradiation, so that the end of the safety baffle is placed on the safety shutter, at this time the motor cannot drive the safety baffle to rotate, which will cause the machine to be shut down. UTILITY MODEL CONTENTS

[0005] To solve the technical problems in the prior art, the purpose of the utility model is to provide a safety baffle and a light source protection device. The safety baffle is made of copper material. Since copper has a high melting point, a high heat capacity, a better heat dissipation performance and a higher hardness, it is beneficial to the heat dissipation of the safety baffle, so as to reduce the working temperature of the safety baffle and significantly improve the problem of deformation of the safety baffle under heat.

[0006] To achieve the above purpose, the utility model provides a safety baffle. The safety baffle is arranged between a light source and a lens to shield the light emitted by the light source. The safety baffle is made of copper material.

[0007] Optionally, a heat dissipation strip is arranged on the safety baffle, and the heat dissipation strip is located on the side of the safety baffle away from the light source.

[0008] Optionally, two ends of the safety baffle are respectively provided with a first arc shape and a second arc shape which protrude outward, the length of the first arc shape is less than the length of the second arc shape, and the plurality of heat dissipation strips are distributed at intervals on a line connecting the first arc shape and the second arc shape.

[0009] Optionally, the first arc shape is a first circular arc shape, the second arc shape is a second circular arc shape, the radius of the first circular arc shape is less than the radius of the second circular arc shape, and all the heat dissipation strips are distributed at equal intervals in the radial direction of the first circular arc shape.

[0010] Optionally, all the heat dissipation strips are curved along the circumferential direction of the first circular arc shape.

[0011] Optionally, the shape of the heat dissipation strip includes at least one of a trapezoidal body, a hemispherical body, a cuboid and a square body.

[0012] Optionally, the shape of the heat dissipation strip is a trapezoidal body, and the cross section of the heat dissipation strip perpendicular to the axial direction of the safety baffle gradually decreases in the direction away from the safety baffle.

[0013] Optionally, the width of the upper end surface of the heat dissipation strip in the radial direction of the first circular arc is 0.5mm-1.5mm,

[0014] and / or, the width of the lower end surface of the heat dissipation strip in the radial direction of the first circular arc is 1mm-3mm,

[0015] and / or, the height of the heat dissipation strip in the axial direction of the first circular arc is 1mm-2mm,

[0016] and / or, the distance between two adjacent heat dissipation strips in the radial direction of the first circular arc is 1mm-3mm,

[0017] and / or, the thickness of the safety baffle in the axial direction of the safety baffle is 1mm-3mm.

[0018] In order to achieve the above-mentioned purpose, the utility model also provides a light source protection device, including motor and any one safety baffle, the motor is connected with safety baffle, and is used for driving safety baffle rotation.

[0019] Optionally, two ends of the safety baffle are respectively provided with a first arc shape and a second arc shape which protrude outward, the length of the first arc shape is less than the length of the second arc shape, and the plurality of heat dissipation strips are distributed at intervals on a line connecting the first arc shape and the second arc shape.

[0020] The utility model provides a safe baffle and light source protection device, this safe baffle adopts copper material to make, because copper has higher melting point (1083 DEG C), higher heat capacity, better heat dissipation performance and higher hardness. Under the same volume, the heat absorption of copper is also higher than aluminium 30%~40%, namely absorbs the temperature of safe baffle of copper material preparation to rise less when the same heat, is favorable to the heat dissipation of safe baffle, thereby can reduce the working temperature of safe baffle, avoid the deformation of safe baffle by heat, promote the service life of safe baffle.

[0021] The present application can also be provided with a heat dissipation strip on the safe baffle, and the heat dissipation strip is located on the side of the safe baffle away from the light source. By this arrangement, since the surface area of the side of the safe baffle facing the light source is not changed, the total heat absorbed by the safe baffle from the light source remains unchanged. If a heat dissipation strip is provided on the side of the safe baffle away from the light source, the heat dissipation area of the side of the safe baffle away from the light source can be increased, the heat dissipation efficiency of the safe baffle can be improved, the temperature rise of the safe baffle can be further reduced, the possibility of deformation of the safe baffle can be reduced, and the equipment downtime can be reduced. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a structure schematic view of the lighting system in the preferred embodiment of the utility model;

[0023] Figure 2a It is a partial structure schematic view of the lighting system in a preferred embodiment of the utility model, wherein the safe baffle and the safety shutter are not in contact;

[0024] Figure 2b It is a partial structure schematic view of the lighting system in another preferred embodiment of the utility model, wherein the safe baffle and the safety shutter are in contact;

[0025] Figure 3 It is a front view structure schematic view of the safe baffle in the preferred embodiment of the utility model;

[0026] Figure 4 It is a side view structure schematic view of the safe baffle in the preferred embodiment of the utility model.

[0027] Wherein, the following is the explanation of the reference signs:

[0028] Safe baffle 1; first circular arc 11; second circular arc 12; mounting hole 13; motor 2; light source 3; lens 4; shutter 5; reflector 6; heat dissipation strip 7; upper end face 71; lower end face 72. DETAILED DESCRIPTION

[0029] The utility model will be further explained in detail below in combination with the drawings and specific embodiments. The advantages and features of the utility model will be more apparent according to the following description. It should be noted that the drawings are all very simplified and use non-precise proportions, only for the purpose of facilitating and clearly assisting the description of the utility model embodiments.

[0030] In the present specification, the terms "first", "second" and the like are used only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" and the like can explicitly or implicitly include one or more of the features.

[0031] In the following description, the safety shield of the utility model is used to set between the light source and the lens of the illumination system to block the light path, but those skilled in the art should know that the safety shield can also be better applied to other semiconductor devices that need to block the light path of the light source.

[0032] As shown in Figure 1 The utility model provides a kind of safety shield 1, safety shield 1 is used to set between light source 3 and lens 4, to shield the light emitted by light source, safety shield 1 is prepared with copper material.

[0033] In addition, the utility model further provides a kind of light source protection device, including motor 2 and safety shield 1, motor 2 is connected with safety shield 1, and is used to drive safety shield 1 rotation.

[0034] Now with 365nm photoetching machine as an example to explain. Refer to Figure 1 In photoetching machine, safety shield 1 is set between the light source 3 (such as high-pressure mercury lamp) of illumination system and lens 4. Specifically, safety shield 1 is installed between light source 3 and shutter 5, and the light emitted by light source 3 is reflected by reflector 6 and then passes through shutter 5 to irradiate on lens 4.

[0035] When machine needs light source irradiation, safety shield 1 can be rotated and release light path under the drive of motor 2, at this time, safety shield 1 will not block the light of light source 3 irradiating on lens 4. During machine idle or maintenance, safety shield 1 can be rotated and block light path under the drive of motor 2 (refer to Figure 2a ), at this time, safety shield 1 can intercept all light at the outlet of light source 3, to reduce the loss of lens 4 by light source 3, and also avoid the influence of light on maintenance work.

[0036] The existing safety shield is generally prepared with aluminum material, since the melting point of aluminum material is lower, safety shield 1 will gradually bend and deform under long-time irradiation of light source 3, so that the end of safety shield 1 is on shutter 5, at this time, motor 2 cannot drive safety shield 1 to rotate (refer toFigure 2b ), causing the machine to be down.

[0037] The safety shield 1 is made of copper material. Since copper has a high melting point (1083℃), high heat capacity, better heat dissipation performance and higher hardness. The heat absorption of copper is 30%-40% higher than that of aluminum under the same volume, that is, the temperature rise of the safety shield 1 made of copper material is less when absorbing the same heat, which is beneficial to the heat dissipation of the safety shield 1, so as to reduce the working temperature of the safety shield 1, avoid the deformation of the safety shield 1 due to heat, and prolong the service life of the safety shield 1.

[0038] Preferably, the safety shield 1 is provided with a heat dissipation strip 7, which is located on the side of the safety shield 1 away from the light source 3. In this way, since the surface area of the side of the safety shield 1 facing the light source 3 is not changed, the total heat absorbed by the safety shield 1 from the light source 3 remains unchanged. If the heat dissipation strip 7 is arranged on the side of the safety shield 1 away from the light source 3, the heat dissipation area of the side of the safety shield 1 away from the light source 3 can be increased, the heat dissipation efficiency of the safety shield 1 can be improved, the temperature rise of the safety shield 1 can be further reduced, the possibility of deformation of the safety shield 1 can be reduced, and the machine downtime can be reduced.

[0039] In a preferred embodiment, the two ends of the safety shield 1 are respectively provided with a first arc shape and a second arc shape which protrude outward, and the length of the first arc shape is less than the length of the second arc shape. At this time, the shape of the safety shield 1 is approximately fan-shaped.

[0040] It should be understood that the "protruding outward" described above means that the safety shield 1 protrudes in a direction away from itself. It should also be understood that the first arc shape and the second arc shape include but are not limited to a part of a circular arc shape or a part of an elliptical shape.

[0041] In another preferred embodiment, the two ends of the safety shield 1 can be provided with a circular arc shape, a fan shape, an elliptical shape, a wave shape, a sawtooth shape, a rectangular shape or any other desired shape as needed, and the shape of the safety shield 1 is not limited in the present application.

[0042] Further, the safety shield 1 is connected to the motor 2 on one side of the first arc shape, so that the safety shield 1 rotates around the first arc shape. At this time, one side of the second arc shape of the safety shield 1 is used to shield the light emitted by the light source 3 under the drive of the motor 2, thereby protecting the lens 4 when the machine is idle or being maintained.

[0043] Please refer to Figure 3As a specific embodiment, the first arc is a first circular arc 11, and the second arc is a second circular arc 12. The radius of the first circular arc 11 is smaller than that of the second circular arc 12. That is, one end of the first circular arc 11 is the smaller end of the safety shield 1, and one end of the second circular arc 12 is the larger end of the safety shield 1. In this way, the motor 2 can be fixed to one side of the first circular arc 11, and the second circular arc 12 can match the shape of the light emitted by the light source 3 under the drive of the motor 2, thereby completely blocking the light path.

[0044] In a specific example, one side of the first circular arc 11 of the safety shield 1 is provided with a mounting hole 13, and the geometric center of the mounting hole 13 is preferably coincident with the geometric center of the first circular arc 11. The mounting hole 13 is used to accommodate and fix the motor shaft, so as to realize the connection between the motor 2 and the safety shield 1.

[0045] Preferably, the number of heat dissipation strips 7 is multiple, and all the heat dissipation strips 7 are distributed at intervals on the line connecting the first arc and the second arc. It should be understood that the line connecting the first arc and the second arc refers to the line connecting any point on the first arc and any point on the second arc.

[0046] In other embodiments, the number of heat dissipation strips 7 is multiple, and all the heat dissipation strips 7 are distributed at intervals approximately on the circumference of the first arc or the second arc. In a specific example, one end of all the heat dissipation strips 7 is arranged on the first arc, and the other end of the heat dissipation strips 7 is arranged on the second arc.

[0047] Continuing to refer to Figure 3 In a specific embodiment, when all the heat dissipation strips 7 are distributed at intervals on the line connecting the first arc and the second arc, the heat dissipation strips 7 are approximately curved along the circumference of the first circular arc 11, at this time, the heat dissipation strips 7 are distributed at intervals as concentric circles with the motor shaft, and the geometric centers of all the heat dissipation strips 7 are coincident with the geometric center of the first circular arc 11 of the safety shield 1. In this way, the disturbance to the airflow in the machine caused by the movement of the safety shield 1 can be minimized when the motor 2 drives the safety shield 1 to rotate, thereby ensuring the processing quality of the machine.

[0048] In another specific embodiment, when all the heat dissipation strips 7 are distributed at intervals approximately on the circumference of the first arc or the second arc, the heat dissipation strips 7 can be approximately curved along the radial direction of the first circular arc 11.

[0049] Preferably, all the heat dissipation strips 7 are distributed at equal intervals in the radial direction or the circumferential direction of the first circular arc 11, so that the safety shield 1 can dissipate heat uniformly.

[0050] Further preferably, the first circular arc 11 and the second circular arc 12 are symmetrically arranged about the line connecting the geometric center of the first circular arc 11 and the geometric center of the second circular arc 12, so as to further ensure that one side of the second circular arc 12 in the safety shield 1 can shield all the light emitted by the light source 3.

[0051] The shape of the heat dissipation strip 7 is not limited in the present application. The shape of the heat dissipation strip 7 includes, but is not limited to, at least one of a trapezoidal body, a hemispherical body, a cuboid and a square body. That is, in the side view of the safety shield 1 (see Figure 4 ), the shape of the heat dissipation strip 7 can be wedge-shaped, semicircular, rectangular or square.

[0052] Referring to Figure 3 and Figure 4 , in a preferred example, the shape of the heat dissipation strip 7 is a trapezoidal body, and the cross section of the heat dissipation strip 7 perpendicular to the axial direction of the safety shield 1 gradually decreases in the direction away from the safety shield 1, i.e. the heat dissipation strip 7 is a right trapezoidal body. At this time, referring to Figure 4 , in the side view of the safety shield 1, the shape of the heat dissipation strip 7 is wedge-shaped. Specifically, in the radial direction of the first circular arc 11, the width of the end face (i.e. the upper end face 71) of the heat dissipation strip 7 away from the side of the safety shield 1 is smaller than the width of the end face (i.e. the lower end face 72) of the heat dissipation strip 7 connected to the side of the safety shield 1.

[0053] In another preferred example, the shape of the heat dissipation strip 7 is a trapezoidal body, and the cross section of the heat dissipation strip 7 perpendicular to the axial direction of the safety shield 1 gradually increases in the direction away from the safety shield 1, i.e. the heat dissipation strip 7 is an inverted trapezoidal body. At this time, in the side view of the safety shield 1, the shape of the heat dissipation strip 7 is wedge-shaped. Specifically, in the radial direction of the first circular arc 11, the width of the end face (i.e. the upper end face 71) of the heat dissipation strip 7 away from the side of the safety shield 1 is greater than the width of the end face (i.e. the lower end face 72) of the heat dissipation strip 7 connected to the side of the safety shield 1.

[0054] Further, in order to better dissipate heat, the width of the upper end face 71 of the heat dissipation strip 7 in the radial direction of the first circular arc 11 is preferably 0.5mm-1.5mm, the width of the lower end face 22 of the heat dissipation strip 7 in the radial direction of the first circular arc 11 is preferably 1mm-3mm, the height of the heat dissipation strip 7 in the axial direction of the first circular arc 11 is preferably 1mm-2mm, and the distance between two adjacent heat dissipation strips 7 in the radial direction of the first circular arc 11 is preferably 1mm-3mm.

[0055] In order to better match the light emitted by the light source 3, the thickness of the safety shield 1 in the axial direction of the safety shield 1 is preferably 1mm-3mm.

[0056] In summary, the utility model provides a kind of safe baffle and light source protection device, the safe baffle 1 is made of copper material, since copper has higher melting point (1083 ℃), higher heat capacity, better heat dissipation performance and higher hardness.Under the same volume, the heat absorption of copper is also higher than that of aluminum by 30%~40%, that is, when absorbing the same heat, the temperature of the safe baffle 1 made of copper material rises less, which is beneficial to the heat dissipation of the safe baffle 1, so as to reduce the working temperature of the safe baffle 1, avoid the deformation of the safe baffle 1 due to heating, and improve the service life of the safe baffle 1.

[0057] The present application can also be provided with a heat dissipation strip 7 on the safe baffle 1, and the heat dissipation strip 7 is located on the side of the safe baffle 1 away from the light source 3. By setting in this way, since the surface area of the side of the safe baffle 1 facing the light source 3 is not changed, the total heat absorbed by the safe baffle 1 from the light source 3 remains unchanged. If the heat dissipation strip 7 is provided on the side of the safe baffle 1 away from the light source 3, the heat dissipation area of the side of the safe baffle 1 away from the light source 3 can be increased, the heat dissipation efficiency of the safe baffle 1 can be improved, the temperature rise of the safe baffle 1 can be further reduced, the possibility of deformation of the safe baffle 1 can be reduced, and the equipment downtime can be reduced.

[0058] The above description is only a description of the preferred embodiment of the utility model, and does not limit the scope of the utility model. Any modification or modification made by a person skilled in the art based on the above disclosure is within the scope of protection of the utility model.

Claims

1. A safety shield characterized in that, The safety shield is arranged between a light source and a lens to shield light emitted by the light source, and is made of copper; a heat dissipation strip is arranged on the safety shield and located on a side of the safety shield away from the light source; two ends of the safety shield are respectively provided with a first arc shape and a second arc shape that protrude outward, the length of the first arc shape is less than the length of the second arc shape; and a plurality of heat dissipation strips are arranged on the safety shield and are distributed at intervals on a line connecting the first arc shape and the second arc shape.

2. The safety shield of claim 1, wherein, The first arc shape is a first circular arc shape, the second arc shape is a second circular arc shape, the radius of the first circular arc shape is less than the radius of the second circular arc shape, and all the heat dissipation strips are distributed at equal intervals in the radial direction of the first circular arc shape.

3. The safety shutter as claimed in claim 2, wherein, All the heat dissipation strips are curved in the circumferential direction of the first circular arc shape.

4. A security tab as claimed in claim 2 or 3, wherein the first and second portions are formed from a single sheet of material. The shape of the heat dissipation strip includes at least one of a trapezoidal body, a hemispherical body, a cuboid and a square body.

5. The safety shutter as claimed in claim 4, wherein, The shape of the heat dissipation strip is a trapezoidal body, and the cross section of the heat dissipation strip perpendicular to the axial direction of the safety shield gradually decreases in the direction away from the safety shield.

6. The safety shutter as claimed in claim 5, wherein, The width of the upper end surface of the heat dissipation strip in the radial direction of the first circular arc shape is 0.5mm-1.5mm, and / or, the width of the lower end surface of the heat dissipation strip in the radial direction of the first circular arc shape is 1mm-3mm, and / or, the height of the heat dissipation strip in the axial direction of the first circular arc shape is 1mm-2mm, and / or, the distance between two adjacent heat dissipation strips in the radial direction of the first circular arc shape is 1mm-3mm, and / or, the thickness of the safety shield in the axial direction of the safety shield is 1mm-3mm.

7. A light source protection device, characterized in that The safety shield is arranged between a light source and a lens to shield light emitted by the light source, and is made of copper; a heat dissipation strip is arranged on the safety shield and located on a side of the safety shield away from the light source; two ends of the safety shield are respectively provided with a first arc shape and a second arc shape that protrude outward, the length of the first arc shape is less than the length of the second arc shape; and a plurality of heat dissipation strips are arranged on the safety shield and are distributed at intervals on a line connecting the first arc shape and the second arc shape.

8. The light source protection device of claim 7, wherein the light source is a light emitting diode. The first arc shape is a first circular arc shape, the second arc shape is a second circular arc shape, the radius of the first circular arc shape is less than the radius of the second circular arc shape, and all the heat dissipation strips are distributed at equal intervals in the radial direction of the first circular arc shape. All the heat dissipation strips are curved in the circumferential direction of the first circular arc shape. The shape of the heat dissipation strip includes at least one of a trapezoidal body, a hemispherical body, a cuboid and a square body. The shape of the heat dissipation strip is a trapezoidal body, and the cross section of the heat dissipation strip perpendicular to the axial direction of the safety shield gradually decreases in the direction away from the safety shield. The width of the upper end surface of the heat dissipation strip in the radial direction of the first circular arc shape is 0.5mm-1.5mm, and / or, the width of the lower end surface of the heat dissipation strip in the radial direction of the first circular arc shape is 1mm-3mm, and / or, the height of the heat dissipation strip in the axial direction of the first circular arc shape is 1mm-2mm, and / or, the distance between two adjacent heat dissipation strips in the radial direction of the first circular arc shape is 1mm-3mm, and / or, the thickness of the safety shield in the axial direction of the safety shield is 1mm-3mm. The safety shield is arranged between a light source and a lens to shield light emitted by the light source, and is made of copper; a heat dissipation strip is arranged on the safety shield and located on a side of the safety shield away from the light source; two ends of the safety shield are respectively provided with a first arc shape and a second arc shape that protrude outward, the length of the first arc shape is less than the length of the second arc shape; and a plurality of heat dissipation strips are arranged on the safety shield and are distributed at intervals on a line connecting the first arc shape and the second arc shape. The first arc shape is a first circular arc shape, the second arc shape is a second circular arc shape, the radius of the first circular arc shape is less than the radius of the second circular arc shape, and all the heat dissipation strips are distributed at equal intervals in the radial direction of the first circular arc shape. All the heat dissipation strips are curved in the circumferential direction of the first circular arc shape. The shape of the heat dissipation strip includes at least one of a trapezoidal body, a hemispherical body, a cuboid and a square body. The shape of the heat dissipation strip is a trapezoidal body, and the cross section of the heat dissipation strip perpendicular to the axial direction of the safety shield gradually decreases in the direction away from the safety shield.

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