Thermal evaporation vacuum coating device

Abstract

The utility model belongs to the technical field of vacuum coating, and particularly relates to a thermal evaporation vacuum coating device which comprises a vacuum chamber, one side of the vacuum chamber is connected with a hinge, the other side of the hinge is connected with a sealing door, a motor is fixedly installed in the middle of the top end of the vacuum chamber, and a moving structure is arranged in an inner cavity of the vacuum chamber. The moving structure comprises a driving gear fixedly connected to the output end of the motor, one side of the driving gear is connected with a driven gear, and a connecting rod is fixedly installed in the middle of the bottom end of the driven gear. Through the arrangement of structures such as a motor, a driving gear, a driven gear and a connecting rod, rotation treatment of a part can be conveniently achieved when the part is subjected to coating treatment in the follow-up process, so that the part can be better subjected to coating treatment in the follow-up process, and the part does circular motion on the inner side of the vacuum chamber in the coating process; therefore, all-directional film coating treatment on the parts is achieved, and the overall practicability is higher.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum coating technology, specifically a thermal evaporation vacuum coating device. Background Technology

[0002] Thermal evaporation technology is one of the earliest thin film deposition technologies developed in the field of optical thin film manufacturing. It has the advantages of simple operation, low coating cost, convenient monitoring, and good stability. It is still the mainstream thin film preparation technology adopted by optical manufacturing companies. The basic principle of thermal evaporation coating is to heat the thin film raw materials in the evaporation container (such as a crucible or tungsten boat) in a vacuum chamber. At high temperature, the atoms or molecules of the raw materials evaporate and vaporize from the surface of the film material and escape, forming a vapor flow in the vacuum chamber and diffusing into space. Finally, it is deposited on the surface of the part, adhering and condensing or undergoing a chemical reaction to form a thin film.

[0003] Existing thermal evaporation vacuum coating equipment typically includes a vacuum chamber, a crucible, and an evaporation source. The material to be evaporated is placed in the crucible to facilitate subsequent thermal evaporation treatment. The evaporated material then adheres to the surface of the part, achieving the coating process.

[0004] However, existing coating equipment often places the parts to be coated in a designated location and then uses thermal evaporation to coat the parts. However, this coating method not only easily leads to some surfaces of the parts not being completely coated, but also results in poor overall coating efficiency and poor overall practicality.

[0005] Therefore, a thermal evaporation vacuum coating apparatus is proposed to address the above problems. Utility Model Content

[0006] To overcome the shortcomings of existing technologies and address the problems of existing equipment, this utility model proposes a thermal evaporation vacuum coating device.

[0007] The technical solution adopted by this utility model to solve its technical problem is a thermal evaporation vacuum coating device, including a vacuum chamber, a hinge connected to one side of the vacuum chamber, and a sealed door connected to the other side of the hinge, a motor fixedly installed at the top center of the vacuum chamber, and a moving structure provided in the inner cavity of the vacuum chamber.

[0008] The motion structure includes a driving gear fixedly connected to the output end of the motor, and a driven gear connected to one side of the driving gear. A connecting rod is fixedly installed at the middle of the bottom end of the driven gear, and a protruding rod is provided on the surface of the connecting rod. A toothed ring is provided on the inner side of the top end of the vacuum chamber.

[0009] Preferably, an evaporation seat is provided at the bottom of the inner cavity of the vacuum chamber, and a placement groove is provided on the upper surface of the evaporation seat.

[0010] Preferably, the vacuum chamber has an air extraction hole at the bottom of its inner cavity, and the bottom of the air extraction hole is connected to a filter cavity. The filter cavity is provided with a filter screen, and a filter element is distributed below the filter screen. An adsorption filter plate is distributed on the side of the filter element away from the filter screen.

[0011] Preferably, a vacuum pump is installed at the bottom center of the vacuum chamber, and a support base is provided around the vacuum pump. When the vacuum pump is working, it can perform vacuum treatment on the inside of the vacuum chamber.

[0012] Preferably, the driving gear is meshed with the driven gear through its teeth, and the driven gears are equidistantly distributed along the center point of the driving gear, so that the rotation of the driving gear will realize the synchronous rotation of the driven gear.

[0013] Preferably, the protrusions are evenly distributed on the outer surface of the connecting rod, and the connecting rod and the driven gear are perpendicularly distributed. The protrusions can be used to support the workpiece to be coated.

[0014] The advantages of this utility model are:

[0015] 1. This utility model, through the design of a motor, driving gear, driven gear, and connecting rod, facilitates the rotation of parts during subsequent coating processes. This allows for better coating treatment of the parts, enabling them to move in a circular motion inside the vacuum chamber during the coating process, thus achieving comprehensive coating treatment and enhancing overall practicality.

[0016] 2. This utility model, through its structure including a vacuum pump, filter screen, filter element, and adsorption filter plate, can perform vacuum treatment on the inside of the vacuum chamber and simultaneously filter and remove impurities from the air extracted during the vacuum process, thereby effectively removing particulate matter mixed in with the air. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of a thermal evaporation vacuum coating apparatus;

[0019] Figure 2 A bottom view of a thermal evaporation vacuum coating apparatus;

[0020] Figure 3 This is a schematic diagram of the interior of the vacuum chamber of a thermal evaporation vacuum coating apparatus;

[0021] Figure 4 This is a schematic diagram of a cross-section of the vacuum chamber in a thermal evaporation vacuum coating apparatus.

[0022] Figure 5 A side view of the sealing door of a thermal evaporation vacuum coating apparatus;

[0023] In the diagram: 1. Vacuum chamber; 2. Hinge; 3. Sealed door; 4. Motor; 5. Drive gear; 6. Driven gear; 7. Connecting rod; 8. Protruding rod; 9. Gear ring; 10. Evaporator seat; 11. Placement slot; 12. Suction port; 13. Filter chamber; 14. Filter screen; 15. Filter element; 16. Adsorption filter plate; 17. Vacuum pump; 18. Support base. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0025] Please see Figure 1-5 As shown, a thermal evaporation vacuum coating device includes a vacuum chamber 1, a hinge 2 connected to one side of the vacuum chamber 1, and a sealing door 3 connected to the other side of the hinge 2. A motor 4 is fixedly installed at the top center of the vacuum chamber 1, and a moving structure is provided in the inner cavity of the vacuum chamber 1.

[0026] The motion structure includes a drive gear 5 fixedly connected to the output end of the motor 4, and a driven gear 6 connected to one side of the drive gear 5. A connecting rod 7 is fixedly installed at the bottom center of the driven gear 6, and a protruding rod 8 is provided on the surface of the connecting rod 7. A toothed ring 9 is provided on the inner side of the top of the vacuum chamber 1.

[0027] During operation, when the workpiece is coated, the motor 4 operates, causing the drive gear 5 connected to its output end to rotate. Since the drive gear 5 is meshed with the driven gear 6 through its teeth, when the drive gear 5 rotates, the driven gear 6 will rotate. In turn, the driven gear 6 will move along the circumference of the gear ring 9 through the meshing connection between the driven gear 6 and the gear ring 9. At the same time, the driven gear 6 itself will also rotate. The rotation of the driven gear 6 will realize the synchronous movement of the connecting rod 7. Subsequently, the movement of the connecting rod 7 will realize the synchronous movement of the workpiece hanging on the surface of the protrusion 8, which will facilitate better subsequent coating treatment, resulting in higher coating efficiency and better effect.

[0028] An evaporation seat 10 is provided at the bottom of the inner cavity of the vacuum chamber 1, and a placement groove 11 is provided on the upper surface of the evaporation seat 10;

[0029] During operation, the coating material is placed inside the placement tank 11. At this time, the evaporation seat 10 generates heat to evaporate the material. The evaporated material then diffuses inside the vacuum chamber 1, which facilitates subsequent coating treatment of the workpiece.

[0030] The vacuum chamber 1 has an air extraction hole 12 at the bottom of its inner cavity, and the bottom of the air extraction hole 12 is connected to a filter chamber 13. The filter chamber 13 has a filter screen 14 in its inner cavity, and a filter element 15 is distributed below the filter screen 14. An adsorption filter plate 16 is distributed on the side of the filter element 15 away from the filter screen 14.

[0031] During operation, the air inside the vacuum chamber 1 is drawn into the inner side of the filter chamber 13 through the air extraction port 12. The air then passes through the filter screen 14, which is used to initially remove particulate matter from the air. The pre-treated air then passes through the filter element 15, and together with the adsorption filter plate 16, it can effectively remove impurities mixed in with the air, preventing particulate matter from being drawn into the outside air with the operation of the vacuum pump 17, thus preventing the outside air from being polluted.

[0032] A vacuum pump 17 is installed at the bottom center of vacuum chamber 1, and a support base 18 is provided around the vacuum pump 17.

[0033] During operation, vacuum pump 17 extracts the air from inside vacuum chamber 1, thereby achieving vacuum treatment of the internal environment of vacuum chamber 1.

[0034] The driving gear 5 is meshed with the driven gear 6 through its teeth, and the driven gear 6 is equidistantly distributed along the center point of the driving gear 5.

[0035] During operation, the rotation of the driving gear 5 drives the driven gear 6 to rotate through its teeth, and the rotation of the driven gear 6 causes the connecting rod 7 connected to its bottom to move accordingly.

[0036] The protruding rods 8 are evenly distributed on the outer surface of the connecting rod 7, and the connecting rod 7 and the driven gear 6 are distributed perpendicularly to each other;

[0037] During operation, the workpiece to be coated is hung on the outer surface of the protrusion 8. Then, multiple workpieces can be hung by combining multiple protrusions 8 that are evenly distributed, which facilitates the simultaneous coating of multiple workpieces in the future.

[0038] Working principle: During use, the sealing door 3 is opened via hinge 2, and the workpiece to be coated is then hung on the outer surface of the protruding rod 8. Multiple workpieces can be hung using the equally spaced protruding rods 8, facilitating simultaneous coating of multiple workpieces. The coating material is then placed inside the placement slot 11, and the sealing door 3 is closed to seal the vacuum chamber 1. The vacuum pump 17 then extracts the air from the vacuum chamber 1, creating a vacuum environment. The air inside the vacuum chamber 1 is drawn into the filter chamber 13 through the extraction port 12. The air then passes through the filter screen 14, which initially removes particulate matter. The pre-treated air then passes through the filter element 15, and with the adsorption filter plate 16, impurities mixed in with the air are effectively removed, preventing particulate matter from being carried away by the vacuum pump 17. The workpiece is extracted into the outside air, causing air pollution. At this time, the evaporator 10 generates heat to evaporate the material. The evaporated material diffuses inside the vacuum chamber 1, facilitating subsequent coating treatment of the workpiece. During the coating treatment, the motor 4 operates, causing the drive gear 5 connected to its output end to rotate. Since the drive gear 5 is meshed with the driven gear 6 through its teeth, the rotation of the drive gear 5 will cause the driven gear 6 to rotate. The meshing connection between the driven gear 6 and the gear ring 9 will cause the driven gear 6 to move along the circumference of the gear ring 9. At the same time, the driven gear 6 itself will also rotate. The rotation of the driven gear 6 will cause the connecting rod 7 to move synchronously. Subsequently, the movement of the connecting rod 7 will cause the workpiece hanging on the surface of the protrusion 8 to move synchronously, facilitating better subsequent coating treatment, resulting in higher coating efficiency and better effect.

[0039] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0040] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A thermal evaporation vacuum coating apparatus, characterized in that: Includes a vacuum chamber (1), a hinge (2) is connected to one side of the vacuum chamber (1), and a sealing door (3) is connected to the other side of the hinge (2). A motor (4) is fixedly installed at the top center of the vacuum chamber (1), and a moving structure is provided in the inner cavity of the vacuum chamber (1). The motion structure includes a drive gear (5) fixedly connected to the output end of the motor (4), and a driven gear (6) is connected to one side of the drive gear (5). A connecting rod (7) is fixedly installed at the bottom center of the driven gear (6), and a protruding rod (8) is provided on the surface of the connecting rod (7). A toothed ring (9) is provided on the inner side of the top of the vacuum chamber (1).

2. The thermal evaporation vacuum coating apparatus according to claim 1, characterized in that: An evaporation seat (10) is provided at the bottom of the inner cavity of the vacuum chamber (1), and a placement groove (11) is provided on the upper surface of the evaporation seat (10).

3. The thermal evaporation vacuum coating apparatus according to claim 1, characterized in that: The vacuum chamber (1) has an air extraction hole (12) at the bottom of its inner cavity, and the bottom of the air extraction hole (12) is connected to a filter chamber (13). The filter chamber (13) has a filter screen (14) in its inner cavity, and a filter element (15) is distributed below the filter screen (14). An adsorption filter plate (16) is distributed on the side of the filter element (15) away from the filter screen (14).

4. The thermal evaporation vacuum coating apparatus according to claim 1, characterized in that: A vacuum pump (17) is installed at the bottom center of the vacuum chamber (1), and a support base (18) is provided around the vacuum pump (17).

5. The thermal evaporation vacuum coating apparatus according to claim 1, characterized in that: The driving gear (5) is meshed with the driven gear (6) through its teeth, and the driven gear (6) is equidistantly distributed along the center point of the driving gear (5).

6. The thermal evaporation vacuum coating apparatus according to claim 1, characterized in that: The protruding rods (8) are evenly distributed on the outer surface of the connecting rod (7), and the connecting rod (7) and the driven gear (6) are distributed perpendicularly to each other.

Images