Round plane multi-arc target device for multi-arc ion plating equipment

Abstract

The utility model relates to the technical field of coating, and discloses a circular plane multi-arc target device for multi-arc ion plating equipment, which comprises a shell, T-shaped blocks are fixedly connected to the left side and the right side of the inner wall of the shell, target seats are connected to the outer walls of the T-shaped blocks in a clamping manner, bolts are connected to the right sides of the target seats in a threaded manner, and target materials are connected to the outer walls of the bolts in a threaded manner. An insulating ring is arranged on the outer wall of the target material, insulating screws are fixedly connected to the front side and the rear side of the insulating ring, power boxes are fixedly connected to the left side and the right side of the outer wall of the shell, telescopic rods are fixedly connected to the tops of the power boxes, and guide rods are fixedly connected to the other ends of the telescopic rods. According to the utility model, due to the design of quick replacement, an operator can more easily execute the replacement work of the target material and the insulating ring, the operation is more convenient, and different metal and alloy target materials are more easily replaced in different production batches so as to adapt to different coating requirements.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, and in particular to a circular planar multi-arc target device for multi-arc ion plating equipment. Background Technology

[0002] Metal parts are widely used in various industries and mechanical equipment. They refer to components with specific functions and shapes made from metal materials. Their main uses include forming mechanical structures, transmitting power and motion, and connecting components. After prolonged use, the surface of metal parts will rust and oxidize. Therefore, surface coating is required to ensure the service life of metal parts. Coating is a technology that changes the properties and appearance of an object by applying a thin film of material to the surface of the object. Metal coating is used for corrosion protection, wear resistance, and decoration of metal surfaces, improving the durability of objects and preventing oxidation and corrosion. The processes used for metal coating include electroplating, thermal spraying, and multi-arc ion plating.

[0003] Current multi-arc ion plating equipment consists of an arc-initiating needle, a target material, an insulating ring, and a target holder. The equipment generates an arc discharge within a vacuum chamber using the arc-initiating needle. The arc causes the target material to evaporate, forming ions. These metal ions are accelerated and react with the substrate surface to form a thin film. To address the target material replacement issue, existing technologies rely on bolt fixing, requiring bolt tightening for replacement. This method is inefficient and cannot replace the insulating ring individually; the entire target material must be replaced, wasting material costs and failing to meet user needs. Utility Model Content

[0004] To overcome the above shortcomings, this utility model provides a circular planar multi-arc target device for multi-arc ion plating equipment, which aims to improve the problems of existing technology where replacement is completed by tightening bolts, resulting in low replacement efficiency and the inability to replace the insulating ring separately, requiring the entire target material to be replaced, which wastes material costs.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a circular planar multi-arc target device for multi-arc ion plating equipment, comprising a housing, T-blocks fixedly connected to the left and right sides of the inner wall of the housing, a target seat engaged with the outer wall of the T-blocks, a bolt threadedly connected to the right side of the target seat, a target material threadedly connected to the outer wall of the bolt, an insulating ring provided on the outer wall of the target material, insulating screws fixedly connected to the front and rear sides of the insulating ring, a power supply box fixedly connected to the left and right sides of the outer wall of the housing, a telescopic rod fixedly connected to the top of the power supply box, a guide rod fixedly connected to the other end of the telescopic rod, an arc-initiating pin fixedly connected to the top of the guide rod, an insulating ring fixedly connected to the right outer wall of the guide rod, limit rings fixedly connected to the left and right sides of the housing, the inner wall of the limit rings slidingly connected to the outer wall of the guide rod, sealing rings fixedly connected to the opposite sides of the two limit rings, and fixing mechanisms provided on the upper and lower sides of the inner wall of the housing, the fixing mechanisms being used to clamp and fix the workpiece.

[0006] As a further description of the above technical solution:

[0007] The fixing mechanism includes a motor, the bottom of which is fixedly connected to the inner wall of the housing. A rotating rod is fixedly connected to the output end of the motor. A connecting rod is rotatably connected to both the left and right ends of the rotating rod. Limiting rods are fixedly connected to the upper and lower sides of the inner wall of the housing. A sliding groove is provided on the upper side of the limiting rod. A slider is slidably connected to the inner wall of the sliding groove. The top of the slider is rotatably connected to the lower side of the connecting rod. A fixing clamp is fixedly connected to the outer wall of the slider.

[0008] As a further description of the above technical solution:

[0009] A sealing frame is fixedly connected to the front side of the inner wall of the housing, and equipment doors are rotatably connected to the left and right sides of the front end of the housing.

[0010] As a further description of the above technical solution:

[0011] A controller is fixedly connected to the front left side of the equipment door, and the controller is electrically connected to the power supply box, the telescopic rod and the motor.

[0012] As a further description of the above technical solution:

[0013] A small screw is fixedly connected to the front right side of the equipment door, and an information board is fixedly connected to the outer wall of the small screw.

[0014] As a further description of the above technical solution:

[0015] A handle is fixedly connected to the center of the front side of the equipment door, and an anti-slip sleeve is fixedly connected to the outer wall of the handle.

[0016] As a further description of the above technical solution:

[0017] Support columns are fixedly connected to the four corners of the bottom of the shell, and buffer pads are fixedly connected to the bottom of the support columns.

[0018] As a further description of the above technical solution:

[0019] Anti-collision pads are fixedly connected to the four corners of the outer wall of the housing, and diagonal braces are fixedly connected to the left and right sides of the housing. The top of the diagonal braces is fixedly connected to the bottom of the power supply box.

[0020] This utility model has the following beneficial effects:

[0021] 1. In this utility model, the target material is fixed to the inner wall of the equipment by engaging with the target holder via a T-block. If the insulating ring needs to be replaced, the insulating screw can be turned to separate and replace it. The quick replacement design makes it easier for operators to perform the replacement of the target material and the insulating ring, making the operation more convenient. In different production batches, it is easier to replace different metal and alloy targets to meet different coating requirements.

[0022] 2. In this utility model, the slider slides in the groove of the limiting rod, and the slider drives the fixed clamp to move in opposite directions to clamp the workpiece and complete the electroplating work. The workpiece needs to maintain a stable posture during the multi-arc ion plating process. The clamping device ensures that the workpiece does not shift during the coating process, avoiding uneven and incomplete coating due to workpiece shaking. Using the clamping device reduces manual operation and improves production efficiency and work safety. Attached Figure Description

[0023] Figure 1 This is a perspective view of the front side of the housing of a circular planar multi-arc target device for a multi-arc ion plating equipment proposed in this utility model;

[0024] Figure 2 This is a perspective view of the left side of the housing of a circular planar multi-arc target device for multi-arc ion plating equipment proposed in this utility model;

[0025] Figure 3 This is a partial structural diagram of the housing of a circular planar multi-arc target device for multi-arc ion plating equipment proposed in this utility model;

[0026] Figure 4 This is a partial structural diagram of a guide rod for a circular planar multi-arc target device in a multi-arc ion plating equipment, as proposed in this utility model.

[0027] Figure 5 This is a partial structural exploded view of a target material for a circular planar multi-arc target device in a multi-arc ion plating equipment, as proposed in this utility model.

[0028] Figure 6 This is a partial structural diagram of a fixing mechanism for a circular planar multi-arc target device in a multi-arc ion plating equipment, as proposed in this utility model.

[0029] Legend:

[0030] 1. Housing; 2. Fixing mechanism; 201. Motor; 202. Limiting rod; 203. Slide groove; 204. Rotating rod; 205. Connecting rod; 206. Sliding block; 207. Fixing clamp; 3. T-block; 4. Target base; 5. Bolt; 6. Insulating ring; 7. Insulating screw; 8. Target material; 9. Power supply box; 10. Telescopic rod; 11. Guide rod; 12. Insulating ring; 13. Arc igniting pin; 14. Limiting ring; 15. Sealing ring; 16. Equipment door; 17. Controller; 18. Small screw; 19. Information board; 20. Handle; 21. Anti-slip sleeve; 22. Sealing frame; 23. Support column; 24. Buffer pad; 25. Anti-collision pad; 26. Diagonal brace. Detailed Implementation

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0032] Please see the appendix Figure 1 Appendix Figure 4 and attached Figure 5This utility model provides an embodiment of a circular planar multi-arc target device for multi-arc ion plating equipment, comprising a housing 1, which supports the main structure of the entire device, ensuring stability and safety during operation. T-blocks 3 are fixedly connected to the left and right sides of the inner wall of the housing 1, and target seats 4 are engaged with the outer walls of the T-blocks 3. This connection method ensures the firmness of the target seats 4 and facilitates their replacement and adjustment. A bolt 5 is threadedly connected to the right side of the target seat 4, and a target material 8 is threadedly connected to the outer wall of the bolt 5. The target material 8 is tightly fixed to the target seat 4, ensuring uniformity and consistency during the plating process. An insulating ring 6 is provided on the outer wall of the target material 8 to prevent current leakage and ensure operator safety. Insulating screws 7 are fixedly connected to both the front and rear sides of the insulating ring 6, enhancing the insulation effect and facilitating daily operation. For inspection and maintenance, power supply boxes 9 are fixedly connected to the left and right sides of the outer wall of the housing 1. A telescopic rod 10 is fixedly connected to the top of the power supply box 9. A guide rod 11 is fixedly connected to the other end of the telescopic rod 10. An arc-starting needle 13 is fixedly connected to the top of the guide rod 11. An insulating ring 12 is fixedly connected to the right outer wall of the guide rod 11. The insulating ring 12 further prevents current leakage. Limiting rings 14 are fixedly connected to the left and right sides of the housing 1. The inner wall of the limiting ring 14 is slidably connected to the outer wall of the guide rod 11. The limiting ring 14 and the guide rod 11 form a sliding connection, which makes the device more stable and reliable during operation. A sealing ring 15 is fixedly connected to the opposite side of the two limiting rings 14. The sealing ring 15 prevents gas from entering the interior during the coating process and affecting the coating. Fixing mechanisms 2 are provided on the upper and lower sides of the inner wall of the housing 1. The fixing mechanisms 2 are used to clamp and fix the workpiece.

[0033] Please see the appendix Figure 3 and attached Figure 3 The fixing mechanism 2 includes a motor 201. The bottom of the motor 201 is fixedly connected to the inner wall of the housing 1. A rotating rod 204 is fixedly connected to the output end of the motor 201 to ensure efficient and stable power transmission. The left and right ends of the rotating rod 204 are rotatably connected to connecting rods 205, enabling precise motion control of the entire mechanism during operation. Limiting rods 202 are fixedly connected to the upper and lower sides of the inner wall of the housing 1. A sliding groove 203 is provided on the upper side of the limiting rod 202. A slider 206 is slidably connected to the inner wall of the sliding groove 203. The sliding groove 203 and the slider 206 are slidably connected to ensure the smooth movement of the slider 206 and the accuracy of the mechanism during operation. The top of the slider 206 is rotatably connected to the lower side of the connecting rod 205. A fixing clamp 207 is fixedly connected to the outer wall of the slider 206 to firmly clamp and fix the target object.

[0034] Please see the appendix Figure 1 Appendix Figure 2 and attached Figure 3A sealing frame 22 is fixedly connected to the front inner wall of the housing 1. The sealing frame 22 ensures that the sealing performance of the entire equipment reaches the best. Equipment doors 16 are rotatably connected to the left and right front sides of the housing 1. A controller 17 is fixedly connected to the left front side of the equipment door 16. The controller 17 is electrically connected to the power box 9, the telescopic rod 10 and the motor 201 to ensure the efficient operation of the equipment. A small screw 18 is fixedly connected to the right front side of the equipment door 16. An information plate 19 is fixedly connected to the outer wall of the small screw 18. The information plate 19 records important information of the equipment in detail, so that operators can quickly obtain the equipment status.

[0035] Please see the appendix Figure 2 and attached Figure 3 A handle 20 is fixedly connected to the center of the front side of the equipment door 16. An anti-slip sleeve 21 is fixedly connected to the outer wall of the handle 20. The anti-slip sleeve 21 ensures a stable and reliable grip during operation. Support columns 23 are fixedly connected to the four corners of the bottom of the housing 1. Buffer pads 24 are fixedly connected to the bottom of the support columns 23. The support columns 23 enhance the stability of the equipment, and the buffer pads 24 at the bottom reduce vibration during use. Anti-collision pads 25 are fixedly connected to the four corners of the outer wall of the housing 1, which can effectively absorb external impacts and protect the equipment from accidental collisions. Diagonal braces 26 are fixedly connected to the left and right sides of the housing 1. The top of the diagonal braces 26 is fixedly connected to the bottom of the power box 9, ensuring the stable installation of the power box 9 and thus ensuring the safety of the equipment's power supply.

[0036] Working principle: The insulating ring 6 is fixed to the outer wall of the target material 8 by the insulating screw 7, and the target material 8 and the target seat 4 are fixed by the bolt 5. The T-block 3 is used to lock the target seat 4, so that the target material 8 is fixed to the inner wall of the equipment for use. If the insulating ring 6 needs to be replaced, simply unscrew the insulating screw 7 to separate it for replacement. After the equipment has been used for a long time, the target material 8 will also be damaged. The target seat 4 is slid out of the T-block 3 for replacement. Then, the controller 17 is started, and the telescopic rod 10 pulls the guide rod 11 to bring the arc-starting needle 13 close to the target material 8 to complete the ion plating work. The quick replacement design makes it easier for operators to perform the replacement of the target material 8 and the insulating ring 6, making the operation more convenient. In different production batches, it is easier to replace different target materials 8 to adapt to different coating requirements.

[0037] In industrial production, workpieces come in various shapes. Since some workpieces cannot stand upright, they need to be clamped for electroplating. When the motor 201 is started, the rotating rod 204 rotates, which drives the connecting rods 205 on both sides to pull the slider 206. The slider 206 slides in the groove 203 of the limiting rod 202. The slider 206 drives the fixed clamp 207 to move towards each other, thereby clamping the workpiece and completing the electroplating process. The workpiece needs to maintain a stable posture during the multi-arc ion plating process. The clamping device ensures that the workpiece does not shift during the coating process, avoiding uneven and incomplete coating due to workpiece shaking. Using the clamping device reduces manual operation, improves production efficiency and work safety.

[0038] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A circular planar multi-arc target device for multi-arc ion plating equipment, comprising a housing (1), characterized in that: T-blocks (3) are fixedly connected to the left and right sides of the inner wall of the housing (1). A target base (4) is engaged with the outer wall of the T-blocks (3). A bolt (5) is threadedly connected to the right side of the target base (4). A target material (8) is threadedly connected to the outer wall of the bolt (5). An insulating ring (6) is provided on the outer wall of the target material (8). Insulating screws (7) are fixedly connected to the front and rear sides of the insulating ring (6). A power supply box (9) is fixedly connected to the left and right sides of the outer wall of the housing (1). A telescopic rod (10) is fixedly connected to the top of the power supply box (9). The other end is fixedly connected to a guide rod (11), the top end of the guide rod (11) is fixedly connected to an arc-starting needle (13), the right outer wall of the guide rod (11) is fixedly connected to an insulating ring (12), the left and right sides of the housing (1) are fixedly connected to limit rings (14), the inner wall of the limit ring (14) is slidably connected to the outer wall of the guide rod (11), the two limit rings (14) are fixedly connected to a sealing ring (15) on the opposite side, and the inner wall of the housing (1) is provided with a fixing mechanism (2) on the upper and lower sides, the fixing mechanism (2) is used to clamp and fix the workpiece.

2. The circular planar multi-arc target device for multi-arc ion plating equipment according to claim 1, characterized in that: The fixing mechanism (2) includes a motor (201), the bottom of which is fixedly connected to the inner wall of the housing (1), a rotating rod (204) is fixedly connected to the output end of the motor (201), and a connecting rod (205) is rotatably connected to the left and right ends of the rotating rod (204). Limiting rods (202) are fixedly connected to the upper and lower sides of the inner wall of the housing (1). A sliding groove (203) is provided on the upper side of the limiting rod (202), and a slider (206) is slidably connected to the inner wall of the sliding groove (203). The top of the slider (206) is rotatably connected to the lower side of the connecting rod (205), and a fixing clamp (207) is fixedly connected to the outer wall of the slider (206).

3. A circular planar multi-arc target device for multi-arc ion plating equipment according to claim 1, characterized in that: A sealing frame (22) is fixedly connected to the front side of the inner wall of the housing (1), and equipment doors (16) are rotatably connected to the left and right sides of the front end of the housing (1).

4. A circular planar multi-arc target device for multi-arc ion plating equipment according to claim 3, characterized in that: A controller (17) is fixedly connected to the left front end of the equipment door (16), and the controller (17) is electrically connected to the power box (9), the telescopic rod (10) and the motor (201).

5. A circular planar multi-arc target device for multi-arc ion plating equipment according to claim 3, characterized in that: A small screw (18) is fixedly connected to the front right side of the equipment door (16), and an information board (19) is fixedly connected to the outer wall of the small screw (18).

6. A circular planar multi-arc target device for multi-arc ion plating equipment according to claim 3, characterized in that: A handle (20) is fixedly connected to the middle of the front side of the equipment door (16), and an anti-slip sleeve (21) is fixedly connected to the outer wall of the handle (20).

7. A circular planar multi-arc target device for multi-arc ion plating equipment according to claim 1, characterized in that: Support columns (23) are fixedly connected to the four corners of the bottom of the shell (1), and buffer pads (24) are fixedly connected to the bottom of the support columns (23).

8. A circular planar multi-arc target device for multi-arc ion plating equipment according to claim 1, characterized in that: Anti-collision pads (25) are fixedly connected to the four corners of the outer wall of the housing (1), and diagonal braces (26) are fixedly connected to the left and right sides of the housing (1). The top of the diagonal braces (26) is fixedly connected to the bottom of the power supply box (9).

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