Shared storage structure for silicon wafer baskets with different sizes and used in cooperation with intelligent transfer robot

Abstract

The utility model relates to the technical field of silicon wafer processing equipment, in particular to a storage structure shared by silicon wafer baskets with different sizes and used in cooperation with an intelligent transfer robot. The device comprises a bottom mounting plate, a multifunctional limiting assembly arranged on the bottom mounting plate, and a guardrail arranged on the bottom mounting plate, the multifunctional limiting assembly comprises a bottom surface limiting block arranged on the bottom mounting plate, a front end jacking limiting block arranged at the front end of the bottom surface limiting block and a rear end supporting block arranged at the rear end of the bottom surface limiting block, and the bottom surface limiting block is of a triangular structure; the lower side of the bottom limiting block abuts against the front end abutting-against limiting block, and a groove is formed in the bottom face limiting block. The mounting plate has the advantages that the limiting structures capable of being matched with different sizes for limiting are arranged on the same mounting plate, so that the mounting plate can be matched with sheet baskets of different sizes for mounting.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer processing equipment technology, and in particular to a shared storage structure for silicon wafer baskets of different sizes used in conjunction with an intelligent handling robot. Background Technology

[0002] Currently, silicon wafer manufacturing inevitably involves the use of carriers such as baskets and graphite boats to switch between different process steps. Generally, there are two automation requirements: transferring silicon wafers from baskets to graphite boats and vice versa. With the industrialization of silicon wafer production, the demand for automated handling and placement capacity is increasing.

[0003] The existing technology, application number: CN2020213798129, is a silicon wafer picking and placing mechanism that uses a clamping method for transfer. However, in order to facilitate processing with different equipment, it is necessary to limit the wafer basket and enable it to cooperate with the equipment. The existing limiting structure can only be installed one-to-one, so it needs to be replaced every time a different size is used, which affects efficiency and cost.

[0004] Therefore, it is necessary to design a shared storage structure for silicon wafer baskets of different sizes used in conjunction with intelligent handling robots to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a shared storage structure for silicon wafer baskets of different sizes used in conjunction with intelligent handling robots, so as to overcome the above-mentioned shortcomings of the existing technology.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A shared storage structure for silicon wafer baskets of different sizes used in conjunction with an intelligent handling robot includes a bottom mounting plate, a multifunctional limiting component disposed on the bottom mounting plate, and a guardrail disposed on the bottom mounting plate. The multifunctional limiting component includes a bottom limiting block disposed on the bottom mounting plate, a front supporting limiting block disposed at the front end of the bottom limiting block, and a rear supporting block disposed at the rear end of the bottom limiting block. The bottom limiting block has a triangular structure, with the lower side of the bottom limiting block resting against the front supporting limiting block and the higher side resting against the rear supporting block. A groove is formed on the bottom limiting block, and protruding limiting blocks are disposed on both sides of the groove. The rear supporting block is mounted via a mounting block, and the top surface of the rear supporting block is inclined at the same angle as the bottom limiting block.

[0008] Preferably, the bottom mounting plate has several sets of mounting holes.

[0009] Preferably, the front end support limiting block has an L-shaped structure.

[0010] Preferably, sensors are provided on the sides of the bottom limiting block.

[0011] Preferably, a reader is also mounted on the outer side of the bottom limiting block via a mounting block.

[0012] The beneficial effects of this utility model are: This technical solution sets a limiting structure on the same mounting plate that can simultaneously limit different sizes, so that it can be used to install different sized trays. The inclined bottom limiting block limits most of the tray structure. In addition, the sensor and reader work together to ensure the accuracy of product placement and whether the product is installed correctly, and prevent misplacement. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of a common storage structure for silicon wafer baskets of different sizes used in conjunction with an intelligent handling robot according to the present invention.

[0014] Figure 2 This is a structural diagram of a 6-inch wafer basket with a shared storage space for different sizes of silicon wafer baskets used in conjunction with an intelligent handling robot, according to the present invention.

[0015] Figure 3 This is a structural diagram of an 8-inch wafer basket for use with intelligent handling robots, which is a shared storage structure for wafer baskets of different sizes.

[0016] In the diagram: 1. Bottom mounting plate; 2. Guardrail; 3. Bottom limiting block; 4. Front top supporting limiting block; 5. Rear support block; 31. Groove; 6. Sensor; 7. Reader. Detailed Implementation

[0017] Reference Figures 1 to 3 A shared storage structure for silicon wafer baskets of different sizes used in conjunction with an intelligent handling robot includes a bottom mounting plate 1, a multi-functional limiting component disposed on the bottom mounting plate, and a guardrail 2 disposed on the bottom mounting plate.

[0018] The multi-functional limiting component includes a bottom limiting block 3 disposed on the bottom mounting plate, a front end supporting limiting block 4 disposed at the front end of the bottom limiting block, and a rear end support block 5 disposed at the rear end of the bottom limiting block.

[0019] The bottom mounting plate has several sets of mounting holes for mounting different limiting components, which can be easily adjusted to accommodate different models of trays for limiting.

[0020] The bottom limiting block 3 has a triangular structure, with the lower side of the bottom limiting block set against the front end supporting limiting block and the higher side set against the rear end supporting block. A groove 31 is provided on the bottom limiting block, and protruding limiting blocks are provided on both sides of the groove 31 to cooperate with the bottom of the tray for limiting.

[0021] To facilitate the installation of the tray, all grooves or placement edges of the limiting structure are chamfered.

[0022] The front end support limiting block 4 has an L-shaped structure, which is used to limit the front end and the side, and also limit both sides;

[0023] The rear support block 5 is installed by an installation block. The top surface of the rear support block 5 is inclined and the same angle as the bottom limiting block 3.

[0024] In order to accurately detect whether the tray is installed in place, sensors 6 are provided on the sides of the bottom limiting block 3; by sensing the bottom of the tray, the sensors ensure that both sides are placed in place, thereby ensuring placement accuracy.

[0025] A reader 7 is also installed on the outer side of the bottom limiting block 3 via an installation block. The reader identifies the material number on the tray to ensure the accuracy of material feeding and serves as a verification function.

[0026] This equipment requires the restriction of different sized trays: one set is 6 inches and the other is 8 inches. Both have similar structural shapes and raised strip structures 11 at the bottom, but their positions differ. Therefore, a bottom limiting block 3 is used to restrict the bottom strip structures. To simultaneously restrict both sets of trays of different sizes, a groove is made in the bottom limiting block 3. The gap in the groove is large enough to accommodate two different diameters; the larger tray has a smaller middle diameter, so the bottom strip structure is placed within the groove. The rear end moves inward to limit the side, while the smaller size has a larger central diameter, so it moves outward to limit the side. At the same time, the front end support block 4 is used to support the strip structure and prevent the tray from tilting and sliding down. Since the 6-inch size is small, 80% of the strip structure can be placed on the bottom support block 3 and limited by the bottom support block. The 8-inch size is larger, and the rear side of the strip structure is set at a certain angle to the outward. Therefore, a rear support block is set to support the rear structure and play a supporting role. In this way, the trays of two different sizes are limited at the same time.

[0027] In this implementation case, to improve utilization, multiple mounting plates can be set up, staggered vertically and horizontally, so as not to affect normal placement and positioning, thereby improving efficiency.

[0028] The advantages of this utility model are that the technical solution sets up a limiting structure on the same mounting plate that can simultaneously limit the position of different sizes, so as to accommodate the installation of different sized trays. The inclined bottom limiting block limits the installation of most of the tray structure. In addition, the sensor and reader work together to ensure the accuracy of product placement and whether the product is installed correctly, preventing misplacement.

[0029] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A shared storage structure for silicon wafer baskets of different sizes used in conjunction with an intelligent handling robot, comprising a bottom mounting plate, a multifunctional limiting component disposed on the bottom mounting plate, and a guardrail disposed on the bottom mounting plate, characterized in that: The multifunctional limiting component includes a bottom limiting block disposed on the bottom mounting plate, a front supporting limiting block disposed at the front end of the bottom limiting block, and a rear supporting block disposed at the rear end of the bottom limiting block. The bottom limiting block has a triangular structure, with the lower side of the bottom limiting block resting against the front supporting limiting block and the higher side resting against the rear supporting block. The bottom limiting block has a groove, and protruding limiting blocks are disposed on both sides of the groove. The rear supporting block is installed by a mounting block, and the top surface of the rear supporting block is inclined at the same angle as the bottom limiting block.

2. The shared storage structure for silicon wafer baskets of different sizes used in conjunction with an intelligent handling robot, as described in claim 1, is characterized in that: Several sets of mounting holes are provided on the bottom mounting plate.

3. The shared storage structure for silicon wafer baskets of different sizes used in conjunction with an intelligent handling robot, as described in claim 1, is characterized in that: The front-end top-holding limiting block has an L-shaped structure.

4. The shared storage structure for silicon wafer baskets of different sizes used in conjunction with an intelligent handling robot, as described in claim 1, is characterized in that: Sensors are provided on the sides of the bottom limiting block.

5. The shared storage structure for silicon wafer baskets of different sizes used in conjunction with an intelligent handling robot, as described in claim 1, is characterized in that: A reader is also mounted on the outer side of the bottom limiting block via an mounting block.

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